[Scan]
initial_time=2015-12-22T16:49:35
final_time=2015-12-22T16:49:55
ip_count=19
run=1021
dataset=2
scan=48
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08772E-4
ql1_vset=
ql1_vmon=-8.18062E-1
ql1_imon=1.39103E-8
ql2_vset=
ql2_vmon=-7.98297E-1
ql2_imon=2.00516E-9
ql3_vset=
ql3_vmon=-9.13095E0
ql3_imon=9.92584E-10
ql4_vset=
ql4_vmon=-9.14214E0
ql4_imon=5.90086E-12
mult1=-8.54588E-9
mult2=-2.73623E-9
rf_tmon=-4.14323E-3
rf_agc=3.29163E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.24521E-3
ql5_imon=1.69402E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67978E0
bslens_imon=2.6813E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20049E1
lens5a_imon=1.99359E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12483E2
lens4a_imon=2.05082E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53604E1
cs_ef1b_imon=2.83133E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04603E2
lens23_imon=1.02227E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05253E1
cs_ea1_imon=2.57653E-5
lens1_vset=-5.0E0
lens1_vmon=-5.45102E0
lens1_imon=2.50079E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64741E1
os_ef1alow_imon=2.96864E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04133E1
cs_ea2_imon=1.52391E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84406E1
cs_ef1a_imon=2.94125E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.29295E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11412E1
os_restr1_imon=4.2913E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15317E1
os_ea1_imon=2.36134E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63821E1
os_ef1bup_imon=3.0728E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2751E0
cs_ionrep_imon=1.17493E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91873E2
cs_nozzle_imon=1.93463E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01737E1
cs_anode1_imon=2.93873E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20539E0
olens4_imon=3.29568E-8
tplens_vset=1.4E-1
tplens_vmon=1.61666E0
tplens_imon=-3.44899E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26316E1
iondef3_imon=1.48604E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26652E1
iondef2_imon=1.57806E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02966E2
lens6_imon=2.98452E-4
ql6_vset=1.0E-1
ql6_vmon=9.29594E-2
ql6_imon=4.09772E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24089E0
ionrepsh_imon=1.75716E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3377E1
lens5b_imon=2.19605E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74531E1
cs_ef2b_imon=3.12398E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46859E0
os_ea2_imon=-7.34234E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06096E2
lens4b_imon=2.00502E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.72273E1
cs_ef2a_imon=3.17695E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06237E0
os_ef2alow_imon=-2.53661E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.92619E-1
os_ef2bup_imon=-5.37293E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10571E1
os_restr2_imon=3.41878E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23088E2
cs_ionfoca_imon=6.30141E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02031E1
cs_anode2_imon=2.24281E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72939E1
iondef1_imon=1.08255E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68261E1
iondef4_imon=1.09458E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=5.49629E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82618E-1
olens1_imon=7.79819E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13014E0
cs_ionaccel_imon=-1.95998E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02066E2
cs_ionfocb_imon=1.47179E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56261E1
einzel_imon=7.56891E-6
window_vset=0.0E0
window_vmon=1.70491E-1
window_imon=-1.09863E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82635E2
mask1_imon=2.38983E-4
mask2_vset=0.0E0
mask2_vmon=-1.86098E1
mask2_imon=-5.83262E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92496E3
multa_neg_imon=7.53029E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93598E3
defgrida_imon=8.33373E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50314E3
multb_neg_imon=3.69711E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.03349E0
defgridb_imon=6.48262E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33389E1
os_fil1_imon=9.42684E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07119E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63078E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30914E1
cs_fil1_imon=9.94407E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63958E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6265E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.05331E-2
