[Scan]
initial_time=2015-12-22T16:43:37
final_time=2015-12-22T16:43:57
ip_count=19
run=1021
dataset=1
scan=35
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.201E-2
qbias_imon=-3.77798E-6
ql1_vset=
ql1_vmon=-8.8002E1
ql1_imon=-7.27844E-10
ql2_vset=
ql2_vmon=-3.33786E-4
ql2_imon=1.20087E-9
ql3_vset=
ql3_vmon=-8.79997E1
ql3_imon=-2.37999E-9
ql4_vset=
ql4_vmon=1.66893E-4
ql4_imon=1.38239E-8
mult1=-9.64281E-9
mult2=-2.588E-9
rf_tmon=-4.17587E-3
rf_agc=3.42395E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.07832E-3
ql5_imon=6.75607E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65501E0
bslens_imon=2.41584E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20267E1
lens5a_imon=1.96244E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12495E2
lens4a_imon=2.04969E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53808E1
cs_ef1b_imon=2.84142E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04646E2
lens23_imon=1.0204E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05012E1
cs_ea1_imon=2.56698E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97697E0
lens1_imon=1.39649E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6465E1
os_ef1alow_imon=2.97333E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03773E1
cs_ea2_imon=1.51789E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84292E1
cs_ef1a_imon=2.93441E-5
olens2_vset=0.0E0
olens2_vmon=1.21593E-3
olens2_imon=1.05046E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11448E1
os_restr1_imon=4.31473E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15205E1
os_ea1_imon=2.39001E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63329E1
os_ef1bup_imon=3.08145E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25387E0
cs_ionrep_imon=1.17705E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91857E2
cs_nozzle_imon=1.93186E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02049E1
cs_anode1_imon=2.91711E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99983E1
olens4_imon=4.13718E-9
tplens_vset=0.0E0
tplens_vmon=-1.57064E0
tplens_imon=-3.55518E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99707E1
iondef3_imon=8.61688E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98579E1
iondef2_imon=9.42741E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02983E2
lens6_imon=2.98229E-4
ql6_vset=1.0E-1
ql6_vmon=9.29832E-2
ql6_imon=9.8418E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26508E0
ionrepsh_imon=1.75928E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33958E1
lens5b_imon=2.15676E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74754E1
cs_ef2b_imon=3.11569E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.2226E0
os_ea2_imon=-6.10355E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06091E2
lens4b_imon=2.00389E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71462E1
cs_ef2a_imon=3.17227E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06837E0
os_ef2alow_imon=-2.7096E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.95622E-1
os_ef2bup_imon=-5.38735E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10907E1
os_restr2_imon=3.39391E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.29539E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02013E1
cs_anode2_imon=2.25182E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57897E1
iondef1_imon=4.96067E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49835E1
iondef4_imon=5.21552E-6
olens3_vset=-1.28E1
olens3_vmon=-1.2796E1
olens3_imon=2.56278E-8
olens1_vset=0.0E0
olens1_vmon=1.14441E-3
olens1_imon=1.235E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14516E0
cs_ionaccel_imon=-1.89511E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47215E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56327E1
einzel_imon=7.58693E-6
window_vset=0.0E0
window_vmon=1.50669E-1
window_imon=-9.43659E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82615E2
mask1_imon=2.3903E-4
mask2_vset=0.0E0
mask2_vmon=-1.8632E1
mask2_imon=-7.02193E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92747E3
multa_neg_imon=6.80825E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.12514E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50149E3
multb_neg_imon=7.33916E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37898E0
defgridb_imon=5.80659E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33384E1
os_fil1_imon=9.42312E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06206E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63187E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30945E1
cs_fil1_imon=9.9857E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62324E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62913E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.98999E-2
os_fil2_imon=-2.90023E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.90506E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.98729E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34442E-1
