[Scan]
initial_time=2015-12-22T16:29:40
final_time=2015-12-22T16:30:02
ip_count=19
run=1021
dataset=1
scan=5
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.82619E-6
ql1_vset=
ql1_vmon=-8.80019E1
ql1_imon=-7.48885E-10
ql2_vset=
ql2_vmon=-6.19888E-4
ql2_imon=1.21042E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-2.47338E-9
ql4_vset=
ql4_vmon=2.38419E-4
ql4_imon=1.39178E-8
mult1=-9.60364E-9
mult2=-2.79318E-9
rf_tmon=-3.84036E-3
rf_agc=3.40039E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.36442E-3
ql5_imon=6.35457E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64096E0
bslens_imon=2.42185E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19994E1
lens5a_imon=1.98685E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12486E2
lens4a_imon=2.04722E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53929E1
cs_ef1b_imon=2.83205E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04592E2
lens23_imon=1.02205E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05086E1
cs_ea1_imon=2.56093E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99798E0
lens1_imon=1.30527E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64602E1
os_ef1alow_imon=2.97117E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03347E1
cs_ea2_imon=1.52222E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84442E1
cs_ef1a_imon=2.92828E-5
olens2_vset=0.0E0
olens2_vmon=1.19209E-3
olens2_imon=1.05209E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11304E1
os_restr1_imon=4.32554E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1533E1
os_ea1_imon=2.36222E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64056E1
os_ef1bup_imon=3.07857E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22027E0
cs_ionrep_imon=1.18393E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91886E2
cs_nozzle_imon=1.93009E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01881E1
cs_anode1_imon=2.93945E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99983E1
olens4_imon=4.24066E-9
tplens_vset=0.0E0
tplens_vmon=-1.60103E0
tplens_imon=-4.39395E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99616E1
iondef3_imon=8.4896E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98191E1
iondef2_imon=9.45926E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03006E2
lens6_imon=2.98309E-4
ql6_vset=1.0E-1
ql6_vmon=9.28879E-2
ql6_imon=9.66787E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25638E0
ionrepsh_imon=1.76206E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33541E1
lens5b_imon=2.17784E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74645E1
cs_ef2b_imon=3.10992E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.24659E0
os_ea2_imon=-7.84654E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0606E2
lens4b_imon=2.00465E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71546E1
cs_ef2a_imon=3.18668E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06417E0
os_ef2alow_imon=-2.64833E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.88414E-1
os_ef2bup_imon=-5.50988E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10823E1
os_restr2_imon=3.40256E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23097E2
cs_ionfoca_imon=6.30442E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01971E1
cs_anode2_imon=2.24353E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57821E1
iondef1_imon=5.05904E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49964E1
iondef4_imon=5.15786E-6
olens3_vset=-1.28E1
olens3_vmon=-1.2796E1
olens3_imon=2.55552E-8
olens1_vset=0.0E0
olens1_vmon=1.07288E-3
olens1_imon=1.22683E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16258E0
cs_ionaccel_imon=-1.93475E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02077E2
cs_ionfocb_imon=1.47104E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56267E1
einzel_imon=7.61576E-6
window_vset=0.0E0
window_vmon=1.58478E-1
window_imon=-1.01574E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82638E2
mask1_imon=2.39008E-4
mask2_vset=0.0E0
mask2_vmon=-1.8608E1
mask2_imon=-6.55342E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92629E3
multa_neg_imon=7.1306E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93692E3
defgrida_imon=6.47681E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=7.05347E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35452E0
defgridb_imon=5.90015E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33365E1
os_fil1_imon=9.40666E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07035E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6326E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30913E1
cs_fil1_imon=9.97645E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62462E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6261E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.75322E-2
