[Scan]
initial_time=2015-12-22T16:46:29
final_time=2015-12-22T16:46:48
ip_count=19
run=1021
dataset=2
scan=41
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08799E-4
ql1_vset=
ql1_vmon=-8.20303E-1
ql1_imon=1.61735E-8
ql2_vset=
ql2_vmon=-7.98154E-1
ql2_imon=1.90355E-9
ql3_vset=
ql3_vmon=-9.13076E0
ql3_imon=7.12374E-9
ql4_vset=
ql4_vmon=-9.14176E0
ql4_imon=-5.49209E-10
mult1=-7.5983E-9
mult2=-2.84802E-9
rf_tmon=-4.35632E-3
rf_agc=3.29794E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.81741E-3
ql5_imon=1.51691E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63318E0
bslens_imon=2.29196E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19653E1
lens5a_imon=1.97837E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12482E2
lens4a_imon=2.04913E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53866E1
cs_ef1b_imon=2.83099E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04611E2
lens23_imon=1.0227E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05212E1
cs_ea1_imon=2.56202E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39616E0
lens1_imon=2.55034E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64511E1
os_ef1alow_imon=2.97606E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03879E1
cs_ea2_imon=1.53878E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84315E1
cs_ef1a_imon=2.93112E-5
olens2_vset=9.7E-1
olens2_vmon=9.70745E-1
olens2_imon=1.29617E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11353E1
os_restr1_imon=4.31784E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15028E1
os_ea1_imon=2.39319E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63621E1
os_ef1bup_imon=3.06948E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25682E0
cs_ionrep_imon=1.17386E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91873E2
cs_nozzle_imon=1.93225E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02027E1
cs_anode1_imon=2.94492E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20656E0
olens4_imon=3.4133E-8
tplens_vset=1.4E-1
tplens_vmon=1.60368E0
tplens_imon=-5.50185E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26548E1
iondef3_imon=1.48498E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26517E1
iondef2_imon=1.577E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02979E2
lens6_imon=2.98272E-4
ql6_vset=1.0E-1
ql6_vmon=9.2864E-2
ql6_imon=3.97311E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29221E0
ionrepsh_imon=1.75397E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3364E1
lens5b_imon=2.15605E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74725E1
cs_ef2b_imon=3.12149E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.35533E0
os_ea2_imon=-7.90865E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06079E2
lens4b_imon=2.00449E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7101E1
cs_ef2a_imon=3.19226E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0867E0
os_ef2alow_imon=-2.76471E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.02338E-1
os_ef2bup_imon=-5.45392E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10834E1
os_restr2_imon=3.42544E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23114E2
cs_ionfoca_imon=6.30813E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.23547E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73014E1
iondef1_imon=1.08255E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68225E1
iondef4_imon=1.08618E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=4.78817E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82785E-1
olens1_imon=7.70576E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10596E0
cs_ionaccel_imon=-1.90487E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02084E2
cs_ionfocb_imon=1.47223E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55975E1
einzel_imon=7.70553E-6
window_vset=0.0E0
window_vmon=1.65915E-1
window_imon=-1.1158E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82641E2
mask1_imon=2.39165E-4
mask2_vset=0.0E0
mask2_vmon=-1.86043E1
mask2_imon=-7.19492E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92704E3
multa_neg_imon=6.14638E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93622E3
defgrida_imon=7.06308E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50368E3
multb_neg_imon=4.76601E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.07779E0
defgridb_imon=6.57111E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33367E1
os_fil1_imon=9.43151E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08226E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62502E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30844E1
cs_fil1_imon=9.95284E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6361E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62966E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.11662E-2
