[Scan]
initial_time=2015-12-22T16:29:11
final_time=2015-12-22T16:29:32
ip_count=19
run=1021
dataset=1
scan=4
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.42513E-2
qbias_imon=-3.79288E-6
ql1_vset=
ql1_vmon=-8.80022E1
ql1_imon=-7.31707E-10
ql2_vset=
ql2_vmon=-4.05312E-4
ql2_imon=1.22083E-9
ql3_vset=
ql3_vmon=-8.79997E1
ql3_imon=-2.53164E-9
ql4_vset=
ql4_vmon=-9.53674E-5
ql4_imon=1.39184E-8
mult1=-9.68019E-9
mult2=-2.68867E-9
rf_tmon=-4.84889E-3
rf_agc=3.29611E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.48363E-3
ql5_imon=6.35314E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67275E0
bslens_imon=2.44763E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20506E1
lens5a_imon=1.97694E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.05014E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53592E1
cs_ef1b_imon=2.83061E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04598E2
lens23_imon=1.01988E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04826E1
cs_ea1_imon=2.58402E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97166E0
lens1_imon=1.39138E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64716E1
os_ef1alow_imon=2.97189E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03456E1
cs_ea2_imon=1.54255E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84394E1
cs_ef1a_imon=2.93837E-5
olens2_vset=0.0E0
olens2_vmon=1.40667E-3
olens2_imon=1.05022E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1137E1
os_restr1_imon=4.31328E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15606E1
os_ea1_imon=2.37637E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63083E1
os_ef1bup_imon=3.08361E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21304E0
cs_ionrep_imon=1.18854E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91916E2
cs_nozzle_imon=1.9338E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01911E1
cs_anode1_imon=2.92468E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99981E1
olens4_imon=4.24623E-9
tplens_vset=0.0E0
tplens_vmon=-1.52668E0
tplens_imon=-3.93075E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99264E1
iondef3_imon=8.80316E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98326E1
iondef2_imon=9.38716E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03006E2
lens6_imon=2.9849E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=9.82165E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28755E0
ionrepsh_imon=1.76497E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33736E1
lens5b_imon=2.16692E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74645E1
cs_ef2b_imon=3.12073E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.23888E0
os_ea2_imon=-7.93225E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06101E2
lens4b_imon=2.00284E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70681E1
cs_ef2a_imon=3.16975E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05336E0
os_ef2alow_imon=-2.64113E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.71595E-1
os_ef2bup_imon=-5.38735E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10901E1
os_restr2_imon=3.4004E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23086E2
cs_ionfoca_imon=6.31478E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02169E1
cs_anode2_imon=2.25182E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57879E1
iondef1_imon=4.93144E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49968E1
iondef4_imon=5.25877E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27963E1
olens3_imon=2.55075E-8
olens1_vset=0.0E0
olens1_vmon=1.07288E-3
olens1_imon=1.23103E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15237E0
cs_ionaccel_imon=-1.88069E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02062E2
cs_ionfocb_imon=1.47284E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56369E1
einzel_imon=7.5617E-6
window_vset=0.0E0
window_vmon=1.66887E-1
window_imon=-1.09142E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82661E2
mask1_imon=2.39034E-4
mask2_vset=0.0E0
mask2_vmon=-1.8632E1
mask2_imon=-6.40926E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92607E3
multa_neg_imon=7.70365E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93741E3
defgrida_imon=6.49239E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50131E3
multb_neg_imon=7.22419E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44668E0
defgridb_imon=6.10666E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33411E1
os_fil1_imon=9.4266E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06849E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63093E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30902E1
cs_fil1_imon=9.97152E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63033E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62945E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.04791E-2
