[Scan]
initial_time=2015-12-22T16:36:50
final_time=2015-12-22T16:37:10
ip_count=19
run=1021
dataset=1
scan=20
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.29374E-2
qbias_imon=-3.78003E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-7.67207E-10
ql2_vset=
ql2_vmon=-4.76837E-5
ql2_imon=1.25611E-9
ql3_vset=
ql3_vmon=-8.79998E1
ql3_imon=-2.5069E-9
ql4_vset=
ql4_vmon=1.66893E-4
ql4_imon=1.38602E-8
mult1=-9.921E-9
mult2=-2.58687E-9
rf_tmon=-5.01111E-3
rf_agc=3.29611E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.31673E-3
ql5_imon=5.94139E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64931E0
bslens_imon=2.60985E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19106E1
lens5a_imon=1.96397E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12492E2
lens4a_imon=2.04855E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53832E1
cs_ef1b_imon=2.8216E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04598E2
lens23_imon=1.02085E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05084E1
cs_ea1_imon=2.56816E-5
lens1_vset=-2.7E0
lens1_vmon=-2.95544E0
lens1_imon=1.33009E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64692E1
os_ef1alow_imon=2.97441E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03955E1
cs_ea2_imon=1.50217E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84424E1
cs_ef1a_imon=2.93801E-5
olens2_vset=0.0E0
olens2_vmon=1.19209E-3
olens2_imon=1.05203E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11189E1
os_restr1_imon=4.31076E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15588E1
os_ea1_imon=2.35943E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64116E1
os_ef1bup_imon=3.08289E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23347E0
cs_ionrep_imon=1.18097E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91881E2
cs_nozzle_imon=1.93323E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02061E1
cs_anode1_imon=2.93441E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99985E1
olens4_imon=4.18982E-9
tplens_vset=0.0E0
tplens_vmon=-1.61199E0
tplens_imon=-4.25519E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.9966E1
iondef3_imon=8.69862E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98038E1
iondef2_imon=9.54578E-6
lens6_vset=-6.0E2
lens6_vmon=-6.0297E2
lens6_imon=2.98324E-4
ql6_vset=1.0E-1
ql6_vmon=9.29832E-2
ql6_imon=9.72784E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28394E0
ionrepsh_imon=1.77074E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33664E1
lens5b_imon=2.18675E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74748E1
cs_ef2b_imon=3.12037E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.20343E0
os_ea2_imon=-6.92286E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06122E2
lens4b_imon=2.00461E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71035E1
cs_ef2a_imon=3.17299E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03714E0
os_ef2alow_imon=-2.68437E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.90817E-1
os_ef2bup_imon=-5.40897E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10757E1
os_restr2_imon=3.39175E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23062E2
cs_ionfoca_imon=6.28919E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01863E1
cs_anode2_imon=2.25146E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57819E1
iondef1_imon=4.9747E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50142E1
iondef4_imon=5.30922E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27957E1
olens3_imon=2.5506E-8
olens1_vset=0.0E0
olens1_vmon=8.34465E-4
olens1_imon=1.23388E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16798E0
cs_ionaccel_imon=-1.86988E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02067E2
cs_ionfocb_imon=1.47158E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56375E1
einzel_imon=7.61936E-6
window_vset=0.0E0
window_vmon=1.54874E-1
window_imon=-1.13107E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82634E2
mask1_imon=2.3908E-4
mask2_vset=0.0E0
mask2_vmon=-1.8641E1
mask2_imon=-7.41837E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92655E3
multa_neg_imon=7.2999E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9369E3
defgrida_imon=6.25085E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=7.17372E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.29028E0
defgridb_imon=5.94083E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33365E1
os_fil1_imon=9.46126E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06795E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62849E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30867E1
cs_fil1_imon=9.99621E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62396E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62806E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.76417E-2
