[Scan]
initial_time=2015-12-22T16:31:38
final_time=2015-12-22T16:31:59
ip_count=19
run=1021
dataset=1
scan=9
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.37874E-2
qbias_imon=-3.79222E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-7.65216E-10
ql2_vset=
ql2_vmon=-3.09944E-4
ql2_imon=1.22221E-9
ql3_vset=
ql3_vmon=-8.79994E1
ql3_imon=-2.53831E-9
ql4_vset=
ql4_vmon=-4.76837E-5
ql4_imon=1.38765E-8
mult1=-9.74761E-9
mult2=-2.84084E-9
rf_tmon=-3.73081E-3
rf_agc=3.35451E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.36442E-3
ql5_imon=6.42443E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64321E0
bslens_imon=2.49017E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.21063E1
lens5a_imon=1.99111E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12471E2
lens4a_imon=2.05008E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53577E1
cs_ef1b_imon=2.82922E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04676E2
lens23_imon=1.02125E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.049E1
cs_ea1_imon=2.56025E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02888E0
lens1_imon=1.5947E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64358E1
os_ef1alow_imon=2.97182E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03566E1
cs_ea2_imon=1.53028E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84527E1
cs_ef1a_imon=2.93289E-5
olens2_vset=0.0E0
olens2_vmon=1.3113E-3
olens2_imon=1.05511E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11465E1
os_restr1_imon=4.30333E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15294E1
os_ea1_imon=2.39744E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64163E1
os_ef1bup_imon=3.07655E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.1996E0
cs_ionrep_imon=1.17882E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91926E2
cs_nozzle_imon=1.93615E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01733E1
cs_anode1_imon=2.92016E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99983E1
olens4_imon=4.2291E-9
tplens_vset=0.0E0
tplens_vmon=-1.53171E0
tplens_imon=-5.14791E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99927E1
iondef3_imon=8.81155E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98735E1
iondef2_imon=9.15841E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02978E2
lens6_imon=2.98452E-4
ql6_vset=1.0E-1
ql6_vmon=9.35793E-2
ql6_imon=9.71043E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23971E0
ionrepsh_imon=1.73628E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33569E1
lens5b_imon=2.19003E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74596E1
cs_ef2b_imon=3.13918E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.19842E0
os_ea2_imon=-7.5901E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06085E2
lens4b_imon=2.00616E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71865E1
cs_ef2a_imon=3.16148E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03657E0
os_ef2alow_imon=-2.60194E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.95262E-1
os_ef2bup_imon=-5.28762E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10781E1
os_restr2_imon=3.38971E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23068E2
cs_ionfoca_imon=6.29043E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01939E1
cs_anode2_imon=2.25634E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57843E1
iondef1_imon=5.17304E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50016E1
iondef4_imon=5.11186E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27959E1
olens3_imon=2.5581E-8
olens1_vset=0.0E0
olens1_vmon=1.28746E-3
olens1_imon=1.22988E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13073E0
cs_ionaccel_imon=-1.73502E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0211E2
cs_ionfocb_imon=1.47071E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5611E1
einzel_imon=7.65599E-6
window_vset=0.0E0
window_vmon=1.15787E-1
window_imon=-1.05564E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82598E2
mask1_imon=2.38833E-4
mask2_vset=0.0E0
mask2_vmon=-1.86379E1
mask2_imon=-7.12415E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92607E3
multa_neg_imon=7.325E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93698E3
defgrida_imon=6.22424E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50143E3
multb_neg_imon=6.76931E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.65655E0
defgridb_imon=6.07205E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33381E1
os_fil1_imon=9.39583E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07258E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63334E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30853E1
cs_fil1_imon=9.95473E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62655E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63212E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.92668E-2
