[Scan]
initial_time=2015-12-22T16:48:43
final_time=2015-12-22T16:49:02
ip_count=19
run=1021
dataset=2
scan=46
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09433E0
qbias_imon=-1.08821E-4
ql1_vset=
ql1_vmon=-8.18372E-1
ql1_imon=1.39064E-8
ql2_vset=
ql2_vmon=-7.9844E-1
ql2_imon=2.02886E-9
ql3_vset=
ql3_vmon=-9.13064E0
ql3_imon=1.23416E-9
ql4_vset=
ql4_vmon=-9.1419E0
ql4_imon=-9.25064E-12
mult1=-6.97105E-9
mult2=-2.78847E-9
rf_tmon=-6.03251E-3
rf_agc=3.18976E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.62668E-3
ql5_imon=1.6989E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64631E0
bslens_imon=2.63869E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20109E1
lens5a_imon=1.97838E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12476E2
lens4a_imon=2.04873E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53826E1
cs_ef1b_imon=2.83097E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04641E2
lens23_imon=1.0202E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04796E1
cs_ea1_imon=2.59123E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38458E0
lens1_imon=2.55217E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64602E1
os_ef1alow_imon=2.9791E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03648E1
cs_ea2_imon=1.53101E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83986E1
cs_ef1a_imon=2.94125E-5
olens2_vset=9.7E-1
olens2_vmon=9.70531E-1
olens2_imon=1.28962E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1152E1
os_restr1_imon=4.2949E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15414E1
os_ea1_imon=2.38538E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63755E1
os_ef1bup_imon=3.08577E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25871E0
cs_ionrep_imon=1.17664E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91904E2
cs_nozzle_imon=1.93362E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01911E1
cs_anode1_imon=2.93837E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20561E0
olens4_imon=3.29988E-8
tplens_vset=1.4E-1
tplens_vmon=1.59277E0
tplens_imon=-4.29124E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2638E1
iondef3_imon=1.48667E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26669E1
iondef2_imon=1.56418E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02955E2
lens6_imon=2.98465E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=4.11161E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31939E0
ionrepsh_imon=1.75452E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33748E1
lens5b_imon=2.20802E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74657E1
cs_ef2b_imon=3.11929E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.38668E0
os_ea2_imon=-7.17521E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06114E2
lens4b_imon=2.00677E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70543E1
cs_ef2a_imon=3.18344E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09E0
os_ef2alow_imon=-2.72041E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.10638E-1
os_ef2bup_imon=-5.40177E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10895E1
os_restr2_imon=3.40689E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.27585E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02007E1
cs_anode2_imon=2.23704E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72769E1
iondef1_imon=1.11428E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68058E1
iondef4_imon=1.08413E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=5.4193E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=7.78837E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11993E0
cs_ionaccel_imon=-1.87709E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47114E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56375E1
einzel_imon=7.7455E-6
window_vset=0.0E0
window_vmon=1.63884E-1
window_imon=-1.12746E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82645E2
mask1_imon=2.38983E-4
mask2_vset=0.0E0
mask2_vmon=-1.86116E1
mask2_imon=-4.31896E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92589E3
multa_neg_imon=7.27466E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93693E3
defgrida_imon=6.80962E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.10162E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47375E0
defgridb_imon=5.87233E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3337E1
os_fil1_imon=9.41862E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07065E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63269E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30954E1
cs_fil1_imon=9.96834E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63579E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63326E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.93184E-2
os_fil2_imon=-2.72603E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86902E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.10158E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3755E-1
