[Scan]
initial_time=2015-12-22T16:32:35
final_time=2015-12-22T16:32:55
ip_count=19
run=1021
dataset=1
scan=11
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.25507E-2
qbias_imon=-3.78619E-6
ql1_vset=
ql1_vmon=-8.80022E1
ql1_imon=-7.65014E-10
ql2_vset=
ql2_vmon=-7.39098E-4
ql2_imon=1.2301E-9
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-2.46973E-9
ql4_vset=
ql4_vmon=2.86102E-4
ql4_imon=1.38921E-8
mult1=-1.00668E-8
mult2=-2.75461E-9
rf_tmon=-3.7544E-3
rf_agc=3.44948E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.22137E-3
ql5_imon=6.17766E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6581E0
bslens_imon=2.47327E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19554E1
lens5a_imon=1.97289E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12517E2
lens4a_imon=2.051E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53649E1
cs_ef1b_imon=2.82833E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04603E2
lens23_imon=1.02099E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05037E1
cs_ea1_imon=2.5793E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97595E0
lens1_imon=1.29425E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64633E1
os_ef1alow_imon=2.9698E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03856E1
cs_ea2_imon=1.53323E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84325E1
cs_ef1a_imon=2.93387E-5
olens2_vset=0.0E0
olens2_vmon=1.38283E-3
olens2_imon=1.05527E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11491E1
os_restr1_imon=4.30702E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15147E1
os_ea1_imon=2.35965E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63798E1
os_ef1bup_imon=3.07272E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25393E0
cs_ionrep_imon=1.18944E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9188E2
cs_nozzle_imon=1.93255E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01884E1
cs_anode1_imon=2.93611E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99984E1
olens4_imon=4.16881E-9
tplens_vset=0.0E0
tplens_vmon=-1.61021E0
tplens_imon=-5.09181E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99408E1
iondef3_imon=8.88261E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98706E1
iondef2_imon=9.31234E-6
lens6_vset=-6.0E2
lens6_vmon=-6.0297E2
lens6_imon=2.98339E-4
ql6_vset=1.0E-1
ql6_vmon=9.30786E-2
ql6_imon=9.43148E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28944E0
ionrepsh_imon=1.77565E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33811E1
lens5b_imon=2.176E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74657E1
cs_ef2b_imon=3.12025E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.22149E0
os_ea2_imon=-6.34062E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06049E2
lens4b_imon=2.00494E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71619E1
cs_ef2a_imon=3.17975E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0583E0
os_ef2alow_imon=-2.79513E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.88899E-1
os_ef2bup_imon=-5.46359E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10924E1
os_restr2_imon=3.4073E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.231E2
cs_ionfoca_imon=6.3092E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01952E1
cs_anode2_imon=2.25159E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57767E1
iondef1_imon=4.97456E-6
iondef4_vset=1.53E1
iondef4_vmon=1.5004E1
iondef4_imon=5.14663E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27961E1
olens3_imon=2.5592E-8
olens1_vset=0.0E0
olens1_vmon=1.3113E-3
olens1_imon=1.23521E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16632E0
cs_ionaccel_imon=-1.88942E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02074E2
cs_ionfocb_imon=1.47129E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56274E1
einzel_imon=7.70655E-6
window_vset=0.0E0
window_vmon=1.60211E-1
window_imon=-1.11471E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.39077E-4
mask2_vset=0.0E0
mask2_vmon=-1.86219E1
mask2_imon=-7.36708E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92629E3
multa_neg_imon=6.92491E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93691E3
defgrida_imon=6.24174E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.19671E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35146E0
defgridb_imon=5.80466E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33363E1
os_fil1_imon=9.40736E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06356E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63086E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30978E1
cs_fil1_imon=9.98584E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62309E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6309E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.91091E-2
os_fil2_imon=-2.88706E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91592E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.05209E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37181E-1
