[Scan]
initial_time=2015-12-22T16:41:49
final_time=2015-12-22T16:42:09
ip_count=19
run=1021
dataset=1
scan=31
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.39421E-2
qbias_imon=-3.85297E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-7.84791E-10
ql2_vset=
ql2_vmon=-4.76837E-4
ql2_imon=1.22772E-9
ql3_vset=
ql3_vmon=-8.79997E1
ql3_imon=-2.39043E-9
ql4_vset=
ql4_vmon=-2.38419E-5
ql4_imon=1.39205E-8
mult1=-1.07277E-8
mult2=-2.62679E-9
rf_tmon=-5.8042E-3
rf_agc=3.18676E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.45979E-3
ql5_imon=6.37019E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64726E0
bslens_imon=2.4737E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19906E1
lens5a_imon=1.9683E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12497E2
lens4a_imon=2.04943E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53655E1
cs_ef1b_imon=2.83881E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04601E2
lens23_imon=1.02054E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04982E1
cs_ea1_imon=2.58038E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98539E0
lens1_imon=1.27948E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64627E1
os_ef1alow_imon=2.97616E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03996E1
cs_ea2_imon=1.53405E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84338E1
cs_ef1a_imon=2.92077E-5
olens2_vset=0.0E0
olens2_vmon=1.57356E-3
olens2_imon=1.05211E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11317E1
os_restr1_imon=4.31525E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15549E1
os_ea1_imon=2.34229E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63592E1
os_ef1bup_imon=3.07534E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23588E0
cs_ionrep_imon=1.20274E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91879E2
cs_nozzle_imon=1.93416E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02015E1
cs_anode1_imon=2.92563E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99984E1
olens4_imon=4.22456E-9
tplens_vset=0.0E0
tplens_vmon=-1.59401E0
tplens_imon=-3.9765E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99654E1
iondef3_imon=8.77044E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98687E1
iondef2_imon=9.50419E-6
lens6_vset=-6.0E2
lens6_vmon=-6.0301E2
lens6_imon=2.9829E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=9.70626E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2627E0
ionrepsh_imon=1.77139E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33508E1
lens5b_imon=2.15661E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7457E1
cs_ef2b_imon=3.12025E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.17411E0
os_ea2_imon=-8.05703E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06101E2
lens4b_imon=2.00458E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71838E1
cs_ef2a_imon=3.17564E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05269E0
os_ef2alow_imon=-2.77267E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.95137E-1
os_ef2bup_imon=-5.34008E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10886E1
os_restr2_imon=3.38784E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.29891E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01846E1
cs_anode2_imon=2.24785E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57771E1
iondef1_imon=4.73483E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50166E1
iondef4_imon=5.19154E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27964E1
olens3_imon=2.5592E-8
olens1_vset=0.0E0
olens1_vmon=6.91414E-4
olens1_imon=1.23284E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14885E0
cs_ionaccel_imon=-1.85948E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47159E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56255E1
einzel_imon=7.66164E-6
window_vset=0.0E0
window_vmon=1.57715E-1
window_imon=-1.17833E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82618E2
mask1_imon=2.39099E-4
mask2_vset=0.0E0
mask2_vmon=-1.86307E1
mask2_imon=-7.47936E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92603E3
multa_neg_imon=7.61741E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93689E3
defgrida_imon=6.20981E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50108E3
multb_neg_imon=7.3591E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42123E0
defgridb_imon=6.07879E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33368E1
os_fil1_imon=9.40331E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.05402E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6277E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30931E1
cs_fil1_imon=9.94854E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62665E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63078E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.92936E-2
