[Scan]
initial_time=2015-12-22T16:35:54
final_time=2015-12-22T16:36:15
ip_count=19
run=1021
dataset=1
scan=18
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.22418E-2
qbias_imon=-3.81745E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-7.24959E-10
ql2_vset=
ql2_vmon=-6.91414E-4
ql2_imon=1.19988E-9
ql3_vset=
ql3_vmon=-8.79997E1
ql3_imon=-2.43042E-9
ql4_vset=
ql4_vmon=2.38419E-5
ql4_imon=1.38746E-8
mult1=-8.3763E-9
mult2=-2.79577E-9
rf_tmon=-4.22632E-3
rf_agc=3.35746E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.24521E-3
ql5_imon=6.31356E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64498E0
bslens_imon=2.47247E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19459E1
lens5a_imon=1.96421E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12487E2
lens4a_imon=2.04806E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53934E1
cs_ef1b_imon=2.82926E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.021E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05141E1
cs_ea1_imon=2.56379E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98464E0
lens1_imon=1.27615E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64666E1
os_ef1alow_imon=2.97209E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03678E1
cs_ea2_imon=1.54338E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84504E1
cs_ef1a_imon=2.91927E-5
olens2_vset=0.0E0
olens2_vmon=1.54972E-3
olens2_imon=1.05475E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11233E1
os_restr1_imon=4.31285E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15134E1
os_ea1_imon=2.38717E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64255E1
os_ef1bup_imon=3.0767E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23499E0
cs_ionrep_imon=1.18696E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91895E2
cs_nozzle_imon=1.9336E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01815E1
cs_anode1_imon=2.94082E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99981E1
olens4_imon=4.22642E-9
tplens_vset=0.0E0
tplens_vmon=-1.5618E0
tplens_imon=-6.20973E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99862E1
iondef3_imon=8.66643E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98423E1
iondef2_imon=9.35308E-6
lens6_vset=-6.0E2
lens6_vmon=-6.0299E2
lens6_imon=2.98325E-4
ql6_vset=1.0E-1
ql6_vmon=9.30786E-2
ql6_imon=9.64785E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23853E0
ionrepsh_imon=1.75857E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33622E1
lens5b_imon=2.17092E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74773E1
cs_ef2b_imon=3.10207E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.24443E0
os_ea2_imon=-6.84683E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06086E2
lens4b_imon=2.00658E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71605E1
cs_ef2a_imon=3.18513E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0505E0
os_ef2alow_imon=-2.73444E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.79855E-1
os_ef2bup_imon=-5.4938E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11019E1
os_restr2_imon=3.39052E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.28866E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02273E1
cs_anode2_imon=2.25758E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57808E1
iondef1_imon=5.11641E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49906E1
iondef4_imon=5.19261E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27964E1
olens3_imon=2.5502E-8
olens1_vset=0.0E0
olens1_vmon=8.10623E-4
olens1_imon=1.23196E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16837E0
cs_ionaccel_imon=-1.84825E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02083E2
cs_ionfocb_imon=1.47011E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56312E1
einzel_imon=7.66351E-6
window_vset=0.0E0
window_vmon=1.53394E-1
window_imon=-1.12888E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82643E2
mask1_imon=2.39018E-4
mask2_vset=0.0E0
mask2_vmon=-1.86286E1
mask2_imon=-8.05679E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92665E3
multa_neg_imon=7.32146E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93706E3
defgrida_imon=6.41537E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=6.73746E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43213E0
defgridb_imon=5.97648E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3336E1
os_fil1_imon=9.41574E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07219E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63506E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30926E1
cs_fil1_imon=9.99241E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62088E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63454E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.77472E-2
