[Scan]
initial_time=2015-12-22T16:40:55
final_time=2015-12-22T16:41:14
ip_count=19
run=1021
dataset=1
scan=29
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.3401E-2
qbias_imon=-3.83454E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-7.59029E-10
ql2_vset=
ql2_vmon=-7.15256E-5
ql2_imon=1.23572E-9
ql3_vset=
ql3_vmon=-8.79997E1
ql3_imon=-2.46276E-9
ql4_vset=
ql4_vmon=3.33786E-4
ql4_imon=1.3936E-8
mult1=-1.30329E-8
mult2=-2.67515E-9
rf_tmon=-3.57276E-3
rf_agc=3.42282E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.57899E-3
ql5_imon=6.41036E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63189E0
bslens_imon=2.51252E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19899E1
lens5a_imon=1.96397E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12487E2
lens4a_imon=2.05197E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53622E1
cs_ef1b_imon=2.83025E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0465E2
lens23_imon=1.01934E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04808E1
cs_ea1_imon=2.58546E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01011E0
lens1_imon=1.20392E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64747E1
os_ef1alow_imon=2.96648E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03558E1
cs_ea2_imon=1.55408E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84274E1
cs_ef1a_imon=2.9254E-5
olens2_vset=0.0E0
olens2_vmon=1.69277E-3
olens2_imon=1.05654E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11316E1
os_restr1_imon=4.31725E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15516E1
os_ea1_imon=2.36664E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63191E1
os_ef1bup_imon=3.08722E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21905E0
cs_ionrep_imon=1.1907E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91898E2
cs_nozzle_imon=1.93207E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01845E1
cs_anode1_imon=2.94378E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99978E1
olens4_imon=4.17796E-9
tplens_vset=0.0E0
tplens_vmon=-1.60839E0
tplens_imon=-5.66113E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.995E1
iondef3_imon=8.70222E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98563E1
iondef2_imon=9.25018E-6
lens6_vset=-6.0E2
lens6_vmon=-6.0298E2
lens6_imon=2.9831E-4
ql6_vset=1.0E-1
ql6_vmon=9.31501E-2
ql6_imon=9.86493E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27193E0
ionrepsh_imon=1.74911E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33471E1
lens5b_imon=2.17738E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74754E1
cs_ef2b_imon=3.11569E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.28695E0
os_ea2_imon=-7.3194E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06089E2
lens4b_imon=2.00277E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.716E1
cs_ef2a_imon=3.17371E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06717E0
os_ef2alow_imon=-2.706E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.78803E-1
os_ef2bup_imon=-5.31167E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10955E1
os_restr2_imon=3.39608E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23065E2
cs_ionfoca_imon=6.29387E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01749E1
cs_anode2_imon=2.24353E-5
iondef1_vset=1.6E1
iondef1_vmon=1.5813E1
iondef1_imon=4.93865E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50076E1
iondef4_imon=5.1939E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27959E1
olens3_imon=2.55602E-8
olens1_vset=0.0E0
olens1_vmon=8.34465E-4
olens1_imon=1.23065E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17459E0
cs_ionaccel_imon=-1.89511E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.46996E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56519E1
einzel_imon=7.57612E-6
window_vset=0.0E0
window_vmon=1.80702E-1
window_imon=-1.0698E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82661E2
mask1_imon=2.39073E-4
mask2_vset=0.0E0
mask2_vmon=-1.86314E1
mask2_imon=-7.88688E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92599E3
multa_neg_imon=7.49817E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93699E3
defgrida_imon=6.71589E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=6.88533E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31134E0
defgridb_imon=5.94083E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33367E1
os_fil1_imon=9.42474E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07401E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63316E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30942E1
cs_fil1_imon=9.99399E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62738E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62812E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.85445E-2