cs_fil2_imon=-2.82468E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.74433E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22285E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.4514E-2
chamber_ion_pmon=2.41911E-9
chamber_cvt_pmon=2.52647E-3
foreline_cvt_pmon=2.52647E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.63553E-1
res40_imon=-2.53689E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=148
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.911E3	1.0E0	1.47E2	4.1E1	-7.35556E-2	-8.80019E1	-9.53674E-5	-8.8E1	2.38419E-4	5.53131E-3	9.31263E-2	1.57778E1	-1.98246E1	-1.99732E1	1.5001E1	2.42315E-9	2.52027E-3	2.52027E-3	6.32418E-3	2.46664E-2
2.0E0	3.288E3	1.0E0	3.16E2	1.6E2	-7.35556E-2	-8.80017E1	-3.57628E-4	-8.79999E1	2.86102E-4	5.55515E-3	9.31263E-2	1.57958E1	-1.98269E1	-1.9961E1	1.501E1	2.42657E-9	2.51847E-3	2.51847E-3	6.31278E-3	2.45559E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.32464E-2	-8.8002E1	-3.33786E-4	-8.79997E1	-2.38419E-5	5.4121E-3	9.32693E-2	1.58249E1	-1.98782E1	-1.99657E1	1.49987E1	2.42858E-9	2.51771E-3	2.51771E-3	6.32936E-3	2.45994E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.13915E-2	-8.80019E1	-3.33786E-4	-8.79997E1	0.0E0	5.31673E-3	9.30309E-2	1.57873E1	-1.9832E1	-1.99546E1	1.50016E1	2.42347E-9	2.51739E-3	2.51739E-3	6.3074E-3	2.46819E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.10051E-2	-8.8002E1	-4.29153E-4	-8.79997E1	1.43051E-4	5.26905E-3	9.31501E-2	1.57987E1	-1.9844E1	-1.99829E1	1.50122E1	2.42437E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.46207E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.18554E-2	-8.80019E1	-4.29153E-4	-8.8E1	2.38419E-4	5.24521E-3	9.31025E-2	1.57903E1	-1.98717E1	-1.99426E1	1.50016E1	2.42376E-9	2.51783E-3	2.51783E-3	6.33341E-3	2.47166E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.17007E-2	-8.80018E1	-2.14577E-4	-8.79999E1	7.15256E-5	5.60284E-3	9.28879E-2	1.57856E1	-1.98468E1	-1.99681E1	1.50033E1	2.42647E-9	2.5188E-3	2.5188E-3	6.30192E-3	2.45994E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.26282E-2	-8.8002E1	-7.15256E-4	-8.79997E1	1.19209E-4	5.24521E-3	9.29594E-2	1.57801E1	-1.98409E1	-1.99428E1	1.49979E1	2.42487E-9	2.52262E-3	2.52262E-3	6.31251E-3	2.46732E-2
1.2E1	1.03E2	0.0E0	4.85E2	3.23E2	-7.26282E-2	-8.80019E1	-1.66893E-4	-8.79996E1	7.15256E-5	5.48363E-3	9.29832E-2	1.57867E1	-1.98537E1	-1.99648E1	1.50046E1	2.42264E-9	2.52147E-3	2.52147E-3	6.31332E-3	2.46293E-2
1.3E1	6.0E0	0.0E0	5.25E2	3.53E2	-7.37103E-2	-8.8002E1	-1.43051E-4	-8.79995E1	-1.43051E-4	5.36442E-3	9.3174E-2	1.58107E1	-1.98687E1	-1.99834E1	1.50004E1	2.42542E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.4685E-2
1.4E1	1.42E2	0.0E0	5.66E2	3.82E2	-7.286E-2	-8.80019E1	-1.90735E-4	-8.79997E1	-2.86102E-4	5.55515E-3	9.29832E-2	1.57784E1	-1.98659E1	-1.99526E1	1.50431E1	2.42347E-9	2.51847E-3	2.51847E-3	6.29665E-3	2.46398E-2
1.5E1	7.3E1	1.0E0	6.06E2	4.11E2	-7.286E-2	-8.80017E1	-5.24521E-4	-8.79995E1	-1.90735E-4	5.45979E-3	9.3317E-2	1.57628E1	-1.98241E1	-1.99772E1	1.50005E1	2.42331E-9	2.51771E-3	2.51771E-3	6.33486E-3	2.47279E-2
1.6E1	3.74E2	1.0E0	6.47E2	4.41E2	-7.22418E-2	-8.80017E1	-1.90735E-4	-8.79998E1	1.19209E-4	5.43594E-3	9.31501E-2	1.57697E1	-1.98746E1	-1.99687E1	1.50113E1	2.42096E-9	2.5165E-3	2.5165E-3	6.29721E-3	2.44942E-2
1.7E1	1.062E3	0.0E0	6.87E2	4.7E2	-7.29374E-2	-8.8002E1	-5.96046E-4	-8.79998E1	2.6226E-4	5.50747E-3	9.32455E-2	1.58374E1	-1.98464E1	-1.99508E1	1.50112E1	2.42491E-9	2.52384E-3	2.52384E-3	6.33112E-3	2.47451E-2
1.8E1	4.442E3	2.0E0	7.27E2	5.0E2	-7.22418E-2	-8.8002E1	-4.76837E-4	-8.79997E1	1.19209E-4	5.22137E-3	9.28164E-2	1.57975E1	-1.98609E1	-1.99606E1	1.5022E1	2.42542E-9	2.52428E-3	2.52428E-3	6.3074E-3	2.4685E-2
1.9E1	2.189E3	3.0E0	7.68E2	5.29E2	-7.30146E-2	-8.80019E1	-5.24521E-4	-8.79997E1	3.57628E-4	5.36442E-3	9.30309E-2	1.57777E1	-1.97996E1	-1.99654E1	1.4998E1	2.42226E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.46636E-2
2.0E1	3.0E1	0.0E0	8.08E2	5.58E2	-7.24736E-2	-8.80019E1	-5.96046E-4	-8.8E1	3.33786E-4	5.53131E-3	9.30548E-2	1.57957E1	-1.98452E1	-1.9978E1	1.49812E1	2.4214E-9	2.51954E-3	2.51954E-3	6.3074E-3	2.45768E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.21643E-2	-8.80023E1	-5.72205E-4	-8.79999E1	2.38419E-5	5.50747E-3	9.31978E-2	1.58168E1	-1.98735E1	-1.9962E1	1.49958E1	2.42542E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.47065E-2
2.2E1	1.4E1	0.0E0	8.89E2	6.17E2	-7.201E-2	-8.80023E1	-4.76837E-4	-8.8E1	5.72205E-4	5.36442E-3	9.31263E-2	1.57807E1	-1.98495E1	-1.99979E1	1.50076E1	2.42243E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.4724E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.25507E-2	-8.80022E1	-7.39098E-4	-8.79999E1	2.86102E-4	5.22137E-3	9.30786E-2	1.57767E1	-1.98706E1	-1.99408E1	1.5004E1	2.41911E-9	2.52647E-3	2.52647E-3	6.3074E-3	2.4514E-2