[Scan]
initial_time=2015-12-22T16:48:16
final_time=2015-12-22T16:48:35
ip_count=19
run=1021
dataset=2
scan=45
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09518E0
qbias_imon=-1.08758E-4
ql1_vset=
ql1_vmon=-8.18539E-1
ql1_imon=1.40953E-8
ql2_vset=
ql2_vmon=-7.98535E-1
ql2_imon=1.99517E-9
ql3_vset=
ql3_vmon=-9.13095E0
ql3_imon=1.53964E-9
ql4_vset=
ql4_vmon=-9.14187E0
ql4_imon=-4.08292E-11
mult1=-9.83505E-9
mult2=-2.61543E-9
rf_tmon=-5.88293E-3
rf_agc=3.18926E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.36442E-3
ql5_imon=1.69287E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66373E0
bslens_imon=2.58101E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20115E1
lens5a_imon=1.98199E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12498E2
lens4a_imon=2.05046E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53767E1
cs_ef1b_imon=2.83319E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04611E2
lens23_imon=1.02193E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0503E1
cs_ea1_imon=2.56383E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36535E0
lens1_imon=2.67114E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64583E1
os_ef1alow_imon=2.97915E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03804E1
cs_ea2_imon=1.5357E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84457E1
cs_ef1a_imon=2.9275E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=1.29716E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11292E1
os_restr1_imon=4.30964E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15053E1
os_ea1_imon=2.39259E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63928E1
os_ef1bup_imon=3.09031E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23648E0
cs_ionrep_imon=1.18998E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91865E2
cs_nozzle_imon=1.93431E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01984E1
cs_anode1_imon=2.93125E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20556E0
olens4_imon=3.29961E-8
tplens_vset=1.4E-1
tplens_vmon=1.56032E0
tplens_imon=-4.61569E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26305E1
iondef3_imon=1.47333E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26428E1
iondef2_imon=1.58544E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02978E2
lens6_imon=2.98353E-4
ql6_vset=1.0E-1
ql6_vmon=9.29832E-2
ql6_imon=4.11261E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27012E0
ionrepsh_imon=1.75776E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33742E1
lens5b_imon=2.18711E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74844E1
cs_ef2b_imon=3.12399E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46599E0
os_ea2_imon=-5.48088E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06087E2
lens4b_imon=2.00684E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71276E1
cs_ef2a_imon=3.18574E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08076E0
os_ef2alow_imon=-2.72402E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.90147E-1
os_ef2bup_imon=-5.35505E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10911E1
os_restr2_imon=3.40992E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2308E2
cs_ionfoca_imon=6.30108E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01871E1
cs_anode2_imon=2.24299E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7276E1
iondef1_imon=1.07715E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6825E1
iondef4_imon=1.08578E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=5.45893E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=7.7318E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12952E0
cs_ionaccel_imon=-1.91188E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02068E2
cs_ionfocb_imon=1.47222E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56337E1
einzel_imon=7.64293E-6
window_vset=0.0E0
window_vmon=1.61458E-1
window_imon=-1.01366E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82628E2
mask1_imon=2.39114E-4
mask2_vset=0.0E0
mask2_vmon=-1.86288E1
mask2_imon=-7.21738E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92668E3
multa_neg_imon=7.13407E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=6.33737E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=7.2314E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40457E0
defgridb_imon=6.02374E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33393E1
os_fil1_imon=9.42383E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06986E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6279E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30947E1
cs_fil1_imon=9.97174E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62827E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62833E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.06081E-2
