[Scan]
initial_time=2015-12-22T16:52:15
final_time=2015-12-22T16:52:35
ip_count=19
run=1021
dataset=2
scan=54
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09549E0
qbias_imon=-1.08768E-4
ql1_vset=
ql1_vmon=-8.17418E-1
ql1_imon=1.37921E-8
ql2_vset=
ql2_vmon=-7.98607E-1
ql2_imon=1.98094E-9
ql3_vset=
ql3_vmon=-9.13129E0
ql3_imon=5.41091E-10
ql4_vset=
ql4_vmon=-9.1419E0
ql4_imon=3.01361E-11
mult1=-1.03665E-8
mult2=-2.71262E-9
rf_tmon=-4.24205E-3
rf_agc=3.46254E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.05447E-3
ql5_imon=1.72327E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63731E0
bslens_imon=2.45831E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19931E1
lens5a_imon=1.9628E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12477E2
lens4a_imon=2.05075E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53807E1
cs_ef1b_imon=2.83276E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04613E2
lens23_imon=1.02139E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04988E1
cs_ea1_imon=2.57299E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38259E0
lens1_imon=2.33797E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64776E1
os_ef1alow_imon=2.97288E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03973E1
cs_ea2_imon=1.53559E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84379E1
cs_ef1a_imon=2.93077E-5
olens2_vset=9.7E-1
olens2_vmon=9.70507E-1
olens2_imon=1.29558E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11165E1
os_restr1_imon=4.29519E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14993E1
os_ea1_imon=2.3716E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63839E1
os_ef1bup_imon=3.07903E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.29221E0
cs_ionrep_imon=1.18944E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91894E2
cs_nozzle_imon=1.93282E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01898E1
cs_anode1_imon=2.93077E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2058E0
olens4_imon=3.29774E-8
tplens_vset=1.4E-1
tplens_vmon=1.57713E0
tplens_imon=-1.0422E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26392E1
iondef3_imon=1.48462E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26837E1
iondef2_imon=1.58798E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02953E2
lens6_imon=2.98399E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=4.0674E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23912E0
ionrepsh_imon=1.76459E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33746E1
lens5b_imon=2.16525E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74702E1
cs_ef2b_imon=3.12432E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49337E0
os_ea2_imon=-6.81143E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06093E2
lens4b_imon=2.00481E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70361E1
cs_ef2a_imon=3.17492E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04719E0
os_ef2alow_imon=-2.67979E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.04697E-1
os_ef2bup_imon=-5.39023E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10728E1
os_restr2_imon=3.42014E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23095E2
cs_ionfoca_imon=6.3099E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02039E1
cs_anode2_imon=2.23653E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73027E1
iondef1_imon=1.09175E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68088E1
iondef4_imon=1.08654E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=5.46802E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=7.73978E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1095E0
cs_ionaccel_imon=-1.79518E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47141E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56281E1
einzel_imon=7.64184E-6
window_vset=0.0E0
window_vmon=1.61787E-1
window_imon=-1.12995E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82625E2
mask1_imon=2.39052E-4
mask2_vset=0.0E0
mask2_vmon=-1.86397E1
mask2_imon=-7.23031E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92688E3
multa_neg_imon=7.33208E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.53925E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50149E3
multb_neg_imon=6.89319E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.21952E0
defgridb_imon=6.16053E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33362E1
os_fil1_imon=9.41423E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07341E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63228E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30927E1
cs_fil1_imon=9.94718E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.64194E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62961E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.02798E-2
os_fil2_imon=-2.80914E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.94416E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.99108E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35054E-1
