[Scan]
initial_time=2015-12-22T16:44:04
final_time=2015-12-22T16:44:24
ip_count=19
run=1021
dataset=1
scan=36
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.34782E-2
qbias_imon=-3.79968E-6
ql1_vset=
ql1_vmon=-8.80019E1
ql1_imon=-8.25107E-10
ql2_vset=
ql2_vmon=-5.48363E-4
ql2_imon=1.21816E-9
ql3_vset=
ql3_vmon=-8.79996E1
ql3_imon=-2.39878E-9
ql4_vset=
ql4_vmon=3.09944E-4
ql4_imon=1.38941E-8
mult1=-8.27303E-9
mult2=-2.67312E-9
rf_tmon=-4.47876E-3
rf_agc=3.38732E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.4121E-3
ql5_imon=6.75869E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66914E0
bslens_imon=2.78289E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20157E1
lens5a_imon=1.97694E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12498E2
lens4a_imon=2.04808E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5367E1
cs_ef1b_imon=2.83674E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04602E2
lens23_imon=1.02071E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04736E1
cs_ea1_imon=2.55878E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98608E0
lens1_imon=1.43103E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6453E1
os_ef1alow_imon=2.97333E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04021E1
cs_ea2_imon=1.5238E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84496E1
cs_ef1a_imon=2.93008E-5
olens2_vset=0.0E0
olens2_vmon=1.4782E-3
olens2_imon=1.05545E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11238E1
os_restr1_imon=4.31617E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15432E1
os_ea1_imon=2.39151E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63828E1
os_ef1bup_imon=3.08433E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26772E0
cs_ionrep_imon=1.16727E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91877E2
cs_nozzle_imon=1.93409E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01797E1
cs_anode1_imon=2.93188E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99981E1
olens4_imon=4.19571E-9
tplens_vset=0.0E0
tplens_vmon=-1.60178E0
tplens_imon=-3.17371E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99598E1
iondef3_imon=8.66617E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98392E1
iondef2_imon=9.24297E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02967E2
lens6_imon=2.98234E-4
ql6_vset=1.0E-1
ql6_vmon=9.30071E-2
ql6_imon=9.72986E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28755E0
ionrepsh_imon=1.77939E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33694E1
lens5b_imon=2.14385E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74657E1
cs_ef2b_imon=3.12506E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.24609E0
os_ea2_imon=-7.4636E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0612E2
lens4b_imon=2.00392E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.72309E1
cs_ef2a_imon=3.18632E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07318E0
os_ef2alow_imon=-2.66275E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.97424E-1
os_ef2bup_imon=-5.41618E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11027E1
os_restr2_imon=3.40833E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23094E2
cs_ionfoca_imon=6.29063E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01959E1
cs_anode2_imon=2.23127E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58258E1
iondef1_imon=5.01436E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49998E1
iondef4_imon=5.27318E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27962E1
olens3_imon=2.55518E-8
olens1_vset=0.0E0
olens1_vmon=9.77516E-4
olens1_imon=1.23718E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15056E0
cs_ionaccel_imon=-1.84465E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.021E2
cs_ionfocb_imon=1.47219E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56057E1
einzel_imon=7.61576E-6
window_vset=0.0E0
window_vmon=1.6088E-1
window_imon=-1.04097E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8261E2
mask1_imon=2.39135E-4
mask2_vset=0.0E0
mask2_vmon=-1.86446E1
mask2_imon=-5.7245E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92601E3
multa_neg_imon=7.40083E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.88172E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50117E3
multb_neg_imon=7.0836E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31735E0
defgridb_imon=5.83268E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33358E1
os_fil1_imon=9.39435E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07539E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62838E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30844E1
cs_fil1_imon=9.90785E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62954E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62849E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.90604E-2
