[Scan]
initial_time=2015-12-22T16:40:00
final_time=2015-12-22T16:40:20
ip_count=19
run=1021
dataset=1
scan=27
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.3401E-2
qbias_imon=-3.82656E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-7.24912E-10
ql2_vset=
ql2_vmon=-7.86781E-4
ql2_imon=1.22325E-9
ql3_vset=
ql3_vmon=-8.79995E1
ql3_imon=-2.42192E-9
ql4_vset=
ql4_vmon=4.76837E-5
ql4_imon=1.38202E-8
mult1=-9.61998E-9
mult2=-2.5689E-9
rf_tmon=-4.99309E-3
rf_agc=3.28049E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.26905E-3
ql5_imon=6.31726E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62588E0
bslens_imon=2.50531E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19875E1
lens5a_imon=1.97154E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12503E2
lens4a_imon=2.04927E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53878E1
cs_ef1b_imon=2.83134E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04614E2
lens23_imon=1.02229E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04748E1
cs_ea1_imon=2.55806E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01792E0
lens1_imon=1.41301E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64417E1
os_ef1alow_imon=2.97854E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03907E1
cs_ea2_imon=1.53606E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84515E1
cs_ef1a_imon=2.93219E-5
olens2_vset=0.0E0
olens2_vmon=1.23978E-3
olens2_imon=1.05805E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11247E1
os_restr1_imon=4.30828E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15113E1
os_ea1_imon=2.3688E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63809E1
os_ef1bup_imon=3.08717E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22927E0
cs_ionrep_imon=1.18097E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91876E2
cs_nozzle_imon=1.93103E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01845E1
cs_anode1_imon=2.92936E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99982E1
olens4_imon=4.28236E-9
tplens_vset=0.0E0
tplens_vmon=-1.58616E0
tplens_imon=-3.8947E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.9981E1
iondef3_imon=8.87166E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98422E1
iondef2_imon=9.37995E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02993E2
lens6_imon=2.98432E-4
ql6_vset=1.0E-1
ql6_vmon=9.30548E-2
ql6_imon=1.00092E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27253E0
ionrepsh_imon=1.76497E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33622E1
lens5b_imon=2.15827E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74596E1
cs_ef2b_imon=3.12645E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.21605E0
os_ea2_imon=-6.99496E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06113E2
lens4b_imon=2.00511E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71352E1
cs_ef2a_imon=3.16855E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.02478E0
os_ef2alow_imon=-2.58071E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.73441E-1
os_ef2bup_imon=-5.30885E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10817E1
os_restr2_imon=3.39643E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23073E2
cs_ionfoca_imon=6.30613E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02063E1
cs_anode2_imon=2.24148E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57729E1
iondef1_imon=4.82329E-6
iondef4_vset=1.53E1
iondef4_vmon=1.4983E1
iondef4_imon=5.17909E-6
olens3_vset=-1.28E1
olens3_vmon=-1.2796E1
olens3_imon=2.56475E-8
olens1_vset=0.0E0
olens1_vmon=6.67572E-4
olens1_imon=1.23986E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.19914E0
cs_ionaccel_imon=-1.89425E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02057E2
cs_ionfocb_imon=1.47163E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56317E1
einzel_imon=7.56046E-6
window_vset=0.0E0
window_vmon=1.63556E-1
window_imon=-1.16534E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82641E2
mask1_imon=2.3919E-4
mask2_vset=0.0E0
mask2_vmon=-1.86421E1
mask2_imon=-6.77031E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92615E3
multa_neg_imon=7.46572E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.359E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=7.39362E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31434E0
defgridb_imon=5.93722E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33379E1
os_fil1_imon=9.41795E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06698E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63075E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30858E1
cs_fil1_imon=9.94364E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6351E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63606E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.91894E-2
