[Scan]
initial_time=2015-12-22T16:37:44
final_time=2015-12-22T16:38:04
ip_count=19
run=1021
dataset=1
scan=22
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.3401E-2
qbias_imon=-3.83878E-6
ql1_vset=
ql1_vmon=-8.80019E1
ql1_imon=-7.49445E-10
ql2_vset=
ql2_vmon=-5.24521E-4
ql2_imon=1.24503E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-2.43253E-9
ql4_vset=
ql4_vmon=-2.38419E-5
ql4_imon=1.39065E-8
mult1=-9.60575E-9
mult2=-2.83301E-9
rf_tmon=-5.01679E-3
rf_agc=3.29729E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.45979E-3
ql5_imon=6.38938E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68509E0
bslens_imon=2.70961E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19482E1
lens5a_imon=1.95926E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12514E2
lens4a_imon=2.04728E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53508E1
cs_ef1b_imon=2.8335E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04592E2
lens23_imon=1.02266E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04888E1
cs_ea1_imon=2.57051E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00116E0
lens1_imon=1.26907E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64843E1
os_ef1alow_imon=2.96792E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04646E1
cs_ea2_imon=1.5225E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84394E1
cs_ef1a_imon=2.94017E-5
olens2_vset=0.0E0
olens2_vmon=1.12057E-3
olens2_imon=1.05283E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.114E1
os_restr1_imon=4.3086E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15211E1
os_ea1_imon=2.36594E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63695E1
os_ef1bup_imon=3.08001E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24502E0
cs_ionrep_imon=1.19899E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91871E2
cs_nozzle_imon=1.93466E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01869E1
cs_anode1_imon=2.92936E-5
olens4_vset=-3.0E1
olens4_vmon=-2.9998E1
olens4_imon=4.19859E-9
tplens_vset=0.0E0
tplens_vmon=-1.58893E0
tplens_imon=-4.72318E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99986E1
iondef3_imon=8.60273E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98369E1
iondef2_imon=9.47696E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02966E2
lens6_imon=2.98332E-4
ql6_vset=1.0E-1
ql6_vmon=9.31025E-2
ql6_imon=9.73773E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28395E0
ionrepsh_imon=1.7561E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33528E1
lens5b_imon=2.19109E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74766E1
cs_ef2b_imon=3.11965E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.21611E0
os_ea2_imon=-9.3952E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06132E2
lens4b_imon=2.00502E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70321E1
cs_ef2a_imon=3.17443E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.02753E0
os_ef2alow_imon=-2.74925E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.83008E-1
os_ef2bup_imon=-5.41618E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10907E1
os_restr2_imon=3.38454E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.2915E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01899E1
cs_anode2_imon=2.24749E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57926E1
iondef1_imon=5.17658E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49871E1
iondef4_imon=5.21912E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27961E1
olens3_imon=2.55208E-8
olens1_vset=0.0E0
olens1_vmon=1.04904E-3
olens1_imon=1.23102E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16078E0
cs_ionaccel_imon=-1.95277E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47215E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56507E1
einzel_imon=7.54729E-6
window_vset=0.0E0
window_vmon=1.27844E-1
window_imon=-1.03376E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82631E2
mask1_imon=2.39055E-4
mask2_vset=0.0E0
mask2_vmon=-1.86452E1
mask2_imon=-6.6255E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92661E3
multa_neg_imon=7.83467E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93738E3
defgrida_imon=6.07205E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.501E3
multb_neg_imon=7.0737E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.21067E0
defgridb_imon=5.94463E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33375E1
os_fil1_imon=9.4233E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07113E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63071E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30906E1
cs_fil1_imon=9.98342E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62678E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62849E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.93934E-2
