[Scan]
initial_time=2015-12-22T16:50:02
final_time=2015-12-22T16:50:21
ip_count=19
run=1021
dataset=2
scan=49
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08727E-4
ql1_vset=
ql1_vmon=-8.17966E-1
ql1_imon=1.38278E-8
ql2_vset=
ql2_vmon=-7.98559E-1
ql2_imon=2.02014E-9
ql3_vset=
ql3_vmon=-9.13041E0
ql3_imon=9.24349E-10
ql4_vset=
ql4_vmon=-9.14187E0
ql4_imon=1.74284E-11
mult1=-8.45205E-9
mult2=-2.71661E-9
rf_tmon=-4.81885E-3
rf_agc=3.26126E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.43594E-3
ql5_imon=1.71028E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66361E0
bslens_imon=2.49898E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20086E1
lens5a_imon=1.94424E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12495E2
lens4a_imon=2.04942E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53676E1
cs_ef1b_imon=2.8407E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04589E2
lens23_imon=1.02154E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05233E1
cs_ea1_imon=2.55616E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37991E0
lens1_imon=2.38145E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64548E1
os_ef1alow_imon=2.97765E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03953E1
cs_ea2_imon=1.53544E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84508E1
cs_ef1a_imon=2.93369E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=1.29911E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11262E1
os_restr1_imon=4.29743E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14755E1
os_ea1_imon=2.35525E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63761E1
os_ef1bup_imon=3.07676E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24353E0
cs_ionrep_imon=1.18577E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91888E2
cs_nozzle_imon=1.9338E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01863E1
cs_anode1_imon=2.93513E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20558E0
olens4_imon=3.31048E-8
tplens_vset=1.4E-1
tplens_vmon=1.59001E0
tplens_imon=-4.13684E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26579E1
iondef3_imon=1.48585E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26404E1
iondef2_imon=1.56813E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02967E2
lens6_imon=2.98331E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=4.14201E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24108E0
ionrepsh_imon=1.76426E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33199E1
lens5b_imon=2.19253E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74802E1
cs_ef2b_imon=3.11893E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.54961E0
os_ea2_imon=-8.21384E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06103E2
lens4b_imon=2.00513E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70471E1
cs_ef2a_imon=3.16362E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04615E0
os_ef2alow_imon=-2.7096E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.90817E-1
os_ef2bup_imon=-5.38014E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11009E1
os_restr2_imon=3.42419E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23088E2
cs_ionfoca_imon=6.30736E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01677E1
cs_anode2_imon=2.2511E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73165E1
iondef1_imon=1.08917E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68028E1
iondef4_imon=1.08485E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=5.48017E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82761E-1
olens1_imon=7.78221E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12053E0
cs_ionaccel_imon=-1.86267E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0207E2
cs_ionfocb_imon=1.47255E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56171E1
einzel_imon=7.62657E-6
window_vset=0.0E0
window_vmon=1.8731E-1
window_imon=-1.11305E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.39099E-4
mask2_vset=0.0E0
mask2_vmon=-1.86578E1
mask2_imon=-7.63461E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92547E3
multa_neg_imon=8.16638E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93676E3
defgrida_imon=7.53463E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=6.34091E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.20131E0
defgridb_imon=6.11319E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.334E1
os_fil1_imon=9.41261E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06302E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62741E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30854E1
cs_fil1_imon=9.96408E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6263E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63006E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.00289E-2
