[Scan]
initial_time=2015-12-22T16:34:29
final_time=2015-12-22T16:34:49
ip_count=19
run=1021
dataset=1
scan=15
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.3401E-2
qbias_imon=-3.80524E-6
ql1_vset=
ql1_vmon=-8.80019E1
ql1_imon=-7.6375E-10
ql2_vset=
ql2_vmon=-5.72205E-4
ql2_imon=1.26773E-9
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-2.44974E-9
ql4_vset=
ql4_vmon=-1.43051E-4
ql4_imon=1.38698E-8
mult1=-9.71021E-9
mult2=-2.58873E-9
rf_tmon=-5.32354E-3
rf_agc=3.28633E-2
counter1=5
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.22137E-3
ql5_imon=6.68883E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66513E0
bslens_imon=2.51728E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.2039E1
lens5a_imon=1.94916E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12477E2
lens4a_imon=2.05069E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53661E1
cs_ef1b_imon=2.83343E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.02215E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04722E1
cs_ea1_imon=2.56549E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03249E0
lens1_imon=1.23456E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64649E1
os_ef1alow_imon=2.97383E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03598E1
cs_ea2_imon=1.52576E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84359E1
cs_ef1a_imon=2.92831E-5
olens2_vset=0.0E0
olens2_vmon=1.43051E-3
olens2_imon=1.0527E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11338E1
os_restr1_imon=4.32883E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15282E1
os_ea1_imon=2.38612E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63826E1
os_ef1bup_imon=3.07322E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22719E0
cs_ionrep_imon=1.1837E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91878E2
cs_nozzle_imon=1.93194E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01728E1
cs_anode1_imon=2.93317E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99983E1
olens4_imon=4.20533E-9
tplens_vset=0.0E0
tplens_vmon=-1.61652E0
tplens_imon=-5.20922E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.9966E1
iondef3_imon=8.64583E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98464E1
iondef2_imon=9.3515E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02958E2
lens6_imon=2.98228E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=9.70483E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31351E0
ionrepsh_imon=1.77674E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3353E1
lens5b_imon=2.15843E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74721E1
cs_ef2b_imon=3.1184E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.22023E0
os_ea2_imon=-6.14779E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06087E2
lens4b_imon=2.00414E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71142E1
cs_ef2a_imon=3.18617E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06093E0
os_ef2alow_imon=-2.7692E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.87384E-1
os_ef2bup_imon=-5.54245E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10863E1
os_restr2_imon=3.40581E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23057E2
cs_ionfoca_imon=6.28468E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01717E1
cs_anode2_imon=2.2336E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57988E1
iondef1_imon=4.87415E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50038E1
iondef4_imon=5.15091E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27959E1
olens3_imon=2.55351E-8
olens1_vset=0.0E0
olens1_vmon=1.28746E-3
olens1_imon=1.23467E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.162E0
cs_ionaccel_imon=-1.84825E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02092E2
cs_ionfocb_imon=1.47164E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56179E1
einzel_imon=7.54535E-6
window_vset=0.0E0
window_vmon=1.5571E-1
window_imon=-1.07675E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.39101E-4
mask2_vset=0.0E0
mask2_vmon=-1.86332E1
mask2_imon=-8.61283E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92657E3
multa_neg_imon=7.39787E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.28201E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50143E3
multb_neg_imon=7.01201E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.363E0
defgridb_imon=6.11168E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33388E1
os_fil1_imon=9.42304E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0752E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63468E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30856E1
cs_fil1_imon=9.92041E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63032E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63125E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.79733E-2
