[Scan]
initial_time=2015-12-22T16:34:00
final_time=2015-12-22T16:34:21
ip_count=19
run=1021
dataset=1
scan=14
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.29374E-2
qbias_imon=-3.80306E-6
ql1_vset=
ql1_vmon=-8.80015E1
ql1_imon=-7.32815E-10
ql2_vset=
ql2_vmon=0.0E0
ql2_imon=1.22721E-9
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-2.39483E-9
ql4_vset=
ql4_vmon=6.4373E-4
ql4_imon=1.38727E-8
mult1=-8.27303E-9
mult2=-2.79514E-9
rf_tmon=-4.59507E-3
rf_agc=3.29672E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.26905E-3
ql5_imon=6.37817E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66973E0
bslens_imon=2.27126E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20258E1
lens5a_imon=1.98317E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12483E2
lens4a_imon=2.04942E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53686E1
cs_ef1b_imon=2.82608E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04627E2
lens23_imon=1.02176E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04945E1
cs_ea1_imon=2.55726E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03471E0
lens1_imon=1.4779E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64371E1
os_ef1alow_imon=2.99225E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03458E1
cs_ea2_imon=1.54242E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84394E1
cs_ef1a_imon=2.92451E-5
olens2_vset=0.0E0
olens2_vmon=1.3113E-3
olens2_imon=1.05602E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11335E1
os_restr1_imon=4.31787E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.153E1
os_ea1_imon=2.36075E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63554E1
os_ef1bup_imon=3.0671E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2472E0
cs_ionrep_imon=1.16777E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91913E2
cs_nozzle_imon=1.93358E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02027E1
cs_anode1_imon=2.9436E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99981E1
olens4_imon=4.26493E-9
tplens_vset=0.0E0
tplens_vmon=-1.57287E0
tplens_imon=-4.83471E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99922E1
iondef3_imon=8.51164E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98453E1
iondef2_imon=9.37846E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02981E2
lens6_imon=2.98114E-4
ql6_vset=1.0E-1
ql6_vmon=9.29832E-2
ql6_imon=9.78577E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25577E0
ionrepsh_imon=1.77418E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33786E1
lens5b_imon=2.17307E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74651E1
cs_ef2b_imon=3.11875E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.26863E0
os_ea2_imon=-7.73635E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06095E2
lens4b_imon=2.00384E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71557E1
cs_ef2a_imon=3.17002E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.02649E0
os_ef2alow_imon=-2.74273E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.65196E-1
os_ef2bup_imon=-5.41493E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11136E1
os_restr2_imon=3.39757E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23082E2
cs_ionfoca_imon=6.30773E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02052E1
cs_anode2_imon=2.25571E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57958E1
iondef1_imon=5.07373E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49947E1
iondef4_imon=5.03435E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27959E1
olens3_imon=2.55088E-8
olens1_vset=0.0E0
olens1_vmon=8.34465E-4
olens1_imon=1.23437E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17006E0
cs_ionaccel_imon=-1.83328E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47091E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5623E1
einzel_imon=7.74024E-6
window_vset=0.0E0
window_vmon=1.60834E-1
window_imon=-1.1933E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82637E2
mask1_imon=2.39114E-4
mask2_vset=0.0E0
mask2_vmon=-1.86263E1
mask2_imon=-6.99282E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92635E3
multa_neg_imon=7.67053E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93691E3
defgrida_imon=6.32989E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5015E3
multb_neg_imon=7.09754E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36984E0
defgridb_imon=6.11319E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33391E1
os_fil1_imon=9.40256E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06967E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62836E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30937E1
cs_fil1_imon=9.96532E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62409E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63393E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.05546E-2