os_fil2_imon=-2.81844E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.96582E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.22424E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37316E-1
cs_fil2_imon=-2.5128E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.55523E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2231E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.45768E-2
chamber_ion_pmon=2.42657E-9
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.2987E-1
res40_imon=-2.53689E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=197
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.747E3	0.0E0	1.47E2	4.1E1	-7.37874E-2	-8.80016E1	-3.09944E-4	-8.80002E1	2.38419E-5	5.38826E-3	9.31501E-2	1.57831E1	-1.98576E1	-1.99425E1	1.50064E1	2.41971E-9	2.51725E-3	2.51725E-3	6.3074E-3	2.48032E-2
2.0E0	3.158E3	5.0E0	3.16E2	1.6E2	-7.44059E-2	-8.80015E1	-2.14577E-4	-8.80003E1	3.33786E-4	5.62668E-3	9.34362E-2	1.57836E1	-1.98557E1	-1.99849E1	1.49986E1	2.41934E-9	2.51525E-3	2.51525E-3	6.32356E-3	2.46608E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.3401E-2	-8.80018E1	-4.52995E-4	-8.80003E1	-4.76837E-5	5.55515E-3	9.31263E-2	1.58026E1	-1.98765E1	-1.99313E1	1.50124E1	2.42423E-9	2.51915E-3	2.51915E-3	6.31858E-3	2.4732E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.33239E-2	-8.80019E1	-3.33786E-4	-8.80001E1	9.53674E-5	5.05447E-3	9.32217E-2	1.58109E1	-1.98552E1	-1.99703E1	1.50155E1	2.4245E-9	2.52276E-3	2.52276E-3	6.32356E-3	2.46819E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.26282E-2	-8.80021E1	-2.14577E-4	-8.80001E1	4.76837E-5	5.26905E-3	9.31263E-2	1.58317E1	-1.98603E1	-1.99546E1	1.50154E1	2.4276E-9	2.51739E-3	2.51739E-3	6.3074E-3	2.4724E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.33239E-2	-8.80019E1	-5.72205E-4	-8.80003E1	2.86102E-4	5.17368E-3	9.35316E-2	1.57729E1	-1.97912E1	-1.99804E1	1.5022E1	2.42016E-9	2.51552E-3	2.51552E-3	6.32936E-3	2.47065E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30918E-2	-8.80021E1	-5.24521E-4	-8.80002E1	2.14577E-4	5.34058E-3	9.31025E-2	1.57692E1	-1.9841E1	-1.99702E1	1.50196E1	2.42542E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.4578E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.31692E-2	-8.8002E1	-8.34465E-4	-8.8E1	1.19209E-4	5.31673E-3	9.30071E-2	1.57973E1	-1.98257E1	-1.99638E1	1.50124E1	2.42437E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.47279E-2
1.2E1	1.07E2	0.0E0	4.85E2	3.23E2	-7.36328E-2	-8.80019E1	-8.10623E-4	-8.80001E1	7.15256E-5	5.6982E-3	9.3174E-2	1.57825E1	-1.9826E1	-1.9954E1	1.50097E1	2.42553E-9	2.51417E-3	2.51417E-3	6.33436E-3	2.46819E-2
1.3E1	9.0E0	0.0E0	5.25E2	3.53E2	-7.37874E-2	-8.80019E1	-5.72205E-4	-8.79999E1	1.19209E-4	5.55515E-3	9.30309E-2	1.57993E1	-1.98272E1	-1.9939E1	1.50241E1	2.42121E-9	2.5188E-3	2.5188E-3	6.29645E-3	2.47065E-2
1.4E1	1.28E2	0.0E0	5.66E2	3.82E2	-7.31692E-2	-8.80018E1	-5.72205E-4	-8.79999E1	-2.38419E-4	5.62668E-3	9.30786E-2	1.58032E1	-1.98399E1	-1.99602E1	1.49993E1	2.42647E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.47494E-2
1.5E1	6.5E1	0.0E0	6.06E2	4.11E2	-7.3401E-2	-8.80021E1	-6.19888E-4	-8.79999E1	4.76837E-5	5.67436E-3	9.29356E-2	1.57481E1	-1.98845E1	-1.99487E1	1.50103E1	2.42553E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.46608E-2
1.6E1	3.73E2	1.0E0	6.47E2	4.41E2	-7.37874E-2	-8.80018E1	-9.77516E-4	-8.79998E1	-2.14577E-4	5.60284E-3	9.29832E-2	1.5789E1	-1.98515E1	-1.99552E1	1.50265E1	2.42315E-9	2.5225E-3	2.5225E-3	6.34661E-3	2.46882E-2
1.7E1	9.93E2	0.0E0	6.87E2	4.7E2	-7.40967E-2	-8.80019E1	-8.10623E-4	-8.79998E1	4.76837E-5	5.60284E-3	9.30071E-2	1.57897E1	-1.98686E1	-1.99781E1	1.49908E1	2.42564E-9	2.51814E-3	2.51814E-3	6.29684E-3	2.4741E-2
1.8E1	4.282E3	1.0E0	7.27E2	5.0E2	-7.39421E-2	-8.80018E1	-4.52995E-4	-8.79997E1	0.0E0	5.43594E-3	9.33409E-2	1.57814E1	-1.98145E1	-1.9952E1	1.50154E1	2.42208E-9	2.5225E-3	2.5225E-3	6.32978E-3	2.46882E-2
1.9E1	2.002E3	0.0E0	7.68E2	5.29E2	-7.37103E-2	-8.8002E1	-2.6226E-4	-8.79998E1	9.53674E-5	5.57899E-3	9.3317E-2	1.57933E1	-1.98476E1	-1.9972E1	1.50154E1	2.42243E-9	2.51632E-3	2.51632E-3	6.31278E-3	2.47874E-2
2.0E1	1.9E1	0.0E0	8.08E2	5.58E2	-7.37874E-2	-8.80021E1	-5.72205E-4	-8.79997E1	-1.43051E-4	5.57899E-3	9.31263E-2	1.57891E1	-1.98723E1	-2.00021E1	1.50292E1	2.41911E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.47709E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.33239E-2	-8.80018E1	-1.66893E-4	-8.8E1	-1.43051E-4	5.29289E-3	9.27925E-2	1.57802E1	-1.98246E1	-1.99602E1	1.49825E1	2.42016E-9	2.51552E-3	2.51552E-3	6.3514E-3	2.4685E-2
2.2E1	1.3E1	0.0E0	8.89E2	6.17E2	-7.34782E-2	-8.80017E1	-3.09944E-4	-8.79997E1	-9.53674E-5	5.57899E-3	9.3174E-2	1.57973E1	-1.98423E1	-1.99467E1	1.49992E1	2.4245E-9	2.51739E-3	2.51739E-3	6.31817E-3	2.46398E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.39421E-2	-8.80018E1	-4.76837E-4	-8.79997E1	-2.38419E-5	5.45979E-3	9.32217E-2	1.57771E1	-1.98687E1	-1.99654E1	1.50166E1	2.42657E-9	2.52384E-3	2.52384E-3	6.31278E-3	2.45768E-2