[Scan]
initial_time=2015-12-22T16:38:39
final_time=2015-12-22T16:38:59
ip_count=19
run=1021
dataset=1
scan=24
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.37874E-2
qbias_imon=-3.80392E-6
ql1_vset=
ql1_vmon=-8.80024E1
ql1_imon=-7.62475E-10
ql2_vset=
ql2_vmon=-2.14577E-4
ql2_imon=1.21826E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-2.52388E-9
ql4_vset=
ql4_vmon=3.09944E-4
ql4_imon=1.38784E-8
mult1=-8.93367E-9
mult2=-2.68867E-9
rf_tmon=-5.33556E-3
rf_agc=3.23062E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.76973E-3
ql5_imon=6.43563E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67279E0
bslens_imon=2.39247E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19676E1
lens5a_imon=1.99162E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12509E2
lens4a_imon=2.05052E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53605E1
cs_ef1b_imon=2.83431E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04598E2
lens23_imon=1.02007E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05153E1
cs_ea1_imon=2.55799E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00655E0
lens1_imon=1.22813E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64571E1
os_ef1alow_imon=2.96792E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0429E1
cs_ea2_imon=1.53838E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84506E1
cs_ef1a_imon=2.93723E-5
olens2_vset=0.0E0
olens2_vmon=1.71661E-3
olens2_imon=1.05612E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11273E1
os_restr1_imon=4.30964E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14908E1
os_ea1_imon=2.35782E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6396E1
os_ef1bup_imon=3.08357E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24353E0
cs_ionrep_imon=1.18944E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91848E2
cs_nozzle_imon=1.93299E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01977E1
cs_anode1_imon=2.92152E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99982E1
olens4_imon=4.23062E-9
tplens_vset=0.0E0
tplens_vmon=-1.56614E0
tplens_imon=-4.10011E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.9969E1
iondef3_imon=8.74303E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98374E1
iondef2_imon=9.32704E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02969E2
lens6_imon=2.98401E-4
ql6_vset=1.0E-1
ql6_vmon=9.38416E-2
ql6_imon=9.72748E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26189E0
ionrepsh_imon=1.75949E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33664E1
lens5b_imon=2.17527E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7472E1
cs_ef2b_imon=3.1195E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.19884E0
os_ea2_imon=-5.60603E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06107E2
lens4b_imon=2.00285E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70815E1
cs_ef2a_imon=3.18312E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03709E0
os_ef2alow_imon=-2.70156E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.81414E-1
os_ef2bup_imon=-5.41493E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10961E1
os_restr2_imon=3.39944E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23068E2
cs_ionfoca_imon=6.29194E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02196E1
cs_anode2_imon=2.24411E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57783E1
iondef1_imon=4.9966E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50479E1
iondef4_imon=5.20651E-6
olens3_vset=-1.28E1
olens3_vmon=-1.2796E1
olens3_imon=2.55838E-8
olens1_vset=0.0E0
olens1_vmon=1.12057E-3
olens1_imon=1.23214E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17942E0
cs_ionaccel_imon=-1.83703E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47193E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56324E1
einzel_imon=7.55311E-6
window_vset=0.0E0
window_vmon=1.60834E-1
window_imon=-1.02114E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82628E2
mask1_imon=2.39013E-4
mask2_vset=0.0E0
mask2_vmon=-1.86282E1
mask2_imon=-6.84312E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92668E3
multa_neg_imon=6.28582E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=6.77065E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50153E3
multb_neg_imon=6.91757E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.25646E0
defgridb_imon=6.19399E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33377E1
os_fil1_imon=9.42221E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07342E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62771E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3089E1
cs_fil1_imon=9.9753E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62484E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63375E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.96347E-2