cs_fil2_imon=-2.44973E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.1242E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22238E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.46996E-2
chamber_ion_pmon=2.42768E-9
chamber_cvt_pmon=2.51919E-3
foreline_cvt_pmon=2.51919E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.51794E-1
res40_imon=-2.64473E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=185
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09611E0	-8.18491E-1	-7.98392E-1	-9.13098E0	-9.1419E0	5.36442E-3	9.30548E-2	2.73128E1	-3.26885E1	-3.26001E1	2.68302E1	2.42647E-9	2.52209E-3	2.52209E-3	6.32936E-3	2.47709E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0958E0	-8.18634E-1	-7.98535E-1	-9.13091E0	-9.14192E0	5.34058E-3	9.29594E-2	2.73014E1	-3.26672E1	-3.26279E1	2.68169E1	2.43684E-9	2.51709E-3	2.51709E-3	6.32858E-3	2.47203E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09619E0	-8.18443E-1	-7.98416E-1	-9.13093E0	-9.1419E0	5.34058E-3	9.26495E-2	2.73381E1	-3.26306E1	-3.2637E1	2.68169E1	2.44183E-9	2.51527E-3	2.51527E-3	6.3074E-3	2.47178E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09595E0	-8.18515E-1	-7.98416E-1	-9.13112E0	-9.14187E0	5.45979E-3	9.27925E-2	2.73405E1	-3.26402E1	-3.26561E1	2.6795E1	2.44479E-9	2.5199E-3	2.5199E-3	6.33341E-3	2.47777E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09619E0	-8.18491E-1	-7.98607E-1	-9.13064E0	-9.1418E0	5.65052E-3	9.28402E-2	2.73219E1	-3.26434E1	-3.26152E1	2.67986E1	2.4328E-9	2.51552E-3	2.51552E-3	6.30192E-3	2.46636E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09603E0	-8.18563E-1	-7.98869E-1	-9.13091E0	-9.14209E0	5.26905E-3	9.26733E-2	2.73124E1	-3.26309E1	-3.26505E1	2.67976E1	2.43915E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.47065E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09673E0	-8.18348E-1	-7.98535E-1	-9.13088E0	-9.14168E0	5.38826E-3	9.29832E-2	2.72859E1	-3.26591E1	-3.25876E1	2.68064E1	2.43713E-9	2.51804E-3	2.51804E-3	6.32978E-3	2.46446E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09588E0	-8.18825E-1	-7.98512E-1	-9.13067E0	-9.14207E0	5.4121E-3	9.28879E-2	2.7288E1	-3.26474E1	-3.26052E1	2.67962E1	2.43915E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.4685E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09588E0	-8.18634E-1	-7.98607E-1	-9.13079E0	-9.14197E0	5.53131E-3	9.30786E-2	2.7288E1	-3.26602E1	-3.26319E1	2.68442E1	2.44021E-9	2.51662E-3	2.51662E-3	6.29645E-3	2.46207E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-8.18563E-1	-7.98655E-1	-9.131E0	-9.1419E0	5.76973E-3	9.29356E-2	2.7298E1	-3.26655E1	-3.26236E1	2.68105E1	2.43386E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.47065E-2
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09565E0	-8.18586E-1	-7.98726E-1	-9.13084E0	-9.14161E0	5.48363E-3	9.2864E-2	2.73161E1	-3.27019E1	-3.26138E1	2.68144E1	2.44422E-9	2.51954E-3	2.51954E-3	6.33977E-3	2.46608E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.18634E-1	-7.98798E-1	-9.13086E0	-9.14211E0	5.34058E-3	9.28402E-2	2.72889E1	-3.26783E1	-3.26266E1	2.68148E1	2.43821E-9	2.52027E-3	2.52027E-3	6.3074E-3	2.4732E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09572E0	-8.18539E-1	-7.98726E-1	-9.131E0	-9.14207E0	5.36442E-3	9.29356E-2	2.73204E1	-3.26148E1	-3.26431E1	2.68441E1	2.43809E-9	2.52318E-3	2.52318E-3	6.3074E-3	2.46421E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09595E0	-8.18563E-1	-7.98702E-1	-9.13095E0	-9.14211E0	5.45979E-3	9.2721E-2	2.73228E1	-3.26976E1	-3.26229E1	2.68076E1	2.44214E-9	2.52276E-3	2.52276E-3	6.32356E-3	2.4724E-2
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09557E0	-8.18706E-1	-7.98631E-1	-9.13088E0	-9.14195E0	5.50747E-3	9.32693E-2	2.72973E1	-3.26134E1	-3.26278E1	2.6777E1	2.44021E-9	2.51771E-3	2.51771E-3	6.30192E-3	2.46636E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-8.18539E-1	-7.98488E-1	-9.13074E0	-9.14204E0	5.74589E-3	9.3174E-2	2.73333E1	-3.26681E1	-3.2608E1	2.68045E1	2.43606E-9	2.52362E-3	2.52362E-3	6.31858E-3	2.46664E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09533E0	-8.183E-1	-7.98345E-1	-9.13072E0	-9.14154E0	5.96046E-3	9.35555E-2	2.73145E1	-3.26384E1	-3.26272E1	2.68204E1	2.43809E-9	2.51662E-3	2.51662E-3	6.30192E-3	2.46636E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09449E0	-8.18443E-1	-7.98702E-1	-9.13103E0	-9.14183E0	5.76973E-3	9.32217E-2	2.73213E1	-3.26536E1	-3.26326E1	2.6813E1	2.42967E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.4724E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-8.18181E-1	-7.98464E-1	-9.131E0	-9.14183E0	5.79357E-3	9.29594E-2	2.73051E1	-3.26098E1	-3.25855E1	2.68094E1	2.42647E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.47709E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09433E0	-8.18372E-1	-7.9844E-1	-9.13064E0	-9.1419E0	5.62668E-3	9.32932E-2	2.72769E1	-3.26669E1	-3.2638E1	2.68058E1	2.42768E-9	2.51919E-3	2.51919E-3	6.3074E-3	2.46996E-2