[Scan]
initial_time=2015-12-22T16:41:22
final_time=2015-12-22T16:41:41
ip_count=19
run=1021
dataset=1
scan=30
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.14689E-2
qbias_imon=-3.81827E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-7.26783E-10
ql2_vset=
ql2_vmon=-1.43051E-4
ql2_imon=1.28363E-9
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-2.57703E-9
ql4_vset=
ql4_vmon=4.29153E-4
ql4_imon=1.38942E-8
mult1=-1.38143E-8
mult2=-3.66592E-9
rf_tmon=8.42116E-3
rf_agc=4.70302E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.43594E-3
ql5_imon=6.39033E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62047E0
bslens_imon=2.54136E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19983E1
lens5a_imon=1.97947E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12527E2
lens4a_imon=2.05078E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53881E1
cs_ef1b_imon=2.82593E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04614E2
lens23_imon=1.02045E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04832E1
cs_ea1_imon=2.57573E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01132E0
lens1_imon=1.1931E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64404E1
os_ef1alow_imon=2.97189E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0348E1
cs_ea2_imon=1.5494E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84376E1
cs_ef1a_imon=2.91927E-5
olens2_vset=0.0E0
olens2_vmon=1.40667E-3
olens2_imon=1.05998E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1122E1
os_restr1_imon=4.3104E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15444E1
os_ea1_imon=2.37421E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63792E1
os_ef1bup_imon=3.07821E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27132E0
cs_ionrep_imon=1.18349E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91879E2
cs_nozzle_imon=1.93197E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01917E1
cs_anode1_imon=2.92972E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99982E1
olens4_imon=4.16071E-9
tplens_vset=0.0E0
tplens_vmon=-1.53749E0
tplens_imon=-5.44483E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99785E1
iondef3_imon=8.73467E-6
iondef2_vset=-2.0E1
iondef2_vmon=-2.0011E1
iondef2_imon=9.22494E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03003E2
lens6_imon=2.98212E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=1.00386E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2569E0
ionrepsh_imon=1.76497E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34054E1
lens5b_imon=2.17125E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74555E1
cs_ef2b_imon=3.12614E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.22266E0
os_ea2_imon=-7.10311E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06111E2
lens4b_imon=2.00457E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71942E1
cs_ef2a_imon=3.17587E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05636E0
os_ef2alow_imon=-2.74564E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.81807E-1
os_ef2bup_imon=-5.37293E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10925E1
os_restr2_imon=3.39283E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.27981E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01995E1
cs_anode2_imon=2.24713E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58628E1
iondef1_imon=5.32078E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50004E1
iondef4_imon=5.12542E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27961E1
olens3_imon=2.55834E-8
olens1_vset=0.0E0
olens1_vmon=1.23978E-3
olens1_imon=1.23307E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16918E0
cs_ionaccel_imon=-1.78338E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02064E2
cs_ionfocb_imon=1.47024E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56321E1
einzel_imon=7.69505E-6
window_vset=0.0E0
window_vmon=1.36253E-1
window_imon=-1.10584E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8263E2
mask1_imon=2.39156E-4
mask2_vset=0.0E0
mask2_vmon=-1.86248E1
mask2_imon=-6.4453E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92591E3
multa_neg_imon=8.1759E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93704E3
defgrida_imon=6.5032E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=6.96103E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41961E0
defgridb_imon=5.96967E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33401E1
os_fil1_imon=9.38143E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.065E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6244E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30966E1
cs_fil1_imon=9.95464E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63069E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63798E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.64809E-2
