[Scan]
initial_time=2015-12-22T16:39:33
final_time=2015-12-22T16:39:53
ip_count=19
run=1021
dataset=1
scan=26
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.3401E-2
qbias_imon=-3.81325E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-7.68089E-10
ql2_vset=
ql2_vmon=-3.57628E-4
ql2_imon=1.23159E-9
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-2.49361E-9
ql4_vset=
ql4_vmon=2.86102E-4
ql4_imon=1.38347E-8
mult1=-8.65158E-9
mult2=-2.72581E-9
rf_tmon=-3.42321E-3
rf_agc=3.44153E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.14984E-3
ql5_imon=6.23035E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64262E0
bslens_imon=2.53264E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20261E1
lens5a_imon=1.96598E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12503E2
lens4a_imon=2.05033E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53724E1
cs_ef1b_imon=2.83133E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0464E2
lens23_imon=1.021E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04917E1
cs_ea1_imon=2.55883E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97933E0
lens1_imon=1.29739E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64578E1
os_ef1alow_imon=2.98018E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03808E1
cs_ea2_imon=1.52781E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8452E1
cs_ef1a_imon=2.92179E-5
olens2_vset=0.0E0
olens2_vmon=1.33514E-3
olens2_imon=1.05356E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11286E1
os_restr1_imon=4.31905E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15329E1
os_ea1_imon=2.35886E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63743E1
os_ef1bup_imon=3.06307E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25269E0
cs_ionrep_imon=1.16714E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91916E2
cs_nozzle_imon=1.93201E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01749E1
cs_anode1_imon=2.94234E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99979E1
olens4_imon=4.2769E-9
tplens_vset=0.0E0
tplens_vmon=-1.59306E0
tplens_imon=-3.4136E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99715E1
iondef3_imon=8.55671E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.9851E1
iondef2_imon=9.27521E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02978E2
lens6_imon=2.98243E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=9.40716E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25918E0
ionrepsh_imon=1.76034E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33787E1
lens5b_imon=2.16384E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74717E1
cs_ef2b_imon=3.11965E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.2108E0
os_ea2_imon=-7.44853E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06082E2
lens4b_imon=2.00619E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70345E1
cs_ef2a_imon=3.18164E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.02032E0
os_ef2alow_imon=-2.72041E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.91417E-1
os_ef2bup_imon=-5.33689E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11033E1
os_restr2_imon=3.40364E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.30282E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01875E1
cs_anode2_imon=2.23596E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58023E1
iondef1_imon=4.89343E-6
iondef4_vset=1.53E1
iondef4_vmon=1.5008E1
iondef4_imon=5.17588E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27958E1
olens3_imon=2.56188E-8
olens1_vset=0.0E0
olens1_vmon=9.05991E-4
olens1_imon=1.24136E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16858E0
cs_ionaccel_imon=-1.81582E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47226E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56681E1
einzel_imon=7.57251E-6
window_vset=0.0E0
window_vmon=1.82504E-1
window_imon=-1.08061E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82634E2
mask1_imon=2.38897E-4
mask2_vset=0.0E0
mask2_vmon=-1.8647E1
mask2_imon=-7.27421E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92628E3
multa_neg_imon=7.48073E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93743E3
defgrida_imon=6.43307E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.10556E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.33469E0
defgridb_imon=5.74996E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33382E1
os_fil1_imon=9.42426E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06458E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62903E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30906E1
cs_fil1_imon=9.97573E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62792E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62963E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.96467E-2