os_fil2_imon=-2.49658E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.74955E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.18408E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35309E-1
cs_fil2_imon=-1.74171E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.48416E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22331E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.46421E-2
chamber_ion_pmon=2.41806E-9
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.20542E-1
res40_imon=-2.53825E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=193
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.743E3	1.0E0	1.47E2	4.1E1	-7.31692E-2	-8.80021E1	-9.53674E-5	-8.79996E1	2.14577E-4	5.4121E-3	9.30786E-2	1.57844E1	-1.98278E1	-1.99848E1	1.50323E1	2.42542E-9	2.52318E-3	2.52318E-3	6.32936E-3	2.47065E-2
2.0E0	3.29E3	1.0E0	3.16E2	1.6E2	-7.34782E-2	-8.80021E1	-3.09944E-4	-8.79997E1	4.76837E-5	5.48363E-3	9.31025E-2	1.57973E1	-1.98578E1	-1.99764E1	1.5001E1	2.4245E-9	2.52169E-3	2.52169E-3	6.33977E-3	2.46819E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.37103E-2	-8.80021E1	-1.66893E-4	-8.79997E1	3.09944E-4	5.45979E-3	9.30786E-2	1.57826E1	-1.98358E1	-1.99791E1	1.50046E1	2.42637E-9	2.52027E-3	2.52027E-3	6.32978E-3	2.46664E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.33239E-2	-8.8002E1	-3.09944E-4	-8.80001E1	0.0E0	5.50747E-3	9.33886E-2	1.57856E1	-1.98834E1	-1.99499E1	1.50081E1	2.4214E-9	2.51417E-3	2.51417E-3	6.35601E-3	2.47451E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.29374E-2	-8.80023E1	-1.19209E-4	-8.79998E1	-4.76837E-5	5.50747E-3	9.30786E-2	1.57866E1	-1.9811E1	-1.99785E1	1.49873E1	2.42499E-9	2.51923E-3	2.51923E-3	6.33253E-3	2.47884E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.40192E-2	-8.8002E1	-2.14577E-4	-8.79999E1	0.0E0	5.65052E-3	9.33647E-2	1.57939E1	-1.98495E1	-1.99888E1	1.501E1	2.42719E-9	2.51557E-3	2.51557E-3	6.31332E-3	2.47684E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.31692E-2	-8.8002E1	-5.96046E-4	-8.80002E1	2.38419E-5	5.10216E-3	9.29594E-2	1.57879E1	-1.98356E1	-1.99155E1	1.50262E1	2.42339E-9	2.51863E-3	2.51863E-3	6.30469E-3	2.47047E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.31692E-2	-8.80017E1	-8.82149E-4	-8.80001E1	3.09944E-4	5.4121E-3	9.34839E-2	1.57448E1	-1.98393E1	-1.99614E1	1.50166E1	2.42243E-9	2.51525E-3	2.51525E-3	6.31278E-3	2.47662E-2
1.2E1	1.0E2	0.0E0	4.85E2	3.23E2	-7.37103E-2	-8.80018E1	-9.05991E-4	-8.8E1	1.90735E-4	5.53131E-3	9.29594E-2	1.58203E1	-1.98335E1	-2.00038E1	1.50072E1					
1.3E1	6.0E0	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80017E1	-9.05991E-4	-8.80001E1	7.15256E-5	5.10216E-3	9.32455E-2	1.5828E1	-1.986E1	-1.99768E1	1.50201E1	2.42627E-9	2.52066E-3	2.52066E-3	6.3074E-3	2.46693E-2
1.4E1	1.09E2	0.0E0	5.66E2	3.82E2	-7.3401E-2	-8.80021E1	-7.86781E-4	-8.80002E1	-1.19209E-4	5.07832E-3	9.28879E-2	1.58119E1	-1.98873E1	-1.99636E1	1.50581E1	2.4276E-9	2.51632E-3	2.51632E-3	6.31817E-3	2.47662E-2
1.5E1	7.9E1	0.0E0	6.06E2	4.11E2	-7.36328E-2	-8.80023E1	-7.39098E-4	-8.80001E1	-4.76837E-5	5.24521E-3	9.30071E-2	1.58136E1	-1.98545E1	-1.99726E1	1.4998E1	2.42647E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.4578E-2
1.6E1	3.57E2	0.0E0	6.47E2	4.41E2	-7.32464E-2	-8.80018E1	-7.62939E-4	-8.8E1	1.19209E-4	5.38826E-3	9.32217E-2	1.57819E1	-1.98687E1	-1.99726E1	1.50053E1	2.42852E-9	2.52139E-3	2.52139E-3	6.31299E-3	2.47539E-2
1.7E1	1.061E3	1.0E0	6.87E2	4.7E2	-7.23964E-2	-8.80018E1	-5.72205E-4	-8.79999E1	2.38419E-5	4.91142E-3	9.32932E-2	1.5815E1	-1.98717E1	-1.9926E1	1.50091E1	2.42437E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.45994E-2
1.8E1	4.329E3	6.0E0	7.27E2	5.0E2	-7.27053E-2	-8.80018E1	-7.39098E-4	-8.79998E1	-7.15256E-5	4.91142E-3	9.32217E-2	1.58035E1	-1.9832E1	-1.99943E1	1.50262E1	2.42542E-9	2.51225E-3	2.51225E-3	6.31837E-3	2.46421E-2
1.9E1	2.043E3	0.0E0	7.68E2	5.29E2	-7.3401E-2	-8.80015E1	-7.39098E-4	-8.79999E1	2.14577E-4	5.126E-3	9.3174E-2	1.58119E1	-1.98741E1	-1.99113E1	1.4998E1	2.42553E-9	2.52492E-3	2.52492E-3	6.3074E-3	2.47451E-2
2.0E1	1.4E1	0.0E0	8.08E2	5.58E2	-7.33239E-2	-8.80014E1	-3.8147E-4	-8.80002E1	1.90735E-4	5.48363E-3	9.30071E-2	1.5786E1	-1.98508E1	-1.99567E1	1.50097E1	2.42637E-9	2.52139E-3	2.52139E-3	6.34099E-3	2.47539E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.32464E-2	-8.80016E1	-8.10623E-4	-8.80001E1	4.05312E-4	4.95911E-3	9.30309E-2	1.58021E1	-1.98184E1	-1.99709E1	1.50083E1	2.42331E-9	2.52099E-3	2.52099E-3	6.29645E-3	2.4685E-2
2.2E1	5.0E0	0.0E0	8.89E2	6.17E2	-7.33239E-2	-8.80017E1	-5.00679E-4	-8.79997E1	1.66893E-4	5.126E-3	9.3174E-2	1.58558E1	-1.99151E1	-1.98759E1	1.49798E1	2.42564E-9	2.52236E-3	2.52236E-3	6.32328E-3	2.46376E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.3401E-2	-8.80018E1	-7.86781E-4	-8.79995E1	4.76837E-5	5.26905E-3	9.30548E-2	1.57729E1	-1.98422E1	-1.9981E1	1.4983E1	2.41806E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.46421E-2