[Scan]
initial_time=2015-12-22T16:43:10
final_time=2015-12-22T16:43:30
ip_count=19
run=1021
dataset=1
scan=34
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.83251E-6
ql1_vset=
ql1_vmon=-8.80019E1
ql1_imon=-7.52473E-10
ql2_vset=
ql2_vmon=-1.66893E-4
ql2_imon=1.23619E-9
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-2.42662E-9
ql4_vset=
ql4_vmon=-3.33786E-4
ql4_imon=1.38412E-8
mult1=-9.4755E-9
mult2=-2.43716E-9
rf_tmon=-6.29688E-3
rf_agc=3.16693E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.55515E-3
ql5_imon=6.38092E-10
bslens_vset=-6.2E0
bslens_vmon=-6.59189E0
bslens_imon=2.74146E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20532E1
lens5a_imon=1.96775E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12476E2
lens4a_imon=2.05135E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53678E1
cs_ef1b_imon=2.84196E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04642E2
lens23_imon=1.01788E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04823E1
cs_ea1_imon=2.57689E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06781E0
lens1_imon=1.40003E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64865E1
os_ef1alow_imon=2.96014E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03431E1
cs_ea2_imon=1.52073E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84256E1
cs_ef1a_imon=2.92865E-5
olens2_vset=0.0E0
olens2_vmon=1.74046E-3
olens2_imon=1.05406E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11389E1
os_restr1_imon=4.32492E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15341E1
os_ea1_imon=2.3493E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63349E1
os_ef1bup_imon=3.07266E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23381E0
cs_ionrep_imon=1.17917E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91946E2
cs_nozzle_imon=1.93395E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01998E1
cs_anode1_imon=2.93643E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99982E1
olens4_imon=4.27961E-9
tplens_vset=0.0E0
tplens_vmon=-1.55413E0
tplens_imon=-4.51082E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.9966E1
iondef3_imon=8.44699E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98392E1
iondef2_imon=9.43803E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03017E2
lens6_imon=2.98229E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=9.89461E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.21375E0
ionrepsh_imon=1.76353E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34177E1
lens5b_imon=2.16596E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74666E1
cs_ef2b_imon=3.10698E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.21906E0
os_ea2_imon=-7.12998E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06105E2
lens4b_imon=2.00442E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71641E1
cs_ef2a_imon=3.19262E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06842E0
os_ef2alow_imon=-2.70102E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.7521E-1
os_ef2bup_imon=-5.54592E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11041E1
os_restr2_imon=3.40987E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23033E2
cs_ionfoca_imon=6.31379E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01715E1
cs_anode2_imon=2.25104E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57903E1
iondef1_imon=4.81202E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50286E1
iondef4_imon=5.09063E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27962E1
olens3_imon=2.55758E-8
olens1_vset=0.0E0
olens1_vmon=1.14441E-3
olens1_imon=1.23283E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15845E0
cs_ionaccel_imon=-1.96502E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.4729E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56205E1
einzel_imon=7.518E-6
window_vset=0.0E0
window_vmon=1.61197E-1
window_imon=-1.04149E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82622E2
mask1_imon=2.38999E-4
mask2_vset=0.0E0
mask2_vmon=-1.8648E1
mask2_imon=-7.33646E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92649E3
multa_neg_imon=7.63293E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.76931E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=6.87903E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41737E0
defgridb_imon=5.79951E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33375E1
os_fil1_imon=9.43953E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08491E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63236E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30886E1
cs_fil1_imon=9.96134E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62826E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63062E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.86336E-2
