[Scan]
initial_time=2015-12-22T16:51:22
final_time=2015-12-22T16:51:41
ip_count=19
run=1021
dataset=2
scan=52
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09549E0
qbias_imon=-1.08764E-4
ql1_vset=
ql1_vmon=-8.17943E-1
ql1_imon=1.37806E-8
ql2_vset=
ql2_vmon=-7.98035E-1
ql2_imon=2.03155E-9
ql3_vset=
ql3_vmon=-9.13072E0
ql3_imon=6.42216E-10
ql4_vset=
ql4_vmon=-9.14204E0
ql4_imon=2.29597E-11
mult1=-9.25877E-9
mult2=-2.84037E-9
rf_tmon=-4.41629E-3
rf_agc=3.37061E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.38826E-3
ql5_imon=1.73874E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66854E0
bslens_imon=2.67474E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20163E1
lens5a_imon=1.98523E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12516E2
lens4a_imon=2.04898E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54007E1
cs_ef1b_imon=2.85007E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0459E2
lens23_imon=1.01879E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04862E1
cs_ea1_imon=2.56996E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34853E0
lens1_imon=2.54136E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64662E1
os_ef1alow_imon=2.94954E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03762E1
cs_ea2_imon=1.55264E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83896E1
cs_ef1a_imon=2.92468E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.29392E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1125E1
os_restr1_imon=4.33347E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15546E1
os_ea1_imon=2.37313E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63984E1
os_ef1bup_imon=3.07965E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2557E0
cs_ionrep_imon=1.19972E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91899E2
cs_nozzle_imon=1.9316E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01539E1
cs_anode1_imon=2.91891E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20592E0
olens4_imon=3.29627E-8
tplens_vset=1.4E-1
tplens_vmon=1.59337E0
tplens_imon=-4.29124E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26218E1
iondef3_imon=1.49244E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26446E1
iondef2_imon=1.60203E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02991E2
lens6_imon=2.98414E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=4.13107E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26351E0
ionrepsh_imon=1.77759E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33652E1
lens5b_imon=2.19504E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74681E1
cs_ef2b_imon=3.13551E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44737E0
os_ea2_imon=-5.44483E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06095E2
lens4b_imon=2.00464E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7145E1
cs_ef2a_imon=3.18632E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05756E0
os_ef2alow_imon=-3.00513E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.2085E-1
os_ef2bup_imon=-5.71531E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11069E1
os_restr2_imon=3.4141E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.29027E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01917E1
cs_anode2_imon=2.22226E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73261E1
iondef1_imon=1.07066E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67974E1
iondef4_imon=1.09999E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=5.50337E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82571E-1
olens1_imon=7.7642E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11993E0
cs_ionaccel_imon=-2.11134E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02013E2
cs_ionfocb_imon=1.4697E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56483E1
einzel_imon=7.97255E-6
window_vset=0.0E0
window_vmon=1.40458E-1
window_imon=-1.20675E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8257E2
mask1_imon=2.38792E-4
mask2_vset=0.0E0
mask2_vmon=-1.86266E1
mask2_imon=-3.30985E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92656E3
multa_neg_imon=7.58108E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93729E3
defgrida_imon=6.359E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=7.48735E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35645E0
defgridb_imon=6.1355E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33369E1
os_fil1_imon=9.423E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07209E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63121E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30905E1
cs_fil1_imon=9.95242E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62606E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63405E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.97053E-2