os_fil2_imon=-2.50838E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.90288E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.91768E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36834E-1
cs_fil2_imon=-3.23965E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.11852E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22167E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31299E-3
inlet_lpb_pmon=2.46882E-2
chamber_ion_pmon=2.42637E-9
chamber_cvt_pmon=2.5225E-3
foreline_cvt_pmon=2.5225E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.24749E-1
res40_imon=-2.56302E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.802E3	2.0E0	1.47E2	4.1E1	-7.29374E-2	-8.80017E1	-2.38419E-5	-8.79999E1	0.0E0	5.19753E-3	9.32932E-2	1.57849E1	-1.98831E1	-1.99474E1	1.49932E1	2.42243E-9	2.51954E-3	2.51954E-3	6.31817E-3	2.47874E-2
2.0E0	3.239E3	3.0E0	3.16E2	1.6E2	-7.20871E-2	-8.80014E1	-7.15256E-5	-8.79994E1	7.15256E-5	5.07832E-3	9.35078E-2	1.57735E1	-1.98705E1	-1.99216E1	1.49962E1	2.4245E-9	2.52061E-3	2.52061E-3	6.32356E-3	2.46819E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.22418E-2	-8.80017E1	-9.53674E-5	-8.79995E1	2.38419E-5	4.95911E-3	9.31501E-2	1.57772E1	-1.98428E1	-1.99337E1	1.49761E1	2.42637E-9	2.52027E-3	2.52027E-3	6.32418E-3	2.47977E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.18554E-2	-8.80018E1	-2.6226E-4	-8.79997E1	-4.76837E-5	5.126E-3	9.32217E-2	1.57654E1	-1.98824E1	-1.9949E1	1.50166E1	2.4245E-9	2.52599E-3	2.52599E-3	6.33977E-3	2.47029E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.20871E-2	-8.80017E1	-1.19209E-4	-8.8E1	-2.38419E-5	5.29289E-3	9.34124E-2	1.57818E1	-1.98545E1	-1.99592E1	1.49836E1	2.42347E-9	2.51954E-3	2.51954E-3	6.32896E-3	2.4724E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27828E-2	-8.80019E1	-3.57628E-4	-8.79997E1	-4.76837E-5	5.29289E-3	9.34124E-2	1.57837E1	-1.98302E1	-1.9948E1	1.49896E1	2.4253E-9	2.51915E-3	2.51915E-3	6.32978E-3	2.47539E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30918E-2	-8.80018E1	-1.90735E-4	-8.79997E1	3.57628E-4	5.14984E-3	9.32693E-2	1.57795E1	-1.98555E1	-1.99612E1	1.50094E1	2.42542E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.46207E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.34782E-2	-8.80018E1	-3.09944E-4	-8.79996E1	2.38419E-4	5.29289E-3	9.34601E-2	1.58026E1	-1.98552E1	-1.99467E1	1.49944E1	2.42347E-9	2.51632E-3	2.51632E-3	6.32356E-3	2.46608E-2
1.2E1	9.8E1	0.0E0	4.85E2	3.23E2	-7.37103E-2	-8.80019E1	-4.05312E-4	-8.79999E1	-7.15256E-5	5.14984E-3	9.3174E-2	1.57952E1	-1.98233E1	-1.99806E1	1.50425E1	2.42437E-9	2.52318E-3	2.52318E-3	6.29645E-3	2.47494E-2
1.3E1	1.0E1	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.80019E1	-3.09944E-4	-8.79998E1	0.0E0	5.43594E-3	9.34362E-2	1.58492E1	-1.98623E1	-1.99815E1	1.5001E1	2.42858E-9	2.5199E-3	2.5199E-3	6.30192E-3	2.46207E-2
1.4E1	1.22E2	0.0E0	5.66E2	3.82E2	-7.286E-2	-8.80019E1	-4.29153E-4	-8.79998E1	3.57628E-4	5.24521E-3	9.36031E-2	1.58001E1	-1.98378E1	-1.99956E1	1.49938E1	2.42437E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.47279E-2
1.5E1	7.0E1	0.0E0	6.06E2	4.11E2	-7.34782E-2	-8.80019E1	-2.14577E-4	-8.79996E1	2.6226E-4	4.93526E-3	9.33409E-2	1.5831E1	-1.98488E1	-2.00004E1	1.49899E1	2.42684E-9	2.51752E-3	2.51752E-3	6.32784E-3	2.47131E-2
1.6E1	3.73E2	0.0E0	6.47E2	4.41E2	-7.35556E-2	-8.80019E1	-1.43051E-4	-8.79996E1	2.86102E-4	5.07832E-3	9.36031E-2	1.58097E1	-1.98369E1	-1.99301E1	1.49962E1	2.42477E-9	2.52432E-3	2.52432E-3	6.32555E-3	2.46081E-2
1.7E1	1.108E3	0.0E0	6.87E2	4.7E2	-7.30146E-2	-8.80018E1	-3.57628E-4	-8.8E1	-7.15256E-5	5.31673E-3	9.3627E-2	1.57885E1	-1.98951E1	-1.99498E1	1.49614E1	2.42967E-9	2.51525E-3	2.51525E-3	6.30202E-3	2.47451E-2
1.8E1	4.435E3	3.0E0	7.27E2	5.0E2	-7.32464E-2	-8.8002E1	-3.8147E-4	-8.79999E1	-2.6226E-4	5.34058E-3	9.36031E-2	1.58041E1	-1.983E1	-1.99793E1	1.49876E1	2.42647E-9	2.51116E-3	2.51116E-3	6.29098E-3	2.47925E-2
1.9E1	2.056E3	3.0E0	7.68E2	5.29E2	-7.40192E-2	-8.80018E1	-3.09944E-4	-8.79998E1	-2.38419E-5	5.24521E-3	9.35555E-2	1.58091E1	-1.98653E1	-1.99489E1	1.49848E1	2.42775E-9	2.51679E-3	2.51679E-3	6.31779E-3	2.46354E-2
2.0E1	2.1E1	0.0E0	8.08E2	5.58E2	-7.3401E-2	-8.80021E1	-4.05312E-4	-8.79999E1	-4.76837E-5	5.65052E-3	9.34601E-2	1.58271E1	-1.9852E1	-1.99561E1	1.50041E1	2.4253E-9	2.51581E-3	2.51581E-3	6.33538E-3	2.45792E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.37103E-2	-8.80018E1	-4.52995E-4	-8.79999E1	4.76837E-5	5.53131E-3	9.34839E-2	1.57789E1	-1.98765E1	-1.99486E1	1.50364E1	2.42423E-9	2.51693E-3	2.51693E-3	6.32418E-3	2.47539E-2
2.2E1	8.0E0	0.0E0	8.89E2	6.17E2	-7.36328E-2	-8.80018E1	-5.00679E-4	-8.79998E1	0.0E0	5.53131E-3	9.35316E-2	1.58065E1	-1.98831E1	-1.99762E1	1.50515E1	2.42657E-9	2.51632E-3	2.51632E-3	6.29665E-3	2.47662E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.37874E-2	-8.80016E1	-3.09944E-4	-8.79994E1	-4.76837E-5	5.36442E-3	9.35793E-2	1.57843E1	-1.98735E1	-1.99927E1	1.50016E1	2.42637E-9	2.5225E-3	2.5225E-3	6.31299E-3	2.46882E-2