cs_fil2_imon=-2.38366E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.2083E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22257E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3414E-3
inlet_lpb_pmon=2.47185E-2
chamber_ion_pmon=2.42819E-9
chamber_cvt_pmon=2.51682E-3
foreline_cvt_pmon=2.51682E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.18157E-1
res40_imon=-2.63032E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=218
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.733E3	1.0E0	1.47E2	4.1E1	-7.40967E-2	-8.80019E1	-4.76837E-4	-8.80001E1	-2.14577E-4	5.60284E-3	9.31025E-2	1.58073E1	-1.98688E1	-1.99862E1	1.50086E1	2.42016E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.4685E-2
2.0E0	3.186E3	2.0E0	3.16E2	1.6E2	-7.35556E-2	-8.8002E1	-4.76837E-5	-8.8E1	-9.53674E-5	5.05447E-3	9.28879E-2	1.5775E1	-1.98459E1	-2.00185E1	1.49854E1	2.41934E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.46188E-2
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.23964E-2	-8.8002E1	-5.96046E-4	-8.80002E1	-2.38419E-5	5.36442E-3	9.3317E-2	1.5756E1	-1.98594E1	-1.99596E1	1.50074E1	2.42315E-9	2.5147E-3	2.5147E-3	6.32978E-3	2.46664E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.30918E-2	-8.80018E1	-3.57628E-4	-8.8E1	1.19209E-4	5.76973E-3	9.30548E-2	1.57684E1	-1.98517E1	-1.99697E1	1.50262E1	2.42553E-9	2.52384E-3	2.52384E-3	6.31817E-3	2.47451E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.31692E-2	-8.80016E1	-4.76837E-4	-8.79999E1	7.15256E-5	5.60284E-3	9.29117E-2	1.57579E1	-1.98428E1	-1.99757E1	1.50148E1	2.42243E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.4535E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.286E-2	-8.80021E1	-5.00679E-4	-8.79998E1	-9.53674E-5	5.43594E-3	9.29117E-2	1.57808E1	-1.98405E1	-1.99785E1	1.50256E1	2.42226E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.47709E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30918E-2	-8.80024E1	-6.91414E-4	-8.79999E1	2.14577E-4	5.38826E-3	9.30309E-2	1.57542E1	-1.98434E1	-1.99528E1	1.5019E1	2.41596E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.47065E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.35556E-2	-8.80022E1	-6.91414E-4	-8.79996E1	2.38419E-5	5.55515E-3	9.30071E-2	1.5779E1	-1.98782E1	-1.99667E1	1.50161E1	2.42437E-9	2.5199E-3	2.5199E-3	6.33486E-3	2.47494E-2
1.2E1	8.7E1	0.0E0	4.85E2	3.23E2	-7.31692E-2	-8.8002E1	-6.19888E-4	-8.79994E1	2.14577E-4	5.48363E-3	9.31501E-2	1.57775E1	-1.98557E1	-1.99353E1	1.50166E1	2.4245E-9	2.51847E-3	2.51847E-3	6.33436E-3	2.45978E-2
1.3E1	7.0E0	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80022E1	-6.67572E-4	-8.79995E1	2.38419E-5	5.29289E-3	9.27687E-2	1.57891E1	-1.98483E1	-1.9984E1	1.50041E1	2.42858E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.45567E-2
1.4E1	1.28E2	0.0E0	5.66E2	3.82E2	-7.37103E-2	-8.80023E1	-4.05312E-4	-8.79995E1	2.14577E-4	5.22137E-3	9.29594E-2	1.58061E1	-1.98659E1	-1.99726E1	1.50213E1	2.4253E-9	2.51359E-3	2.51359E-3	6.31858E-3	2.45792E-2
1.5E1	7.5E1	0.0E0	6.06E2	4.11E2	-7.39421E-2	-8.80018E1	-6.19888E-4	-8.8E1	0.0E0	5.19753E-3	9.29594E-2	1.57885E1	-1.98398E1	-1.99888E1	1.49896E1	2.42864E-9	2.51525E-3	2.51525E-3	6.31817E-3	2.46608E-2
1.6E1	3.57E2	0.0E0	6.47E2	4.41E2	-7.44831E-2	-8.8002E1	-4.76837E-4	-8.79999E1	1.43051E-4	5.22137E-3	9.26256E-2	1.57987E1	-1.98266E1	-1.99654E1	1.50064E1	2.43382E-9	2.51525E-3	2.51525E-3	6.31278E-3	2.47029E-2
1.7E1	1.002E3	0.0E0	6.87E2	4.7E2	-7.29374E-2	-8.80018E1	-3.8147E-4	-8.80003E1	9.53674E-5	5.48363E-3	9.25779E-2	1.58179E1	-1.98795E1	-1.99474E1	1.49944E1	2.43762E-9	2.51677E-3	2.51677E-3	6.3157E-3	2.4665E-2
1.8E1	4.247E3	3.0E0	7.27E2	5.0E2	-7.31692E-2	-8.80018E1	-4.76837E-5	-8.79999E1	3.09944E-4	5.43594E-3	9.30786E-2	1.57686E1	-1.98483E1	-1.99858E1	1.49944E1					
1.9E1	2.038E3	0.0E0	7.68E2	5.29E2	-7.36328E-2	-8.80019E1	-1.43051E-4	-8.8E1	-4.76837E-5	5.19753E-3	9.29356E-2	1.57801E1	-1.98495E1	-1.99678E1	1.50256E1	2.42647E-9	2.52154E-3	2.52154E-3	6.3074E-3	2.47065E-2
2.0E1	2.2E1	0.0E0	8.08E2	5.58E2	-7.38649E-2	-8.80017E1	-2.86102E-4	-8.80003E1	2.6226E-4	5.17368E-3	9.30071E-2	1.57826E1	-1.98428E1	-1.99685E1	1.50178E1					
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.3401E-2	-8.80021E1	-5.72205E-4	-8.8E1	2.14577E-4	5.22137E-3	9.34362E-2	1.5771E1	-1.98344E1	-1.99708E1	1.50461E1	2.42243E-9	2.5131E-3	2.5131E-3	6.3074E-3	2.47662E-2
2.2E1	1.6E1	0.0E0	8.89E2	6.17E2	-7.3401E-2	-8.8002E1	-9.53674E-5	-8.79996E1	9.53674E-5	5.34058E-3	9.30548E-2	1.57954E1	-1.98374E1	-1.99588E1	1.50131E1	2.42858E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.47065E-2
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.201E-2	-8.8002E1	-3.33786E-4	-8.79997E1	1.66893E-4	5.07832E-3	9.29832E-2	1.57897E1	-1.98579E1	-1.99707E1	1.49835E1	2.42819E-9	2.51682E-3	2.51682E-3	6.3414E-3	2.47185E-2