[Scan]
initial_time=2015-12-22T16:45:51
final_time=2015-12-22T16:46:11
ip_count=19
run=1021
dataset=1
scan=40
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.37874E-2
qbias_imon=-3.84182E-6
ql1_vset=
ql1_vmon=-8.80019E1
ql1_imon=-7.58898E-10
ql2_vset=
ql2_vmon=-9.05991E-4
ql2_imon=1.27857E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-2.42115E-9
ql4_vset=
ql4_vmon=-2.6226E-4
ql4_imon=1.39683E-8
mult1=-9.34032E-9
mult2=-2.89683E-9
rf_tmon=-7.69261E-3
rf_agc=3.14858E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.88894E-3
ql5_imon=6.19316E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66494E0
bslens_imon=2.39716E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19821E1
lens5a_imon=1.99713E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12482E2
lens4a_imon=2.05212E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53538E1
cs_ef1b_imon=2.84755E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04596E2
lens23_imon=1.02013E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05024E1
cs_ea1_imon=2.56671E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02033E0
lens1_imon=1.25799E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64741E1
os_ef1alow_imon=2.96396E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03714E1
cs_ea2_imon=1.54038E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84544E1
cs_ef1a_imon=2.93585E-5
olens2_vset=0.0E0
olens2_vmon=1.66893E-3
olens2_imon=1.05252E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1176E1
os_restr1_imon=4.30139E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15264E1
os_ea1_imon=2.39223E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63539E1
os_ef1bup_imon=3.08217E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23768E0
cs_ionrep_imon=1.19827E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91869E2
cs_nozzle_imon=1.93287E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01911E1
cs_anode1_imon=2.93333E-5
olens4_vset=-3.0E1
olens4_vmon=-2.9998E1
olens4_imon=4.2305E-9
tplens_vset=0.0E0
tplens_vmon=-1.56993E0
tplens_imon=-3.24581E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99494E1
iondef3_imon=8.60849E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98741E1
iondef2_imon=9.28262E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02935E2
lens6_imon=2.98205E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=9.61614E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28034E0
ionrepsh_imon=1.75812E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33646E1
lens5b_imon=2.17918E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74513E1
cs_ef2b_imon=3.11497E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.21905E0
os_ea2_imon=-5.33668E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06093E2
lens4b_imon=2.00439E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70963E1
cs_ef2a_imon=3.17083E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03834E0
os_ef2alow_imon=-2.64833E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.78803E-1
os_ef2bup_imon=-5.45222E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10907E1
os_restr2_imon=3.40617E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23087E2
cs_ionfoca_imon=6.2946E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01923E1
cs_anode2_imon=2.25073E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58326E1
iondef1_imon=4.84132E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49944E1
iondef4_imon=5.24075E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27962E1
olens3_imon=2.56275E-8
olens1_vset=0.0E0
olens1_vmon=7.86781E-4
olens1_imon=1.23098E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14576E0
cs_ionaccel_imon=-1.79419E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47215E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56435E1
einzel_imon=7.66622E-6
window_vset=0.0E0
window_vmon=1.72293E-1
window_imon=-1.03015E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82632E2
mask1_imon=2.39109E-4
mask2_vset=0.0E0
mask2_vmon=-1.86284E1
mask2_imon=-8.03104E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92621E3
multa_neg_imon=7.28548E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9364E3
defgrida_imon=7.39362E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50245E3
multb_neg_imon=5.86512E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.25419E0
defgridb_imon=6.31935E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33357E1
os_fil1_imon=9.4239E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06236E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63124E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3084E1
cs_fil1_imon=9.94576E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62708E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62201E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.94473E-2