os_fil2_imon=-2.11937E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.71285E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.13029E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34054E-1
cs_fil2_imon=-1.25441E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.31041E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22097E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.47279E-2
chamber_ion_pmon=2.42121E-9
chamber_cvt_pmon=2.52318E-3
foreline_cvt_pmon=2.52318E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.31371E-1
res40_imon=-2.56544E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=147
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09456E0	-8.18229E-1	-7.98774E-1	-9.13067E0	-9.14185E0	5.76973E-3	9.30071E-2	2.7268E1	-3.26573E1	-3.26359E1	2.67995E1	2.4214E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.47029E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09449E0	-8.18229E-1	-7.98869E-1	-9.13055E0	-9.14204E0	5.76973E-3	9.29117E-2	2.72384E1	-3.26689E1	-3.26346E1	2.6792E1	2.4226E-9	2.52025E-3	2.52025E-3	6.33388E-3	2.46376E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09595E0	-8.18276E-1	-7.98941E-1	-9.13079E0	-9.14185E0	5.76973E-3	9.29832E-2	2.72579E1	-3.26567E1	-3.26732E1	2.68034E1	2.43492E-9	2.52318E-3	2.52318E-3	6.32386E-3	2.47709E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09572E0	-8.18372E-1	-7.98726E-1	-9.13033E0	-9.14166E0	5.38826E-3	9.30786E-2	2.73169E1	-3.26478E1	-3.26502E1	2.68274E1	2.43492E-9	2.51334E-3	2.51334E-3	6.31837E-3	2.47065E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-8.18276E-1	-7.98798E-1	-9.13062E0	-9.14173E0	5.67436E-3	9.29594E-2	2.72632E1	-3.26484E1	-3.26154E1	2.68227E1	2.43694E-9	2.51739E-3	2.51739E-3	6.31817E-3	2.47662E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-8.18348E-1	-7.98726E-1	-9.13067E0	-9.14164E0	5.53131E-3	9.31025E-2	2.73265E1	-3.27129E1	-3.26138E1	2.68094E1	2.42864E-9	2.51632E-3	2.51632E-3	6.31817E-3	2.46819E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.18276E-1	-7.98702E-1	-9.13067E0	-9.14187E0	5.8651E-3	9.29356E-2	2.7298E1	-3.26354E1	-3.26213E1	2.6813E1	2.42331E-9	2.51771E-3	2.51771E-3	6.33486E-3	2.4685E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09588E0	-8.18157E-1	-7.98821E-1	-9.13069E0	-9.14161E0	5.74589E-3	9.31025E-2	2.73344E1	-3.26092E1	-3.25973E1	2.68238E1	2.42121E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.47065E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-8.18324E-1	-7.98726E-1	-9.1306E0	-9.14178E0	5.72205E-3	9.30309E-2	2.73488E1	-3.26231E1	-3.26054E1	2.68163E1	2.42745E-9	2.52027E-3	2.52027E-3	6.31299E-3	2.47101E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.18324E-1	-7.98655E-1	-9.1311E0	-9.14149E0	5.50747E-3	9.30071E-2	2.72612E1	-3.26723E1	-3.26218E1	2.68082E1	2.42753E-9	2.51334E-3	2.51334E-3	6.31288E-3	2.4685E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-8.18348E-1	-7.98845E-1	-9.13115E0	-9.14183E0	5.62668E-3	9.30071E-2	2.73333E1	-3.26536E1	-3.2632E1	2.68136E1	2.42657E-9	2.51847E-3	2.51847E-3	6.33977E-3	2.47029E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09642E0	-8.18205E-1	-7.98655E-1	-9.13084E0	-9.14211E0	5.17368E-3	9.29117E-2	2.73346E1	-3.26602E1	-3.2603E1	2.68292E1	2.43703E-9	2.52428E-3	2.52428E-3	6.3074E-3	2.47065E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09665E0	-8.18133E-1	-7.98583E-1	-9.1311E0	-9.14211E0	5.31673E-3	9.29832E-2	2.72867E1	-3.26058E1	-3.26597E1	2.6798E1	2.4328E-9	2.51498E-3	2.51498E-3	6.32112E-3	2.47279E-2
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.18157E-1	-7.98392E-1	-9.13098E0	-9.14211E0	5.43594E-3	9.30786E-2	2.7367E1	-3.2672E1	-3.25711E1	2.68118E1					
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09565E0	-8.18181E-1	-7.98774E-1	-9.13069E0	-9.14195E0	5.43594E-3	9.29117E-2	2.7301E1	-3.26809E1	-3.26301E1	2.68034E1	2.42647E-9	2.52209E-3	2.52209E-3	6.3074E-3	2.4578E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09572E0	-8.18229E-1	-7.9875E-1	-9.13081E0	-9.14164E0	5.53131E-3	9.30071E-2	2.73363E1	-3.26314E1	-3.26164E1	2.6794E1	2.4245E-9	2.52276E-3	2.52276E-3	6.3074E-3	2.48721E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09533E0	-8.1811E-1	-7.98607E-1	-9.13074E0	-9.14204E0	5.43594E-3	9.31978E-2	2.73334E1	-3.26449E1	-3.26278E1	2.6817E1	2.42398E-9	2.519E-3	2.519E-3	6.32087E-3	2.46819E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09588E0	-8.18229E-1	-7.98273E-1	-9.13105E0	-9.14185E0	5.48363E-3	9.30786E-2	2.72937E1	-3.26663E1	-3.26452E1	2.68064E1					
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09572E0	-8.18181E-1	-7.98607E-1	-9.13112E0	-9.14195E0	5.05447E-3	9.31263E-2	2.73093E1	-3.26314E1	-3.26332E1	2.67716E1	2.42745E-9	2.51804E-3	2.51804E-3	6.33538E-3	2.4732E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-8.18062E-1	-7.98297E-1	-9.13095E0	-9.14214E0	5.24521E-3	9.29594E-2	2.72939E1	-3.26652E1	-3.26316E1	2.68261E1	2.42121E-9	2.52318E-3	2.52318E-3	6.32386E-3	2.47279E-2