[Scan]
initial_time=2015-12-22T16:35:25
final_time=2015-12-22T16:35:46
ip_count=19
run=1021
dataset=1
scan=17
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.32464E-2
qbias_imon=-3.8144E-6
ql1_vset=
ql1_vmon=-8.80019E1
ql1_imon=-7.6797E-10
ql2_vset=
ql2_vmon=-4.76837E-4
ql2_imon=1.28351E-9
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-2.5646E-9
ql4_vset=
ql4_vmon=1.43051E-4
ql4_imon=1.39231E-8
mult1=-8.39994E-9
mult2=-2.34893E-9
rf_tmon=-7.9663E-3
rf_agc=2.95809E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.60284E-3
ql5_imon=6.65522E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64026E0
bslens_imon=2.5291E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19624E1
lens5a_imon=1.96244E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12538E2
lens4a_imon=2.05107E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53661E1
cs_ef1b_imon=2.83447E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04601E2
lens23_imon=1.02178E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05047E1
cs_ea1_imon=2.57122E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02298E0
lens1_imon=1.21952E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64556E1
os_ef1alow_imon=2.97244E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03578E1
cs_ea2_imon=1.54975E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84435E1
cs_ef1a_imon=2.93074E-5
olens2_vset=0.0E0
olens2_vmon=1.4782E-3
olens2_imon=1.05456E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11326E1
os_restr1_imon=4.31354E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15559E1
os_ea1_imon=2.37514E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63473E1
os_ef1bup_imon=3.08261E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23204E0
cs_ionrep_imon=1.17847E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91886E2
cs_nozzle_imon=1.93385E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0185E1
cs_anode1_imon=2.93769E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99982E1
olens4_imon=4.19056E-9
tplens_vset=0.0E0
tplens_vmon=-1.53348E0
tplens_imon=-4.90015E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99402E1
iondef3_imon=8.80447E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98086E1
iondef2_imon=9.37432E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02971E2
lens6_imon=2.98374E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=9.7276E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28513E0
ionrepsh_imon=1.73663E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33404E1
lens5b_imon=2.15605E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74826E1
cs_ef2b_imon=3.12292E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.25269E0
os_ea2_imon=-4.90015E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06082E2
lens4b_imon=2.004E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70817E1
cs_ef2a_imon=3.18478E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03718E0
os_ef2alow_imon=-2.83523E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.01285E-1
os_ef2bup_imon=-5.44862E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10973E1
os_restr2_imon=3.39851E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23099E2
cs_ionfoca_imon=6.3007E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01948E1
cs_anode2_imon=2.24264E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57761E1
iondef1_imon=4.86511E-6
iondef4_vset=1.53E1
iondef4_vmon=1.5025E1
iondef4_imon=5.15091E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27961E1
olens3_imon=2.55902E-8
olens1_vset=0.0E0
olens1_vmon=9.05991E-4
olens1_imon=1.2327E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15389E0
cs_ionaccel_imon=-1.90038E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02065E2
cs_ionfocb_imon=1.47209E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56214E1
einzel_imon=7.59748E-6
window_vset=0.0E0
window_vmon=1.49918E-1
window_imon=-1.20186E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82637E2
mask1_imon=2.3906E-4
mask2_vset=0.0E0
mask2_vmon=-1.86136E1
mask2_imon=-7.25748E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92621E3
multa_neg_imon=6.74808E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93706E3
defgrida_imon=6.30919E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50159E3
multb_neg_imon=6.96752E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.17818E0
defgridb_imon=6.15699E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33386E1
os_fil1_imon=9.4238E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06802E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63028E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3098E1
cs_fil1_imon=9.99194E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6232E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62735E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.88869E-2
