[Scan]
initial_time=2015-12-22T16:40:27
final_time=2015-12-22T16:40:47
ip_count=19
run=1021
dataset=1
scan=28
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.286E-2
qbias_imon=-3.79597E-6
ql1_vset=
ql1_vmon=-8.80019E1
ql1_imon=-7.57217E-10
ql2_vset=
ql2_vmon=-5.48363E-4
ql2_imon=1.23661E-9
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-2.41818E-9
ql4_vset=
ql4_vmon=3.09944E-4
ql4_imon=1.38575E-8
mult1=-8.62061E-9
mult2=-2.64276E-9
rf_tmon=-5.46774E-3
rf_agc=3.25465E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.24521E-3
ql5_imon=6.67357E-10
bslens_vset=-6.2E0
bslens_vmon=-6.70159E0
bslens_imon=2.34308E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1946E1
lens5a_imon=1.99064E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12478E2
lens4a_imon=2.04884E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5373E1
cs_ef1b_imon=2.82196E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04656E2
lens23_imon=1.02107E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0503E1
cs_ea1_imon=2.56888E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98308E0
lens1_imon=1.29044E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64482E1
os_ef1alow_imon=2.97874E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03672E1
cs_ea2_imon=1.53281E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8461E1
cs_ef1a_imon=2.93801E-5
olens2_vset=0.0E0
olens2_vmon=1.74046E-3
olens2_imon=1.05631E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11226E1
os_restr1_imon=4.30536E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15065E1
os_ea1_imon=2.37277E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64308E1
os_ef1bup_imon=3.08866E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24008E0
cs_ionrep_imon=1.17664E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91901E2
cs_nozzle_imon=1.93265E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01989E1
cs_anode1_imon=2.93549E-5
olens4_vset=-3.0E1
olens4_vmon=-2.9998E1
olens4_imon=4.19563E-9
tplens_vset=0.0E0
tplens_vmon=-1.57654E0
tplens_imon=-2.81321E-7
iondef3_vset=-2.0E1
iondef3_vmon=-2.00159E1
iondef3_imon=8.55802E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98158E1
iondef2_imon=9.41961E-6
lens6_vset=-6.0E2
lens6_vmon=-6.0299E2
lens6_imon=2.98274E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=9.20451E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23768E0
ionrepsh_imon=1.77146E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33574E1
lens5b_imon=2.18783E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74711E1
cs_ef2b_imon=3.11244E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.22566E0
os_ea2_imon=-8.07644E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06087E2
lens4b_imon=2.00569E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71486E1
cs_ef2a_imon=3.17731E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03834E0
os_ef2alow_imon=-2.55103E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.61384E-1
os_ef2bup_imon=-5.36212E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10793E1
os_restr2_imon=3.39608E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.28306E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01905E1
cs_anode2_imon=2.25578E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57819E1
iondef1_imon=5.15495E-6
iondef4_vset=1.53E1
iondef4_vmon=1.5019E1
iondef4_imon=5.12182E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27962E1
olens3_imon=2.55682E-8
olens1_vset=0.0E0
olens1_vmon=9.05991E-4
olens1_imon=1.23908E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16798E0
cs_ionaccel_imon=-1.82303E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02102E2
cs_ionfocb_imon=1.47241E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56117E1
einzel_imon=7.48602E-6
window_vset=0.0E0
window_vmon=1.32649E-1
window_imon=-9.94115E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82655E2
mask1_imon=2.3903E-4
mask2_vset=0.0E0
mask2_vmon=-1.86374E1
mask2_imon=-8.5356E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92629E3
multa_neg_imon=7.94879E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93706E3
defgrida_imon=6.22201E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=7.03313E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31134E0
defgridb_imon=6.11026E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33362E1
os_fil1_imon=9.42216E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06638E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63194E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30953E1
cs_fil1_imon=9.98546E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62678E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63358E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.77707E-2
