[Scan]
initial_time=2015-12-22T16:33:32
final_time=2015-12-22T16:33:52
ip_count=19
run=1021
dataset=1
scan=13
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27828E-2
qbias_imon=-3.83092E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-7.53057E-10
ql2_vset=
ql2_vmon=-4.76837E-4
ql2_imon=1.24518E-9
ql3_vset=
ql3_vmon=-8.79995E1
ql3_imon=-2.51838E-9
ql4_vset=
ql4_vmon=4.76837E-4
ql4_imon=1.38819E-8
mult1=-1.04267E-8
mult2=-2.63078E-9
rf_tmon=-4.57852E-3
rf_agc=3.34057E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.8651E-3
ql5_imon=6.48487E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64992E0
bslens_imon=2.63148E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.21293E1
lens5a_imon=1.97118E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12484E2
lens4a_imon=2.05006E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53929E1
cs_ef1b_imon=2.82989E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04635E2
lens23_imon=1.0184E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04982E1
cs_ea1_imon=2.57392E-5
lens1_vset=-2.7E0
lens1_vmon=-2.9999E0
lens1_imon=1.36975E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64674E1
os_ef1alow_imon=2.96684E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04195E1
cs_ea2_imon=1.54795E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8464E1
cs_ef1a_imon=2.93909E-5
olens2_vset=0.0E0
olens2_vmon=1.3113E-3
olens2_imon=1.05834E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10913E1
os_restr1_imon=4.2949E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15179E1
os_ea1_imon=2.36808E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64188E1
os_ef1bup_imon=3.09731E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27132E0
cs_ionrep_imon=1.19106E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91841E2
cs_nozzle_imon=1.93395E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01779E1
cs_anode1_imon=2.91855E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99984E1
olens4_imon=4.23174E-9
tplens_vset=0.0E0
tplens_vmon=-1.59517E0
tplens_imon=-5.33668E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99636E1
iondef3_imon=8.79235E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98837E1
iondef2_imon=9.1204E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02982E2
lens6_imon=2.9831E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=8.91006E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22806E0
ionrepsh_imon=1.73793E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33796E1
lens5b_imon=2.18891E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74964E1
cs_ef2b_imon=3.13479E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.17639E0
os_ea2_imon=-7.21126E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06075E2
lens4b_imon=2.00644E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70873E1
cs_ef2a_imon=3.15425E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04615E0
os_ef2alow_imon=-2.73123E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.14242E-1
os_ef2bup_imon=-5.59278E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10877E1
os_restr2_imon=3.40364E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23079E2
cs_ionfoca_imon=6.30036E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01677E1
cs_anode2_imon=2.23632E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57945E1
iondef1_imon=4.94947E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50617E1
iondef4_imon=5.35968E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27963E1
olens3_imon=2.557E-8
olens1_vset=0.0E0
olens1_vmon=1.0252E-3
olens1_imon=1.22998E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16078E0
cs_ionaccel_imon=-2.09693E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.47331E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56363E1
einzel_imon=7.3779E-6
window_vset=0.0E0
window_vmon=1.48867E-1
window_imon=-9.25639E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82627E2
mask1_imon=2.389E-4
mask2_vset=0.0E0
mask2_vmon=-1.86464E1
mask2_imon=-4.64331E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92681E3
multa_neg_imon=6.12468E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93684E3
defgrida_imon=6.4275E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=6.89254E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.29329E0
defgridb_imon=5.95525E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33378E1
os_fil1_imon=9.45934E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06524E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6326E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30886E1
cs_fil1_imon=9.9666E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61921E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63418E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.78996E-2
