[Scan]
initial_time=2015-12-22T16:53:09
final_time=2015-12-22T16:53:29
ip_count=19
run=1021
dataset=2
scan=56
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.08745E-4
ql1_vset=
ql1_vmon=-8.17537E-1
ql1_imon=1.36961E-8
ql2_vset=
ql2_vmon=-7.98941E-1
ql2_imon=2.08688E-9
ql3_vset=
ql3_vmon=-9.13129E0
ql3_imon=4.80413E-10
ql4_vset=
ql4_vmon=-9.14226E0
ql4_imon=2.89202E-11
mult1=-9.12881E-9
mult2=-2.59499E-9
rf_tmon=-5.58086E-3
rf_agc=3.33974E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.60284E-3
ql5_imon=1.71419E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64811E0
bslens_imon=2.41879E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19412E1
lens5a_imon=1.9618E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12505E2
lens4a_imon=2.05014E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53724E1
cs_ef1b_imon=2.82881E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04592E2
lens23_imon=1.02078E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04658E1
cs_ea1_imon=2.58041E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41342E0
lens1_imon=2.53054E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64608E1
os_ef1alow_imon=2.98054E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03877E1
cs_ea2_imon=1.52849E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84178E1
cs_ef1a_imon=2.93044E-5
olens2_vset=9.7E-1
olens2_vmon=9.70483E-1
olens2_imon=1.29827E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1146E1
os_restr1_imon=4.30968E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15498E1
os_ea1_imon=2.36303E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63725E1
os_ef1bup_imon=3.07568E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24729E0
cs_ionrep_imon=1.18313E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91889E2
cs_nozzle_imon=1.93265E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02025E1
cs_anode1_imon=2.94234E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20554E0
olens4_imon=3.27966E-8
tplens_vset=1.4E-1
tplens_vmon=1.59397E0
tplens_imon=-4.50754E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26243E1
iondef3_imon=1.49893E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26691E1
iondef2_imon=1.5786E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02974E2
lens6_imon=2.98335E-4
ql6_vset=1.0E-1
ql6_vmon=9.31025E-2
ql6_imon=4.14944E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26892E0
ionrepsh_imon=1.76497E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33333E1
lens5b_imon=2.1817E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74597E1
cs_ef2b_imon=3.11316E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44196E0
os_ea2_imon=-5.66113E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06089E2
lens4b_imon=2.00295E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71546E1
cs_ef2a_imon=3.20038E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06537E0
os_ef2alow_imon=-2.69519E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.90817E-1
os_ef2bup_imon=-5.37293E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11021E1
os_restr2_imon=3.42022E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23032E2
cs_ionfoca_imon=6.29784E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01803E1
cs_anode2_imon=2.24028E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72967E1
iondef1_imon=1.08472E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6778E1
iondef4_imon=1.07836E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=5.49897E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82547E-1
olens1_imon=7.78589E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13435E0
cs_ionaccel_imon=-1.79059E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02063E2
cs_ionfocb_imon=1.47179E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56189E1
einzel_imon=7.60855E-6
window_vset=0.0E0
window_vmon=1.71092E-1
window_imon=-1.13107E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82634E2
mask1_imon=2.3903E-4
mask2_vset=0.0E0
mask2_vmon=-1.86272E1
mask2_imon=-7.02193E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=6.72671E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93695E3
defgrida_imon=6.62937E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50144E3
multb_neg_imon=6.7231E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36247E0
defgridb_imon=6.07782E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33378E1
os_fil1_imon=9.43772E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06116E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63378E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30851E1
cs_fil1_imon=9.96708E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63051E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63124E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.08661E-2
os_fil2_imon=-2.95429E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.98915E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.99073E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35478E-1
