[Scan]
initial_time=2015-12-22T16:46:55
final_time=2015-12-22T16:47:15
ip_count=19
run=1021
dataset=2
scan=42
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08731E-4
ql1_vset=
ql1_vmon=-8.19707E-1
ql1_imon=1.46768E-8
ql2_vset=
ql2_vmon=-7.98464E-1
ql2_imon=1.96844E-9
ql3_vset=
ql3_vmon=-9.13067E0
ql3_imon=3.49334E-9
ql4_vset=
ql4_vmon=-9.14166E0
ql4_imon=-2.12812E-10
mult1=-8.40388E-9
mult2=-2.70663E-9
rf_tmon=-5.4377E-3
rf_agc=3.24383E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.6982E-3
ql5_imon=1.6311E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67801E0
bslens_imon=2.53264E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19966E1
lens5a_imon=1.98864E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12495E2
lens4a_imon=2.04944E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53869E1
cs_ef1b_imon=2.82665E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04598E2
lens23_imon=1.02192E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04557E1
cs_ea1_imon=2.57724E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39026E0
lens1_imon=2.70253E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6471E1
os_ef1alow_imon=2.97369E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03838E1
cs_ea2_imon=1.53949E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84382E1
cs_ef1a_imon=2.9308E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.28464E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11195E1
os_restr1_imon=4.30067E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15028E1
os_ea1_imon=2.37266E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63629E1
os_ef1bup_imon=3.08181E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22496E0
cs_ionrep_imon=1.18271E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91892E2
cs_nozzle_imon=1.9331E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01923E1
cs_anode1_imon=2.93224E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20575E0
olens4_imon=3.32026E-8
tplens_vset=1.4E-1
tplens_vmon=1.58834E0
tplens_imon=-3.94451E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26579E1
iondef3_imon=1.45702E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26056E1
iondef2_imon=1.58762E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02988E2
lens6_imon=2.98289E-4
ql6_vset=1.0E-1
ql6_vmon=9.30309E-2
ql6_imon=4.0581E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24384E0
ionrepsh_imon=1.76778E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33911E1
lens5b_imon=2.18932E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74633E1
cs_ef2b_imon=3.11857E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.40429E0
os_ea2_imon=-6.06816E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06121E2
lens4b_imon=2.0058E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71522E1
cs_ef2a_imon=3.18524E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07018E0
os_ef2alow_imon=-2.65194E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.0343E-1
os_ef2bup_imon=-5.40897E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10781E1
os_restr2_imon=3.41734E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2306E2
cs_ionfoca_imon=6.30141E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01725E1
cs_anode2_imon=2.24821E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73183E1
iondef1_imon=1.07653E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68328E1
iondef4_imon=1.07404E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=5.31256E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82571E-1
olens1_imon=7.74118E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11392E0
cs_ionaccel_imon=-1.8014E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47158E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56321E1
einzel_imon=7.64459E-6
window_vset=0.0E0
window_vmon=1.45263E-1
window_imon=-1.12746E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82614E2
mask1_imon=2.39149E-4
mask2_vset=0.0E0
mask2_vmon=-1.86266E1
mask2_imon=-7.09401E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92517E3
multa_neg_imon=8.12137E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93652E3
defgrida_imon=7.52321E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50192E3
multb_neg_imon=6.1216E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.55615E0
defgridb_imon=6.25256E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33375E1
os_fil1_imon=9.42126E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06909E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62701E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3092E1
cs_fil1_imon=9.94534E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62894E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62942E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.16727E-2
