[Scan]
initial_time=2015-12-22T16:30:40
final_time=2015-12-22T16:31:02
ip_count=19
run=1021
dataset=1
scan=7
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.31692E-2
qbias_imon=-3.82552E-6
ql1_vset=
ql1_vmon=-8.80017E1
ql1_imon=-7.7821E-10
ql2_vset=
ql2_vmon=0.0E0
ql2_imon=1.21797E-9
ql3_vset=
ql3_vmon=-8.79998E1
ql3_imon=-2.48033E-9
ql4_vset=
ql4_vmon=9.53674E-5
ql4_imon=1.38785E-8
mult1=-9.60228E-9
mult2=-2.8473E-9
rf_tmon=-4.58558E-3
rf_agc=3.34127E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.74589E-3
ql5_imon=6.44314E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63082E0
bslens_imon=2.45123E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.18279E1
lens5a_imon=1.97483E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12523E2
lens4a_imon=2.04962E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53538E1
cs_ef1b_imon=2.83061E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04627E2
lens23_imon=1.02135E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05307E1
cs_ea1_imon=2.55813E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03065E0
lens1_imon=1.29031E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65077E1
os_ef1alow_imon=2.97729E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04015E1
cs_ea2_imon=1.51825E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8422E1
cs_ef1a_imon=2.92756E-5
olens2_vset=0.0E0
olens2_vmon=1.38283E-3
olens2_imon=1.05025E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11472E1
os_restr1_imon=4.31581E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1507E1
os_ea1_imon=2.38186E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63677E1
os_ef1bup_imon=3.07064E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24384E0
cs_ionrep_imon=1.19227E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91876E2
cs_nozzle_imon=1.93381E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02055E1
cs_anode1_imon=2.94558E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99985E1
olens4_imon=4.28212E-9
tplens_vset=0.0E0
tplens_vmon=-1.58185E0
tplens_imon=-3.55518E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.9958E1
iondef3_imon=8.5461E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98327E1
iondef2_imon=9.43803E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02989E2
lens6_imon=2.9819E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=9.77361E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2869E0
ionrepsh_imon=1.75964E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33404E1
lens5b_imon=2.17269E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74579E1
cs_ef2b_imon=3.11352E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.2167E0
os_ea2_imon=-5.96198E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06073E2
lens4b_imon=2.00527E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7166E1
cs_ef2a_imon=3.1856E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04795E0
os_ef2alow_imon=-2.67717E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.85411E-1
os_ef2bup_imon=-5.36573E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10937E1
os_restr2_imon=3.38382E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.28477E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01797E1
cs_anode2_imon=2.24353E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58032E1
iondef1_imon=5.04562E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49798E1
iondef4_imon=5.0209E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27961E1
olens3_imon=2.55515E-8
olens1_vset=0.0E0
olens1_vmon=1.14441E-3
olens1_imon=1.23459E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15957E0
cs_ionaccel_imon=-1.63202E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02083E2
cs_ionfocb_imon=1.46952E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56213E1
einzel_imon=7.72028E-6
window_vset=0.0E0
window_vmon=1.35052E-1
window_imon=-1.25E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82629E2
mask1_imon=2.39228E-4
mask2_vset=0.0E0
mask2_vmon=-1.8608E1
mask2_imon=-8.67976E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92626E3
multa_neg_imon=7.40641E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.54279E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50131E3
multb_neg_imon=7.15865E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.27563E0
defgridb_imon=5.99064E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3338E1
os_fil1_imon=9.39164E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06837E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63219E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30895E1
cs_fil1_imon=9.9657E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62828E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63082E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.8507E-2