os_fil2_imon=-2.72711E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.05137E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.8987E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37018E-1
cs_fil2_imon=-3.48008E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.28681E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22293E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.47219E-2
chamber_ion_pmon=2.42264E-9
chamber_cvt_pmon=2.52029E-3
foreline_cvt_pmon=2.52029E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.19241E-1
res40_imon=-2.61281E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.843E3	2.0E0	1.47E2	4.1E1	-7.35556E-2	-8.80021E1	-4.52995E-4	-8.8E1	7.15256E-5	5.45979E-3	9.30786E-2	1.58221E1	-1.98676E1	-1.99579E1	1.5001E1	2.4245E-9	2.51525E-3	2.51525E-3	6.31817E-3	2.4724E-2
2.0E0	3.281E3	3.0E0	3.16E2	1.6E2	-7.38649E-2	-8.80018E1	-3.8147E-4	-8.80003E1	1.43051E-4	5.55515E-3	9.3317E-2	1.57946E1	-1.98435E1	-1.99696E1	1.50262E1	2.42967E-9	2.51203E-3	2.51203E-3	6.30202E-3	2.46398E-2
3.0E0	5.0E0	0.0E0	4.85E2	2.79E2	-7.43285E-2	-8.80019E1	-3.57628E-4	-8.80002E1	2.14577E-4	5.45979E-3	9.34839E-2	1.57548E1	-1.98251E1	-1.99756E1	1.4998E1	2.42208E-9	2.51359E-3	2.51359E-3	6.32418E-3	2.47101E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.40192E-2	-8.80021E1	-7.15256E-5	-8.8E1	-4.76837E-5	5.48363E-3	9.33886E-2	1.57356E1	-1.98212E1	-1.99714E1	1.50208E1	2.42657E-9	2.5131E-3	2.5131E-3	6.31817E-3	2.45768E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.80018E1	-3.09944E-4	-8.80002E1	7.15256E-5	5.48363E-3	9.32693E-2	1.57861E1	-1.9834E1	-1.99632E1	1.50277E1	2.42331E-9	2.51771E-3	2.51771E-3	6.32936E-3	2.45567E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30146E-2	-8.80018E1	-9.53674E-5	-8.80002E1	-2.38419E-5	5.43594E-3	9.34124E-2	1.58173E1	-1.98537E1	-1.99167E1	1.49842E1	2.42864E-9	2.52707E-3	2.52707E-3	6.32356E-3	2.46608E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.22418E-2	-8.80022E1	-1.43051E-4	-8.79999E1	4.52995E-4	5.48363E-3	9.31263E-2	1.57777E1	-1.97954E1	-1.9984E1	1.49722E1	2.42121E-9	2.52209E-3	2.52209E-3	6.32936E-3	2.46636E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.35556E-2	-8.80018E1	-3.09944E-4	-8.79999E1	2.38419E-4	5.26905E-3	9.31978E-2	1.58083E1	-1.98615E1	-1.9966E1	1.49884E1	2.42437E-9	2.51007E-3	2.51007E-3	6.32386E-3	2.46207E-2
1.2E1	8.9E1	0.0E0	4.85E2	3.23E2	-7.32464E-2	-8.80019E1	-1.66893E-4	-8.79998E1	2.38419E-5	5.19753E-3	9.32932E-2	1.57897E1	-1.98825E1	-1.99546E1	1.50166E1	2.42331E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.4514E-2
1.3E1	1.0E1	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80017E1	-2.86102E-4	-8.79999E1	7.15256E-5	5.14984E-3	9.32932E-2	1.57662E1	-1.98368E1	-1.9975E1	1.5004E1	2.42437E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.4685E-2
1.4E1	1.3E2	0.0E0	5.66E2	3.82E2	-7.286E-2	-8.80022E1	-3.8147E-4	-8.8E1	1.43051E-4	5.38826E-3	9.32455E-2	1.57957E1	-1.98537E1	-1.99967E1	1.50166E1	2.42331E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.47279E-2
1.5E1	6.6E1	0.0E0	6.06E2	4.11E2	-7.25507E-2	-8.8002E1	-3.57628E-4	-8.79997E1	2.6226E-4	5.36442E-3	9.30548E-2	1.58023E1	-1.98428E1	-1.99702E1	1.50148E1	2.42437E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.46421E-2
1.6E1	4.01E2	1.0E0	6.47E2	4.41E2	-7.21643E-2	-8.80018E1	-4.05312E-4	-8.79998E1	0.0E0	5.31673E-3	9.32693E-2	1.58179E1	-1.98505E1	-1.99602E1	1.49686E1	2.42121E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.46636E-2
1.7E1	1.103E3	0.0E0	6.87E2	4.7E2	-7.26282E-2	-8.80021E1	-2.86102E-4	-8.79999E1	3.33786E-4	5.57899E-3	9.30071E-2	1.57873E1	-1.98519E1	-1.9945E1	1.501E1	2.42553E-9	2.51632E-3	2.51632E-3	6.30202E-3	2.47874E-2
1.8E1	4.486E3	5.0E0	7.27E2	5.0E2	-7.19325E-2	-8.80019E1	-1.66893E-4	-8.80001E1	-9.53674E-5	5.55515E-3	9.31025E-2	1.58059E1	-1.98374E1	-1.99438E1	1.5025E1	2.42208E-9	2.51581E-3	2.51581E-3	6.29067E-3	2.46882E-2
1.9E1	2.088E3	1.0E0	7.68E2	5.29E2	-7.16233E-2	-8.8002E1	-2.86102E-4	-8.80002E1	2.14577E-4	5.65052E-3	9.32455E-2	1.5863E1	-1.9835E1	-1.98404E1	1.49956E1	2.42347E-9	2.52061E-3	2.52061E-3	6.32356E-3	2.47029E-2
2.0E1	2.4E1	0.0E0	8.08E2	5.58E2	-7.27053E-2	-8.80021E1	-6.67572E-4	-8.79999E1	2.86102E-4	4.98295E-3	9.28879E-2	1.58065E1	-1.98651E1	-1.99678E1	1.50148E1	2.42331E-9	2.51552E-3	2.51552E-3	6.31288E-3	2.47279E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.17779E-2	-8.80022E1	-4.29153E-4	-8.8E1	7.15256E-5	5.45979E-3	9.30786E-2	1.5771E1	-1.98496E1	-1.99866E1	1.49971E1	2.42753E-9	2.51662E-3	2.51662E-3	6.32936E-3	2.47494E-2
2.2E1	1.9E1	0.0E0	8.89E2	6.17E2	-7.11597E-2	-8.8002E1	-3.57628E-4	-8.79999E1	-2.14577E-4	5.29289E-3	9.31263E-2	1.57931E1	-1.98454E1	-1.99655E1	1.5012E1	2.42487E-9	2.5216E-3	2.5216E-3	6.29211E-3	2.46931E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.22418E-2	-8.80018E1	-6.91414E-4	-8.79997E1	2.38419E-5	5.24521E-3	9.30786E-2	1.57808E1	-1.98423E1	-1.99862E1	1.49906E1	2.42264E-9	2.52029E-3	2.52029E-3	6.3074E-3	2.47219E-2