os_fil2_imon=-2.90623E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.6648E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.06549E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36126E-1
cs_fil2_imon=-2.08333E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.27437E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22308E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=2.46636E-2
chamber_ion_pmon=2.42331E-9
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.2116E-1
res40_imon=-2.81051E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=209
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	8.0E0	0.0E0	1.47E2	4.1E1	-2.09503E0	-8.18062E-1	-7.98607E-1	-9.13105E0	-9.14173E0	5.53131E-3	9.3174E-2	2.72842E1	-3.26718E1	-3.26753E1	2.67763E1	2.42437E-9	2.52318E-3	2.52318E-3	6.32936E-3	2.47279E-2
2.0E0	4.0E0	0.0E0	3.16E2	1.6E2	-2.09433E0	-8.17537E-1	-7.98702E-1	-9.13095E0	-9.14202E0	5.26905E-3	9.29594E-2	2.73075E1	-3.26634E1	-3.26223E1	2.68207E1	2.42279E-9	2.51935E-3	2.51935E-3	6.31563E-3	2.47065E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-8.17513E-1	-7.98392E-1	-9.13076E0	-9.14159E0	5.53131E-3	9.35555E-2	2.73279E1	-3.26873E1	-3.2617E1	2.6796E1					
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09433E0	-8.17871E-1	-7.98368E-1	-9.13081E0	-9.14133E0	5.31673E-3	9.31263E-2	2.72889E1	-3.26897E1	-3.26034E1	2.68018E1	2.41831E-9	2.52384E-3	2.52384E-3	6.30202E-3	2.4724E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09418E0	-8.17847E-1	-7.98321E-1	-9.13084E0	-9.14133E0	5.45979E-3	9.33886E-2	2.72919E1	-3.26603E1	-3.26248E1	2.67884E1	2.42971E-9	2.51182E-3	2.51182E-3	6.31798E-3	2.46169E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09387E0	-8.17609E-1	-7.98202E-1	-9.13084E0	-9.14133E0	5.24521E-3	9.32693E-2	2.7275E1	-3.2672E1	-3.26201E1	2.68046E1	2.42647E-9	2.50789E-3	2.50789E-3	6.31288E-3	2.47279E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-8.17513E-1	-7.98488E-1	-9.13057E0	-9.14149E0	5.26905E-3	9.31025E-2	2.72757E1	-3.2634E1	-3.26554E1	2.6825E1	2.42331E-9	2.51771E-3	2.51771E-3	6.33486E-3	2.47279E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.17704E-1	-7.98345E-1	-9.131E0	-9.14154E0	5.4121E-3	9.32932E-2	2.73129E1	-3.26663E1	-3.26302E1	2.68022E1	2.4253E-9	2.52027E-3	2.52027E-3	6.3074E-3	2.46446E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-8.17704E-1	-7.9844E-1	-9.13091E0	-9.14166E0	5.43594E-3	9.29832E-2	2.72933E1	-3.26655E1	-3.26183E1	2.68052E1	2.4214E-9	2.51954E-3	2.51954E-3	6.31817E-3	2.46819E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-8.17704E-1	-7.98321E-1	-9.13057E0	-9.14176E0	5.36442E-3	9.3174E-2	2.73363E1	-3.26567E1	-3.26248E1	2.6789E1	2.42548E-9	2.51809E-3	2.51809E-3	6.32371E-3	2.47366E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09441E0	-8.17823E-1	-7.98178E-1	-9.13062E0	-9.14204E0	5.76973E-3	9.33409E-2	2.73159E1	-3.26512E1	-3.25701E1	2.68154E1					
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09533E0	-8.17847E-1	-7.98273E-1	-9.13048E0	-9.14192E0	5.53131E-3	9.29117E-2	2.73135E1	-3.26494E1	-3.26302E1	2.68196E1	2.42647E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.46636E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.1799E-1	-7.98273E-1	-9.13057E0	-9.14176E0	5.55515E-3	9.32455E-2	2.73063E1	-3.26615E1	-3.26162E1	2.67932E1	2.4253E-9	2.52027E-3	2.52027E-3	6.32978E-3	2.4732E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09565E0	-8.18062E-1	-7.98273E-1	-9.13072E0	-9.14168E0	5.36442E-3	9.32217E-2	2.73181E1	-3.26726E1	-3.26189E1	2.68052E1	2.42121E-9	2.52099E-3	2.52099E-3	6.29645E-3	2.47494E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09565E0	-8.17895E-1	-7.98345E-1	-9.13074E0	-9.14166E0	5.53131E-3	9.29832E-2	2.73175E1	-3.26543E1	-3.26189E1	2.67902E1	2.42657E-9	2.51954E-3	2.51954E-3	6.29665E-3	2.46188E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-8.18038E-1	-7.98202E-1	-9.13105E0	-9.14178E0	5.45979E-3	9.29832E-2	2.73091E1	-3.26641E1	-3.26095E1	2.68194E1	2.42542E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.46207E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09595E0	-8.18038E-1	-7.98082E-1	-9.13093E0	-9.14173E0	5.34058E-3	9.29356E-2	2.73135E1	-3.26565E1	-3.26156E1	2.68192E1	2.42487E-9	2.51956E-3	2.51956E-3	6.31251E-3	2.47331E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09572E0	-8.17752E-1	-7.9813E-1	-9.13079E0	-9.14164E0	5.43594E-3	9.29594E-2	2.7344E1	-3.26726E1	-3.26001E1	2.68128E1	2.41923E-9	2.51793E-3	2.51793E-3	6.33112E-3	2.46987E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.18014E-1	-7.98106E-1	-9.13095E0	-9.14202E0	5.19753E-3	9.3174E-2	2.73977E1	-3.27652E1	-3.25989E1	2.68088E1	2.42347E-9	2.51632E-3	2.51632E-3	6.31278E-3	2.46819E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09549E0	-8.17943E-1	-7.98035E-1	-9.13072E0	-9.14204E0	5.38826E-3	9.31978E-2	2.73261E1	-3.26446E1	-3.26218E1	2.67974E1	2.42331E-9	2.51334E-3	2.51334E-3	6.32936E-3	2.46636E-2