os_fil2_imon=-2.80412E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92308E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.43414E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37161E-1
cs_fil2_imon=-2.88821E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.01008E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22519E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.90236E-1
res40_imon=-2.5222E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=147
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.768E3	0.0E0	1.47E2	4.1E1	-7.37874E-2	-8.8002E1	-3.8147E-4	-8.79996E1	-2.38419E-5	5.65052E-3	9.28402E-2	1.57991E1	-1.98187E1	-1.99703E1	1.49998E1	2.42657E-9	2.51954E-3	2.51954E-3	6.30202E-3	2.46819E-2
2.0E0	3.177E3	2.0E0	3.16E2	1.6E2	-7.25507E-2	-8.8002E1	-6.91414E-4	-8.8E1	0.0E0	5.74589E-3	9.27925E-2	1.58179E1	-1.983E1	-1.99524E1	1.50076E1	2.4276E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.47451E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.32464E-2	-8.80017E1	-2.6226E-4	-8.8E1	7.15256E-5	5.48363E-3	9.27925E-2	1.58435E1	-1.98174E1	-2.00288E1	1.50219E1	2.42315E-9	2.51581E-3	2.51581E-3	6.35223E-3	2.47758E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.24736E-2	-8.80018E1	-4.29153E-4	-8.79999E1	2.38419E-5	5.67436E-3	9.26495E-2	1.58138E1	-1.98417E1	-1.99673E1	1.50046E1	2.42666E-9	2.52448E-3	2.52448E-3	6.33388E-3	2.46996E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.24736E-2	-8.80019E1	-5.00679E-4	-8.8E1	2.38419E-5	5.84126E-3	9.27687E-2	1.57738E1	-1.98551E1	-1.99487E1	1.49626E1	2.42553E-9	2.52276E-3	2.52276E-3	6.31817E-3	2.47874E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.25507E-2	-8.80018E1	-4.52995E-4	-8.79997E1	4.76837E-5	5.45979E-3	9.30309E-2	1.57855E1	-1.9834E1	-1.99655E1	1.5004E1	2.42208E-9	2.51248E-3	2.51248E-3	6.31858E-3	2.46882E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.16233E-2	-8.80017E1	-4.76837E-4	-8.79999E1	9.53674E-5	5.45979E-3	9.31978E-2	1.58024E1	-1.98512E1	-1.99536E1	1.49971E1	2.42647E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.47494E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.201E-2	-8.8002E1	-6.4373E-4	-8.80001E1	1.90735E-4	5.17368E-3	9.28164E-2	1.58018E1	-1.98508E1	-1.99382E1	1.50295E1	2.42306E-9	2.52023E-3	2.52023E-3	6.31744E-3	2.45335E-2
1.2E1	9.3E1	0.0E0	4.85E2	3.23E2	-7.21643E-2	-8.80021E1	-1.43051E-4	-8.79998E1	-2.38419E-5	5.53131E-3	9.29594E-2	1.58071E1	-1.98356E1	-1.9942E1	1.50256E1	2.42594E-9	2.5195E-3	2.5195E-3	6.33767E-3	2.46081E-2
1.3E1	1.1E1	0.0E0	5.25E2	3.53E2	-7.22418E-2	-8.80021E1	-3.57628E-4	-8.8E1	-4.76837E-5	5.43594E-3	9.32455E-2	1.58137E1	-1.98675E1	-1.99882E1	1.50094E1	2.42542E-9	2.51552E-3	2.51552E-3	6.31288E-3	2.47065E-2
1.4E1	1.22E2	0.0E0	5.66E2	3.82E2	-7.17779E-2	-8.80021E1	-2.6226E-4	-8.8E1	2.38419E-4	5.48363E-3	9.33409E-2	1.57808E1	-1.98759E1	-1.99425E1	1.4992E1	2.42964E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.47279E-2
1.5E1	6.8E1	0.0E0	6.06E2	4.11E2	-7.18554E-2	-8.80021E1	-2.14577E-4	-8.79999E1	4.76837E-5	5.60284E-3	9.31025E-2	1.58137E1	-1.98386E1	-1.99414E1	1.49929E1	2.42657E-9	2.51632E-3	2.51632E-3	6.32356E-3	2.4724E-2
1.6E1	3.77E2	0.0E0	6.47E2	4.41E2	-7.27828E-2	-8.80018E1	-4.29153E-4	-8.8E1	-1.19209E-4	5.76973E-3	9.33647E-2	1.57945E1	-1.9844E1	-1.9987E1	1.50053E1	2.42964E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.47279E-2
1.7E1	1.071E3	1.0E0	6.87E2	4.7E2	-7.26282E-2	-8.80017E1	-2.6226E-4	-8.79999E1	9.53674E-5	5.53131E-3	9.32217E-2	1.57689E1	-1.98551E1	-1.99616E1	1.49912E1	2.42331E-9	2.51225E-3	2.51225E-3	6.31288E-3	2.4578E-2
1.8E1	4.221E3	1.0E0	7.27E2	5.0E2	-7.13143E-2	-8.80017E1	-1.19209E-4	-8.79996E1	-1.19209E-4	5.38826E-3	9.31501E-2	1.57777E1	-1.98507E1	-1.99762E1	1.50172E1	2.41994E-9	2.51581E-3	2.51581E-3	6.31858E-3	2.46228E-2
1.9E1	2.08E3	0.0E0	7.68E2	5.29E2	-7.21643E-2	-8.80019E1	0.0E0	-8.79999E1	0.0E0	5.62668E-3	9.29117E-2	1.57861E1	-1.98216E1	-1.99644E1	1.50118E1	2.42647E-9	2.5188E-3	2.5188E-3	6.29645E-3	2.4685E-2
2.0E1	2.9E1	0.0E0	8.08E2	5.58E2	-7.23189E-2	-8.80017E1	-2.14577E-4	-8.8E1	-4.76837E-5	5.26905E-3	9.30309E-2	1.58161E1	-1.98495E1	-1.99492E1	1.5034E1	2.42347E-9	2.52384E-3	2.52384E-3	6.33977E-3	2.46819E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.24736E-2	-8.80016E1	-1.43051E-4	-8.79998E1	-4.76837E-5	5.60284E-3	9.33647E-2	1.58044E1	-1.98635E1	-1.99219E1	1.49813E1	2.42016E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.47065E-2
2.2E1	1.8E1	0.0E0	8.89E2	6.17E2	-7.18554E-2	-8.80015E1	-1.66893E-4	-8.8E1	3.57628E-4	5.38826E-3	9.32455E-2	1.57993E1	-1.98392E1	-1.9981E1	1.5025E1	2.42131E-9	2.51809E-3	2.51809E-3	6.31012E-3	2.4641E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.14689E-2	-8.80018E1	-1.43051E-4	-8.8E1	4.29153E-4	5.43594E-3	9.3174E-2	1.58628E1	-2.0011E1	-1.99785E1	1.50004E1