os_fil2_imon=-2.77376E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.13288E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.48338E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34419E-1
cs_fil2_imon=-2.71479E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.94679E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22166E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.47451E-2
chamber_ion_pmon=2.42657E-9
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.34184E-1
res40_imon=-2.58425E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=209
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.0958E0	-8.21662E-1	-7.98011E-1	-9.13174E0	-9.14202E0	5.07832E-3	9.30786E-2	2.73375E1	-3.26996E1	-3.2615E1	2.68058E1	2.42553E-9	2.51632E-3	2.51632E-3	6.33436E-3	2.46608E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09627E0	-8.21137E-1	-7.98273E-1	-9.13165E0	-9.14226E0	5.36442E-3	9.31025E-2	2.72951E1	-3.26928E1	-3.26329E1	2.68244E1	2.42657E-9	2.51847E-3	2.51847E-3	6.33436E-3	2.46188E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.20589E-1	-7.97987E-1	-9.13148E0	-9.14207E0	5.93662E-3	9.32932E-2	2.72931E1	-3.26524E1	-3.26368E1	2.68106E1	2.42315E-9	2.5147E-3	2.5147E-3	6.32418E-3	2.46882E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09696E0	-8.20541E-1	-7.98011E-1	-9.13098E0	-9.14183E0	5.72205E-3	9.29832E-2	2.72974E1	-3.26679E1	-3.26278E1	2.68226E1	2.42331E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.4685E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09565E0	-8.20327E-1	-7.98392E-1	-9.13131E0	-9.14214E0	5.79357E-3	9.31025E-2	2.7254E1	-3.26488E1	-3.2629E1	2.68142E1	2.42243E-9	2.52276E-3	2.52276E-3	6.32356E-3	2.46398E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09595E0	-8.20398E-1	-7.9844E-1	-9.13131E0	-9.14211E0	5.65052E-3	9.29594E-2	2.73222E1	-3.26626E1	-3.26508E1	2.68148E1	2.42437E-9	2.5188E-3	2.5188E-3	6.29645E-3	2.47709E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09595E0	-8.20398E-1	-7.98559E-1	-9.13153E0	-9.14221E0	5.93662E-3	9.30548E-2	2.73014E1	-3.26566E1	-3.25972E1	2.68016E1	2.42542E-9	2.52318E-3	2.52318E-3	6.3074E-3	2.47065E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0965E0	-8.20208E-1	-7.98345E-1	-9.13153E0	-9.14197E0	6.00815E-3	9.30786E-2	2.73115E1	-3.26637E1	-3.26115E1	2.68163E1	2.42121E-9	2.51334E-3	2.51334E-3	6.31837E-3	2.47925E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09565E0	-8.20208E-1	-7.98368E-1	-9.13146E0	-9.14207E0	6.05583E-3	9.31025E-2	2.72544E1	-3.26596E1	-3.26213E1	2.68172E1	2.42564E-9	2.51919E-3	2.51919E-3	6.3445E-3	2.46582E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-8.2047E-1	-7.98416E-1	-9.13107E0	-9.14171E0	5.48363E-3	9.31501E-2	2.73155E1	-3.2664E1	-3.26272E1	2.68196E1	2.42243E-9	2.51632E-3	2.51632E-3	6.33436E-3	2.47029E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09565E0	-8.20351E-1	-7.98607E-1	-9.13167E0	-9.14214E0	5.55515E-3	9.32455E-2	2.73315E1	-3.2635E1	-3.25816E1	2.6807E1	2.42423E-9	2.51804E-3	2.51804E-3	6.31858E-3	2.46882E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.20565E-1	-7.98392E-1	-9.13129E0	-9.14197E0	5.43594E-3	9.29594E-2	2.72809E1	-3.26484E1	-3.26626E1	2.68208E1	2.41806E-9	2.51662E-3	2.51662E-3	6.30192E-3	2.4685E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09627E0	-8.20732E-1	-7.98583E-1	-9.13131E0	-9.14204E0	5.57899E-3	9.28164E-2	2.73473E1	-3.26456E1	-3.2596E1	2.6804E1	2.4245E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.47029E-2
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09634E0	-8.20661E-1	-7.98392E-1	-9.13093E0	-9.1419E0	5.62668E-3	9.2864E-2	2.72829E1	-3.26843E1	-3.26639E1	2.68076E1	2.42518E-9	2.51838E-3	2.51838E-3	6.34164E-3	2.46249E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09688E0	-8.20589E-1	-7.98583E-1	-9.13093E0	-9.14226E0	5.79357E-3	9.27687E-2	2.73556E1	-3.26987E1	-3.26092E1	2.68112E1	2.4214E-9	2.51739E-3	2.51739E-3	6.3074E-3	2.4724E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09627E0	-8.20374E-1	-7.98559E-1	-9.13126E0	-9.14202E0	5.55515E-3	9.30786E-2	2.73363E1	-3.26633E1	-3.2593E1	2.68304E1	2.42437E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.47709E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.20112E-1	-7.98631E-1	-9.13081E0	-9.1418E0	5.8651E-3	9.28164E-2	2.73098E1	-3.26537E1	-3.2652E1	2.68046E1	2.42226E-9	2.51007E-3	2.51007E-3	6.33486E-3	2.47494E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-8.20088E-1	-7.98392E-1	-9.13081E0	-9.1418E0	5.65052E-3	9.30548E-2	2.72919E1	-3.26518E1	-3.259E1	2.68018E1	2.42864E-9	2.51525E-3	2.51525E-3	6.32896E-3	2.45978E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-8.20041E-1	-7.98416E-1	-9.13069E0	-9.14187E0	5.81741E-3	9.29117E-2	2.73098E1	-3.26673E1	-3.26431E1	2.68076E1	2.42331E-9	2.52318E-3	2.52318E-3	6.31288E-3	2.4685E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-8.20303E-1	-7.98154E-1	-9.13076E0	-9.14176E0	5.81741E-3	9.2864E-2	2.73014E1	-3.26517E1	-3.26548E1	2.68225E1	2.42657E-9	2.51417E-3	2.51417E-3	6.32356E-3	2.47451E-2