os_fil2_imon=-2.49178E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.72486E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.0294E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35737E-1
cs_fil2_imon=-1.96319E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.44005E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2239E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.46207E-2
chamber_ion_pmon=2.42858E-9
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.83919E-1
res40_imon=-2.58346E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=203
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.684E3	0.0E0	1.47E2	4.1E1	-7.35556E-2	-8.80015E1	-4.76837E-4	-8.79997E1	1.19209E-4	5.43594E-3	9.31978E-2	1.58173E1	-1.98717E1	-1.99774E1	1.50425E1	2.42226E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.47279E-2
2.0E0	3.137E3	2.0E0	3.16E2	1.6E2	-7.33239E-2	-8.80018E1	-5.72205E-4	-8.79997E1	2.14577E-4	5.53131E-3	9.32455E-2	1.58047E1	-1.98663E1	-1.99612E1	1.4998E1	2.42753E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.45994E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.27828E-2	-8.80019E1	-6.67572E-4	-8.8E1	4.76837E-5	5.74589E-3	9.29832E-2	1.5805E1	-1.988E1	-1.99502E1	1.50118E1	2.42745E-9	2.5147E-3	2.5147E-3	6.31858E-3	2.47977E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.31692E-2	-8.80016E1	-6.4373E-4	-8.79996E1	1.19209E-4	5.24521E-3	9.28164E-2	1.57644E1	-1.98452E1	-1.9957E1	1.50172E1	2.42347E-9	2.5131E-3	2.5131E-3	6.29665E-3	2.46188E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.35556E-2	-8.80015E1	-8.82149E-4	-8.79998E1	2.86102E-4	5.38826E-3	9.30548E-2	1.57656E1	-1.98549E1	-1.9945E1	1.5001E1	2.42437E-9	2.51662E-3	2.51662E-3	6.32936E-3	2.47065E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.31692E-2	-8.80019E1	-1.0252E-3	-8.79999E1	1.19209E-4	5.34058E-3	9.2864E-2	1.57789E1	-1.9835E1	-1.99606E1	1.50148E1	2.42016E-9	2.5199E-3	2.5199E-3	6.30192E-3	2.47279E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.32464E-2	-8.80019E1	-6.19888E-4	-8.80002E1	1.90735E-4	5.53131E-3	9.31025E-2	1.58047E1	-1.98458E1	-1.9951E1	1.49992E1	2.42657E-9	2.51525E-3	2.51525E-3	6.31817E-3	2.47662E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.38649E-2	-8.80018E1	-6.19888E-4	-8.80003E1	2.6226E-4	5.34058E-3	9.31263E-2	1.58119E1	-1.9838E1	-1.99119E1	1.50226E1	2.42226E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.47065E-2
1.2E1	8.1E1	0.0E0	4.85E2	3.23E2	-7.29374E-2	-8.80021E1	-4.29153E-4	-8.80002E1	1.43051E-4	5.22137E-3	9.3174E-2	1.58053E1	-1.98422E1	-1.99606E1	1.50106E1	2.42542E-9	2.5188E-3	2.5188E-3	6.33486E-3	2.46636E-2
1.3E1	1.0E1	0.0E0	5.25E2	3.53E2	-7.40192E-2	-8.80019E1	-3.8147E-4	-8.80001E1	3.09944E-4	5.45979E-3	9.29832E-2	1.57771E1	-1.98573E1	-1.99738E1	1.49866E1	2.42637E-9	2.51804E-3	2.51804E-3	6.33538E-3	2.47758E-2
1.4E1	1.16E2	0.0E0	5.66E2	3.82E2	-7.36328E-2	-8.8002E1	-3.8147E-4	-8.80002E1	-4.76837E-5	5.81741E-3	9.29117E-2	1.58606E1	-1.98741E1	-1.98897E1	1.50109E1	2.41727E-9	2.51954E-3	2.51954E-3	6.29128E-3	2.47451E-2
1.5E1	7.5E1	0.0E0	6.06E2	4.11E2	-7.37874E-2	-8.80018E1	-3.57628E-4	-8.80002E1	2.38419E-5	5.57899E-3	9.3174E-2	1.57729E1	-1.98404E1	-1.99774E1	1.50112E1	2.42647E-9	2.52318E-3	2.52318E-3	6.32936E-3	2.4578E-2
1.6E1	3.87E2	0.0E0	6.47E2	4.41E2	-7.38649E-2	-8.8002E1	-2.14577E-4	-8.80001E1	3.33786E-4	5.53131E-3	9.28164E-2	1.57747E1	-1.98795E1	-1.99666E1	1.50191E1	2.42964E-9	2.52318E-3	2.52318E-3	6.32936E-3	2.4685E-2
1.7E1	1.093E3	1.0E0	6.87E2	4.7E2	-7.32464E-2	-8.80023E1	-4.76837E-4	-8.80001E1	3.33786E-4	4.98295E-3	9.27448E-2	1.58371E1	-1.9832E1	-1.9966E1	1.5019E1	2.42423E-9	2.51581E-3	2.51581E-3	6.30182E-3	2.46228E-2
1.8E1	4.339E3	0.0E0	7.27E2	5.0E2	-7.30918E-2	-8.80021E1	-2.38419E-4	-8.79999E1	1.43051E-4	5.48363E-3	9.27687E-2	1.57767E1	-1.98322E1	-1.99644E1	1.50016E1	2.4245E-9	2.51525E-3	2.51525E-3	6.30202E-3	2.46819E-2
1.9E1	2.08E3	1.0E0	7.68E2	5.29E2	-7.23964E-2	-8.8002E1	0.0E0	-8.80001E1	7.15256E-5	5.34058E-3	9.28402E-2	1.58093E1	-1.98551E1	-1.99592E1	1.50197E1	2.42331E-9	2.51771E-3	2.51771E-3	6.3074E-3	2.4685E-2
2.0E1	2.6E1	0.0E0	8.08E2	5.58E2	-7.43285E-2	-8.80018E1	-1.19209E-4	-8.79999E1	2.38419E-5	5.50747E-3	9.30786E-2	1.57965E1	-1.98683E1	-1.99367E1	1.49918E1	2.42437E-9	2.51662E-3	2.51662E-3	6.32936E-3	2.46636E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.38649E-2	-8.80018E1	-5.24521E-4	-8.8E1	3.33786E-4	5.17368E-3	9.32693E-2	1.57819E1	-1.98861E1	-1.99834E1	1.5025E1	2.42347E-9	2.51847E-3	2.51847E-3	6.31278E-3	2.46819E-2
2.2E1	1.5E1	0.0E0	8.89E2	6.17E2	-7.23964E-2	-8.80018E1	-3.8147E-4	-8.8E1	9.53674E-5	5.36442E-3	9.31025E-2	1.58227E1	-1.98567E1	-1.99882E1	1.50028E1	2.4245E-9	2.51847E-3	2.51847E-3	6.30202E-3	2.4724E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.286E-2	-8.80019E1	-5.48363E-4	-8.79999E1	3.09944E-4	5.24521E-3	9.3174E-2	1.57819E1	-1.98158E1	-2.00159E1	1.5019E1	2.42858E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.46207E-2