os_fil2_imon=-2.79211E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.01318E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.93784E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36773E-1
cs_fil2_imon=-2.45574E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.25985E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22286E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=2.46207E-2
chamber_ion_pmon=2.42647E-9
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.31371E-1
res40_imon=-2.65554E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.819E3	2.0E0	1.47E2	4.1E1	-7.31692E-2	-8.80019E1	-2.86102E-4	-8.80002E1	2.14577E-4	5.53131E-3	9.34362E-2	1.57672E1	-1.98499E1	-1.99691E1	1.49668E1	2.41887E-9	2.52362E-3	2.52362E-3	6.32978E-3	2.46882E-2
2.0E0	3.261E3	5.0E0	3.16E2	1.6E2	-7.30146E-2	-8.80017E1	-1.66893E-4	-8.8E1	7.15256E-5	5.55515E-3	9.32932E-2	1.57824E1	-1.98545E1	-1.9939E1	1.5025E1	2.4276E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.4724E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.30146E-2	-8.80017E1	-3.33786E-4	-8.80003E1	9.53674E-5	5.72205E-3	9.31978E-2	1.58256E1	-1.98688E1	-1.99868E1	1.50232E1	2.4253E-9	2.51581E-3	2.51581E-3	6.3074E-3	2.4732E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.32464E-2	-8.8002E1	-7.15256E-5	-8.8E1	2.14577E-4	5.24521E-3	9.30548E-2	1.58018E1	-1.98596E1	-1.99355E1	1.49987E1	2.4245E-9	2.51417E-3	2.51417E-3	6.33436E-3	2.46608E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.80018E1	-4.29153E-4	-8.79999E1	2.38419E-4	5.26905E-3	9.34124E-2	1.58227E1	-1.98495E1	-1.99582E1	1.50184E1	2.41753E-9	2.52236E-3	2.52236E-3	6.31269E-3	2.4741E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.38649E-2	-8.80018E1	-3.09944E-4	-8.79997E1	1.90735E-4	5.43594E-3	9.35316E-2	1.57963E1	-1.98344E1	-1.99636E1	1.50124E1	2.4227E-9	2.51898E-3	2.51898E-3	6.32679E-3	2.47083E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30146E-2	-8.80019E1	-4.52995E-4	-8.80002E1	-4.76837E-5	5.45979E-3	9.3317E-2	1.58053E1	-1.98705E1	-1.99534E1	1.4992E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.34782E-2	-8.80016E1	-5.24521E-4	-8.8E1	-9.53674E-5	5.48363E-3	9.34362E-2	1.57524E1	-1.98248E1	-1.999E1	1.50394E1	2.42243E-9	2.51954E-3	2.51954E-3	6.32896E-3	2.46188E-2
1.2E1	9.5E1	0.0E0	4.85E2	3.23E2	-7.31692E-2	-8.80015E1	-4.52995E-4	-8.79999E1	-1.90735E-4	5.48363E-3	9.3174E-2	1.57891E1	-1.98585E1	-1.9951E1	1.49896E1	2.42542E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.45567E-2
1.3E1	1.5E1	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.80017E1	-3.33786E-4	-8.79998E1	4.76837E-5	5.14984E-3	9.31263E-2	1.58113E1	-1.98753E1	-1.99798E1	1.50112E1	2.42542E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.46636E-2
1.4E1	1.15E2	0.0E0	5.66E2	3.82E2	-7.22418E-2	-8.80019E1	-3.8147E-4	-8.80001E1	2.14577E-4	5.43594E-3	9.31263E-2	1.58011E1	-1.98476E1	-1.99462E1	1.50184E1	2.42647E-9	2.51443E-3	2.51443E-3	6.28552E-3	2.45994E-2
1.5E1	6.3E1	0.0E0	6.06E2	4.11E2	-7.16233E-2	-8.80018E1	-5.72205E-4	-8.79998E1	2.86102E-4	5.57899E-3	9.32217E-2	1.57065E1	-1.98004E1	-2.00275E1	1.49962E1	2.42331E-9	2.51443E-3	2.51443E-3	6.32936E-3	2.4685E-2
1.6E1	3.78E2	0.0E0	6.47E2	4.41E2	-7.29374E-2	-8.80019E1	-4.52995E-4	-8.79999E1	-2.38419E-5	5.57899E-3	9.32455E-2	1.57807E1	-1.9841E1	-1.99366E1	1.50213E1	2.41934E-9	2.52276E-3	2.52276E-3	6.32356E-3	2.46608E-2
1.7E1	1.098E3	0.0E0	6.87E2	4.7E2	-7.19325E-2	-8.80021E1	-2.86102E-4	-8.79995E1	1.66893E-4	5.65052E-3	9.32932E-2	1.58197E1	-1.98679E1	-1.99494E1	1.50103E1	2.42226E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.45567E-2
1.8E1	4.555E3	4.0E0	7.27E2	5.0E2	-7.23964E-2	-8.80019E1	-4.29153E-4	-8.79999E1	1.90735E-4	5.48363E-3	9.30071E-2	1.57843E1	-1.98771E1	-1.99685E1	1.50207E1	2.42852E-9	2.52473E-3	2.52473E-3	6.3074E-3	2.45575E-2
1.9E1	2.076E3	1.0E0	7.68E2	5.29E2	-7.286E-2	-8.80016E1	-4.29153E-4	-8.80001E1	1.19209E-4	5.74589E-3	9.31501E-2	1.58023E1	-1.9823E1	-1.99558E1	1.5001E1	2.4245E-9	2.52276E-3	2.52276E-3	6.33436E-3	2.47451E-2
2.0E1	2.2E1	0.0E0	8.08E2	5.58E2	-7.27828E-2	-8.80017E1	-3.33786E-4	-8.80001E1	1.43051E-4	5.38826E-3	9.33886E-2	1.58125E1	-1.98651E1	-1.99522E1	1.50172E1	2.42542E-9	2.51116E-3	2.51116E-3	6.31837E-3	2.45353E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.25507E-2	-8.80021E1	-3.8147E-4	-8.79999E1	-1.19209E-4	5.29289E-3	9.33409E-2	1.58038E1	-1.98458E1	-1.99402E1	1.50232E1	2.42542E-9	2.51552E-3	2.51552E-3	6.31288E-3	2.45353E-2
2.2E1	1.7E1	0.0E0	8.89E2	6.17E2	-7.23964E-2	-8.80019E1	-5.24521E-4	-8.80001E1	1.43051E-4	5.36442E-3	9.31025E-2	1.57987E1	-1.98639E1	-1.99594E1	1.50202E1	2.4245E-9	2.52169E-3	2.52169E-3	6.3074E-3	2.45768E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.80019E1	-6.19888E-4	-8.80001E1	2.38419E-4	5.36442E-3	9.28879E-2	1.57821E1	-1.98191E1	-1.99616E1	1.49964E1	2.42647E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.46207E-2