os_fil2_imon=-2.62864E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83127E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.86464E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36269E-1
cs_fil2_imon=-2.29849E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.65523E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22408E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29098E-3
inlet_lpb_pmon=2.47279E-2
chamber_ion_pmon=2.42647E-9
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.09973E-1
res40_imon=-2.55373E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=231
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.871E3	1.0E0	1.47E2	4.1E1	-7.27828E-2	-8.8002E1	-5.72205E-4	-8.79999E1	0.0E0	5.00679E-3	9.29117E-2	1.57634E1	-1.9833E1	-1.99487E1	1.50016E1	2.42037E-9	2.51739E-3	2.51739E-3	6.2752E-3	2.46398E-2
2.0E0	3.368E3	3.0E0	3.16E2	1.6E2	-7.32464E-2	-8.80019E1	-3.33786E-4	-8.80001E1	-4.76837E-5	5.00679E-3	9.31025E-2	1.57738E1	-1.98673E1	-1.99702E1	1.49848E1	2.42542E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.46636E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.37874E-2	-8.80019E1	-2.14577E-4	-8.80001E1	1.90735E-4	5.38826E-3	9.30071E-2	1.57778E1	-1.98712E1	-1.99685E1	1.50118E1	2.42637E-9	2.51359E-3	2.51359E-3	6.28511E-3	2.4732E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.37103E-2	-8.80017E1	-7.15256E-5	-8.8E1	2.6226E-4	5.38826E-3	9.30548E-2	1.57839E1	-1.98624E1	-1.99687E1	1.50145E1	2.42016E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.47709E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.3401E-2	-8.80019E1	-3.8147E-4	-8.79998E1	3.33786E-4	5.48363E-3	9.31263E-2	1.57922E1	-1.98545E1	-1.99634E1	1.50153E1	2.4221E-9	2.52224E-3	2.52224E-3	6.33757E-3	2.46901E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.40967E-2	-8.80018E1	-2.86102E-4	-8.79999E1	3.8147E-4	5.38826E-3	9.30309E-2	1.57903E1	-1.98501E1	-1.99708E1	1.503E1	2.4219E-9	2.51952E-3	2.51952E-3	6.3074E-3	2.45805E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.37874E-2	-8.80019E1	-3.09944E-4	-8.8E1	7.15256E-5	5.48363E-3	9.27925E-2	1.57993E1	-1.98723E1	-1.99576E1	1.49998E1	2.42657E-9	2.52169E-3	2.52169E-3	6.33436E-3	2.45978E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.31692E-2	-8.8002E1	-2.6226E-4	-8.79998E1	2.14577E-4	5.43594E-3	9.30071E-2	1.58263E1	-1.98344E1	-1.99552E1	1.49908E1	2.42226E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.45994E-2
1.2E1	1.03E2	0.0E0	4.85E2	3.23E2	-7.35556E-2	-8.80022E1	-3.8147E-4	-8.79999E1	3.33786E-4	5.17368E-3	9.32455E-2	1.57837E1	-1.98404E1	-1.9972E1	1.50052E1	2.42437E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.46421E-2
1.3E1	8.0E0	0.0E0	5.25E2	3.53E2	-7.33239E-2	-8.80019E1	-5.00679E-4	-8.79997E1	4.05312E-4	5.36442E-3	9.32217E-2	1.57951E1	-1.98549E1	-1.99864E1	1.5019E1	2.42647E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.47279E-2
1.4E1	1.12E2	0.0E0	5.66E2	3.82E2	-7.40192E-2	-8.80023E1	-1.19209E-4	-8.8E1	5.48363E-4	5.05447E-3	9.30548E-2	1.5768E1	-1.98537E1	-1.99432E1	1.49926E1	2.42226E-9	2.51662E-3	2.51662E-3	6.34588E-3	2.47065E-2
1.5E1	7.9E1	1.0E0	6.06E2	4.11E2	-7.30918E-2	-8.80019E1	-7.15256E-5	-8.79998E1	4.52995E-4	5.31673E-3	9.30071E-2	1.57915E1	-1.98603E1	-1.99804E1	1.50208E1	2.42647E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.47279E-2
1.6E1	3.92E2	0.0E0	6.47E2	4.41E2	-7.42513E-2	-8.80018E1	-5.24521E-4	-8.8E1	1.43051E-4	5.19753E-3	9.31025E-2	1.5792E1	-1.9811E1	-1.99768E1	1.50094E1	2.42542E-9	2.51552E-3	2.51552E-3	6.31288E-3	2.46421E-2
1.7E1	1.061E3	0.0E0	6.87E2	4.7E2	-7.31692E-2	-8.80022E1	-3.33786E-4	-8.79999E1	4.52995E-4	5.55515E-3	9.28879E-2	1.57731E1	-1.9867E1	-1.9965E1	1.50268E1	2.4245E-9	2.51525E-3	2.51525E-3	6.32896E-3	2.45768E-2
1.8E1	4.467E3	4.0E0	7.27E2	5.0E2	-7.34782E-2	-8.80022E1	-2.14577E-4	-8.79996E1	-1.43051E-4	5.29289E-3	9.30309E-2	1.57965E1	-1.98655E1	-1.99665E1	1.50082E1	2.42542E-9	2.51443E-3	2.51443E-3	6.32936E-3	2.47065E-2
1.9E1	1.995E3	0.0E0	7.68E2	5.29E2	-7.30918E-2	-8.80021E1	-2.38419E-4	-8.8E1	4.76837E-5	5.07832E-3	9.31978E-2	1.5815E1	-1.98641E1	-1.99478E1	1.50207E1	2.42647E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.46636E-2
2.0E1	2.6E1	0.0E0	8.08E2	5.58E2	-7.27828E-2	-8.80022E1	-9.53674E-5	-8.79998E1	1.43051E-4	5.29289E-3	9.34362E-2	1.57795E1	-1.98302E1	-1.99318E1	1.50154E1	2.42437E-9	2.5199E-3	2.5199E-3	6.34037E-3	2.46636E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.27828E-2	-8.80022E1	-1.43051E-4	-8.79997E1	1.43051E-4	5.19753E-3	9.33886E-2	1.5825E1	-1.98723E1	-1.99419E1	1.50184E1	2.41831E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.46608E-2
2.2E1	1.5E1	0.0E0	8.89E2	6.17E2	-7.27053E-2	-8.80019E1	-3.8147E-4	-8.80002E1	2.14577E-4	5.29289E-3	9.34362E-2	1.57278E1	-1.98404E1	-2.00658E1	1.50256E1	2.4245E-9	2.51739E-3	2.51739E-3	6.31817E-3	2.47662E-2
2.3E1	5.0E0	0.0E0	9.3E2	6.47E2	-7.3401E-2	-8.80019E1	-5.72205E-4	-8.79999E1	-1.43051E-4	5.22137E-3	9.34362E-2	1.57988E1	-1.98464E1	-1.9966E1	1.50038E1	2.42647E-9	2.51443E-3	2.51443E-3	6.29098E-3	2.47279E-2