os_fil2_imon=-2.60273E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.53134E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.9316E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35054E-1
cs_fil2_imon=-2.04248E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.82884E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22361E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29624E-3
inlet_lpb_pmon=2.47977E-2
chamber_ion_pmon=2.42423E-9
chamber_cvt_pmon=2.51804E-3
foreline_cvt_pmon=2.51804E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-2.87595E-1
res40_imon=-2.59133E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=146
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.699E3	2.0E0	1.47E2	4.1E1	-7.44059E-2	-8.80019E1	-9.29832E-4	-8.79999E1	2.38419E-5	5.57899E-3	9.29356E-2	1.5818E1	-1.98481E1	-1.99251E1	1.49922E1	2.42542E-9	2.51007E-3	2.51007E-3	6.32386E-3	2.47065E-2
2.0E0	3.239E3	8.0E0	3.16E2	1.6E2	-7.47923E-2	-8.80018E1	-8.82149E-4	-8.80001E1	4.76837E-5	5.45979E-3	9.32455E-2	1.57873E1	-1.98667E1	-1.99451E1	1.50088E1	2.42057E-9	2.52448E-3	2.52448E-3	6.32328E-3	2.47617E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.39421E-2	-8.80019E1	-4.52995E-4	-8.79999E1	-1.43051E-4	5.38826E-3	9.30548E-2	1.58E1	-1.98689E1	-1.99668E1	1.49999E1	2.42637E-9	2.51693E-3	2.51693E-3	6.29624E-3	2.47101E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.30918E-2	-8.8002E1	-3.8147E-4	-8.8E1	-2.38419E-5	5.67436E-3	9.31501E-2	1.58E1	-1.98515E1	-1.99581E1	1.50091E1	2.42564E-9	2.51287E-3	2.51287E-3	6.30212E-3	2.45963E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.31692E-2	-8.80018E1	-3.57628E-4	-8.80003E1	7.15256E-5	5.45979E-3	9.29832E-2	1.57934E1	-1.98912E1	-1.99518E1	1.49904E1	2.42971E-9	2.52025E-3	2.52025E-3	6.32328E-3	2.47203E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.42513E-2	-8.80021E1	-3.09944E-4	-8.79999E1	3.33786E-4	5.48363E-3	9.32217E-2	1.57825E1	-1.9841E1	-1.99943E1	1.50346E1	2.42637E-9	2.5225E-3	2.5225E-3	6.31299E-3	2.47101E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.40192E-2	-8.80021E1	7.15256E-5	-8.79996E1	9.53674E-5	5.53131E-3	9.32455E-2	1.57731E1	-1.98364E1	-1.99573E1	1.49932E1	2.42864E-9	2.51739E-3	2.51739E-3	6.3074E-3	2.46608E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.37103E-2	-8.80019E1	-4.76837E-5	-8.79999E1	2.38419E-4	5.53131E-3	9.31263E-2	1.57951E1	-1.98747E1	-1.9966E1	1.50388E1	2.42542E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.47279E-2
1.2E1	8.4E1	1.0E0	4.85E2	3.23E2	-7.40967E-2	-8.8002E1	1.19209E-4	-8.79997E1	-2.38419E-5	5.76973E-3	9.32693E-2	1.57807E1	-1.98567E1	-1.99378E1	1.49806E1	2.42542E-9	2.52318E-3	2.52318E-3	6.31837E-3	2.46207E-2
1.3E1	7.0E0	0.0E0	5.25E2	3.53E2	-7.41738E-2	-8.80018E1	-2.14577E-4	-8.79998E1	7.15256E-5	5.6982E-3	9.34124E-2	1.58185E1	-1.98597E1	-1.99949E1	1.4989E1	2.42226E-9	2.51443E-3	2.51443E-3	6.3074E-3	2.4685E-2
1.4E1	1.12E2	0.0E0	5.66E2	3.82E2	-7.44831E-2	-8.80019E1	-1.66893E-4	-8.80002E1	2.38419E-4	5.36442E-3	9.32217E-2	1.58281E1	-1.98963E1	-1.99324E1	1.50106E1	2.42437E-9	2.51771E-3	2.51771E-3	6.32936E-3	2.47494E-2
1.5E1	6.4E1	0.0E0	6.06E2	4.11E2	-7.41738E-2	-8.80019E1	-9.53674E-5	-8.80001E1	-9.53674E-5	5.6982E-3	9.34601E-2	1.57909E1	-1.98711E1	-1.99552E1	1.5028E1	2.42384E-9	2.51771E-3	2.51771E-3	6.3074E-3	2.47387E-2
1.6E1	3.67E2	2.0E0	6.47E2	4.41E2	-7.35556E-2	-8.80018E1	-3.8147E-4	-8.79999E1	4.05312E-4	5.38826E-3	9.32217E-2	1.57867E1	-1.98452E1	-1.99354E1	1.49698E1					
1.7E1	1.031E3	0.0E0	6.87E2	4.7E2	-7.37874E-2	-8.80017E1	-1.66893E-4	-8.79997E1	1.43051E-4	5.38826E-3	9.29117E-2	1.57963E1	-1.98326E1	-1.99906E1	1.50467E1	2.42226E-9	2.51116E-3	2.51116E-3	6.31288E-3	2.4685E-2
1.8E1	4.501E3	2.0E0	7.27E2	5.0E2	-7.33239E-2	-8.8002E1	-2.86102E-4	-8.79999E1	-4.76837E-5	4.98295E-3	9.32693E-2	1.57951E1	-1.98549E1	-1.99402E1	1.4992E1	2.4328E-9	2.51552E-3	2.51552E-3	6.3074E-3	2.4685E-2
1.9E1	2.124E3	0.0E0	7.68E2	5.29E2	-7.36328E-2	-8.80017E1	-4.29153E-4	-8.79996E1	-3.33786E-4	5.48363E-3	9.29117E-2	1.57917E1	-1.98263E1	-1.99776E1	1.50089E1	2.42016E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.46421E-2
2.0E1	1.2E1	0.0E0	8.08E2	5.58E2	-7.37103E-2	-8.80019E1	-1.90735E-4	-8.79996E1	-4.76837E-5	5.29289E-3	9.3174E-2	1.57926E1	-1.98475E1	-1.99541E1	1.49977E1	2.42692E-9	2.52023E-3	2.52023E-3	6.33253E-3	2.46313E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.36328E-2	-8.8002E1	-2.38419E-4	-8.8E1	1.66893E-4	5.65052E-3	9.3174E-2	1.5823E1	-1.98439E1	-2.00023E1	1.49999E1	2.42037E-9	2.51675E-3	2.51675E-3	6.29558E-3	2.47219E-2
2.2E1	1.2E1	0.0E0	8.89E2	6.17E2	-7.30918E-2	-8.80018E1	-3.57628E-4	-8.79999E1	-2.38419E-5	5.65052E-3	9.30309E-2	1.58062E1	-1.99114E1	-1.9961E1	1.5016E1	2.42389E-9	2.52364E-3	2.52364E-3	6.32784E-3	2.47131E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.80019E1	-1.66893E-4	-8.8E1	-3.33786E-4	5.55515E-3	9.32932E-2	1.57903E1	-1.98392E1	-1.9966E1	1.50286E1	2.42423E-9	2.51804E-3	2.51804E-3	6.29624E-3	2.47977E-2