os_fil2_imon=-2.77478E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.80988E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.09806E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35433E-1
cs_fil2_imon=-2.58141E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.67998E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22328E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.45978E-2
chamber_ion_pmon=2.42553E-9
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.13652E-1
res40_imon=-2.5294E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=200
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.727E3	2.0E0	1.47E2	4.1E1	-7.40967E-2	-8.80021E1	-4.76837E-4	-8.79999E1	3.09944E-4	5.65052E-3	9.34124E-2	1.57943E1	-1.98387E1	-1.9916E1	1.50016E1	2.42315E-9	2.52362E-3	2.52362E-3	6.28511E-3	2.45792E-2
2.0E0	3.065E3	3.0E0	3.16E2	1.6E2	-7.29374E-2	-8.80022E1	-3.8147E-4	-8.80001E1	0.0E0	5.84126E-3	9.32693E-2	1.58017E1	-1.98567E1	-1.996E1	1.50232E1	2.4276E-9	2.51417E-3	2.51417E-3	6.29665E-3	2.45768E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.25507E-2	-8.8002E1	-4.76837E-4	-8.80005E1	1.43051E-4	5.45979E-3	9.33409E-2	1.5851E1	-1.98417E1	-1.99555E1	1.5001E1	2.42101E-9	2.52027E-3	2.52027E-3	6.30182E-3	2.48197E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.201E-2	-8.80022E1	-5.00679E-4	-8.80001E1	1.19209E-4	5.65052E-3	9.33409E-2	1.5789E1	-1.98167E1	-2.00039E1	1.50038E1	2.42768E-9	2.51709E-3	2.51709E-3	6.32858E-3	2.4514E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.80022E1	-5.48363E-4	-8.80004E1	4.76837E-4	5.45979E-3	9.34839E-2	1.57885E1	-1.98374E1	-1.996E1	1.50274E1	2.42295E-9	2.519E-3	2.519E-3	6.32626E-3	2.45873E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.26282E-2	-8.8002E1	-3.57628E-4	-8.80003E1	3.09944E-4	5.65052E-3	9.32693E-2	1.57714E1	-1.98698E1	-1.99218E1	1.50234E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.26282E-2	-8.80017E1	-6.4373E-4	-8.80001E1	3.57628E-4	5.36442E-3	9.31263E-2	1.58215E1	-1.98603E1	-1.99474E1	1.50016E1	2.42542E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.46636E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.21643E-2	-8.8002E1	-3.33786E-4	-8.8E1	1.90735E-4	5.31673E-3	9.32932E-2	1.57914E1	-1.98517E1	-1.99526E1	1.50196E1	2.427E-9	2.5188E-3	2.5188E-3	6.31563E-3	2.47817E-2
1.2E1	1.13E2	0.0E0	4.85E2	3.23E2	-7.29374E-2	-8.80021E1	-5.48363E-4	-8.80001E1	-4.76837E-5	5.14984E-3	9.33409E-2	1.57843E1	-1.98627E1	-1.99672E1	1.50292E1					
1.3E1	1.5E1	0.0E0	5.25E2	3.53E2	-7.29374E-2	-8.80022E1	-3.57628E-4	-8.8E1	2.14577E-4	5.4121E-3	9.3317E-2	1.57855E1	-1.98322E1	-1.99414E1	1.50256E1	2.42243E-9	2.52923E-3	2.52923E-3	6.30202E-3	2.47451E-2
1.4E1	1.12E2	0.0E0	5.66E2	3.82E2	-7.30146E-2	-8.80022E1	-4.29153E-4	-8.8E1	2.86102E-4	5.4121E-3	9.34362E-2	1.57772E1	-1.98434E1	-1.99844E1	1.49941E1	2.42647E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.47925E-2
1.5E1	6.1E1	2.0E0	6.06E2	4.11E2	-7.36328E-2	-8.80021E1	-3.09944E-4	-8.8E1	3.8147E-4	5.45979E-3	9.35078E-2	1.57855E1	-1.98561E1	-1.99955E1	1.5031E1	2.42243E-9	2.51954E-3	2.51954E-3	6.34518E-3	2.47662E-2
1.6E1	3.74E2	0.0E0	6.47E2	4.41E2	-7.41738E-2	-8.80022E1	-3.09944E-4	-8.79998E1	3.8147E-4	5.45979E-3	9.35793E-2	1.58203E1	-1.98639E1	-1.99786E1	1.50533E1	2.42657E-9	2.51525E-3	2.51525E-3	6.30202E-3	2.46608E-2
1.7E1	1.162E3	0.0E0	6.87E2	4.7E2	-7.37874E-2	-8.80023E1	-4.29153E-4	-8.80002E1	-1.19209E-4	5.67436E-3	9.33886E-2	1.57595E1	-1.98989E1	-1.99909E1	1.50112E1	2.42542E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.46207E-2
1.8E1	4.332E3	4.0E0	7.27E2	5.0E2	-7.31692E-2	-8.80022E1	-3.8147E-4	-8.8E1	-1.90735E-4	5.79357E-3	9.32455E-2	1.58064E1	-1.9858E1	-1.9966E1	1.50038E1	2.42542E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.47709E-2
1.9E1	2.17E3	0.0E0	7.68E2	5.29E2	-7.41738E-2	-8.80024E1	-5.24521E-4	-8.79999E1	0.0E0	5.36442E-3	9.3317E-2	1.58087E1	-1.98603E1	-1.99342E1	1.5007E1	2.42855E-9	2.51879E-3	2.51879E-3	6.31406E-3	2.47477E-2
2.0E1	2.7E1	0.0E0	8.08E2	5.58E2	-7.40967E-2	-8.80021E1	-2.6226E-4	-8.79997E1	2.38419E-5	5.48363E-3	9.34124E-2	1.57873E1	-1.98347E1	-1.99061E1	1.49789E1	2.42736E-9	2.5202E-3	2.5202E-3	6.32107E-3	2.47451E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.39421E-2	-8.80021E1	-1.90735E-4	-8.79999E1	4.29153E-4	5.4121E-3	9.35078E-2	1.57784E1	-1.98776E1	-1.9995E1	1.49854E1	2.41679E-9	2.51575E-3	2.51575E-3	6.3074E-3	2.49414E-2
2.2E1	8.0E0	0.0E0	8.89E2	6.17E2	-7.43285E-2	-8.80024E1	-3.09944E-4	-8.80001E1	2.86102E-4	5.26905E-3	9.37223E-2	1.58268E1	-1.97962E1	-2.00127E1	1.50294E1	2.4214E-9	2.52923E-3	2.52923E-3	6.31817E-3	2.47662E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.37874E-2	-8.80024E1	-2.14577E-4	-8.80003E1	3.09944E-4	5.76973E-3	9.38416E-2	1.57783E1	-1.98374E1	-1.9969E1	1.50479E1	2.42553E-9	2.51954E-3	2.51954E-3	6.3074E-3	2.45978E-2