os_fil2_imon=-2.7861E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.81496E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.83348E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35349E-1
cs_fil2_imon=-2.62392E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.89945E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22238E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.46608E-2
chamber_ion_pmon=2.42037E-9
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.29259E-1
res40_imon=-2.59428E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=199
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.73E3	2.0E0	1.47E2	4.1E1	-7.45602E-2	-8.80016E1	1.66893E-4	-8.79999E1	7.15256E-5	5.26905E-3	9.31263E-2	1.57628E1	-1.98309E1	-1.99601E1	1.50068E1	2.42226E-9	2.52428E-3	2.52428E-3	6.31837E-3	2.47279E-2
2.0E0	3.182E3	7.0E0	3.16E2	1.6E2	-7.30918E-2	-8.80017E1	-3.8147E-4	-8.79999E1	7.15256E-5	5.65052E-3	9.30071E-2	1.58172E1	-1.98304E1	-1.99495E1	1.4991E1	2.42475E-9	2.52093E-3	2.52093E-3	6.3282E-3	2.45949E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.80016E1	-4.29153E-4	-8.79997E1	9.53674E-5	5.53131E-3	9.30786E-2	1.57796E1	-1.98812E1	-1.99797E1	1.50242E1	2.42728E-9	2.52222E-3	2.52222E-3	6.33065E-3	2.46724E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.30918E-2	-8.80017E1	-4.76837E-5	-8.79996E1	1.43051E-4	5.57899E-3	9.30786E-2	1.58002E1	-1.98493E1	-1.99502E1	1.50057E1	2.42361E-9	2.52025E-3	2.52025E-3	6.33919E-3	2.47825E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.22418E-2	-8.80013E1	2.38419E-5	-8.79999E1	1.19209E-4	5.29289E-3	9.3317E-2	1.57867E1	-1.98446E1	-1.99654E1	1.50191E1	2.42243E-9	2.51203E-3	2.51203E-3	6.34518E-3	2.46188E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.24736E-2	-8.80015E1	-2.14577E-4	-8.79998E1	4.05312E-4	5.48363E-3	9.31501E-2	1.57795E1	-1.98422E1	-1.996E1	1.50088E1	2.42542E-9	2.51552E-3	2.51552E-3	6.34588E-3	2.46207E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27828E-2	-8.80019E1	-4.52995E-4	-8.79998E1	2.86102E-4	5.24521E-3	9.32217E-2	1.5765E1	-1.98591E1	-1.99726E1	1.50346E1	2.42647E-9	2.51443E-3	2.51443E-3	6.32936E-3	2.45567E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23189E-2	-8.8002E1	-7.15256E-5	-8.79996E1	3.33786E-4	5.31673E-3	9.30071E-2	1.57644E1	-1.98645E1	-1.99167E1	1.50058E1	2.4253E-9	2.52139E-3	2.52139E-3	6.31299E-3	2.46882E-2
1.2E1	8.8E1	0.0E0	4.85E2	3.23E2	-7.19325E-2	-8.80017E1	-4.76837E-5	-8.79999E1	-1.43051E-4	5.45979E-3	9.31263E-2	1.57674E1	-1.98861E1	-1.99594E1	1.50064E1	2.42391E-9	2.51701E-3	2.51701E-3	6.32371E-3	2.47366E-2
1.3E1	1.0E1	0.0E0	5.25E2	3.53E2	-7.24736E-2	-8.80017E1	-2.86102E-4	-8.79996E1	1.43051E-4	5.50747E-3	9.28879E-2	1.58203E1	-1.98044E1	-2.00201E1	1.50208E1					
1.4E1	1.04E2	0.0E0	5.66E2	3.82E2	-7.21643E-2	-8.80019E1	0.0E0	-8.79997E1	2.86102E-4	5.53131E-3	9.3174E-2	1.57975E1	-1.98627E1	-1.99564E1	1.50196E1	2.42542E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.4814E-2
1.5E1	7.5E1	0.0E0	6.06E2	4.11E2	-7.27828E-2	-8.80019E1	-2.14577E-4	-8.79998E1	7.15256E-5	5.36442E-3	9.3317E-2	1.57831E1	-1.98597E1	-1.9936E1	1.50154E1	2.42331E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.47494E-2
1.6E1	3.69E2	0.0E0	6.47E2	4.41E2	-7.21643E-2	-8.8002E1	-1.90735E-4	-8.79996E1	1.66893E-4	5.36442E-3	9.31263E-2	1.57981E1	-1.98152E1	-1.99654E1	1.5016E1	2.42226E-9	2.51662E-3	2.51662E-3	6.32936E-3	2.47709E-2
1.7E1	1.022E3	1.0E0	6.87E2	4.7E2	-7.22418E-2	-8.8002E1	-2.86102E-4	-8.79998E1	4.76837E-5	5.65052E-3	9.3317E-2	1.57921E1	-1.98458E1	-1.99546E1	1.49854E1	2.42016E-9	2.52428E-3	2.52428E-3	6.30192E-3	2.47494E-2
1.8E1	4.345E3	2.0E0	7.27E2	5.0E2	-7.30146E-2	-8.8002E1	-4.76837E-4	-8.8E1	2.38419E-5	5.55515E-3	9.31025E-2	1.57854E1	-1.98379E1	-1.99665E1	1.49728E1	2.42858E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.46636E-2
1.9E1	2.113E3	1.0E0	7.68E2	5.29E2	-7.16233E-2	-8.80023E1	-4.76837E-4	-8.8E1	7.15256E-5	5.55515E-3	9.29594E-2	1.5838E1	-1.98588E1	-1.99532E1	1.50004E1	2.4253E-9	2.5147E-3	2.5147E-3	6.29624E-3	2.47539E-2
2.0E1	2.1E1	0.0E0	8.08E2	5.58E2	-7.18554E-2	-8.80021E1	-3.33786E-4	-8.8E1	4.05312E-4	5.57899E-3	9.30548E-2	1.57525E1	-1.98812E1	-1.99555E1	1.50225E1	2.42347E-9	2.51632E-3	2.51632E-3	6.32896E-3	2.46819E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.22418E-2	-8.8002E1	-5.72205E-4	-8.8E1	3.57628E-4	5.57899E-3	9.30071E-2	1.57979E1	-1.9857E1	-1.99555E1	1.49986E1	2.42657E-9	2.51525E-3	2.51525E-3	6.33436E-3	2.4724E-2
2.2E1	2.0E1	0.0E0	8.89E2	6.17E2	-7.30918E-2	-8.80019E1	2.38419E-5	-8.80001E1	0.0E0	5.45979E-3	9.2864E-2	1.58574E1	-1.98689E1	-1.99732E1	1.499E1	2.4214E-9	2.51632E-3	2.51632E-3	6.33977E-3	2.47451E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.3401E-2	-8.80021E1	-7.15256E-5	-8.79997E1	3.33786E-4	5.57899E-3	9.31501E-2	1.5813E1	-1.98563E1	-1.995E1	1.50076E1	2.42037E-9	2.52384E-3	2.52384E-3	6.3074E-3	2.46608E-2