cs_fil2_imon=-2.87402E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.02417E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22238E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.46421E-2
chamber_ion_pmon=2.42331E-9
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.17338E-1
res40_imon=-2.52763E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=215
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09549E0	-8.18133E-1	-7.98368E-1	-9.13074E0	-9.14209E0	5.10216E-3	9.32217E-2	2.7285E1	-3.26909E1	-3.26384E1	2.67956E1	2.43175E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.4685E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09541E0	-8.17943E-1	-7.98202E-1	-9.13088E0	-9.14216E0	5.19753E-3	9.32217E-2	2.73088E1	-3.26672E1	-3.26266E1	2.68094E1	2.42243E-9	2.51096E-3	2.51096E-3	6.30202E-3	2.46608E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-8.17704E-1	-7.98535E-1	-9.13098E0	-9.14187E0	5.55515E-3	9.29832E-2	2.72987E1	-3.26909E1	-3.26202E1	2.6822E1	2.42423E-9	2.51915E-3	2.51915E-3	6.32418E-3	2.46882E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09557E0	-8.178E-1	-7.98607E-1	-9.13081E0	-9.14173E0	5.84126E-3	9.28879E-2	2.73075E1	-3.26663E1	-3.2605E1	2.68034E1	2.4245E-9	2.51847E-3	2.51847E-3	6.31278E-3	2.46819E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.1799E-1	-7.98535E-1	-9.13069E0	-9.14156E0	5.74589E-3	9.33647E-2	2.72913E1	-3.26512E1	-3.26549E1	2.68218E1	2.42243E-9	2.51632E-3	2.51632E-3	6.3074E-3	2.45768E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-8.17943E-1	-7.98416E-1	-9.13062E0	-9.14183E0	5.48363E-3	9.33647E-2	2.73165E1	-3.26392E1	-3.26122E1	2.68045E1	2.41952E-9	2.51732E-3	2.51732E-3	6.31017E-3	2.46974E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09595E0	-8.17728E-1	-7.98821E-1	-9.13074E0	-9.14171E0	5.24521E-3	9.33409E-2	2.72913E1	-3.26242E1	-3.26434E1	2.67873E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-8.17871E-1	-7.98583E-1	-9.13048E0	-9.1418E0	5.67436E-3	9.32932E-2	2.73191E1	-3.26428E1	-3.26087E1	2.6811E1	2.42864E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.4535E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09627E0	-8.17919E-1	-7.98559E-1	-9.1306E0	-9.14187E0	5.36442E-3	9.33409E-2	2.73077E1	-3.2661E1	-3.2589E1	2.68121E1	2.43273E-9	2.5216E-3	2.5216E-3	6.3074E-3	2.47531E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09565E0	-8.17919E-1	-7.9875E-1	-9.13076E0	-9.14183E0	5.34058E-3	9.31025E-2	2.72768E1	-3.2662E1	-3.26573E1	2.68238E1	2.41923E-9	2.51911E-3	2.51911E-3	6.30149E-3	2.47219E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0958E0	-8.17823E-1	-7.98583E-1	-9.13086E0	-9.14211E0	5.45979E-3	9.30548E-2	2.73448E1	-3.26999E1	-3.25972E1	2.68124E1	2.42553E-9	2.5131E-3	2.5131E-3	6.32896E-3	2.46398E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09588E0	-8.17728E-1	-7.98368E-1	-9.13072E0	-9.14164E0	5.38826E-3	9.34362E-2	2.73039E1	-3.26693E1	-3.26278E1	2.6789E1	2.42226E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.46421E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09627E0	-8.1749E-1	-7.98559E-1	-9.13074E0	-9.14173E0	5.53131E-3	9.34362E-2	2.72927E1	-3.26638E1	-3.26313E1	2.6804E1	2.42121E-9	2.52318E-3	2.52318E-3	6.30192E-3	2.47065E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09588E0	-8.17776E-1	-7.98202E-1	-9.13064E0	-9.14185E0	5.62668E-3	9.31263E-2	2.72939E1	-3.26832E1	-3.26349E1	2.68186E1	2.42553E-9	2.51954E-3	2.51954E-3	6.33436E-3	2.46819E-2
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09627E0	-8.17776E-1	-7.98106E-1	-9.13069E0	-9.14161E0	5.67436E-3	9.33647E-2	2.73442E1	-3.26452E1	-3.25888E1	2.68064E1	2.42121E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.47279E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09595E0	-8.17728E-1	-7.98345E-1	-9.13069E0	-9.14171E0	5.55515E-3	9.33647E-2	2.73165E1	-3.26585E1	-3.26134E1	2.68268E1	2.4214E-9	2.51417E-3	2.51417E-3	6.31278E-3	2.46398E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09603E0	-8.17943E-1	-7.98321E-1	-9.13062E0	-9.14176E0	5.36442E-3	9.34601E-2	2.73045E1	-3.26855E1	-3.25906E1	2.681E1	2.42226E-9	2.52318E-3	2.52318E-3	6.32386E-3	2.47279E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09557E0	-8.17752E-1	-7.98345E-1	-9.13067E0	-9.14183E0	5.24521E-3	9.31263E-2	2.73116E1	-3.26455E1	-3.26124E1	2.67926E1	2.42016E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.47494E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09572E0	-8.1749E-1	-7.98321E-1	-9.13134E0	-9.14161E0	5.22137E-3	9.3174E-2	2.73039E1	-3.26212E1	-3.26398E1	2.68282E1	2.41934E-9	2.52061E-3	2.52061E-3	6.32356E-3	2.46398E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09549E0	-8.17418E-1	-7.98607E-1	-9.13129E0	-9.1419E0	5.05447E-3	9.31978E-2	2.73027E1	-3.26837E1	-3.26392E1	2.68088E1	2.42331E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.46421E-2