os_fil2_imon=-2.76808E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.03721E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.20575E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35219E-1
cs_fil2_imon=-2.99032E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.23232E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2223E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.47925E-2
chamber_ion_pmon=2.4328E-9
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.56599E-1
res40_imon=-2.48976E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=176
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09433E0	-8.18014E-1	-7.9844E-1	-9.13069E0	-9.14192E0	5.62668E-3	9.34124E-2	2.73005E1	-3.26388E1	-3.26254E1	2.68128E1	2.42331E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.47279E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09464E0	-8.18086E-1	-7.98273E-1	-9.13076E0	-9.14178E0	5.67436E-3	9.32932E-2	2.73149E1	-3.26505E1	-3.26046E1	2.68132E1	2.42243E-9	2.52061E-3	2.52061E-3	6.33436E-3	2.47029E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-8.18205E-1	-7.98368E-1	-9.13084E0	-9.14176E0	5.57899E-3	9.32932E-2	2.72827E1	-3.26484E1	-3.26508E1	2.6803E1	2.4253E-9	2.52139E-3	2.52139E-3	6.34099E-3	2.4732E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-8.18324E-1	-7.98273E-1	-9.13067E0	-9.14192E0	5.55515E-3	9.31978E-2	2.72898E1	-3.26903E1	-3.2626E1	2.68302E1	2.42553E-9	2.51632E-3	2.51632E-3	6.32356E-3	2.47451E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-8.18276E-1	-7.98178E-1	-9.13072E0	-9.14207E0	5.57899E-3	9.32932E-2	2.72991E1	-3.26476E1	-3.26464E1	2.68268E1	2.42463E-9	2.51498E-3	2.51498E-3	6.32858E-3	2.46996E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-8.18253E-1	-7.98512E-1	-9.13103E0	-9.14207E0	5.55515E-3	9.30309E-2	2.72889E1	-3.26903E1	-3.26272E1	2.68313E1	2.42542E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.46636E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09634E0	-8.18324E-1	-7.98392E-1	-9.13098E0	-9.14218E0	5.62668E-3	9.32932E-2	2.72768E1	-3.26207E1	-3.26236E1	2.68111E1	2.42637E-9	2.52585E-3	2.52585E-3	6.31858E-3	2.47539E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09572E0	-8.18229E-1	-7.98535E-1	-9.13103E0	-9.14221E0	5.67436E-3	9.31025E-2	2.73381E1	-3.26579E1	-3.25515E1	2.68034E1	2.42553E-9	2.51525E-3	2.51525E-3	6.32896E-3	2.46819E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09526E0	-8.17943E-1	-7.9875E-1	-9.13107E0	-9.14211E0	5.79357E-3	9.31263E-2	2.73129E1	-3.26981E1	-3.25852E1	2.68028E1	2.42542E-9	2.51771E-3	2.51771E-3	6.30192E-3	2.47065E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.1811E-1	-7.98416E-1	-9.13072E0	-9.14197E0	5.50747E-3	9.31025E-2	2.72721E1	-3.2632E1	-3.2653E1	2.68232E1	2.42864E-9	2.51096E-3	2.51096E-3	6.32356E-3	2.47662E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09433E0	-8.18181E-1	-7.98416E-1	-9.13086E0	-9.14185E0	5.29289E-3	9.2721E-2	2.73321E1	-3.26807E1	-3.2617E1	2.6795E1	2.43703E-9	2.51771E-3	2.51771E-3	6.29645E-3	2.4685E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.18229E-1	-7.98321E-1	-9.13057E0	-9.14171E0	5.29289E-3	9.31263E-2	2.7257E1	-3.2632E1	-3.26392E1	2.6801E1	2.43703E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.48356E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-8.18229E-1	-7.9875E-1	-9.13103E0	-9.14202E0	5.38826E-3	9.30548E-2	2.73063E1	-3.26325E1	-3.26319E1	2.68204E1	2.43386E-9	2.51443E-3	2.51443E-3	6.29098E-3	2.47279E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09426E0	-8.17943E-1	-7.98774E-1	-9.1305E0	-9.14204E0	5.38826E-3	9.31263E-2	2.73027E1	-3.26248E1	-3.26543E1	2.67728E1	2.4245E-9	2.51739E-3	2.51739E-3	6.34518E-3	2.47874E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.1799E-1	-7.98559E-1	-9.13043E0	-9.14199E0	5.53131E-3	9.3317E-2	2.73676E1	-3.26278E1	-3.25076E1	2.68238E1	2.4253E-9	2.51359E-3	2.51359E-3	6.30182E-3	2.47758E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-8.17823E-1	-7.98631E-1	-9.131E0	-9.1418E0	5.19753E-3	9.32932E-2	2.73281E1	-3.26325E1	-3.27127E1	2.67926E1	2.42347E-9	2.52169E-3	2.52169E-3	6.32356E-3	2.47451E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-8.17752E-1	-7.98225E-1	-9.13084E0	-9.14207E0	5.36442E-3	9.32932E-2	2.73112E1	-3.2637E1	-3.25617E1	2.67957E1	2.42437E-9	2.52428E-3	2.52428E-3	6.32936E-3	2.47279E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09472E0	-8.17728E-1	-7.98607E-1	-9.13095E0	-9.14195E0	5.67436E-3	9.32217E-2	2.73138E1	-3.26793E1	-3.26463E1	2.68294E1	2.42315E-9	2.52027E-3	2.52027E-3	6.31858E-3	2.45792E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09518E0	-8.17823E-1	-7.98321E-1	-9.13064E0	-9.14183E0	5.62668E-3	9.36031E-2	2.73098E1	-3.26396E1	-3.26561E1	2.68304E1	2.41778E-9	2.51783E-3	2.51783E-3	6.2815E-3	2.4737E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.17966E-1	-7.98559E-1	-9.13041E0	-9.14187E0	5.43594E-3	9.32932E-2	2.73165E1	-3.26404E1	-3.26579E1	2.68028E1	2.4328E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.47925E-2