os_fil2_imon=-2.62392E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9351E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.13381E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3496E-1
cs_fil2_imon=-2.43772E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.28037E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22309E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34518E-3
inlet_lpb_pmon=2.47874E-2
chamber_ion_pmon=2.42553E-9
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.26566E-1
res40_imon=-2.49697E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=202
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.764E3	0.0E0	1.47E2	4.1E1	-7.27828E-2	-8.80021E1	-4.05312E-4	-8.80002E1	2.14577E-4	5.60284E-3	9.3174E-2	1.58023E1	-1.98457E1	-1.99697E1	1.49941E1	2.41806E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.46636E-2
2.0E0	3.147E3	4.0E0	3.16E2	1.6E2	-7.30146E-2	-8.8002E1	-5.24521E-4	-8.79998E1	2.86102E-4	5.26905E-3	9.30548E-2	1.58001E1	-1.98539E1	-1.99347E1	1.50166E1	2.42463E-9	2.52342E-3	2.52342E-3	6.33388E-3	2.47617E-2
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.31692E-2	-8.80021E1	-2.86102E-4	-8.79996E1	3.33786E-4	5.26905E-3	9.29594E-2	1.57942E1	-1.98649E1	-1.99303E1	1.5008E1	2.42745E-9	2.51359E-3	2.51359E-3	6.32418E-3	2.4732E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.30146E-2	-8.80023E1	-4.29153E-4	-8.79997E1	1.43051E-4	5.38826E-3	9.3174E-2	1.58089E1	-1.9838E1	-1.9972E1	1.50154E1	2.42666E-9	2.52448E-3	2.52448E-3	6.30212E-3	2.46996E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.34782E-2	-8.80021E1	-4.76837E-4	-8.79999E1	2.38419E-5	5.48363E-3	9.29594E-2	1.57831E1	-1.98495E1	-1.99516E1	1.50256E1	2.42657E-9	2.51954E-3	2.51954E-3	6.31817E-3	2.4724E-2
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.35556E-2	-8.8002E1	-5.96046E-4	-8.8E1	-4.76837E-5	5.62668E-3	9.29356E-2	1.58089E1	-1.98681E1	-1.99089E1	1.50094E1	2.42121E-9	2.52318E-3	2.52318E-3	6.32936E-3	2.4685E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.24736E-2	-8.80021E1	-5.24521E-4	-8.8E1	0.0E0	5.45979E-3	9.28879E-2	1.58002E1	-1.98629E1	-1.99543E1	1.49866E1	2.41911E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.46636E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27053E-2	-8.8002E1	-3.57628E-4	-8.79999E1	2.38419E-5	5.57899E-3	9.32217E-2	1.58101E1	-1.98507E1	-1.99822E1	1.50051E1	2.42331E-9	2.52099E-3	2.52099E-3	6.34037E-3	2.4685E-2
1.2E1	1.01E2	0.0E0	4.85E2	3.23E2	-7.27053E-2	-8.80017E1	-4.76837E-4	-8.8E1	2.38419E-4	5.60284E-3	9.32455E-2	1.58038E1	-1.98824E1	-1.99573E1	1.49968E1	2.4214E-9	2.5131E-3	2.5131E-3	6.31817E-3	2.47662E-2
1.3E1	1.1E1	0.0E0	5.25E2	3.53E2	-7.286E-2	-8.80021E1	-4.76837E-4	-8.79995E1	2.86102E-4	5.60284E-3	9.30786E-2	1.58246E1	-1.98435E1	-2.00008E1	1.4977E1	2.42331E-9	2.51662E-3	2.51662E-3	6.30192E-3	2.45994E-2
1.4E1	1.05E2	0.0E0	5.66E2	3.82E2	-7.25507E-2	-8.80018E1	-4.05312E-4	-8.79998E1	2.38419E-5	5.43594E-3	9.30309E-2	1.57731E1	-1.98187E1	-1.99567E1	1.5019E1	2.42542E-9	2.52209E-3	2.52209E-3	6.30192E-3	2.46207E-2
1.5E1	7.3E1	0.0E0	6.06E2	4.11E2	-7.27053E-2	-8.8002E1	-1.66893E-4	-8.8E1	2.14577E-4	5.57899E-3	9.32932E-2	1.57951E1	-1.98404E1	-1.99804E1	1.4992E1	2.42331E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.47279E-2
1.6E1	3.54E2	0.0E0	6.47E2	4.41E2	-7.25507E-2	-8.8002E1	-2.86102E-4	-8.79998E1	2.86102E-4	5.96046E-3	9.31978E-2	1.58035E1	-1.98483E1	-1.99666E1	1.5013E1	2.41911E-9	2.51771E-3	2.51771E-3	6.29098E-3	2.47065E-2
1.7E1	9.81E2	2.0E0	6.87E2	4.7E2	-7.3401E-2	-8.80021E1	-2.14577E-4	-8.80001E1	4.05312E-4	5.62668E-3	9.31501E-2	1.57772E1	-1.98393E1	-1.99986E1	1.5016E1	2.42226E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.46636E-2
1.8E1	4.22E3	0.0E0	7.27E2	5.0E2	-7.33239E-2	-8.8002E1	-4.05312E-4	-8.80001E1	-9.53674E-5	5.43594E-3	9.29594E-2	1.57903E1	-1.9871E1	-1.99867E1	1.50082E1	2.42657E-9	2.51417E-3	2.51417E-3	6.31278E-3	2.46398E-2
1.9E1	2.119E3	0.0E0	7.68E2	5.29E2	-7.3401E-2	-8.80017E1	-9.53674E-5	-8.79998E1	3.57628E-4	5.48363E-3	9.28164E-2	1.58002E1	-1.98269E1	-1.99655E1	1.50208E1	2.42753E-9	2.51443E-3	2.51443E-3	6.3074E-3	2.4685E-2
2.0E1	2.6E1	0.0E0	8.08E2	5.58E2	-7.33239E-2	-8.8002E1	9.53674E-5	-8.79998E1	3.09944E-4	5.67436E-3	9.27687E-2	1.58023E1	-1.98326E1	-1.99474E1	1.50431E1	2.41806E-9	2.52209E-3	2.52209E-3	6.29645E-3	2.4685E-2
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80017E1	-2.6226E-4	-8.79998E1	2.6226E-4	5.19753E-3	9.27687E-2	1.57979E1	-1.98552E1	-1.99756E1	1.50149E1	2.41831E-9	2.51632E-3	2.51632E-3	6.32896E-3	2.46608E-2
2.2E1	1.6E1	0.0E0	8.89E2	6.17E2	-7.30146E-2	-8.80018E1	-3.33786E-4	-8.79996E1	3.09944E-4	5.38826E-3	9.29117E-2	1.58256E1	-1.98529E1	-1.99319E1	1.49944E1	2.42753E-9	2.51334E-3	2.51334E-3	6.33486E-3	2.4685E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.34782E-2	-8.80019E1	-5.48363E-4	-8.79996E1	3.09944E-4	5.4121E-3	9.30071E-2	1.58258E1	-1.98392E1	-1.99598E1	1.49998E1	2.42553E-9	2.51847E-3	2.51847E-3	6.34518E-3	2.47874E-2