cs_fil2_imon=-3.25462E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.28037E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22215E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32418E-3
inlet_lpb_pmon=2.46446E-2
chamber_ion_pmon=2.42101E-9
chamber_cvt_pmon=2.51693E-3
foreline_cvt_pmon=2.51693E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.47279E-1
res40_imon=-2.63032E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=206
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-8.17466E-1	-7.98774E-1	-9.13074E0	-9.14192E0	5.65052E-3	9.3317E-2	2.72957E1	-3.26366E1	-3.26419E1	2.67962E1	2.43698E-9	2.51593E-3	2.51593E-3	6.32371E-3	2.46941E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09603E0	-8.17323E-1	-7.98392E-1	-9.13115E0	-9.14183E0	5.79357E-3	9.30309E-2	2.73115E1	-3.26822E1	-3.26347E1	2.68435E1					
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09642E0	-8.17275E-1	-7.98702E-1	-9.13088E0	-9.14202E0	5.60284E-3	9.31025E-2	2.72811E1	-3.2629E1	-3.26452E1	2.68382E1	2.4226E-9	2.52025E-3	2.52025E-3	6.32858E-3	2.47203E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09673E0	-8.17513E-1	-7.98702E-1	-9.13081E0	-9.14202E0	5.67436E-3	9.30071E-2	2.73178E1	-3.26503E1	-3.26104E1	2.6796E1	2.41911E-9	2.51662E-3	2.51662E-3	6.32936E-3	2.46421E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09657E0	-8.17442E-1	-7.98583E-1	-9.13086E0	-9.14218E0	5.60284E-3	9.31501E-2	2.72715E1	-3.26573E1	-3.26308E1	2.68166E1	2.42361E-9	2.51709E-3	2.51709E-3	6.31269E-3	2.4741E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09688E0	-8.17227E-1	-7.98202E-1	-9.13086E0	-9.14223E0	5.60284E-3	9.30309E-2	2.73134E1	-3.26484E1	-3.26083E1	2.68154E1	2.42121E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.46207E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09696E0	-8.1718E-1	-7.98392E-1	-9.13093E0	-9.14218E0	5.45979E-3	9.29832E-2	2.72787E1	-3.26603E1	-3.26062E1	2.68163E1	2.4214E-9	2.51954E-3	2.51954E-3	6.32356E-3	2.47662E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0965E0	-8.17442E-1	-7.98249E-1	-9.13103E0	-9.14211E0	5.4121E-3	9.29117E-2	2.72985E1	-3.26825E1	-3.26122E1	2.67951E1	2.42437E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.47065E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09588E0	-8.1749E-1	-7.98106E-1	-9.131E0	-9.14195E0	5.57899E-3	9.31025E-2	2.72913E1	-3.26675E1	-3.26116E1	2.68047E1	2.42226E-9	2.5188E-3	2.5188E-3	6.30192E-3	2.4578E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09603E0	-8.17513E-1	-7.98249E-1	-9.13105E0	-9.14197E0	5.55515E-3	9.32217E-2	2.72979E1	-3.26332E1	-3.2626E1	2.68082E1	2.41701E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.47494E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-8.17227E-1	-7.98726E-1	-9.13112E0	-9.14197E0	5.62668E-3	9.29594E-2	2.72889E1	-3.26789E1	-3.26482E1	2.68094E1	2.42647E-9	2.52209E-3	2.52209E-3	6.32936E-3	2.4685E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0958E0	-8.17466E-1	-7.98917E-1	-9.13098E0	-9.1418E0	5.67436E-3	9.30071E-2	2.72931E1	-3.26561E1	-3.26176E1	2.68017E1	2.42542E-9	2.51552E-3	2.51552E-3	6.32936E-3	2.47065E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-8.17466E-1	-7.98535E-1	-9.13107E0	-9.1419E0	5.45979E-3	9.28402E-2	2.73291E1	-3.26362E1	-3.26488E1	2.6787E1	2.42437E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.47279E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.17752E-1	-7.98559E-1	-9.13131E0	-9.14195E0	5.72205E-3	9.2864E-2	2.73171E1	-3.26735E1	-3.26218E1	2.68007E1	2.42437E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.47065E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-8.17561E-1	-7.98845E-1	-9.13105E0	-9.14187E0	5.76973E-3	9.31501E-2	2.72709E1	-3.2636E1	-3.26325E1	2.67752E1	2.42016E-9	2.51443E-3	2.51443E-3	6.30192E-3	2.47279E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.17871E-1	-7.9875E-1	-9.13124E0	-9.14221E0	5.8651E-3	9.31501E-2	2.73099E1	-3.26464E1	-3.25996E1	2.68082E1	2.42121E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.47494E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09549E0	-8.17943E-1	-7.98941E-1	-9.13131E0	-9.14197E0	5.84126E-3	9.31978E-2	2.73141E1	-3.26663E1	-3.26074E1	2.68304E1	2.42657E-9	2.52061E-3	2.52061E-3	6.32356E-3	2.46819E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.17752E-1	-7.98965E-1	-9.13148E0	-9.14185E0	5.79357E-3	9.3174E-2	2.73155E1	-3.26237E1	-3.26515E1	2.6792E1	2.42542E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.47065E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09518E0	-8.17561E-1	-7.98893E-1	-9.13129E0	-9.14197E0	5.76973E-3	9.30071E-2	2.73265E1	-3.26621E1	-3.26352E1	2.67872E1	2.42057E-9	2.51709E-3	2.51709E-3	6.32328E-3	2.4741E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-8.17537E-1	-7.98941E-1	-9.13129E0	-9.14226E0	5.60284E-3	9.31025E-2	2.72967E1	-3.26691E1	-3.26243E1	2.6778E1	2.42101E-9	2.51693E-3	2.51693E-3	6.32418E-3	2.46446E-2