os_fil2_imon=-2.70617E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.0781E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.0823E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33282E-1
cs_fil2_imon=-2.6126E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.12255E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22314E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.47029E-2
chamber_ion_pmon=2.42553E-9
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40057E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.97434E-1
res40_imon=-2.34228E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=213
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.795E3	1.0E0	1.47E2	4.1E1	-7.26282E-2	-8.80018E1	-1.66893E-4	-8.79998E1	1.43051E-4	5.07832E-3	9.3317E-2	1.57969E1	-1.98633E1	-1.99474E1	1.5016E1	2.42627E-9	2.52066E-3	2.52066E-3	6.31879E-3	2.46027E-2
2.0E0	3.326E3	7.0E0	3.16E2	1.6E2	-7.24736E-2	-8.80022E1	-2.14577E-4	-8.8E1	-2.38419E-5	5.00679E-3	9.32455E-2	1.58197E1	-1.98459E1	-1.99334E1	1.5031E1	2.42121E-9	2.51334E-3	2.51334E-3	6.34037E-3	2.44927E-2
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.22418E-2	-8.80022E1	-3.57628E-4	-8.79998E1	2.38419E-5	5.10216E-3	9.30786E-2	1.58061E1	-1.98399E1	-1.99738E1	1.50142E1	2.42753E-9	2.5199E-3	2.5199E-3	6.33486E-3	2.4685E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.27053E-2	-8.80019E1	-4.76837E-4	-8.79998E1	2.86102E-4	5.48363E-3	9.30786E-2	1.57867E1	-1.98643E1	-1.99657E1	1.49987E1	2.42657E-9	2.51954E-3	2.51954E-3	6.30202E-3	2.4514E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.19325E-2	-8.8002E1	-3.8147E-4	-8.80002E1	1.19209E-4	5.24521E-3	9.3317E-2	1.58071E1	-1.98476E1	-1.99702E1	1.49896E1	2.4245E-9	2.51954E-3	2.51954E-3	6.32356E-3	2.4535E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.18554E-2	-8.80022E1	-3.09944E-4	-8.8E1	1.19209E-4	5.24521E-3	9.34839E-2	1.57939E1	-1.98549E1	-1.99216E1	1.50256E1	2.42243E-9	2.53139E-3	2.53139E-3	6.31817E-3	2.45768E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.24736E-2	-8.8002E1	-5.72205E-4	-8.80001E1	2.86102E-4	5.14984E-3	9.3627E-2	1.57903E1	-1.98272E1	-1.9969E1	1.49974E1	2.42647E-9	2.51662E-3	2.51662E-3	6.32936E-3	2.46636E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.18554E-2	-8.80019E1	-6.91414E-4	-8.8E1	4.76837E-4	5.126E-3	9.32932E-2	1.57738E1	-1.9822E1	-1.99628E1	1.5019E1	2.42483E-9	2.51898E-3	2.51898E-3	6.31847E-3	2.46002E-2
1.2E1	8.6E1	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.8002E1	-1.43051E-4	-8.79998E1	1.19209E-4	5.38826E-3	9.32693E-2	1.58085E1	-1.98251E1	-1.99797E1	1.5016E1					
1.3E1	7.0E0	0.0E0	5.25E2	3.53E2	-7.20871E-2	-8.80018E1	-3.09944E-4	-8.79999E1	1.90735E-4	5.48363E-3	9.3174E-2	1.58029E1	-1.98573E1	-1.9978E1	1.4992E1	2.42864E-9	2.51203E-3	2.51203E-3	6.32356E-3	2.46398E-2
1.4E1	1.14E2	0.0E0	5.66E2	3.82E2	-7.20871E-2	-8.80019E1	-2.86102E-4	-8.79998E1	-9.53674E-5	5.62668E-3	9.3174E-2	1.58239E1	-1.98476E1	-1.99918E1	1.5016E1	2.42647E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.4514E-2
1.5E1	9.0E1	0.0E0	6.06E2	4.11E2	-7.21643E-2	-8.80019E1	-2.38419E-4	-8.79998E1	1.90735E-4	5.57899E-3	9.33409E-2	1.57837E1	-1.9829E1	-1.99474E1	1.50136E1	2.4253E-9	2.51915E-3	2.51915E-3	6.31299E-3	2.45792E-2
1.6E1	3.98E2	0.0E0	6.47E2	4.41E2	-7.21643E-2	-8.8002E1	9.53674E-5	-8.80001E1	-9.53674E-5	5.81741E-3	9.30786E-2	1.57971E1	-1.98618E1	-1.99934E1	1.50082E1	2.42657E-9	2.51525E-3	2.51525E-3	6.31817E-3	2.47029E-2
1.7E1	1.079E3	1.0E0	6.87E2	4.7E2	-7.29374E-2	-8.80018E1	7.15256E-5	-8.79999E1	-2.14577E-4	5.38826E-3	9.33647E-2	1.57873E1	-1.98332E1	-1.99744E1	1.50118E1	2.42315E-9	2.5225E-3	2.5225E-3	6.30182E-3	2.4601E-2
1.8E1	4.493E3	4.0E0	7.27E2	5.0E2	-7.27053E-2	-8.80019E1	4.76837E-5	-8.79998E1	1.90735E-4	5.24521E-3	9.32932E-2	1.58191E1	-1.98735E1	-1.99216E1	1.50064E1	2.42647E-9	2.50952E-3	2.50952E-3	6.3074E-3	2.4685E-2
1.9E1	2.084E3	0.0E0	7.68E2	5.29E2	-7.29374E-2	-8.80019E1	-7.15256E-5	-8.8E1	2.38419E-4	5.29289E-3	9.31025E-2	1.57777E1	-1.98458E1	-1.99522E1	1.50268E1					
2.0E1	2.2E1	0.0E0	8.08E2	5.58E2	-7.30146E-2	-8.80018E1	-4.76837E-5	-8.79997E1	-1.19209E-4	5.07832E-3	9.31263E-2	1.57975E1	-1.98717E1	-1.99762E1	1.49986E1	2.42542E-9	2.51552E-3	2.51552E-3	6.28552E-3	2.47494E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.286E-2	-8.80019E1	-7.15256E-5	-8.79995E1	2.14577E-4	5.48363E-3	9.32455E-2	1.58203E1	-1.98169E1	-1.99891E1	1.5025E1	2.42226E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.47494E-2
2.2E1	1.4E1	0.0E0	8.89E2	6.17E2	-7.30918E-2	-8.80016E1	-4.76837E-5	-8.79997E1	1.43051E-4	5.45979E-3	9.29832E-2	1.57949E1	-1.98558E1	-1.99355E1	1.50207E1	2.41727E-9	2.52169E-3	2.52169E-3	6.30202E-3	2.46188E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.29374E-2	-8.80015E1	0.0E0	-8.79999E1	6.4373E-4	5.26905E-3	9.29832E-2	1.57958E1	-1.98453E1	-1.99922E1	1.49947E1	2.42553E-9	2.51632E-3	2.51632E-3	6.31278E-3	2.47029E-2