[Scan]
initial_time=2015-12-22T16:37:17
final_time=2015-12-22T16:37:37
ip_count=19
run=1021
dataset=1
scan=21
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.18554E-2
qbias_imon=-3.79116E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-7.33757E-10
ql2_vset=
ql2_vmon=-4.76837E-4
ql2_imon=1.24831E-9
ql3_vset=
ql3_vmon=-8.79997E1
ql3_imon=-2.47549E-9
ql4_vset=
ql4_vmon=7.15256E-5
ql4_imon=1.38855E-8
mult1=-8.96979E-9
mult2=-2.86033E-9
rf_tmon=-5.03514E-3
rf_agc=3.31413E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.29289E-3
ql5_imon=6.33836E-10
bslens_vset=-6.2E0
bslens_vmon=-6.71136E0
bslens_imon=2.59081E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19884E1
lens5a_imon=1.97105E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12519E2
lens4a_imon=2.05008E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53834E1
cs_ef1b_imon=2.82619E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.02158E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0489E1
cs_ea1_imon=2.57526E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98023E0
lens1_imon=1.40444E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64777E1
os_ef1alow_imon=2.97674E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03666E1
cs_ea2_imon=1.52956E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84385E1
cs_ef1a_imon=2.92827E-5
olens2_vset=0.0E0
olens2_vmon=1.50204E-3
olens2_imon=1.0531E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11276E1
os_restr1_imon=4.31774E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15275E1
os_ea1_imon=2.40152E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64587E1
os_ef1bup_imon=3.08433E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21414E0
cs_ionrep_imon=1.19385E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91865E2
cs_nozzle_imon=1.93284E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01821E1
cs_anode1_imon=2.93304E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99979E1
olens4_imon=4.20306E-9
tplens_vset=0.0E0
tplens_vmon=-1.61572E0
tplens_imon=-4.50414E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99594E1
iondef3_imon=8.67692E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98867E1
iondef2_imon=9.28296E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02992E2
lens6_imon=2.98261E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=1.01825E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29801E0
ionrepsh_imon=1.75288E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33517E1
lens5b_imon=2.17674E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74624E1
cs_ef2b_imon=3.11554E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.19027E0
os_ea2_imon=-7.22214E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06095E2
lens4b_imon=2.00432E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71937E1
cs_ef2a_imon=3.18751E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0671E0
os_ef2alow_imon=-2.64507E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.79472E-1
os_ef2bup_imon=-5.50186E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11148E1
os_restr2_imon=3.39754E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23087E2
cs_ionfoca_imon=6.29414E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01895E1
cs_anode2_imon=2.24528E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57795E1
iondef1_imon=5.01497E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50316E1
iondef4_imon=5.12114E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27958E1
olens3_imon=2.55472E-8
olens1_vset=0.0E0
olens1_vmon=1.35899E-3
olens1_imon=1.23327E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14789E0
cs_ionaccel_imon=-1.87763E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47142E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56448E1
einzel_imon=7.64378E-6
window_vset=0.0E0
window_vmon=1.48924E-1
window_imon=-1.07347E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82628E2
mask1_imon=2.39113E-4
mask2_vset=0.0E0
mask2_vmon=-1.8605E1
mask2_imon=-7.57681E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92632E3
multa_neg_imon=7.32527E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93699E3
defgrida_imon=6.19766E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.21508E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40049E0
defgridb_imon=6.11319E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33383E1
os_fil1_imon=9.41006E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06864E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63114E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30931E1
cs_fil1_imon=9.98203E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62898E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63103E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.08174E-2