os_fil2_imon=-2.70201E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83899E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.9721E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36643E-1
cs_fil2_imon=-1.98722E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.16625E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22185E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=2.46636E-2
chamber_ion_pmon=2.42331E-9
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.04051E-1
res40_imon=-2.46093E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=213
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.776E3	2.0E0	1.47E2	4.1E1	-7.31692E-2	-8.80018E1	-2.6226E-4	-8.79998E1	-1.90735E-4	5.43594E-3	9.34839E-2	1.5802E1	-1.98387E1	-1.9965E1	1.50068E1	2.42331E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.47925E-2
2.0E0	3.252E3	1.0E0	3.16E2	1.6E2	-7.34782E-2	-8.80019E1	-6.4373E-4	-8.80001E1	1.90735E-4	5.43594E-3	9.34839E-2	1.57995E1	-1.98539E1	-1.99683E1	1.50247E1	2.42768E-9	2.52342E-3	2.52342E-3	6.29684E-3	2.46789E-2
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.37874E-2	-8.80019E1	-5.24521E-4	-8.80002E1	1.19209E-4	5.48363E-3	9.34601E-2	1.58256E1	-1.98493E1	-1.99242E1	1.49773E1	2.42627E-9	2.51611E-3	2.51611E-3	6.3245E-3	2.46916E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.43285E-2	-8.80018E1	-6.19888E-4	-8.80001E1	-1.19209E-4	5.19753E-3	9.35078E-2	1.57513E1	-1.98582E1	-1.99596E1	1.50172E1	2.42243E-9	2.51471E-3	2.51471E-3	6.31278E-3	2.47979E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.41738E-2	-8.80018E1	-3.57628E-4	-8.80002E1	-2.14577E-4	5.53131E-3	9.3174E-2	1.58161E1	-1.98597E1	-1.9987E1	1.50262E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.44059E-2	-8.80018E1	-7.39098E-4	-8.80003E1	1.43051E-4	5.43594E-3	9.34839E-2	1.57777E1	-1.98464E1	-1.99492E1	1.50166E1	2.42542E-9	2.5188E-3	2.5188E-3	6.29919E-3	2.46101E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.40192E-2	-8.8002E1	-7.15256E-4	-8.8E1	2.38419E-4	5.55515E-3	9.33886E-2	1.57975E1	-1.98561E1	-1.99672E1	1.50022E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.3401E-2	-8.80015E1	-5.96046E-4	-8.8E1	-3.09944E-4	5.36442E-3	9.38177E-2	1.5776E1	-1.98341E1	-1.99963E1	1.49767E1	2.42331E-9	2.51334E-3	2.51334E-3	6.3074E-3	2.47065E-2
1.2E1	1.26E2	0.0E0	4.85E2	3.23E2	-7.27053E-2	-8.80019E1	-5.24521E-4	-8.8E1	1.90735E-4	5.17368E-3	9.32217E-2	1.57832E1	-1.98365E1	-1.99483E1	1.49912E1	2.42745E-9	2.51359E-3	2.51359E-3	6.31299E-3	2.47977E-2
1.3E1	1.1E1	0.0E0	5.25E2	3.53E2	-7.30918E-2	-8.80017E1	-4.29153E-4	-8.80001E1	0.0E0	5.62668E-3	9.3317E-2	1.57921E1	-1.98909E1	-1.99744E1	1.50034E1	2.42361E-9	2.51603E-3	2.51603E-3	6.31798E-3	2.46582E-2
1.4E1	1.19E2	1.0E0	5.66E2	3.82E2	-7.27053E-2	-8.80016E1	-4.76837E-4	-8.8E1	-1.90735E-4	5.65052E-3	9.30786E-2	1.57821E1	-1.98724E1	-1.99351E1	1.50139E1	2.42423E-9	2.51693E-3	2.51693E-3	6.3074E-3	2.4732E-2
1.5E1	5.9E1	0.0E0	6.06E2	4.11E2	-7.21643E-2	-8.80013E1	-6.19888E-4	-8.8E1	-4.29153E-4	5.67436E-3	9.30071E-2	1.57765E1	-1.98581E1	-1.99752E1	1.49841E1	2.42489E-9	2.51607E-3	2.51607E-3	6.32386E-3	2.46743E-2
1.6E1	3.9E2	0.0E0	6.47E2	4.41E2	-7.23964E-2	-8.80015E1	-4.29153E-4	-8.8E1	-4.76837E-5	5.72205E-3	9.33647E-2	1.58462E1	-1.98627E1	-1.9963E1	1.49944E1					
1.7E1	1.098E3	0.0E0	6.87E2	4.7E2	-7.24736E-2	-8.80015E1	-1.90735E-4	-8.79998E1	-2.14577E-4	5.6982E-3	9.33409E-2	1.57783E1	-1.98116E1	-1.99997E1	1.50298E1	2.42331E-9	2.52099E-3	2.52099E-3	6.28006E-3	2.47494E-2
1.8E1	4.388E3	5.0E0	7.27E2	5.0E2	-7.201E-2	-8.80017E1	-3.8147E-4	-8.80001E1	1.19209E-4	6.12736E-3	9.30309E-2	1.58083E1	-1.98218E1	-1.99708E1	1.50064E1	2.42121E-9	2.52318E-3	2.52318E-3	6.31837E-3	2.47065E-2
1.9E1	2.076E3	2.0E0	7.68E2	5.29E2	-7.33239E-2	-8.8002E1	-5.72205E-4	-8.80001E1	-9.53674E-5	5.91278E-3	9.3174E-2	1.57854E1	-1.98563E1	-1.99873E1	1.4986E1	2.42437E-9	2.5199E-3	2.5199E-3	6.30192E-3	2.47065E-2
2.0E1	2.2E1	0.0E0	8.08E2	5.58E2	-7.34782E-2	-8.80017E1	-3.8147E-4	-8.8E1	1.66893E-4	5.36442E-3	9.32932E-2	1.58221E1	-1.99219E1	-1.99142E1	1.49986E1	2.42121E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.4685E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.45602E-2	-8.80017E1	-7.39098E-4	-8.79999E1	1.43051E-4	5.53131E-3	9.33647E-2	1.57472E1	-1.98505E1	-1.9936E1	1.49958E1	2.42542E-9	2.51662E-3	2.51662E-3	6.34588E-3	2.46636E-2
2.2E1	2.2E1	0.0E0	8.89E2	6.17E2	-7.41738E-2	-8.80018E1	-7.39098E-4	-8.80004E1	2.6226E-4	5.43594E-3	9.32455E-2	1.58069E1	-1.98832E1	-1.99585E1	1.50053E1	2.4276E-9	2.51525E-3	2.51525E-3	6.32356E-3	2.47451E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.3401E-2	-8.80019E1	-5.24521E-4	-8.80001E1	-2.38419E-5	5.45979E-3	9.31025E-2	1.57926E1	-1.98369E1	-1.99986E1	1.49871E1	2.42331E-9	2.51334E-3	2.51334E-3	6.33486E-3	2.46636E-2