[Scan]
initial_time=2015-12-22T16:33:03
final_time=2015-12-22T16:33:24
ip_count=19
run=1021
dataset=1
scan=12
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.37103E-2
qbias_imon=-3.82702E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-7.52807E-10
ql2_vset=
ql2_vmon=-4.29153E-4
ql2_imon=1.21958E-9
ql3_vset=
ql3_vmon=-8.79993E1
ql3_imon=-2.43543E-9
ql4_vset=
ql4_vmon=3.09944E-4
ql4_imon=1.38152E-8
mult1=-9.921E-9
mult2=-2.73458E-9
rf_tmon=-2.42756E-3
rf_agc=3.51E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.26905E-3
ql5_imon=6.79731E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62787E0
bslens_imon=2.45831E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1947E1
lens5a_imon=1.98828E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12498E2
lens4a_imon=2.05029E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53724E1
cs_ef1b_imon=2.83278E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04599E2
lens23_imon=1.02213E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04876E1
cs_ea1_imon=2.57795E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98818E0
lens1_imon=1.40711E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64759E1
os_ef1alow_imon=2.97802E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03773E1
cs_ea2_imon=1.5363E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84358E1
cs_ef1a_imon=2.91855E-5
olens2_vset=0.0E0
olens2_vmon=1.04904E-3
olens2_imon=1.05121E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11388E1
os_restr1_imon=4.31977E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15058E1
os_ea1_imon=2.38859E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63377E1
os_ef1bup_imon=3.07821E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26744E0
cs_ionrep_imon=1.1859E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91895E2
cs_nozzle_imon=1.93424E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01881E1
cs_anode1_imon=2.93801E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99983E1
olens4_imon=4.3486E-9
tplens_vset=0.0E0
tplens_vmon=-1.57477E0
tplens_imon=-4.79397E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99768E1
iondef3_imon=8.43637E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98489E1
iondef2_imon=9.31061E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02983E2
lens6_imon=2.98254E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=9.45604E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23971E0
ionrepsh_imon=1.75716E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33705E1
lens5b_imon=2.17092E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7476E1
cs_ef2b_imon=3.11713E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.23794E0
os_ea2_imon=-9.28902E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06068E2
lens4b_imon=2.00417E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71552E1
cs_ef2a_imon=3.17227E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0011E0
os_ef2alow_imon=-2.6159E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.88414E-1
os_ef2bup_imon=-5.42699E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10949E1
os_restr2_imon=3.38959E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23097E2
cs_ionfoca_imon=6.30034E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01737E1
cs_anode2_imon=2.24389E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58029E1
iondef1_imon=4.99961E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50208E1
iondef4_imon=5.11821E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27962E1
olens3_imon=2.55522E-8
olens1_vset=0.0E0
olens1_vmon=6.67572E-4
olens1_imon=1.23471E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17399E0
cs_ionaccel_imon=-1.80861E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0207E2
cs_ionfocb_imon=1.47187E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56519E1
einzel_imon=7.62297E-6
window_vset=0.0E0
window_vmon=1.81303E-1
window_imon=-1.20314E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82641E2
mask1_imon=2.39135E-4
mask2_vset=0.0E0
mask2_vmon=-1.8635E1
mask2_imon=-7.70669E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9259E3
multa_neg_imon=7.61523E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.64543E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50121E3
multb_neg_imon=7.13741E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.17818E0
defgridb_imon=5.92693E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33372E1
os_fil1_imon=9.42402E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.065E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63114E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30899E1
cs_fil1_imon=9.98564E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62402E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62629E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.83804E-2
