[Scan]
initial_time=2015-12-22T16:44:58
final_time=2015-12-22T16:45:17
ip_count=19
run=1021
dataset=1
scan=38
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.286E-2
qbias_imon=-3.82982E-6
ql1_vset=
ql1_vmon=-8.80015E1
ql1_imon=-7.51197E-10
ql2_vset=
ql2_vmon=-5.00679E-4
ql2_imon=1.21864E-9
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-2.39816E-9
ql4_vset=
ql4_vmon=1.43051E-4
ql4_imon=1.38854E-8
mult1=-9.68382E-9
mult2=-2.54906E-9
rf_tmon=-4.76035E-3
rf_agc=3.26611E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.19753E-3
ql5_imon=6.38008E-10
bslens_vset=-6.2E0
bslens_vmon=-6.70159E0
bslens_imon=2.32146E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1958E1
lens5a_imon=2.01804E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12517E2
lens4a_imon=2.04804E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53604E1
cs_ef1b_imon=2.82088E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04597E2
lens23_imon=1.0206E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05312E1
cs_ea1_imon=2.57356E-5
lens1_vset=-2.7E0
lens1_vmon=-2.91638E0
lens1_imon=1.50313E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64572E1
os_ef1alow_imon=2.96901E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0381E1
cs_ea2_imon=1.50686E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84706E1
cs_ef1a_imon=2.93044E-5
olens2_vset=0.0E0
olens2_vmon=1.62125E-3
olens2_imon=1.05305E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11189E1
os_restr1_imon=4.32914E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15396E1
os_ea1_imon=2.38034E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63737E1
os_ef1bup_imon=3.08613E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24549E0
cs_ionrep_imon=1.2026E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91862E2
cs_nozzle_imon=1.93294E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01719E1
cs_anode1_imon=2.93369E-5
olens4_vset=-3.0E1
olens4_vmon=-2.9998E1
olens4_imon=4.20116E-9
tplens_vset=0.0E0
tplens_vmon=-1.60659E0
tplens_imon=-4.94013E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99934E1
iondef3_imon=8.88247E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98275E1
iondef2_imon=9.37995E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02985E2
lens6_imon=2.98137E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=9.66001E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29656E0
ionrepsh_imon=1.76533E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33802E1
lens5b_imon=2.16801E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74778E1
cs_ef2b_imon=3.12109E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.1842E0
os_ea2_imon=-8.86953E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06105E2
lens4b_imon=2.00399E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70903E1
cs_ef2a_imon=3.16758E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06056E0
os_ef2alow_imon=-2.68077E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.82407E-1
os_ef2bup_imon=-5.50628E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10991E1
os_restr2_imon=3.41482E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23065E2
cs_ionfoca_imon=6.31442E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02169E1
cs_anode2_imon=2.25578E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57432E1
iondef1_imon=4.81969E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49746E1
iondef4_imon=5.35607E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27961E1
olens3_imon=2.55726E-8
olens1_vset=0.0E0
olens1_vmon=8.58307E-4
olens1_imon=1.23456E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14876E0
cs_ionaccel_imon=-1.97439E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02084E2
cs_ionfocb_imon=1.47262E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56375E1
einzel_imon=7.61576E-6
window_vset=0.0E0
window_vmon=1.82504E-1
window_imon=-9.07619E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82616E2
mask1_imon=2.39073E-4
mask2_vset=0.0E0
mask2_vmon=-1.86416E1
mask2_imon=-6.19302E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92732E3
multa_neg_imon=6.5717E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93779E3
defgrida_imon=5.42171E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50152E3
multb_neg_imon=8.1759E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.26021E0
defgridb_imon=5.75337E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33392E1
os_fil1_imon=9.42636E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.05972E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62936E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3103E1
cs_fil1_imon=1.00327E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62204E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.628E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.1124E-2