os_fil2_imon=-2.48577E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91107E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.03843E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3509E-1
cs_fil2_imon=-2.57587E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.33443E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22012E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=2.47451E-2
chamber_ion_pmon=2.4214E-9
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.46077E-1
res40_imon=-2.63392E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.73E3	2.0E0	1.47E2	4.1E1	-7.286E-2	-8.80017E1	-4.29153E-4	-8.80001E1	2.38419E-5	5.38826E-3	9.30786E-2	1.57948E1	-1.98272E1	-1.99309E1	1.50062E1	2.42964E-9	2.52099E-3	2.52099E-3	6.30192E-3	2.45994E-2
2.0E0	3.137E3	3.0E0	3.16E2	1.6E2	-7.30918E-2	-8.80018E1	-6.19888E-4	-8.80001E1	1.43051E-4	5.60284E-3	9.32932E-2	1.57829E1	-1.98453E1	-1.9977E1	1.50066E1	2.4245E-9	2.52169E-3	2.52169E-3	6.28592E-3	2.47662E-2
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.26282E-2	-8.80018E1	-6.19888E-4	-8.8E1	2.6226E-4	5.50747E-3	9.32932E-2	1.58064E1	-1.98567E1	-1.99744E1	1.49981E1	2.42423E-9	2.51804E-3	2.51804E-3	6.32418E-3	2.47101E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.31692E-2	-8.80021E1	-5.48363E-4	-8.8E1	2.14577E-4	5.65052E-3	9.29356E-2	1.57678E1	-1.98493E1	-1.99732E1	1.50022E1	2.4226E-9	2.51814E-3	2.51814E-3	6.32858E-3	2.47617E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37103E-2	-8.8002E1	-4.29153E-4	-8.80002E1	1.43051E-4	5.57899E-3	9.29594E-2	1.57686E1	-1.98092E1	-1.99468E1	1.50202E1	2.42347E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.46398E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.33239E-2	-8.80016E1	-2.86102E-4	-8.79998E1	7.15256E-5	5.34058E-3	9.28402E-2	1.57799E1	-1.983E1	-1.99634E1	1.50262E1	2.41887E-9	2.51804E-3	2.51804E-3	6.33538E-3	2.46882E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.37874E-2	-8.8002E1	-2.6226E-4	-8.80001E1	0.0E0	5.53131E-3	9.32932E-2	1.58041E1	-1.98248E1	-1.99528E1	1.49944E1	2.42331E-9	2.51443E-3	2.51443E-3	6.32386E-3	2.46636E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.29374E-2	-8.80018E1	-5.96046E-4	-8.80001E1	7.15256E-5	5.4121E-3	9.32455E-2	1.58168E1	-1.98092E1	-1.99608E1	1.49974E1	2.42753E-9	2.51662E-3	2.51662E-3	6.32936E-3	2.46636E-2
1.2E1	9.2E1	0.0E0	4.85E2	3.23E2	-7.30918E-2	-8.80019E1	-3.57628E-4	-8.80001E1	-9.53674E-5	5.88894E-3	9.33409E-2	1.57885E1	-1.98176E1	-1.99185E1	1.50184E1	2.42243E-9	2.51739E-3	2.51739E-3	6.28592E-3	2.4724E-2
1.3E1	4.0E0	0.0E0	5.25E2	3.53E2	-7.42513E-2	-8.8002E1	-3.33786E-4	-8.79999E1	4.76837E-5	5.72205E-3	9.27687E-2	1.5792E1	-1.98257E1	-1.99821E1	1.49935E1	2.42542E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.45567E-2
1.4E1	1.2E2	0.0E0	5.66E2	3.82E2	-7.39421E-2	-8.80015E1	-5.96046E-4	-8.79999E1	2.38419E-4	5.8651E-3	9.3174E-2	1.58203E1	-1.98378E1	-1.99217E1	1.50419E1	2.42753E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.47065E-2
1.5E1	8.9E1	0.0E0	6.06E2	4.11E2	-7.44831E-2	-8.8002E1	-3.57628E-4	-8.80001E1	1.19209E-4	5.65052E-3	9.30548E-2	1.57243E1	-1.97501E1	-2.00103E1	1.49971E1	2.42114E-9	2.52023E-3	2.52023E-3	6.32247E-3	2.46705E-2
1.6E1	3.89E2	0.0E0	6.47E2	4.41E2	-7.39421E-2	-8.80018E1	-2.6226E-4	-8.80002E1	7.15256E-5	5.45979E-3	9.30071E-2	1.57957E1	-1.98807E1	-1.99576E1	1.50076E1	2.41898E-9	2.51709E-3	2.51709E-3	6.34982E-3	2.47025E-2
1.7E1	1.006E3	0.0E0	6.87E2	4.7E2	-7.40967E-2	-8.80019E1	-2.6226E-4	-8.8E1	2.38419E-5	5.50747E-3	9.29594E-2	1.57638E1	-1.98915E1	-1.99546E1	1.4998E1	2.42347E-9	2.51739E-3	2.51739E-3	6.31817E-3	2.46188E-2
1.8E1	4.277E3	3.0E0	7.27E2	5.0E2	-7.37103E-2	-8.80018E1	-4.29153E-4	-8.80003E1	-2.38419E-4	5.62668E-3	9.28164E-2	1.57685E1	-1.98685E1	-1.99561E1	1.49947E1	2.42208E-9	2.52027E-3	2.52027E-3	6.30182E-3	2.45792E-2
1.9E1	2.053E3	0.0E0	7.68E2	5.29E2	-7.40192E-2	-8.8002E1	-3.33786E-4	-8.8E1	-2.38419E-5	5.74589E-3	9.26495E-2	1.57885E1	-1.98335E1	-1.99764E1	1.50178E1	2.42575E-9	2.51679E-3	2.51679E-3	6.29185E-3	2.4737E-2
2.0E1	2.7E1	0.0E0	8.08E2	5.58E2	-7.40967E-2	-8.80019E1	-6.4373E-4	-8.8E1	1.90735E-4	5.67436E-3	9.26971E-2	1.58095E1	-1.98723E1	-1.99204E1	1.49866E1	2.42208E-9	2.51693E-3	2.51693E-3	6.31299E-3	2.46664E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.40192E-2	-8.80018E1	-3.8147E-4	-8.80003E1	-1.19209E-4	5.74589E-3	9.27448E-2	1.57784E1	-1.98187E1	-1.99762E1	1.49935E1	2.42208E-9	2.51359E-3	2.51359E-3	6.32978E-3	2.4732E-2
2.2E1	1.2E1	0.0E0	8.89E2	6.17E2	-7.36328E-2	-8.80019E1	-6.91414E-4	-8.80004E1	-9.53674E-5	5.60284E-3	9.31025E-2	1.57601E1	-1.97915E1	-2.00157E1	1.49896E1	2.4226E-9	2.51814E-3	2.51814E-3	6.32858E-3	2.46376E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.37874E-2	-8.80019E1	-9.05991E-4	-8.80002E1	-2.6226E-4	5.88894E-3	9.31263E-2	1.58326E1	-1.98741E1	-1.99494E1	1.49944E1	2.4214E-9	2.51739E-3	2.51739E-3	6.33436E-3	2.47451E-2