[Scan]
initial_time=2015-12-22T16:42:16
final_time=2015-12-22T16:42:36
ip_count=19
run=1021
dataset=1
scan=32
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.286E-2
qbias_imon=-3.79287E-6
ql1_vset=
ql1_vmon=-8.8002E1
ql1_imon=-7.72953E-10
ql2_vset=
ql2_vmon=-7.39098E-4
ql2_imon=1.20747E-9
ql3_vset=
ql3_vmon=-8.79997E1
ql3_imon=-2.39582E-9
ql4_vset=
ql4_vmon=-2.14577E-4
ql4_imon=1.39194E-8
mult1=-9.18652E-9
mult2=-2.49305E-9
rf_tmon=-5.06518E-3
rf_agc=3.34237E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.4121E-3
ql5_imon=6.69384E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6373E0
bslens_imon=2.5738E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19526E1
lens5a_imon=1.96E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12491E2
lens4a_imon=2.04895E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53818E1
cs_ef1b_imon=2.82579E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04588E2
lens23_imon=1.02164E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04952E1
cs_ea1_imon=2.57609E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97286E0
lens1_imon=1.14624E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64475E1
os_ef1alow_imon=2.96966E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03774E1
cs_ea2_imon=1.53173E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84724E1
cs_ef1a_imon=2.929E-5
olens2_vset=0.0E0
olens2_vmon=1.5974E-3
olens2_imon=1.05478E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11222E1
os_restr1_imon=4.31841E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1554E1
os_ea1_imon=2.3789E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63925E1
os_ef1bup_imon=3.07913E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2509E0
cs_ionrep_imon=1.19611E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91875E2
cs_nozzle_imon=1.93222E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0163E1
cs_anode1_imon=2.93213E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99981E1
olens4_imon=4.16998E-9
tplens_vset=0.0E0
tplens_vmon=-1.58976E0
tplens_imon=-3.57025E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99528E1
iondef3_imon=8.74188E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98242E1
iondef2_imon=9.29704E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02978E2
lens6_imon=2.98613E-4
ql6_vset=1.0E-1
ql6_vmon=9.27448E-2
ql6_imon=9.80699E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27793E0
ionrepsh_imon=1.76641E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3361E1
lens5b_imon=2.16476E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74791E1
cs_ef2b_imon=3.11736E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.22446E0
os_ea2_imon=-7.64385E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06113E2
lens4b_imon=2.00396E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71571E1
cs_ef2a_imon=3.18687E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0088E0
os_ef2alow_imon=-2.77615E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.70587E-1
os_ef2bup_imon=-5.48684E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10955E1
os_restr2_imon=3.39712E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23087E2
cs_ionfoca_imon=6.29748E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0196E1
cs_anode2_imon=2.25133E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57885E1
iondef1_imon=5.11169E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50431E1
iondef4_imon=5.27949E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27966E1
olens3_imon=2.55685E-8
olens1_vset=0.0E0
olens1_vmon=8.34465E-4
olens1_imon=1.23193E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15621E0
cs_ionaccel_imon=-1.91776E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47268E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56214E1
einzel_imon=7.53145E-6
window_vset=0.0E0
window_vmon=1.47602E-1
window_imon=-1.0837E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82631E2
mask1_imon=2.39053E-4
mask2_vset=0.0E0
mask2_vmon=-1.86263E1
mask2_imon=-6.63193E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=6.9394E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93688E3
defgrida_imon=6.651E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50165E3
multb_neg_imon=6.99347E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.28126E0
defgridb_imon=5.98769E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33388E1
os_fil1_imon=9.41997E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07155E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62523E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3092E1
cs_fil1_imon=9.98453E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63299E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62511E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.88025E-2