os_fil2_imon=-2.78667E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.99913E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.00219E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36314E-1
cs_fil2_imon=-2.82951E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.09778E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22126E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.45567E-2
chamber_ion_pmon=2.42331E-9
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.94527E-1
res40_imon=-2.51288E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=203
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.817E3	0.0E0	1.47E2	4.1E1	-7.35556E-2	-8.80017E1	-9.53674E-5	-8.79999E1	2.6226E-4	5.29289E-3	9.31025E-2	1.58073E1	-1.98535E1	-1.99868E1	1.49951E1	2.42121E-9	2.52318E-3	2.52318E-3	6.31837E-3	2.47065E-2
2.0E0	3.187E3	0.0E0	3.16E2	1.6E2	-7.40192E-2	-8.80015E1	0.0E0	-8.80001E1	1.66893E-4	5.22137E-3	9.3174E-2	1.57952E1	-1.98447E1	-1.9972E1	1.49885E1	2.42753E-9	2.51771E-3	2.51771E-3	6.35692E-3	2.47494E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.36328E-2	-8.80017E1	-1.90735E-4	-8.8E1	2.38419E-5	5.6982E-3	9.31263E-2	1.5828E1	-1.98576E1	-1.99449E1	1.50004E1	2.42852E-9	2.51581E-3	2.51581E-3	6.31858E-3	2.47101E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.32464E-2	-8.80017E1	9.53674E-5	-8.8E1	-2.38419E-5	5.36442E-3	9.31263E-2	1.58174E1	-1.98629E1	-1.99573E1	1.50136E1	2.42553E-9	2.52169E-3	2.52169E-3	6.33436E-3	2.46398E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27053E-2	-8.80019E1	-1.66893E-4	-8.80001E1	1.43051E-4	5.53131E-3	9.30786E-2	1.57855E1	-1.98627E1	-2.00105E1	1.5016E1	2.42657E-9	2.51525E-3	2.51525E-3	6.32356E-3	2.4724E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.26282E-2	-8.8002E1	-1.66893E-4	-8.80003E1	2.38419E-4	5.62668E-3	9.3317E-2	1.57725E1	-1.98423E1	-1.99821E1	1.50103E1	2.41911E-9	2.51225E-3	2.51225E-3	6.29098E-3	2.47279E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.286E-2	-8.80019E1	-3.8147E-4	-8.8E1	-1.19209E-4	5.26905E-3	9.32455E-2	1.57756E1	-1.98355E1	-1.99867E1	1.49972E1	2.42553E-9	2.52276E-3	2.52276E-3	6.29665E-3	2.47874E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.8002E1	-4.29153E-4	-8.8E1	4.76837E-5	5.07832E-3	9.31978E-2	1.57814E1	-1.98635E1	-1.99567E1	1.50062E1	2.42437E-9	2.52209E-3	2.52209E-3	6.28552E-3	2.4685E-2
1.2E1	1.03E2	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.80019E1	-7.15256E-4	-8.80001E1	2.38419E-5	5.38826E-3	9.31263E-2	1.57921E1	-1.98458E1	-1.9942E1	1.49842E1	2.42647E-9	2.52647E-3	2.52647E-3	6.30192E-3	2.47279E-2
1.3E1	6.0E0	0.0E0	5.25E2	3.53E2	-7.286E-2	-8.80017E1	-3.09944E-4	-8.79999E1	2.38419E-4	5.126E-3	9.29594E-2	1.57813E1	-1.98537E1	-1.99864E1	1.50232E1	2.42647E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.45994E-2
1.4E1	1.26E2	0.0E0	5.66E2	3.82E2	-7.13143E-2	-8.80016E1	-7.39098E-4	-8.79998E1	1.19209E-4	5.26905E-3	9.31501E-2	1.58109E1	-1.98635E1	-1.99655E1	1.50058E1	2.42437E-9	2.52318E-3	2.52318E-3	6.31837E-3	2.47065E-2
1.5E1	5.9E1	0.0E0	6.06E2	4.11E2	-7.18554E-2	-8.80017E1	-9.29832E-4	-8.79996E1	1.66893E-4	5.43594E-3	9.35793E-2	1.58089E1	-1.98741E1	-1.99396E1	1.50262E1	2.41934E-9	2.52061E-3	2.52061E-3	6.31278E-3	2.47662E-2
1.6E1	3.52E2	0.0E0	6.47E2	4.41E2	-7.16233E-2	-8.80018E1	-1.04904E-3	-8.79997E1	2.6226E-4	5.26905E-3	9.33409E-2	1.57643E1	-1.9857E1	-1.99602E1	1.50358E1	2.42647E-9	2.51334E-3	2.51334E-3	6.31288E-3	2.47065E-2
1.7E1	1.006E3	0.0E0	6.87E2	4.7E2	-7.22418E-2	-8.80019E1	-6.19888E-4	-8.79998E1	-2.38419E-5	5.45979E-3	9.36985E-2	1.57922E1	-1.98606E1	-1.99561E1	1.50172E1	2.42553E-9	2.51739E-3	2.51739E-3	6.33436E-3	2.47662E-2
1.8E1	4.462E3	3.0E0	7.27E2	5.0E2	-7.3401E-2	-8.80019E1	-8.34465E-4	-8.8E1	7.15256E-5	5.72205E-3	9.32455E-2	1.58149E1	-1.98681E1	-2.00039E1	1.49956E1	2.42852E-9	2.5147E-3	2.5147E-3	6.3074E-3	2.46882E-2
1.9E1	2.098E3	2.0E0	7.68E2	5.29E2	-7.26282E-2	-8.80018E1	-5.48363E-4	-8.80002E1	4.76837E-4	5.48363E-3	9.3317E-2	1.58011E1	-1.98543E1	-1.99522E1	1.50196E1	2.42226E-9	2.51443E-3	2.51443E-3	6.32386E-3	2.47925E-2
2.0E1	2.1E1	0.0E0	8.08E2	5.58E2	-7.29374E-2	-8.80019E1	-5.96046E-4	-8.79998E1	4.52995E-4	5.36442E-3	9.34124E-2	1.58281E1	-1.98681E1	-1.99534E1	1.50094E1	2.41806E-9	2.51443E-3	2.51443E-3	6.33486E-3	2.47279E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.40967E-2	-8.8002E1	-8.34465E-4	-8.79999E1	1.90735E-4	5.38826E-3	9.35793E-2	1.57554E1	-1.98293E1	-1.99685E1	1.49825E1	2.42753E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.46421E-2
2.2E1	2.2E1	0.0E0	8.89E2	6.17E2	-7.32464E-2	-8.80021E1	-7.15256E-4	-8.79996E1	2.38419E-4	5.29289E-3	9.33647E-2	1.57897E1	-1.98392E1	-1.99282E1	1.49854E1	2.42553E-9	2.5131E-3	2.5131E-3	6.32356E-3	2.4724E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.18554E-2	-8.80021E1	-4.76837E-4	-8.79997E1	7.15256E-5	5.29289E-3	9.3317E-2	1.57795E1	-1.98867E1	-1.99594E1	1.50316E1	2.42331E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.45567E-2