[Scan]
initial_time=2015-12-22T16:34:57
final_time=2015-12-22T16:35:18
ip_count=19
run=1021
dataset=1
scan=16
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.34782E-2
qbias_imon=-3.81943E-6
ql1_vset=
ql1_vmon=-8.8002E1
ql1_imon=-7.59232E-10
ql2_vset=
ql2_vmon=-4.29153E-4
ql2_imon=1.25171E-9
ql3_vset=
ql3_vmon=-8.79997E1
ql3_imon=-2.46068E-9
ql4_vset=
ql4_vmon=-4.76837E-5
ql4_imon=1.38829E-8
mult1=-9.03831E-9
mult2=-2.74677E-9
rf_tmon=-4.03755E-3
rf_agc=3.32147E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.24521E-3
ql5_imon=6.10554E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64871E0
bslens_imon=2.5017E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20103E1
lens5a_imon=1.96901E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12522E2
lens4a_imon=2.0483E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53634E1
cs_ef1b_imon=2.83602E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04634E2
lens23_imon=1.02211E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04988E1
cs_ea1_imon=2.55914E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0005E0
lens1_imon=1.37335E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64716E1
os_ef1alow_imon=2.9636E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03919E1
cs_ea2_imon=1.5494E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84328E1
cs_ef1a_imon=2.93837E-5
olens2_vset=0.0E0
olens2_vmon=1.26362E-3
olens2_imon=1.05328E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11364E1
os_restr1_imon=4.29743E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15035E1
os_ea1_imon=2.37313E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64116E1
os_ef1bup_imon=3.0901E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21965E0
cs_ionrep_imon=1.17484E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91884E2
cs_nozzle_imon=1.93186E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01935E1
cs_anode1_imon=2.92756E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99983E1
olens4_imon=4.24452E-9
tplens_vset=0.0E0
tplens_vmon=-1.58315E0
tplens_imon=-3.57025E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99602E1
iondef3_imon=8.67338E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98594E1
iondef2_imon=9.35832E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02985E2
lens6_imon=2.98216E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=9.86409E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28514E0
ionrepsh_imon=1.76786E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33676E1
lens5b_imon=2.16584E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74754E1
cs_ef2b_imon=3.12578E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.21004E0
os_ea2_imon=-7.49965E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0607E2
lens4b_imon=2.00572E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7139E1
cs_ef2a_imon=3.16218E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.01251E0
os_ef2alow_imon=-2.69158E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.82407E-1
os_ef2bup_imon=-5.38375E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10805E1
os_restr2_imon=3.39752E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.30938E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.23812E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58191E1
iondef1_imon=4.99633E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50142E1
iondef4_imon=5.23354E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27961E1
olens3_imon=2.54591E-8
olens1_vset=0.0E0
olens1_vmon=8.34465E-4
olens1_imon=1.23644E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14516E0
cs_ionaccel_imon=-1.978E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47262E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56405E1
einzel_imon=7.45358E-6
window_vset=0.0E0
window_vmon=1.45263E-1
window_imon=-9.97719E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82652E2
mask1_imon=2.39012E-4
mask2_vset=0.0E0
mask2_vmon=-1.86086E1
mask2_imon=-6.4453E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92652E3
multa_neg_imon=7.79017E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.2833E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50146E3
multb_neg_imon=6.96824E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.30833E0
defgridb_imon=6.03456E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33366E1
os_fil1_imon=9.4069E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06825E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62899E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30999E1
cs_fil1_imon=1.00001E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62396E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63081E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.97053E-2