os_fil2_imon=-3.05039E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.79694E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.22533E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35867E-1
cs_fil2_imon=-3.0564E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.15092E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22124E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.47279E-2
chamber_ion_pmon=2.42437E-9
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-2.9382E-1
res40_imon=-2.72762E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=206
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.7E3	1.0E0	1.47E2	4.1E1	-7.30146E-2	-8.80018E1	-5.48363E-4	-8.79998E1	0.0E0	5.8651E-3	9.27687E-2	1.57796E1	-1.98541E1	-1.99744E1	1.50103E1	2.4276E-9	2.5131E-3	2.5131E-3	6.31278E-3	2.48085E-2
2.0E0	3.18E3	3.0E0	3.16E2	1.6E2	-7.37103E-2	-8.80017E1	-6.67572E-4	-8.8E1	2.14577E-4	5.67436E-3	9.28879E-2	1.57799E1	-1.986E1	-1.99653E1	1.50035E1	2.42553E-9	2.51525E-3	2.51525E-3	6.31278E-3	2.46819E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.50241E-2	-8.80016E1	-7.39098E-4	-8.79999E1	7.15256E-5	5.72205E-3	9.2864E-2	1.5789E1	-1.98318E1	-1.99848E1	1.49987E1	2.42637E-9	2.51693E-3	2.51693E-3	6.33538E-3	2.48417E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.50241E-2	-8.80014E1	-4.52995E-4	-8.80003E1	2.14577E-4	5.43594E-3	9.28164E-2	1.58203E1	-1.98322E1	-1.99532E1	1.50479E1	2.4226E-9	2.52448E-3	2.52448E-3	6.30212E-3	2.46789E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.53334E-2	-8.80016E1	-4.52995E-4	-8.80001E1	7.15256E-5	5.67436E-3	9.29594E-2	1.57407E1	-1.98458E1	-1.99709E1	1.49878E1	2.42347E-9	2.51096E-3	2.51096E-3	6.28592E-3	2.47029E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.51788E-2	-8.80018E1	-5.96046E-4	-8.80001E1	0.0E0	5.43594E-3	9.30071E-2	1.57933E1	-1.98705E1	-1.99762E1	1.50166E1	2.42542E-9	2.51552E-3	2.51552E-3	6.31837E-3	2.47279E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.45602E-2	-8.80019E1	-6.67572E-4	-8.80002E1	7.15256E-5	5.60284E-3	9.31025E-2	1.58263E1	-1.98128E1	-1.99618E1	1.49974E1	2.42437E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.47065E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.37103E-2	-8.80019E1	-8.34465E-4	-8.80003E1	1.66893E-4	5.67436E-3	9.30786E-2	1.57554E1	-1.98513E1	-1.99648E1	1.50202E1	2.42753E-9	2.50898E-3	2.50898E-3	6.32936E-3	2.46421E-2
1.2E1	9.5E1	0.0E0	4.85E2	3.23E2	-7.40967E-2	-8.80018E1	-4.05312E-4	-8.80001E1	1.43051E-4	5.31673E-3	9.32932E-2	1.57969E1	-1.9841E1	-1.99462E1	1.50262E1	2.42647E-9	2.51662E-3	2.51662E-3	6.32936E-3	2.4685E-2
1.3E1	6.0E0	0.0E0	5.25E2	3.53E2	-7.42513E-2	-8.80018E1	-6.67572E-4	-8.79998E1	2.14577E-4	5.53131E-3	9.32932E-2	1.58167E1	-1.98489E1	-1.99546E1	1.49914E1	2.42647E-9	2.51662E-3	2.51662E-3	6.32936E-3	2.4685E-2
1.4E1	1.23E2	0.0E0	5.66E2	3.82E2	-7.43285E-2	-8.80017E1	-4.76837E-4	-8.80002E1	2.38419E-4	5.38826E-3	9.30548E-2	1.58005E1	-1.98489E1	-1.99462E1	1.49968E1	2.42437E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.47065E-2
1.5E1	8.2E1	0.0E0	6.06E2	4.11E2	-7.37874E-2	-8.80016E1	-2.86102E-4	-8.8E1	4.76837E-5	5.24521E-3	9.31263E-2	1.58245E1	-1.98873E1	-1.99576E1	1.50352E1	2.42347E-9	2.51847E-3	2.51847E-3	6.29665E-3	2.47662E-2
1.6E1	3.84E2	0.0E0	6.47E2	4.41E2	-7.30146E-2	-8.80015E1	-2.86102E-4	-8.79997E1	1.66893E-4	5.24521E-3	9.31978E-2	1.58239E1	-1.98945E1	-1.9972E1	1.50382E1	2.42226E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.4685E-2
1.7E1	1.075E3	1.0E0	6.87E2	4.7E2	-7.37103E-2	-8.80015E1	-4.76837E-4	-8.79996E1	4.76837E-5	5.43594E-3	9.33886E-2	1.5812E1	-1.98906E1	-1.99567E1	1.49941E1	2.42226E-9	2.5188E-3	2.5188E-3	6.29098E-3	2.47494E-2
1.8E1	4.249E3	4.0E0	7.27E2	5.0E2	-7.41738E-2	-8.80015E1	-6.67572E-4	-8.79999E1	-1.43051E-4	5.10216E-3	9.35078E-2	1.58321E1	-1.98865E1	-1.99532E1	1.49463E1	2.42347E-9	2.52169E-3	2.52169E-3	6.31278E-3	2.47029E-2
1.9E1	2.071E3	1.0E0	7.68E2	5.29E2	-7.44831E-2	-8.80018E1	-3.8147E-4	-8.8E1	0.0E0	5.00679E-3	9.32932E-2	1.57957E1	-1.98603E1	-1.99474E1	1.49944E1	2.42542E-9	2.51443E-3	2.51443E-3	6.28552E-3	2.47279E-2
2.0E1	3.0E1	0.0E0	8.08E2	5.58E2	-7.40192E-2	-8.80018E1	-6.19888E-4	-8.79999E1	9.53674E-5	5.17368E-3	9.32932E-2	1.57824E1	-1.98484E1	-1.99592E1	1.50135E1	2.42331E-9	2.51771E-3	2.51771E-3	6.29645E-3	2.47709E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.36328E-2	-8.80016E1	-4.52995E-4	-8.8E1	-9.53674E-5	5.29289E-3	9.33886E-2	1.58232E1	-1.99031E1	-1.9957E1	1.49889E1	2.42443E-9	2.51593E-3	2.51593E-3	6.31012E-3	2.4726E-2
2.2E1	1.3E1	0.0E0	8.89E2	6.17E2	-7.27053E-2	-8.80015E1	-5.00679E-4	-8.79998E1	-2.38419E-5	5.57899E-3	9.32455E-2	1.58113E1	-1.98483E1	-1.9978E1	1.5001E1					
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.286E-2	-8.80015E1	-5.00679E-4	-8.79999E1	1.43051E-4	5.19753E-3	9.32932E-2	1.57432E1	-1.98275E1	-1.99934E1	1.49746E1	2.42437E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.47279E-2