os_fil2_imon=-2.7861E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.69483E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.41223E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34701E-1
cs_fil2_imon=-2.62993E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.13972E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22068E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=2.47709E-2
chamber_ion_pmon=2.41911E-9
chamber_cvt_pmon=2.52428E-3
foreline_cvt_pmon=2.52428E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.52394E-1
res40_imon=-2.57626E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.717E3	0.0E0	1.47E2	4.1E1	-7.29374E-2	-8.80021E1	-5.24521E-4	-8.80005E1	0.0E0	5.38826E-3	9.33409E-2	1.57797E1	-1.98405E1	-1.99813E1	1.5001E1	2.42542E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.4685E-2
2.0E0	3.219E3	5.0E0	3.16E2	1.6E2	-7.30918E-2	-8.80019E1	-4.29153E-4	-8.79999E1	-1.90735E-4	5.19753E-3	9.33886E-2	1.57785E1	-1.98141E1	-1.99583E1	1.50178E1	2.42361E-9	2.51814E-3	2.51814E-3	6.32328E-3	2.45963E-2
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.21643E-2	-8.8002E1	-2.86102E-4	-8.79999E1	-1.90735E-4	5.126E-3	9.33409E-2	1.58E1	-1.98672E1	-1.99297E1	1.5019E1	2.4219E-9	2.51384E-3	2.51384E-3	6.3074E-3	2.46916E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.3401E-2	-8.80018E1	-2.86102E-4	-8.79998E1	1.43051E-4	5.60284E-3	9.34362E-2	1.5812E1	-1.98546E1	-1.99449E1	1.50028E1	2.42159E-9	2.51498E-3	2.51498E-3	6.3445E-3	2.46996E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.16233E-2	-8.80017E1	-4.29153E-4	-8.80001E1	-7.15256E-5	5.48363E-3	9.33647E-2	1.57761E1	-1.98959E1	-1.99626E1	1.5034E1	2.41727E-9	2.51847E-3	2.51847E-3	6.32896E-3	2.46398E-2
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.18554E-2	-8.80019E1	-6.19888E-4	-8.79998E1	9.53674E-5	5.65052E-3	9.34839E-2	1.58005E1	-1.98314E1	-1.99522E1	1.50148E1	2.42243E-9	2.52276E-3	2.52276E-3	6.33977E-3	2.46819E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.20871E-2	-8.80018E1	-4.05312E-4	-8.80001E1	-4.76837E-5	5.67436E-3	9.32693E-2	1.57596E1	-1.98693E1	-1.99642E1	1.498E1	2.42657E-9	2.51632E-3	2.51632E-3	6.33977E-3	2.46819E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.17779E-2	-8.80019E1	-7.15256E-5	-8.79999E1	-1.43051E-4	5.48363E-3	9.32932E-2	1.57524E1	-1.98349E1	-1.99996E1	1.50569E1	2.4178E-9	2.5147E-3	2.5147E-3	6.3074E-3	2.4732E-2
1.2E1	1.07E2	0.0E0	4.85E2	3.23E2	-7.22418E-2	-8.80021E1	-1.19209E-4	-8.8E1	-4.76837E-5	5.53131E-3	9.3317E-2	1.57855E1	-1.98275E1	-1.99691E1	1.50058E1	2.42331E-9	2.52209E-3	2.52209E-3	6.3074E-3	2.47494E-2
1.3E1	1.1E1	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80019E1	-3.57628E-4	-8.79998E1	1.43051E-4	5.29289E-3	9.29832E-2	1.57909E1	-1.98458E1	-1.99937E1	1.49896E1	2.42226E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.45994E-2
1.4E1	1.08E2	0.0E0	5.66E2	3.82E2	-7.23189E-2	-8.80018E1	-3.09944E-4	-8.79999E1	4.76837E-5	5.4121E-3	9.3174E-2	1.57879E1	-1.98943E1	-1.99622E1	1.50232E1	2.42437E-9	2.51334E-3	2.51334E-3	6.32936E-3	2.47494E-2
1.5E1	8.2E1	0.0E0	6.06E2	4.11E2	-7.27053E-2	-8.80019E1	-4.05312E-4	-8.80001E1	9.53674E-5	5.57899E-3	9.31501E-2	1.57997E1	-1.9824E1	-1.99449E1	1.50491E1	2.42745E-9	2.51915E-3	2.51915E-3	6.32978E-3	2.46228E-2
1.6E1	3.5E2	0.0E0	6.47E2	4.41E2	-7.30918E-2	-8.80018E1	-2.86102E-4	-8.80001E1	1.66893E-4	5.17368E-3	9.34601E-2	1.57735E1	-1.9817E1	-1.99642E1	1.50412E1	2.42037E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.44931E-2
1.7E1	1.093E3	0.0E0	6.87E2	4.7E2	-7.27828E-2	-8.80019E1	-1.43051E-4	-8.8E1	4.76837E-5	5.22137E-3	9.32217E-2	1.57913E1	-1.98457E1	-1.99721E1	1.50111E1	2.42437E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.47279E-2
1.8E1	4.485E3	1.0E0	7.27E2	5.0E2	-7.38649E-2	-8.80017E1	-2.14577E-4	-8.79998E1	2.38419E-4	5.60284E-3	9.33647E-2	1.58343E1	-1.98486E1	-1.99637E1	1.49893E1	2.42475E-9	2.52509E-3	2.52509E-3	6.31779E-3	2.46963E-2
1.9E1	2.123E3	0.0E0	7.68E2	5.29E2	-7.40192E-2	-8.80017E1	-2.6226E-4	-8.79997E1	1.43051E-4	5.38826E-3	9.31263E-2	1.57584E1	-1.9838E1	-1.99714E1	1.50076E1	2.42505E-9	2.52106E-3	2.52106E-3	6.3016E-3	2.46724E-2
2.0E1	2.6E1	0.0E0	8.08E2	5.58E2	-7.29374E-2	-8.80018E1	-2.38419E-4	-8.80001E1	9.53674E-5	5.24521E-3	9.3317E-2	1.58257E1	-1.98398E1	-1.99762E1	1.50118E1	2.42226E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.46421E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.286E-2	-8.8002E1	-4.29153E-4	-8.80001E1	2.38419E-4	5.126E-3	9.3317E-2	1.57832E1	-1.98759E1	-1.99593E1	1.50381E1	2.42121E-9	2.52318E-3	2.52318E-3	6.32386E-3	2.47065E-2
2.2E1	1.8E1	0.0E0	8.89E2	6.17E2	-7.3401E-2	-8.8002E1	-3.8147E-4	-8.80002E1	2.86102E-4	5.31673E-3	9.29117E-2	1.57885E1	-1.98585E1	-1.9948E1	1.5004E1	2.42159E-9	2.51919E-3	2.51919E-3	6.3074E-3	2.47203E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.29374E-2	-8.80016E1	-4.76837E-5	-8.79998E1	1.66893E-4	5.31673E-3	9.29832E-2	1.57819E1	-1.98038E1	-1.9966E1	1.50142E1	2.41911E-9	2.52428E-3	2.52428E-3	6.32936E-3	2.47709E-2