os_fil2_imon=-2.88221E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.82698E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.14548E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33795E-1
cs_fil2_imon=-3.05039E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.23872E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22215E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.45768E-2
chamber_ion_pmon=2.42657E-9
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.91728E-1
res40_imon=-2.42849E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.855E3	0.0E0	1.47E2	4.1E1	-7.3401E-2	-8.80019E1	-5.72205E-4	-8.79994E1	4.52995E-4	5.29289E-3	9.34601E-2	1.57963E1	-1.9835E1	-1.99666E1	1.49956E1	2.42647E-9	2.52538E-3	2.52538E-3	6.32936E-3	2.4514E-2
2.0E0	3.183E3	5.0E0	3.16E2	1.6E2	-7.38649E-2	-8.80019E1	-4.76837E-4	-8.79994E1	4.76837E-4	5.24521E-3	9.33409E-2	1.58216E1	-1.98673E1	-1.99622E1	1.50028E1	2.42347E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.46188E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.40192E-2	-8.8002E1	-3.8147E-4	-8.79995E1	-7.15256E-5	5.48363E-3	9.36747E-2	1.57658E1	-1.98521E1	-1.99228E1	1.50074E1	2.4253E-9	2.51915E-3	2.51915E-3	6.31299E-3	2.46882E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.35556E-2	-8.80019E1	-3.57628E-4	-8.79997E1	9.53674E-5	5.43594E-3	9.34362E-2	1.57608E1	-1.98807E1	-1.99288E1	1.49902E1	2.42564E-9	2.52236E-3	2.52236E-3	6.32858E-3	2.46376E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.40192E-2	-8.8002E1	-6.19888E-4	-8.79998E1	3.57628E-4	4.93526E-3	9.30309E-2	1.57716E1	-1.98531E1	-1.99462E1	1.5004E1	2.42637E-9	2.51693E-3	2.51693E-3	6.31858E-3	2.45792E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.40967E-2	-8.8002E1	-5.24521E-4	-8.79997E1	1.19209E-4	5.22137E-3	9.31025E-2	1.57879E1	-1.98316E1	-1.99461E1	1.49914E1	2.4245E-9	2.51417E-3	2.51417E-3	6.3074E-3	2.47451E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.32464E-2	-8.80021E1	-3.8147E-4	-8.79998E1	1.19209E-4	5.19753E-3	9.34362E-2	1.57789E1	-1.98422E1	-1.99546E1	1.49902E1	2.42858E-9	2.51552E-3	2.51552E-3	6.32936E-3	2.4578E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.35556E-2	-8.80024E1	-3.09944E-4	-8.79999E1	0.0E0	5.26905E-3	9.31978E-2	1.57932E1	-1.9867E1	-1.99278E1	1.50118E1	2.42347E-9	2.51632E-3	2.51632E-3	6.3074E-3	2.45768E-2
1.2E1	1.03E2	0.0E0	4.85E2	3.23E2	-7.40192E-2	-8.80017E1	-4.76837E-4	-8.79998E1	4.29153E-4	5.03063E-3	9.31025E-2	1.57873E1	-1.98594E1	-1.99445E1	1.50166E1	2.42331E-9	2.51007E-3	2.51007E-3	6.31837E-3	2.45567E-2
1.3E1	1.5E1	0.0E0	5.25E2	3.53E2	-7.3401E-2	-8.80021E1	-3.09944E-4	-8.79998E1	1.43051E-4	5.38826E-3	9.33409E-2	1.57837E1	-1.98777E1	-1.99792E1	1.49812E1	2.42647E-9	2.51007E-3	2.51007E-3	6.32936E-3	2.4685E-2
1.4E1	1.15E2	0.0E0	5.66E2	3.82E2	-7.32464E-2	-8.8002E1	-1.66893E-4	-8.79998E1	1.43051E-4	5.22137E-3	9.35078E-2	1.57927E1	-1.98627E1	-1.9942E1	1.49596E1	2.42016E-9	2.52757E-3	2.52757E-3	6.3074E-3	2.4685E-2
1.5E1	7.2E1	0.0E0	6.06E2	4.11E2	-7.34782E-2	-8.80021E1	-1.90735E-4	-8.79998E1	4.76837E-5	5.43594E-3	9.33886E-2	1.57638E1	-1.9844E1	-2.00021E1	1.5019E1	2.41994E-9	2.51581E-3	2.51581E-3	6.3074E-3	2.46664E-2
1.6E1	3.58E2	1.0E0	6.47E2	4.41E2	-7.3401E-2	-8.80017E1	-2.14577E-4	-8.79997E1	1.43051E-4	5.72205E-3	9.32932E-2	1.57949E1	-1.98529E1	-1.9962E1	1.50146E1	2.42243E-9	2.51739E-3	2.51739E-3	6.28592E-3	2.4514E-2
1.7E1	1.101E3	0.0E0	6.87E2	4.7E2	-7.35556E-2	-8.80017E1	-4.29153E-4	-8.8E1	4.52995E-4	5.17368E-3	9.30548E-2	1.58029E1	-1.98086E1	-1.99726E1	1.50093E1	2.42542E-9	2.51443E-3	2.51443E-3	6.32386E-3	2.44927E-2
1.8E1	4.54E3	0.0E0	7.27E2	5.0E2	-7.31692E-2	-8.80017E1	-2.86102E-4	-8.79998E1	3.8147E-4	5.4121E-3	9.31978E-2	1.58011E1	-1.98639E1	-1.9936E1	1.5006E1	2.4245E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.45768E-2
1.9E1	2.086E3	0.0E0	7.68E2	5.29E2	-7.29374E-2	-8.80017E1	-1.66893E-4	-8.80002E1	3.57628E-4	5.6982E-3	9.28879E-2	1.5747E1	-1.98765E1	-1.9936E1	1.49831E1	2.42208E-9	2.51359E-3	2.51359E-3	6.31858E-3	2.46664E-2
2.0E1	1.8E1	0.0E0	8.08E2	5.58E2	-7.35556E-2	-8.8002E1	-1.19209E-4	-8.8E1	2.86102E-4	5.4121E-3	9.30786E-2	1.57885E1	-1.98543E1	-1.99222E1	1.50479E1	2.42553E-9	2.51417E-3	2.51417E-3	6.31817E-3	2.46819E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.37103E-2	-8.80019E1	-3.57628E-4	-8.8E1	2.38419E-4	5.45979E-3	9.29117E-2	1.57731E1	-1.98647E1	-1.99378E1	1.50016E1	2.42101E-9	2.51693E-3	2.51693E-3	6.31299E-3	2.46228E-2
2.2E1	1.2E1	0.0E0	8.89E2	6.17E2	-7.41738E-2	-8.80019E1	-5.96046E-4	-8.79999E1	4.76837E-5	5.74589E-3	9.32455E-2	1.57885E1	-1.98855E1	-1.9951E1	1.50046E1	2.4245E-9	2.52169E-3	2.52169E-3	6.31278E-3	2.46398E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.37103E-2	-8.80021E1	-4.29153E-4	-8.79993E1	3.09944E-4	5.26905E-3	9.34362E-2	1.58029E1	-1.98489E1	-1.99768E1	1.50208E1	2.42657E-9	2.51954E-3	2.51954E-3	6.32356E-3	2.45768E-2