os_fil2_imon=-2.77409E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.80295E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.11764E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35219E-1
cs_fil2_imon=-2.77409E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.99846E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22314E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29098E-3
inlet_lpb_pmon=2.47494E-2
chamber_ion_pmon=2.42121E-9
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40035E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.95332E-1
res40_imon=-2.63032E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.729E3	0.0E0	1.47E2	4.1E1	-7.35556E-2	-8.80019E1	-4.05312E-4	-8.80001E1	-2.38419E-5	5.34058E-3	9.31025E-2	1.58073E1	-1.98682E1	-1.99537E1	1.50393E1	2.42463E-9	2.51709E-3	2.51709E-3	6.32858E-3	2.47203E-2
2.0E0	3.25E3	6.0E0	3.16E2	1.6E2	-7.35556E-2	-8.8002E1	0.0E0	-8.80003E1	-2.38419E-5	5.48363E-3	9.26971E-2	1.57995E1	-1.98312E1	-1.99567E1	1.5011E1	2.42243E-9	2.51632E-3	2.51632E-3	6.31278E-3	2.4535E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.286E-2	-8.80022E1	-4.76837E-5	-8.80003E1	2.14577E-4	5.72205E-3	9.30309E-2	1.57784E1	-1.98275E1	-1.99579E1	1.49854E1	2.42423E-9	2.52362E-3	2.52362E-3	6.34099E-3	2.46228E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.25507E-2	-8.8002E1	2.38419E-5	-8.80003E1	-9.53674E-5	5.4121E-3	9.30786E-2	1.57983E1	-1.98423E1	-1.99749E1	1.50091E1	2.4245E-9	2.51847E-3	2.51847E-3	6.33436E-3	2.47451E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.26282E-2	-8.80021E1	-4.29153E-4	-8.80002E1	-4.76837E-5	5.36442E-3	9.34601E-2	1.57807E1	-1.98639E1	-1.99462E1	1.50304E1	2.42564E-9	2.51919E-3	2.51919E-3	6.3074E-3	2.47825E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.286E-2	-8.80018E1	-3.33786E-4	-8.79997E1	-2.38419E-4	5.34058E-3	9.31025E-2	1.57855E1	-1.98675E1	-1.99822E1	1.49956E1	2.42315E-9	2.51693E-3	2.51693E-3	6.32418E-3	2.4732E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.29374E-2	-8.8002E1	-3.8147E-4	-8.80001E1	-2.86102E-4	5.31673E-3	9.32217E-2	1.57831E1	-1.9808E1	-1.99484E1	1.50016E1	2.42226E-9	2.51771E-3	2.51771E-3	6.30192E-3	2.47494E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30918E-2	-8.80019E1	-3.57628E-4	-8.80002E1	1.19209E-4	5.26905E-3	9.32217E-2	1.57891E1	-1.98801E1	-1.99456E1	1.50196E1	2.42553E-9	2.51847E-3	2.51847E-3	6.32356E-3	2.46819E-2
1.2E1	9.6E1	0.0E0	4.85E2	3.23E2	-7.3401E-2	-8.80019E1	-5.00679E-4	-8.8E1	5.72205E-4	5.10216E-3	9.32217E-2	1.57729E1	-1.98314E1	-1.9948E1	1.50118E1	2.42553E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.46398E-2
1.3E1	1.0E1	0.0E0	5.25E2	3.53E2	-7.35556E-2	-8.80018E1	-5.96046E-4	-8.80003E1	3.33786E-4	5.19753E-3	9.30786E-2	1.57999E1	-1.98777E1	-1.99684E1	1.50172E1	2.42437E-9	2.51334E-3	2.51334E-3	6.31837E-3	2.47709E-2
1.4E1	1.27E2	0.0E0	5.66E2	3.82E2	-7.37103E-2	-8.80016E1	-1.90735E-4	-8.80003E1	7.15256E-5	5.50747E-3	9.31978E-2	1.57963E1	-1.98386E1	-1.99588E1	1.50244E1	2.42745E-9	2.51581E-3	2.51581E-3	6.31858E-3	2.46446E-2
1.5E1	6.7E1	0.0E0	6.06E2	4.11E2	-7.40967E-2	-8.80015E1	-1.66893E-4	-8.8E1	3.09944E-4	5.24521E-3	9.31025E-2	1.57945E1	-1.98513E1	-1.99732E1	1.4998E1	2.42753E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.47709E-2
1.6E1	4.01E2	0.0E0	6.47E2	4.41E2	-7.32464E-2	-8.80018E1	-3.8147E-4	-8.80001E1	4.05312E-4	5.126E-3	9.29117E-2	1.57938E1	-1.98511E1	-1.99608E1	1.49582E1	2.42753E-9	2.51443E-3	2.51443E-3	6.32386E-3	2.46207E-2
1.7E1	1.055E3	1.0E0	6.87E2	4.7E2	-7.30146E-2	-8.80018E1	-4.76837E-4	-8.8E1	5.00679E-4	5.43594E-3	9.29356E-2	1.58087E1	-1.98233E1	-1.99641E1	1.49898E1	2.42361E-9	2.52659E-3	2.52659E-3	6.31269E-3	2.47617E-2
1.8E1	4.378E3	3.0E0	7.27E2	5.0E2	-7.35556E-2	-8.80016E1	-7.39098E-4	-8.79999E1	2.38419E-4	5.31673E-3	9.29832E-2	1.58047E1	-1.98723E1	-1.99516E1	1.50473E1	2.42081E-9	2.52407E-3	2.52407E-3	6.3245E-3	2.47362E-2
1.9E1	2.008E3	0.0E0	7.68E2	5.29E2	-7.34782E-2	-8.80018E1	-5.00679E-4	-8.80001E1	7.15256E-5	5.17368E-3	9.29356E-2	1.57949E1	-1.98428E1	-1.99349E1	1.50282E1	2.4245E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.47662E-2
2.0E1	2.0E1	0.0E0	8.08E2	5.58E2	-7.32464E-2	-8.80017E1	-6.19888E-4	-8.79998E1	-2.38419E-5	5.07832E-3	9.29832E-2	1.57927E1	-1.98182E1	-1.9948E1	1.49878E1	2.42437E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.46636E-2
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80016E1	-3.09944E-4	-8.8E1	-1.90735E-4	5.10216E-3	9.29594E-2	1.58128E1	-1.98481E1	-1.99431E1	1.49564E1	2.41934E-9	2.51203E-3	2.51203E-3	6.30202E-3	2.47029E-2
2.2E1	1.0E1	0.0E0	8.89E2	6.17E2	-7.30146E-2	-8.80021E1	-2.14577E-4	-8.79999E1	-4.76837E-5	5.126E-3	9.30071E-2	1.57848E1	-1.98698E1	-1.9961E1	1.50166E1	2.4245E-9	2.5131E-3	2.5131E-3	6.33436E-3	2.46819E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.3401E-2	-8.80018E1	-3.57628E-4	-8.79999E1	2.86102E-4	5.14984E-3	9.32217E-2	1.58023E1	-1.9851E1	-1.99715E1	1.5008E1	2.42121E-9	2.5199E-3	2.5199E-3	6.29098E-3	2.47494E-2