os_fil2_imon=-2.66597E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88104E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.19863E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36384E-1
cs_fil2_imon=-2.63593E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.17226E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22228E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.47065E-2
chamber_ion_pmon=2.42647E-9
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.18757E-1
res40_imon=-2.60869E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-8.19898E-1	-7.98607E-1	-9.13043E0	-9.14173E0	5.55515E-3	9.29832E-2	2.73147E1	-3.26488E1	-3.26224E1	2.6786E1	2.42331E-9	2.51771E-3	2.51771E-3	6.33486E-3	2.4814E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09549E0	-8.1985E-1	-7.98249E-1	-9.13031E0	-9.14192E0	5.76973E-3	9.28164E-2	2.72769E1	-3.26646E1	-3.26327E1	2.68007E1	2.42243E-9	2.51525E-3	2.51525E-3	6.31817E-3	2.47029E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09557E0	-8.19826E-1	-7.9875E-1	-9.13005E0	-9.14192E0	5.88894E-3	9.2864E-2	2.72889E1	-3.26723E1	-3.26158E1	2.67966E1	2.4339E-9	2.51915E-3	2.51915E-3	6.31858E-3	2.47758E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09495E0	-8.19826E-1	-7.98464E-1	-9.1301E0	-9.1418E0	5.67436E-3	9.28402E-2	2.73434E1	-3.26644E1	-3.26183E1	2.6816E1	2.42331E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.4685E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-8.19945E-1	-7.98655E-1	-9.13014E0	-9.14178E0	5.74589E-3	9.27687E-2	2.73297E1	-3.26332E1	-3.26476E1	2.68322E1	2.42553E-9	2.51954E-3	2.51954E-3	6.31278E-3	2.46608E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09533E0	-8.20255E-1	-7.98321E-1	-9.13012E0	-9.14207E0	5.43594E-3	9.26495E-2	2.72949E1	-3.26741E1	-3.26164E1	2.68166E1	2.41911E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.4685E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09588E0	-8.19802E-1	-7.98512E-1	-9.13014E0	-9.14209E0	5.29289E-3	9.3317E-2	2.72709E1	-3.26512E1	-3.25719E1	2.67974E1	2.42858E-9	2.51771E-3	2.51771E-3	6.3074E-3	2.4685E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09541E0	-8.19898E-1	-7.9844E-1	-9.13048E0	-9.14159E0	5.43594E-3	9.31263E-2	2.72806E1	-3.2648E1	-3.26585E1	2.68076E1	2.42016E-9	2.51443E-3	2.51443E-3	6.32386E-3	2.47494E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09588E0	-8.1954E-1	-7.98178E-1	-9.13031E0	-9.14168E0	5.24521E-3	9.30786E-2	2.72933E1	-3.26909E1	-3.25971E1	2.67833E1	2.42315E-9	2.51915E-3	2.51915E-3	6.29067E-3	2.46882E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09619E0	-8.19373E-1	-7.98297E-1	-9.13002E0	-9.14197E0	5.34058E-3	9.29832E-2	2.73163E1	-3.26691E1	-3.26484E1	2.68178E1	2.42858E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.46421E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09634E0	-8.19921E-1	-7.98345E-1	-9.13022E0	-9.14178E0	5.31673E-3	9.29832E-2	2.73663E1	-3.27442E1	-3.2593E1	2.68112E1	2.42463E-9	2.51814E-3	2.51814E-3	6.31269E-3	2.46376E-2
1.5E1	2.0E0	0.0E0	6.06E2	4.11E2	-2.09634E0	-8.1985E-1	-7.98512E-1	-9.13022E0	-9.14133E0	5.48363E-3	9.30071E-2	2.73357E1	-3.26689E1	-3.25893E1	2.68088E1	2.42101E-9	2.51804E-3	2.51804E-3	6.31299E-3	2.4601E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09611E0	-8.19945E-1	-7.98655E-1	-9.13007E0	-9.14168E0	5.6982E-3	9.29594E-2	2.72702E1	-3.26981E1	-3.26603E1	2.68322E1	2.42208E-9	2.52027E-3	2.52027E-3	6.33538E-3	2.46882E-2
1.7E1	2.0E0	0.0E0	6.87E2	4.7E2	-2.09634E0	-8.19826E-1	-7.9875E-1	-9.13014E0	-9.14197E0	5.34058E-3	9.28164E-2	2.72684E1	-3.26939E1	-3.26416E1	2.67955E1	2.42858E-9	2.51334E-3	2.51334E-3	6.32386E-3	2.47709E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0965E0	-8.19826E-1	-7.98631E-1	-9.13012E0	-9.14185E0	5.26905E-3	9.29356E-2	2.7342E1	-3.26501E1	-3.26048E1	2.68186E1	2.42331E-9	2.5199E-3	2.5199E-3	6.29098E-3	2.47709E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09688E0	-8.19898E-1	-7.98678E-1	-9.13029E0	-9.14183E0	5.34058E-3	9.31501E-2	2.73137E1	-3.26174E1	-3.25923E1	2.68238E1	2.42675E-9	2.51886E-3	2.51886E-3	6.33863E-3	2.46151E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09572E0	-8.19898E-1	-7.98893E-1	-9.13053E0	-9.14195E0	5.6982E-3	9.2864E-2	2.72811E1	-3.26951E1	-3.26278E1	2.6813E1	2.42121E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.47709E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09503E0	-8.19874E-1	-7.98488E-1	-9.13045E0	-9.1419E0	5.67436E-3	9.33886E-2	2.72709E1	-3.26697E1	-3.26437E1	2.68106E1	2.41596E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.47065E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09588E0	-8.20017E-1	-7.98726E-1	-9.13041E0	-9.14197E0	5.57899E-3	9.28879E-2	2.73213E1	-3.26681E1	-3.2611E1	2.6807E1	2.42553E-9	2.51847E-3	2.51847E-3	6.32356E-3	2.46398E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-8.19707E-1	-7.98464E-1	-9.13067E0	-9.14166E0	5.6982E-3	9.30309E-2	2.73183E1	-3.26056E1	-3.26579E1	2.68328E1	2.42647E-9	2.51771E-3	2.51771E-3	6.3074E-3	2.47065E-2