os_fil2_imon=-2.78726E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86602E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.30653E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34223E-1
cs_fil2_imon=-2.33191E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.11661E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22319E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.4685E-2
chamber_ion_pmon=2.42964E-9
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.98484E-1
res40_imon=-2.50695E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-8.19039E-1	-7.98416E-1	-9.131E0	-9.14145E0	5.53131E-3	9.34362E-2	2.72909E1	-3.26555E1	-3.2659E1	2.6814E1	2.43492E-9	2.51007E-3	2.51007E-3	6.32386E-3	2.46207E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09464E0	-8.19087E-1	-7.98464E-1	-9.13105E0	-9.14154E0	5.29289E-3	9.30786E-2	2.73237E1	-3.26909E1	-3.26368E1	2.6816E1	2.4359E-9	2.51632E-3	2.51632E-3	6.30202E-3	2.45978E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0948E0	-8.19325E-1	-7.98225E-1	-9.13084E0	-9.14164E0	5.62668E-3	9.29117E-2	2.72985E1	-3.26482E1	-3.26422E1	2.68064E1	2.43069E-9	2.51662E-3	2.51662E-3	6.32936E-3	2.47065E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09456E0	-8.19016E-1	-7.98583E-1	-9.13095E0	-9.14195E0	5.76973E-3	9.29832E-2	2.73204E1	-3.2593E1	-3.26001E1	2.68105E1	2.42647E-9	2.51225E-3	2.51225E-3	6.31288E-3	2.46636E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-8.18872E-1	-7.98345E-1	-9.13093E0	-9.14173E0	5.57899E-3	9.32455E-2	2.73075E1	-3.26717E1	-3.26332E1	2.6807E1	2.42361E-9	2.51709E-3	2.51709E-3	6.30212E-3	2.46582E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.19111E-1	-7.98535E-1	-9.13107E0	-9.14173E0	5.62668E-3	9.31263E-2	2.73069E1	-3.26308E1	-3.26242E1	2.68151E1	2.41994E-9	2.50914E-3	2.50914E-3	6.34099E-3	2.47539E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09418E0	-8.1892E-1	-7.98559E-1	-9.13074E0	-9.14173E0	5.53131E-3	9.32932E-2	2.72859E1	-3.2626E1	-3.26386E1	2.68082E1	2.42331E-9	2.51225E-3	2.51225E-3	6.3074E-3	2.4814E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.18992E-1	-7.98607E-1	-9.13105E0	-9.14178E0	5.74589E-3	9.33886E-2	2.72715E1	-3.26639E1	-3.26248E1	2.68182E1	2.42226E-9	2.51334E-3	2.51334E-3	6.31837E-3	2.47065E-2
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09433E0	-8.19087E-1	-7.98225E-1	-9.13076E0	-9.1419E0	5.45979E-3	9.30548E-2	2.73171E1	-3.26579E1	-3.26308E1	2.67984E1	2.42226E-9	2.51443E-3	2.51443E-3	6.32936E-3	2.47065E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09449E0	-8.18992E-1	-7.98297E-1	-9.13086E0	-9.1418E0	5.34058E-3	9.3174E-2	2.73135E1	-3.26434E1	-3.26002E1	2.68274E1	2.41911E-9	2.51443E-3	2.51443E-3	6.32936E-3	2.47065E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09418E0	-8.19039E-1	-7.98559E-1	-9.13067E0	-9.14176E0	5.53131E-3	9.3317E-2	2.73021E1	-3.26378E1	-3.26425E1	2.68058E1	2.42226E-9	2.5199E-3	2.5199E-3	6.29645E-3	2.47279E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09441E0	-8.18801E-1	-7.98249E-1	-9.13091E0	-9.14183E0	5.8651E-3	9.33647E-2	2.72967E1	-3.26561E1	-3.26296E1	2.68208E1	2.42657E-9	2.52169E-3	2.52169E-3	6.3074E-3	2.46608E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0941E0	-8.18849E-1	-7.98464E-1	-9.1311E0	-9.14204E0	5.67436E-3	9.3174E-2	2.72803E1	-3.26201E1	-3.26508E1	2.67818E1	2.42753E-9	2.51771E-3	2.51771E-3	6.34588E-3	2.46636E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09449E0	-8.18658E-1	-7.98535E-1	-9.13115E0	-9.14192E0	5.60284E-3	9.31501E-2	2.73081E1	-3.26717E1	-3.25972E1	2.68238E1	2.42347E-9	2.51417E-3	2.51417E-3	6.3074E-3	2.45978E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09541E0	-8.18872E-1	-7.98416E-1	-9.13103E0	-9.14161E0	5.55515E-3	9.30548E-2	2.73063E1	-3.26434E1	-3.26344E1	2.68136E1	2.42121E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.47065E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.18801E-1	-7.98488E-1	-9.13095E0	-9.14171E0	5.38826E-3	9.34601E-2	2.73039E1	-3.26735E1	-3.26272E1	2.67949E1	2.42331E-9	2.52647E-3	2.52647E-3	6.31837E-3	2.47065E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.18896E-1	-7.98488E-1	-9.13072E0	-9.14195E0	5.24521E-3	9.34362E-2	2.73135E1	-3.26711E1	-3.2617E1	2.68069E1	2.42753E-9	2.51662E-3	2.51662E-3	6.32936E-3	2.47065E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0941E0	-8.18777E-1	-7.98488E-1	-9.13057E0	-9.14187E0	5.45979E-3	9.32455E-2	2.74201E1	-3.28248E1	-3.257E1	2.67648E1	2.42331E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.47065E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-8.18777E-1	-7.98702E-1	-9.13119E0	-9.14202E0	5.50747E-3	9.29832E-2	2.73351E1	-3.26176E1	-3.26597E1	2.68076E1	2.42243E-9	2.51954E-3	2.51954E-3	6.31278E-3	2.48085E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09518E0	-8.18539E-1	-7.98535E-1	-9.13095E0	-9.14187E0	5.36442E-3	9.29832E-2	2.7276E1	-3.26428E1	-3.26305E1	2.6825E1	2.42964E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.4685E-2