os_fil2_imon=-2.91825E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.94711E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.07714E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37517E-1
cs_fil2_imon=-2.72711E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.49681E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22221E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.47279E-2
chamber_ion_pmon=2.42647E-9
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.48404E-1
res40_imon=-2.48075E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=209
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.721E3	2.0E0	1.47E2	4.1E1	-7.38649E-2	-8.80021E1	-1.90735E-4	-8.79997E1	1.19209E-4	5.24521E-3	9.32455E-2	1.57674E1	-1.98272E1	-1.99804E1	1.5013E1	2.42657E-9	2.51417E-3	2.51417E-3	6.3074E-3	2.47029E-2
2.0E0	3.292E3	5.0E0	3.16E2	1.6E2	-7.43285E-2	-8.80021E1	4.76837E-5	-8.8E1	1.66893E-4	5.22137E-3	9.31978E-2	1.58293E1	-1.98525E1	-1.99576E1	1.50052E1	2.42542E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.47925E-2
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.38649E-2	-8.80023E1	-3.33786E-4	-8.79996E1	0.0E0	5.38826E-3	9.29594E-2	1.57772E1	-1.98411E1	-1.99431E1	1.49986E1	2.42647E-9	2.52099E-3	2.52099E-3	6.30192E-3	2.47065E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.39421E-2	-8.80019E1	2.38419E-4	-8.79997E1	3.57628E-4	5.29289E-3	9.32455E-2	1.58038E1	-1.98541E1	-1.99891E1	1.49987E1	2.4214E-9	2.51847E-3	2.51847E-3	6.29128E-3	2.44722E-2
5.0E0	0.0E0	1.0E0	8.24E2	5.17E2	-7.36328E-2	-8.8002E1	-2.14577E-4	-8.79997E1	4.76837E-5	5.34058E-3	9.3174E-2	1.57729E1	-1.98248E1	-1.99438E1	1.50142E1	2.42347E-9	2.51203E-3	2.51203E-3	6.32896E-3	2.47451E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.35556E-2	-8.80019E1	-1.19209E-4	-8.79997E1	-1.90735E-4	5.43594E-3	9.32932E-2	1.58347E1	-1.98386E1	-1.9984E1	1.50016E1	2.42437E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.45567E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.3401E-2	-8.8002E1	-1.19209E-4	-8.79998E1	1.19209E-4	5.126E-3	9.35793E-2	1.57716E1	-1.98266E1	-1.99624E1	1.49866E1	2.42437E-9	2.51007E-3	2.51007E-3	6.31837E-3	2.45353E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.24736E-2	-8.8002E1	-1.19209E-4	-8.8E1	1.19209E-4	5.43594E-3	9.35078E-2	1.5786E1	-1.98379E1	-1.99549E1	1.50322E1	2.42437E-9	2.51552E-3	2.51552E-3	6.31288E-3	2.45994E-2
1.2E1	9.5E1	0.0E0	4.85E2	3.23E2	-7.37103E-2	-8.80019E1	-4.76837E-5	-8.79997E1	1.90735E-4	5.31673E-3	9.36031E-2	1.58093E1	-1.98486E1	-1.99836E1	1.50277E1	2.42647E-9	2.51771E-3	2.51771E-3	6.32112E-3	2.4685E-2
1.3E1	9.0E0	0.0E0	5.25E2	3.53E2	-7.30918E-2	-8.80019E1	-2.38419E-4	-8.80001E1	3.33786E-4	5.31673E-3	9.35078E-2	1.57957E1	-1.98489E1	-1.99702E1	1.50106E1					
1.4E1	9.9E1	1.0E0	5.66E2	3.82E2	-7.27828E-2	-8.80018E1	-2.14577E-4	-8.80001E1	2.6226E-4	5.22137E-3	9.34601E-2	1.57849E1	-1.98482E1	-1.99915E1	1.4979E1	2.42553E-9	2.51847E-3	2.51847E-3	6.31278E-3	2.46819E-2
1.5E1	7.6E1	0.0E0	6.06E2	4.11E2	-7.31692E-2	-8.8002E1	-5.48363E-4	-8.79997E1	-9.53674E-5	5.55515E-3	9.32693E-2	1.58131E1	-1.98615E1	-1.99798E1	1.50268E1	2.42121E-9	2.52099E-3	2.52099E-3	6.30192E-3	2.4685E-2
1.6E1	3.91E2	1.0E0	6.47E2	4.41E2	-7.30146E-2	-8.80022E1	-3.33786E-4	-8.79998E1	9.53674E-5	5.36442E-3	9.34601E-2	1.59153E1	-1.99944E1	-1.98959E1	1.50022E1	2.4214E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.46608E-2
1.7E1	1.119E3	0.0E0	6.87E2	4.7E2	-7.29374E-2	-8.80021E1	-2.86102E-4	-8.80001E1	2.14577E-4	5.38826E-3	9.33647E-2	1.58035E1	-1.98537E1	-1.9966E1	1.50274E1	2.42437E-9	2.52538E-3	2.52538E-3	6.32386E-3	2.45353E-2
1.8E1	4.344E3	2.0E0	7.27E2	5.0E2	-7.30918E-2	-8.8002E1	-7.15256E-5	-8.79999E1	-4.76837E-5	5.38826E-3	9.34601E-2	1.57861E1	-1.98609E1	-2.00021E1	1.50256E1	2.4276E-9	2.51096E-3	2.51096E-3	6.30202E-3	2.47029E-2
1.9E1	2.133E3	1.0E0	7.68E2	5.29E2	-7.286E-2	-8.80023E1	-4.76837E-5	-8.79997E1	7.15256E-5	5.4121E-3	9.37462E-2	1.57909E1	-1.98236E1	-1.99486E1	1.50136E1	2.42542E-9	2.51662E-3	2.51662E-3	6.33486E-3	2.46636E-2
2.0E1	2.3E1	0.0E0	8.08E2	5.58E2	-7.32464E-2	-8.80021E1	-3.33786E-4	-8.8E1	-4.76837E-5	5.24521E-3	9.31978E-2	1.58047E1	-1.98386E1	-1.9954E1	1.50334E1	2.42753E-9	2.51771E-3	2.51771E-3	6.3074E-3	2.45353E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.33239E-2	-8.8002E1	-7.15256E-5	-8.80001E1	1.66893E-4	5.38826E-3	9.32693E-2	1.57989E1	-1.98625E1	-1.99865E1	1.49819E1	2.42226E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.46636E-2
2.2E1	8.0E0	0.0E0	8.89E2	6.17E2	-7.30918E-2	-8.80018E1	-3.09944E-4	-8.79998E1	1.19209E-4	5.36442E-3	9.32217E-2	1.57714E1	-1.98502E1	-1.99585E1	1.50148E1	2.41934E-9	2.51739E-3	2.51739E-3	6.32896E-3	2.46398E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.32464E-2	-8.80019E1	-4.76837E-4	-8.8E1	1.43051E-4	5.60284E-3	9.32217E-2	1.57761E1	-1.98086E1	-1.99402E1	1.5025E1	2.42647E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.47279E-2