os_fil2_imon=-2.75607E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.94132E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.34005E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36144E-1
cs_fil2_imon=-2.62864E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.67057E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22226E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.46819E-2
chamber_ion_pmon=2.42347E-9
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.7079E-1
res40_imon=-2.47032E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=147
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.759E3	1.0E0	1.47E2	4.1E1	-7.32464E-2	-8.80019E1	0.0E0	-8.80001E1	-4.76837E-5	5.03063E-3	9.30786E-2	1.57991E1	-1.98487E1	-1.99773E1	1.49944E1	2.42121E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.4685E-2
2.0E0	3.237E3	3.0E0	3.16E2	1.6E2	-7.23189E-2	-8.80017E1	-3.09944E-4	-8.79999E1	-9.53674E-5	4.86374E-3	9.29832E-2	1.57867E1	-1.9838E1	-1.99606E1	1.50298E1	2.42347E-9	2.51847E-3	2.51847E-3	6.30202E-3	2.47029E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.27053E-2	-8.80022E1	-4.29153E-4	-8.80001E1	2.38419E-5	4.93526E-3	9.31263E-2	1.57632E1	-1.98206E1	-2.00051E1	1.50172E1	2.42542E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.47925E-2
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.38649E-2	-8.80022E1	-3.09944E-4	-8.8E1	-4.76837E-5	5.24521E-3	9.30786E-2	1.57719E1	-1.98334E1	-1.99455E1	1.49866E1	2.42331E-9	2.52647E-3	2.52647E-3	6.31837E-3	2.47494E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.31692E-2	-8.80023E1	-4.05312E-4	-8.80001E1	1.19209E-4	5.29289E-3	9.31501E-2	1.57879E1	-1.98863E1	-1.9942E1	1.501E1	2.4245E-9	2.51525E-3	2.51525E-3	6.32356E-3	2.48297E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.35556E-2	-8.80021E1	-3.8147E-4	-8.79998E1	4.05312E-4	5.31673E-3	9.31263E-2	1.57908E1	-1.9834E1	-1.99679E1	1.498E1	2.42208E-9	2.51804E-3	2.51804E-3	6.34099E-3	2.46664E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.34782E-2	-8.80022E1	-4.29153E-4	-8.80003E1	-7.15256E-5	5.19753E-3	9.29832E-2	1.58269E1	-1.98128E1	-1.99504E1	1.5025E1	2.42243E-9	2.51954E-3	2.51954E-3	6.31278E-3	2.47662E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.201E-2	-8.80019E1	-1.90735E-4	-8.79999E1	-1.43051E-4	5.24521E-3	9.34839E-2	1.57933E1	-1.98579E1	-1.99498E1	1.49824E1	2.41911E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.46636E-2
1.2E1	1.01E2	0.0E0	4.85E2	3.23E2	-7.26282E-2	-8.80019E1	-3.09944E-4	-8.79997E1	-4.76837E-5	5.36442E-3	9.3317E-2	1.57813E1	-1.98543E1	-1.99384E1	1.50039E1	2.42542E-9	2.51771E-3	2.51771E-3	6.3074E-3	2.4685E-2
1.3E1	1.3E1	0.0E0	5.25E2	3.53E2	-7.33239E-2	-8.80019E1	-3.57628E-4	-8.79997E1	1.90735E-4	5.26905E-3	9.32217E-2	1.58238E1	-1.99207E1	-1.99242E1	1.49896E1	2.4245E-9	2.51847E-3	2.51847E-3	6.32896E-3	2.46819E-2
1.4E1	1.14E2	0.0E0	5.66E2	3.82E2	-7.30146E-2	-8.80018E1	-5.24521E-4	-8.79997E1	1.19209E-4	5.17368E-3	9.30786E-2	1.58154E1	-1.98777E1	-1.99463E1	1.49841E1	2.42331E-9	2.51334E-3	2.51334E-3	6.32936E-3	2.4685E-2
1.5E1	7.5E1	0.0E0	6.06E2	4.11E2	-7.24736E-2	-8.80021E1	-1.43051E-4	-8.79999E1	2.38419E-4	5.72205E-3	9.31263E-2	1.57819E1	-1.98422E1	-2.00153E1	1.49968E1	2.4253E-9	2.51581E-3	2.51581E-3	6.31858E-3	2.47758E-2
1.6E1	4.07E2	0.0E0	6.47E2	4.41E2	-7.286E-2	-8.80018E1	-7.15256E-5	-8.80002E1	-4.76837E-5	5.45979E-3	9.33647E-2	1.57796E1	-1.98299E1	-1.99626E1	1.50497E1	2.42647E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.46207E-2
1.7E1	1.08E3	1.0E0	6.87E2	4.7E2	-7.23189E-2	-8.8002E1	-1.19209E-4	-8.80002E1	-4.76837E-5	5.38826E-3	9.30309E-2	1.58119E1	-1.98747E1	-1.9984E1	1.50004E1	2.42553E-9	2.51417E-3	2.51417E-3	6.33977E-3	2.48509E-2
1.8E1	4.197E3	4.0E0	7.27E2	5.0E2	-7.286E-2	-8.80021E1	-2.86102E-4	-8.79999E1	3.57628E-4	5.26905E-3	9.3174E-2	1.57735E1	-1.98903E1	-1.99101E1	1.49986E1	2.42331E-9	2.51552E-3	2.51552E-3	6.31837E-3	2.45567E-2
1.9E1	2.146E3	1.0E0	7.68E2	5.29E2	-7.30918E-2	-8.80021E1	-3.8147E-4	-8.80001E1	3.57628E-4	5.38826E-3	9.31263E-2	1.57536E1	-1.98116E1	-2.00027E1	1.49968E1	2.42542E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.4514E-2
2.0E1	3.3E1	0.0E0	8.08E2	5.58E2	-7.34782E-2	-8.80019E1	-1.43051E-4	-8.79999E1	5.48363E-4	5.22137E-3	9.31263E-2	1.57432E1	-1.98416E1	-1.99714E1	1.50425E1	2.42243E-9	2.52599E-3	2.52599E-3	6.33436E-3	2.47874E-2
2.1E1	0.0E0	1.0E0	8.49E2	5.88E2	-7.27828E-2	-8.8002E1	0.0E0	-8.79996E1	2.86102E-4	5.60284E-3	9.31501E-2	1.57719E1	-1.9821E1	-1.99844E1	1.50138E1	2.42121E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.46207E-2
2.2E1	1.7E1	0.0E0	8.89E2	6.17E2	-7.37874E-2	-8.80019E1	-3.57628E-4	-8.79997E1	-2.38419E-5	5.29289E-3	9.31978E-2	1.57973E1	-1.9857E1	-1.99608E1	1.49854E1	2.42437E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.46636E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.286E-2	-8.8002E1	-7.39098E-4	-8.79997E1	-2.14577E-4	5.4121E-3	9.27448E-2	1.57885E1	-1.98242E1	-1.99528E1	1.50431E1	2.42347E-9	2.51954E-3	2.51954E-3	6.32896E-3	2.46819E-2