os_fil2_imon=-2.79211E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92909E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.03585E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34831E-1
cs_fil2_imon=-2.63593E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.07615E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22237E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.45994E-2
chamber_ion_pmon=2.42226E-9
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.56289E-1
res40_imon=-2.55824E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=149
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.819E3	0.0E0	1.47E2	4.1E1	-7.23964E-2	-8.80018E1	-7.39098E-4	-8.79998E1	1.43051E-4	5.38826E-3	9.30071E-2	1.5815E1	-1.98234E1	-1.99478E1	1.49962E1	2.42542E-9	2.51443E-3	2.51443E-3	6.32936E-3	2.47925E-2
2.0E0	3.181E3	4.0E0	3.16E2	1.6E2	-7.14689E-2	-8.80014E1	-4.76837E-4	-8.79999E1	2.38419E-5	5.29289E-3	9.31263E-2	1.57933E1	-1.98579E1	-1.99924E1	1.49896E1	2.42347E-9	2.51847E-3	2.51847E-3	6.32896E-3	2.46819E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.18554E-2	-8.80015E1	-5.24521E-4	-8.8E1	9.53674E-5	5.26905E-3	9.30071E-2	1.57802E1	-1.98918E1	-1.9965E1	1.50205E1	2.42331E-9	2.51443E-3	2.51443E-3	6.32936E-3	2.47279E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.25507E-2	-8.80018E1	-4.52995E-4	-8.79998E1	-3.57628E-4	5.6982E-3	9.29594E-2	1.57949E1	-1.98552E1	-1.99355E1	1.50122E1	2.42657E-9	2.51954E-3	2.51954E-3	6.32356E-3	2.47451E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.80018E1	-4.29153E-4	-8.80001E1	3.09944E-4	5.6982E-3	9.29594E-2	1.57855E1	-1.9844E1	-1.99967E1	1.50052E1	2.42657E-9	2.51632E-3	2.51632E-3	6.30202E-3	2.47451E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.34782E-2	-8.80018E1	-2.6226E-4	-8.79999E1	-2.14577E-4	5.45979E-3	9.32217E-2	1.57975E1	-1.98362E1	-1.99672E1	1.50148E1	2.42331E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.47494E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.40967E-2	-8.80018E1	-5.48363E-4	-8.79998E1	-3.8147E-4	5.31673E-3	9.28402E-2	1.57969E1	-1.98452E1	-1.99594E1	1.50154E1	2.42331E-9	2.51662E-3	2.51662E-3	6.33486E-3	2.45994E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.80018E1	-5.00679E-4	-8.79999E1	-1.66893E-4	5.4121E-3	9.29832E-2	1.57897E1	-1.9844E1	-1.99708E1	1.50286E1	2.42542E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.46636E-2
1.2E1	1.04E2	0.0E0	4.85E2	3.23E2	-7.27053E-2	-8.80017E1	-5.72205E-4	-8.79999E1	2.38419E-5	5.29289E-3	9.31501E-2	1.57867E1	-1.98339E1	-1.99737E1	1.50268E1	2.42226E-9	2.52209E-3	2.52209E-3	6.29098E-3	2.47065E-2
1.3E1	1.7E1	0.0E0	5.25E2	3.53E2	-7.41738E-2	-8.80017E1	-7.86781E-4	-8.8E1	1.43051E-4	5.55515E-3	9.30548E-2	1.57848E1	-1.98497E1	-1.99739E1	1.4991E1	2.42684E-9	2.52058E-3	2.52058E-3	6.31761E-3	2.46333E-2
1.4E1	1.33E2	0.0E0	5.66E2	3.82E2	-7.39421E-2	-8.80021E1	-5.24521E-4	-8.80003E1	3.09944E-4	5.26905E-3	9.33647E-2	1.57629E1	-1.98329E1	-1.99527E1	1.50122E1	2.42408E-9	2.51384E-3	2.51384E-3	6.3445E-3	2.4636E-2
1.5E1	8.2E1	0.0E0	6.06E2	4.11E2	-7.40192E-2	-8.80018E1	-3.33786E-4	-8.80001E1	2.38419E-4	5.60284E-3	9.31025E-2	1.58002E1	-1.98546E1	-1.99944E1	1.4997E1					
1.6E1	3.64E2	0.0E0	6.47E2	4.41E2	-7.35556E-2	-8.80021E1	-5.72205E-4	-8.8E1	0.0E0	5.76973E-3	9.31263E-2	1.57945E1	-1.98158E1	-1.99504E1	1.50004E1	2.42347E-9	2.52169E-3	2.52169E-3	6.32356E-3	2.47874E-2
1.7E1	1.083E3	0.0E0	6.87E2	4.7E2	-7.21643E-2	-8.80018E1	-3.09944E-4	-8.8E1	0.0E0	5.38826E-3	9.32455E-2	1.58162E1	-1.98381E1	-1.99425E1	1.49962E1	2.42121E-9	2.52209E-3	2.52209E-3	6.34588E-3	2.4685E-2
1.8E1	4.643E3	0.0E0	7.27E2	5.0E2	-7.24736E-2	-8.80014E1	-3.33786E-4	-8.79997E1	1.19209E-4	5.6982E-3	9.33886E-2	1.57975E1	-1.98831E1	-1.99786E1	1.49788E1	2.4245E-9	2.51954E-3	2.51954E-3	6.32896E-3	2.48085E-2
1.9E1	2.119E3	0.0E0	7.68E2	5.29E2	-7.25507E-2	-8.80017E1	-7.15256E-5	-8.79997E1	-7.15256E-5	5.76973E-3	9.34124E-2	1.57795E1	-1.98452E1	-1.99834E1	1.50196E1	2.42542E-9	2.51334E-3	2.51334E-3	6.3074E-3	2.4685E-2
2.0E1	2.0E1	0.0E0	8.08E2	5.58E2	-7.26282E-2	-8.80017E1	-2.86102E-4	-8.79999E1	-1.19209E-4	5.45979E-3	9.33409E-2	1.58598E1	-1.99514E1	-1.99732E1	1.50074E1	2.42858E-9	2.5068E-3	2.5068E-3	6.31837E-3	2.45353E-2
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.38649E-2	-8.80017E1	-4.29153E-4	-8.79998E1	-2.38419E-4	5.65052E-3	9.30309E-2	1.57849E1	-1.98543E1	-2.00111E1	1.5013E1	2.42243E-9	2.51847E-3	2.51847E-3	6.29665E-3	2.45978E-2
2.2E1	1.3E1	0.0E0	8.89E2	6.17E2	-7.3401E-2	-8.80019E1	0.0E0	-8.79994E1	2.14577E-4	5.48363E-3	9.32217E-2	1.57867E1	-1.98358E1	-1.99744E1	1.5016E1	2.42647E-9	2.5188E-3	2.5188E-3	6.30192E-3	2.46636E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.42513E-2	-8.80022E1	-4.05312E-4	-8.79997E1	-9.53674E-5	5.48363E-3	9.32693E-2	1.57879E1	-1.98326E1	-1.99264E1	1.49968E1	2.42226E-9	2.51662E-3	2.51662E-3	6.30192E-3	2.45994E-2