os_fil2_imon=-2.80412E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.7609E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.11447E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36643E-1
cs_fil2_imon=-2.40768E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.35886E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22319E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.79714E-1
res40_imon=-2.47895E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=151
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.894E3	2.0E0	1.47E2	4.1E1	-7.32464E-2	-8.80019E1	-3.09944E-4	-8.80001E1	2.38419E-5	5.29289E-3	9.34124E-2	1.58097E1	-1.98647E1	-1.99856E1	1.5001E1	2.42437E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.4685E-2
2.0E0	3.233E3	3.0E0	3.16E2	1.6E2	-7.36328E-2	-8.80016E1	-7.15256E-5	-8.8E1	-1.66893E-4	4.93526E-3	9.34362E-2	1.5772E1	-1.9852E1	-1.99524E1	1.50364E1	2.42243E-9	2.52384E-3	2.52384E-3	6.31278E-3	2.46188E-2
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.30146E-2	-8.80016E1	-3.57628E-4	-8.80002E1	-9.53674E-5	5.05447E-3	9.36747E-2	1.57867E1	-1.98543E1	-1.99924E1	1.50376E1	2.42423E-9	2.5225E-3	2.5225E-3	6.31299E-3	2.47539E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.30918E-2	-8.80017E1	-5.24521E-4	-8.80001E1	0.0E0	5.07832E-3	9.33886E-2	1.57985E1	-1.98428E1	-1.9962E1	1.50256E1	2.42542E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.46636E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.35556E-2	-8.80021E1	-4.76837E-4	-8.80003E1	2.38419E-5	5.24521E-3	9.3627E-2	1.58077E1	-1.98537E1	-1.99546E1	1.50328E1	2.42553E-9	2.51096E-3	2.51096E-3	6.3074E-3	2.46398E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27053E-2	-8.80021E1	-2.86102E-4	-8.80001E1	1.90735E-4	5.29289E-3	9.35316E-2	1.57747E1	-1.98495E1	-1.99708E1	1.4983E1	2.42226E-9	2.5199E-3	2.5199E-3	6.28552E-3	2.47065E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.3401E-2	-8.8002E1	-2.6226E-4	-8.8E1	0.0E0	5.19753E-3	9.31978E-2	1.57761E1	-1.98411E1	-1.99414E1	1.49976E1	2.42437E-9	2.51443E-3	2.51443E-3	6.31288E-3	2.47065E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.37103E-2	-8.8002E1	-4.05312E-4	-8.79999E1	2.38419E-5	5.34058E-3	9.31501E-2	1.57672E1	-1.98411E1	-2.00009E1	1.5022E1	2.4245E-9	2.52384E-3	2.52384E-3	6.3074E-3	2.4724E-2
1.2E1	1.03E2	0.0E0	4.85E2	3.23E2	-7.40192E-2	-8.80019E1	-3.57628E-4	-8.79999E1	9.53674E-5	5.43594E-3	9.33409E-2	1.57714E1	-1.98667E1	-1.99671E1	1.5028E1	2.42647E-9	2.51225E-3	2.51225E-3	6.29098E-3	2.47709E-2
1.3E1	1.0E1	0.0E0	5.25E2	3.53E2	-7.37103E-2	-8.80019E1	-4.29153E-4	-8.79999E1	2.38419E-5	5.60284E-3	9.35078E-2	1.5769E1	-1.98558E1	-1.99673E1	1.50004E1	2.42437E-9	2.52538E-3	2.52538E-3	6.31288E-3	2.46421E-2
1.4E1	1.21E2	0.0E0	5.66E2	3.82E2	-7.40192E-2	-8.80019E1	-3.09944E-4	-8.80002E1	-1.90735E-4	5.53131E-3	9.31978E-2	1.57698E1	-1.98627E1	-1.9993E1	1.50202E1	2.42016E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.47709E-2
1.5E1	7.3E1	0.0E0	6.06E2	4.11E2	-7.37874E-2	-8.80021E1	-5.00679E-4	-8.79997E1	-1.43051E-4	5.10216E-3	9.33409E-2	1.57807E1	-1.98332E1	-1.99546E1	1.4989E1	2.42553E-9	2.51954E-3	2.51954E-3	6.32896E-3	2.4724E-2
1.6E1	3.86E2	0.0E0	6.47E2	4.41E2	-7.32464E-2	-8.80018E1	-5.72205E-4	-8.8E1	-2.38419E-4	5.17368E-3	9.34839E-2	1.58125E1	-1.98446E1	-1.99792E1	1.50202E1	2.42858E-9	2.51771E-3	2.51771E-3	6.30192E-3	2.46421E-2
1.7E1	1.101E3	0.0E0	6.87E2	4.7E2	-7.30918E-2	-8.8002E1	-6.67572E-4	-8.79998E1	1.19209E-4	5.65052E-3	9.33409E-2	1.57789E1	-1.98753E1	-1.99666E1	1.4983E1	2.42542E-9	2.51662E-3	2.51662E-3	6.32936E-3	2.4578E-2
1.8E1	4.364E3	4.0E0	7.27E2	5.0E2	-7.37103E-2	-8.80021E1	-3.8147E-4	-8.79998E1	9.53674E-5	5.62668E-3	9.32455E-2	1.57572E1	-1.98272E1	-1.99714E1	1.50202E1	2.42753E-9	2.5199E-3	2.5199E-3	6.33486E-3	2.45353E-2
1.9E1	2.287E3	3.0E0	7.68E2	5.29E2	-7.35556E-2	-8.80019E1	-5.24521E-4	-8.8E1	2.38419E-5	5.72205E-3	9.30071E-2	1.57973E1	-1.98841E1	-1.99343E1	1.49894E1	2.42226E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.46207E-2
2.0E1	2.7E1	0.0E0	8.08E2	5.58E2	-7.30146E-2	-8.8002E1	-1.90735E-4	-8.79997E1	2.38419E-5	5.76973E-3	9.34124E-2	1.57861E1	-1.98645E1	-1.99528E1	1.49842E1	2.4245E-9	2.52276E-3	2.52276E-3	6.32896E-3	2.4535E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.80023E1	-3.09944E-4	-8.79999E1	-4.76837E-5	5.57899E-3	9.35316E-2	1.58101E1	-1.98525E1	-1.99342E1	1.5013E1	2.41887E-9	2.51581E-3	2.51581E-3	6.31299E-3	2.47539E-2
2.2E1	1.2E1	0.0E0	8.89E2	6.17E2	-7.3401E-2	-8.80021E1	-2.38419E-4	-8.79998E1	2.86102E-4	5.31673E-3	9.34124E-2	1.58065E1	-1.98338E1	-1.9951E1	1.49998E1	2.426E-9	2.52026E-3	2.52026E-3	6.32099E-3	2.46304E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.34782E-2	-8.8002E1	-4.29153E-4	-8.79997E1	-4.76837E-5	5.24521E-3	9.3317E-2	1.58191E1	-1.98594E1	-1.99602E1	1.50142E1