os_fil2_imon=-2.64795E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.81496E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.06322E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36643E-1
cs_fil2_imon=-2.04729E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.22031E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22328E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33144E-3
inlet_lpb_pmon=2.46856E-2
chamber_ion_pmon=2.42636E-9
chamber_cvt_pmon=2.52176E-3
foreline_cvt_pmon=2.52176E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.89325E-1
res40_imon=-2.46453E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=202
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.899E3	3.0E0	1.47E2	4.1E1	-7.35556E-2	-8.80019E1	-6.19888E-4	-8.79998E1	7.15256E-5	5.74589E-3	9.34362E-2	1.57867E1	-1.98552E1	-1.99791E1	1.49923E1	2.4214E-9	2.51632E-3	2.51632E-3	6.30202E-3	2.46608E-2
2.0E0	3.206E3	4.0E0	3.16E2	1.6E2	-7.25507E-2	-8.8002E1	-5.00679E-4	-8.80001E1	2.14577E-4	5.50747E-3	9.32693E-2	1.57811E1	-1.98569E1	-1.99671E1	1.50397E1	2.42347E-9	2.52276E-3	2.52276E-3	6.31817E-3	2.47451E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.32464E-2	-8.80018E1	-4.76837E-4	-8.80001E1	1.66893E-4	5.48363E-3	9.32932E-2	1.58023E1	-1.98417E1	-1.99587E1	1.49692E1	2.42315E-9	2.51359E-3	2.51359E-3	6.3074E-3	2.46664E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.27828E-2	-8.80021E1	-3.33786E-4	-8.80001E1	3.57628E-4	5.36442E-3	9.34124E-2	1.58119E1	-1.98807E1	-1.99185E1	1.50046E1	2.42463E-9	2.52025E-3	2.52025E-3	6.27577E-3	2.47617E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.24736E-2	-8.80021E1	-8.82149E-4	-8.80001E1	1.90735E-4	5.34058E-3	9.32693E-2	1.57934E1	-1.98606E1	-1.9961E1	1.50028E1	2.42542E-9	2.51662E-3	2.51662E-3	6.30192E-3	2.47279E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.15461E-2	-8.80021E1	-7.86781E-4	-8.8E1	1.43051E-4	5.48363E-3	9.30309E-2	1.57873E1	-1.98452E1	-1.99419E1	1.50172E1	2.4253E-9	2.51359E-3	2.51359E-3	6.3074E-3	2.46882E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.201E-2	-8.80023E1	-5.96046E-4	-8.8E1	1.19209E-4	5.62668E-3	9.31263E-2	1.57749E1	-1.98234E1	-1.99885E1	1.50016E1	2.4214E-9	2.51525E-3	2.51525E-3	6.31817E-3	2.47662E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.18554E-2	-8.80021E1	-4.76837E-4	-8.80001E1	-1.90735E-4	5.79357E-3	9.30786E-2	1.57614E1	-1.98699E1	-1.99606E1	1.50265E1	2.42657E-9	2.51632E-3	2.51632E-3	6.29665E-3	2.45978E-2
1.2E1	1.22E2	0.0E0	4.85E2	3.23E2	-7.16233E-2	-8.80019E1	-1.90735E-4	-8.8E1	2.14577E-4	5.67436E-3	9.3174E-2	1.57831E1	-1.98128E1	-1.99498E1	1.50184E1	2.42331E-9	2.51443E-3	2.51443E-3	6.3074E-3	2.47709E-2
1.3E1	9.0E0	0.0E0	5.25E2	3.53E2	-7.22418E-2	-8.80018E1	-4.52995E-4	-8.80003E1	0.0E0	5.74589E-3	9.34124E-2	1.57643E1	-1.9847E1	-1.99726E1	1.49956E1	2.42437E-9	2.51334E-3	2.51334E-3	6.3074E-3	2.47279E-2
1.4E1	1.26E2	0.0E0	5.66E2	3.82E2	-7.23964E-2	-8.80017E1	-3.57628E-4	-8.80002E1	-2.38419E-5	5.43594E-3	9.3174E-2	1.57729E1	-1.98633E1	-1.99528E1	1.49896E1	2.4276E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.4724E-2
1.5E1	8.8E1	1.0E0	6.06E2	4.11E2	-7.201E-2	-8.80017E1	-9.53674E-5	-8.80002E1	3.09944E-4	5.50747E-3	9.3317E-2	1.58191E1	-1.98723E1	-1.99654E1	1.50088E1	2.42858E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.47065E-2
1.6E1	4.11E2	0.0E0	6.47E2	4.41E2	-7.17007E-2	-8.80019E1	-5.00679E-4	-8.8E1	1.90735E-4	5.36442E-3	9.30786E-2	1.57831E1	-1.98316E1	-1.99785E1	1.49848E1	2.42437E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.4685E-2
1.7E1	1.098E3	2.0E0	6.87E2	4.7E2	-7.201E-2	-8.80016E1	-5.72205E-4	-8.8E1	1.90735E-4	5.43594E-3	9.31501E-2	1.57945E1	-1.98555E1	-1.9963E1	1.50191E1	2.42864E-9	2.51847E-3	2.51847E-3	6.32356E-3	2.45978E-2
1.8E1	4.516E3	2.0E0	7.27E2	5.0E2	-7.19325E-2	-8.80018E1	-4.76837E-4	-8.79999E1	0.0E0	5.38826E-3	9.34124E-2	1.57469E1	-1.98122E1	-1.99812E1	1.5007E1	2.42542E-9	2.51552E-3	2.51552E-3	6.28006E-3	2.47065E-2
1.9E1	2.119E3	0.0E0	7.68E2	5.29E2	-7.30918E-2	-8.8002E1	-4.05312E-4	-8.79998E1	2.14577E-4	5.84126E-3	9.30786E-2	1.57967E1	-1.9857E1	-1.99532E1	1.49836E1	2.42315E-9	2.51915E-3	2.51915E-3	6.32418E-3	2.48417E-2
2.0E1	1.7E1	0.0E0	8.08E2	5.58E2	-7.27828E-2	-8.8002E1	-2.6226E-4	-8.79997E1	2.38419E-5	5.53131E-3	9.32217E-2	1.58047E1	-1.98608E1	-1.99576E1	1.50069E1	2.42037E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.48297E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.31692E-2	-8.80018E1	-2.14577E-4	-8.8E1	1.43051E-4	5.43594E-3	9.29832E-2	1.58008E1	-1.98694E1	-1.9995E1	1.50122E1	2.42564E-9	2.51287E-3	2.51287E-3	6.32328E-3	2.47617E-2
2.2E1	1.7E1	0.0E0	8.89E2	6.17E2	-7.29374E-2	-8.80016E1	-9.53674E-5	-8.80001E1	3.8147E-4	5.72205E-3	9.30786E-2	1.58004E1	-1.98499E1	-1.99301E1	1.50257E1	2.4276E-9	2.51525E-3	2.51525E-3	6.3074E-3	2.4724E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.31692E-2	-8.80017E1	0.0E0	-8.79998E1	9.53674E-5	5.74589E-3	9.31263E-2	1.58032E1	-1.98327E1	-1.9958E1	1.49798E1	2.42636E-9	2.52176E-3	2.52176E-3	6.33144E-3	2.46856E-2