os_fil2_imon=-2.696E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.7609E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.80641E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3496E-1
cs_fil2_imon=-2.88221E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.56018E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22159E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=2.45768E-2
chamber_ion_pmon=2.4245E-9
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.9353E-1
res40_imon=-2.66996E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.798E3	2.0E0	1.47E2	4.1E1	-7.23964E-2	-8.8002E1	-4.05312E-4	-8.79999E1	2.38419E-4	5.26905E-3	9.31025E-2	1.57789E1	-1.98314E1	-1.996E1	1.5001E1	2.42226E-9	2.51443E-3	2.51443E-3	6.28552E-3	2.46636E-2
2.0E0	3.296E3	4.0E0	3.16E2	1.6E2	-7.23964E-2	-8.8002E1	-5.48363E-4	-8.8E1	1.19209E-4	5.4121E-3	9.3317E-2	1.57849E1	-1.98663E1	-1.99594E1	1.49875E1	2.42553E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.46819E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.18554E-2	-8.80021E1	-4.52995E-4	-8.79996E1	1.90735E-4	5.8651E-3	9.32217E-2	1.57873E1	-1.98647E1	-1.99768E1	1.4968E1	2.42208E-9	2.51804E-3	2.51804E-3	6.31299E-3	2.47539E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.25507E-2	-8.80018E1	-5.24521E-4	-8.79998E1	-4.76837E-5	5.22137E-3	9.36031E-2	1.57839E1	-1.98524E1	-1.99475E1	1.49708E1	2.42347E-9	2.52169E-3	2.52169E-3	6.33977E-3	2.46398E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.286E-2	-8.8002E1	-3.8147E-4	-8.79998E1	3.33786E-4	5.81741E-3	9.35078E-2	1.57931E1	-1.98409E1	-1.99687E1	1.49945E1	2.42788E-9	2.52224E-3	2.52224E-3	6.33757E-3	2.46313E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27053E-2	-8.8002E1	-1.90735E-4	-8.79994E1	3.57628E-4	5.60284E-3	9.3174E-2	1.57831E1	-1.98523E1	-1.9962E1	1.4995E1	2.42947E-9	2.52029E-3	2.52029E-3	6.31925E-3	2.46987E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.24736E-2	-8.80019E1	-3.09944E-4	-8.8E1	1.19209E-4	5.84126E-3	9.34124E-2	1.58263E1	-1.9847E1	-1.99666E1	1.50103E1	2.42331E-9	2.51771E-3	2.51771E-3	6.33486E-3	2.46207E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.24736E-2	-8.80016E1	-2.38419E-4	-8.80002E1	2.38419E-4	5.55515E-3	9.32693E-2	1.57759E1	-1.98338E1	-1.9993E1	1.50172E1	2.41934E-9	2.51847E-3	2.51847E-3	6.3074E-3	2.45559E-2
1.2E1	9.0E1	0.0E0	4.85E2	3.23E2	-7.23189E-2	-8.80018E1	-2.6226E-4	-8.79999E1	7.15256E-5	5.43594E-3	9.34124E-2	1.58258E1	-1.98459E1	-1.99383E1	1.50148E1	2.42423E-9	2.5147E-3	2.5147E-3	6.34661E-3	2.4601E-2
1.3E1	1.8E1	0.0E0	5.25E2	3.53E2	-7.26282E-2	-8.80018E1	-2.38419E-4	-8.8E1	0.0E0	5.65052E-3	9.32693E-2	1.57747E1	-1.98597E1	-1.99864E1	1.50376E1	2.42437E-9	2.52428E-3	2.52428E-3	6.3074E-3	2.45994E-2
1.4E1	1.23E2	0.0E0	5.66E2	3.82E2	-7.37103E-2	-8.80016E1	-4.05312E-4	-8.79998E1	4.76837E-5	5.76973E-3	9.34124E-2	1.58026E1	-1.98655E1	-1.99628E1	1.5007E1	2.4253E-9	2.51915E-3	2.51915E-3	6.29624E-3	2.45792E-2
1.5E1	7.4E1	0.0E0	6.06E2	4.11E2	-7.31692E-2	-8.80014E1	-3.8147E-4	-8.79998E1	0.0E0	5.45979E-3	9.32932E-2	1.58131E1	-1.98639E1	-1.99702E1	1.49848E1	2.42016E-9	2.52099E-3	2.52099E-3	6.34037E-3	2.46636E-2
1.6E1	3.92E2	0.0E0	6.47E2	4.41E2	-7.29374E-2	-8.80019E1	-3.8147E-4	-8.79999E1	7.15256E-5	5.43594E-3	9.31501E-2	1.57755E1	-1.98098E1	-1.9965E1	1.50533E1	2.42753E-9	2.51443E-3	2.51443E-3	6.30192E-3	2.47279E-2
1.7E1	1.113E3	2.0E0	6.87E2	4.7E2	-7.3401E-2	-8.80017E1	-7.86781E-4	-8.79997E1	-2.38419E-4	5.45979E-3	9.33409E-2	1.57903E1	-1.98428E1	-1.99588E1	1.49932E1	2.42542E-9	2.51552E-3	2.51552E-3	6.31288E-3	2.45567E-2
1.8E1	4.718E3	0.0E0	7.27E2	5.0E2	-7.37103E-2	-8.80019E1	-7.86781E-4	-8.79995E1	-9.53674E-5	5.38826E-3	9.32693E-2	1.57807E1	-1.98464E1	-1.9963E1	1.49794E1	2.42331E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.46421E-2
1.9E1	2.136E3	0.0E0	7.68E2	5.29E2	-7.43285E-2	-8.80015E1	-4.52995E-4	-8.79996E1	7.15256E-5	5.29289E-3	9.31978E-2	1.57638E1	-1.98813E1	-1.99444E1	1.4998E1	2.4245E-9	2.52061E-3	2.52061E-3	6.31278E-3	2.45978E-2
2.0E1	2.4E1	0.0E0	8.08E2	5.58E2	-7.40192E-2	-8.80016E1	-3.57628E-4	-8.8E1	2.38419E-5	5.48363E-3	9.30071E-2	1.5756E1	-1.98224E1	-1.9966E1	1.50394E1	2.42437E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.4685E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.286E-2	-8.80015E1	-3.8147E-4	-8.79998E1	2.38419E-5	5.65052E-3	9.31978E-2	1.57961E1	-1.98234E1	-1.99756E1	1.503E1	2.42331E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.47925E-2
2.2E1	1.4E1	0.0E0	8.89E2	6.17E2	-7.30146E-2	-8.80015E1	-4.05312E-4	-8.80001E1	-4.76837E-5	5.67436E-3	9.30548E-2	1.58035E1	-1.98825E1	-1.99282E1	1.49842E1	2.42437E-9	2.52099E-3	2.52099E-3	6.30192E-3	2.4685E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.27828E-2	-8.80016E1	-4.76837E-4	-8.79995E1	4.76837E-4	5.8651E-3	9.31978E-2	1.57945E1	-1.98837E1	-1.99636E1	1.50617E1	2.4245E-9	2.51632E-3	2.51632E-3	6.33977E-3	2.45768E-2