[Scan]
initial_time=2015-12-22T16:53:36
final_time=2015-12-22T16:53:56
ip_count=19
run=1021
dataset=2
scan=57
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08728E-4
ql1_vset=
ql1_vmon=-8.17227E-1
ql1_imon=1.38163E-8
ql2_vset=
ql2_vmon=-7.9844E-1
ql2_imon=1.98883E-9
ql3_vset=
ql3_vmon=-9.1311E0
ql3_imon=5.00906E-10
ql4_vset=
ql4_vmon=-9.14187E0
ql4_imon=4.2057E-11
mult1=-9.04203E-9
mult2=-2.73658E-9
rf_tmon=-5.16132E-3
rf_agc=3.2949E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.55515E-3
ql5_imon=1.71694E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67093E0
bslens_imon=2.62113E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19824E1
lens5a_imon=1.96882E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12472E2
lens4a_imon=2.05075E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53818E1
cs_ef1b_imon=2.83065E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04613E2
lens23_imon=1.02043E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04752E1
cs_ea1_imon=2.56733E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39262E0
lens1_imon=2.33797E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64527E1
os_ef1alow_imon=2.96966E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03537E1
cs_ea2_imon=1.54019E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84417E1
cs_ef1a_imon=2.92657E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.29945E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11343E1
os_restr1_imon=4.30312E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15482E1
os_ea1_imon=2.37302E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63687E1
os_ef1bup_imon=3.0555E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20078E0
cs_ionrep_imon=1.18342E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91909E2
cs_nozzle_imon=1.93105E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01827E1
cs_anode1_imon=2.9436E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20551E0
olens4_imon=3.28294E-8
tplens_vset=1.4E-1
tplens_vmon=1.56534E0
tplens_imon=-4.44003E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26062E1
iondef3_imon=1.49347E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26711E1
iondef2_imon=1.58798E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02998E2
lens6_imon=2.98296E-4
ql6_vset=1.0E-1
ql6_vmon=9.30309E-2
ql6_imon=4.10103E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23263E0
ionrepsh_imon=1.76636E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33463E1
lens5b_imon=2.19144E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74675E1
cs_ef2b_imon=3.10415E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44146E0
os_ea2_imon=-7.51931E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06111E2
lens4b_imon=2.00623E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7113E1
cs_ef2a_imon=3.182E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07136E0
os_ef2alow_imon=-2.80395E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.9086E-1
os_ef2bup_imon=-5.45904E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10874E1
os_restr2_imon=3.41727E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2311E2
cs_ionfoca_imon=6.31202E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.24785E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73213E1
iondef1_imon=1.08396E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68208E1
iondef4_imon=1.06766E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.55135E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8269E-1
olens1_imon=7.78639E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12087E0
cs_ionaccel_imon=-1.88301E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02077E2
cs_ionfocb_imon=1.47167E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56249E1
einzel_imon=7.62528E-6
window_vset=0.0E0
window_vmon=1.64399E-1
window_imon=-1.20533E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.39105E-4
mask2_vset=0.0E0
mask2_vmon=-1.8617E1
mask2_imon=-7.57025E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.62585E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93697E3
defgrida_imon=6.11098E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50168E3
multb_neg_imon=6.59234E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36717E0
defgridb_imon=6.05081E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33375E1
os_fil1_imon=9.41511E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07028E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63317E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30942E1
cs_fil1_imon=9.96512E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62818E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63466E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.90135E-2
os_fil2_imon=-2.76765E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95869E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.87339E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38142E-1
cs_fil2_imon=-3.08042E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.00879E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22256E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.47279E-2
chamber_ion_pmon=2.43703E-9
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-2.82171E-1
res40_imon=-2.58501E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=152
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09503E0	-8.17561E-1	-7.98821E-1	-9.13138E0	-9.1414E0	5.03063E-3	9.30786E-2	2.72898E1	-3.2672E1	-3.26095E1	2.67992E1	2.4245E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.47874E-2
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.09611E0	-8.17275E-1	-7.98488E-1	-9.13112E0	-9.14164E0	5.65052E-3	9.3317E-2	2.73225E1	-3.26807E1	-3.2623E1	2.67998E1	2.42657E-9	2.51954E-3	2.51954E-3	6.30202E-3	2.47029E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-8.17585E-1	-7.9844E-1	-9.13117E0	-9.14137E0	5.55515E-3	9.3317E-2	2.72927E1	-3.26042E1	-3.26472E1	2.68028E1	2.42226E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.47494E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.17537E-1	-7.9844E-1	-9.13112E0	-9.14173E0	5.79357E-3	9.34124E-2	2.73045E1	-3.26425E1	-3.26142E1	2.6814E1	2.4214E-9	2.52384E-3	2.52384E-3	6.34518E-3	2.47029E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09549E0	-8.17776E-1	-7.9844E-1	-9.13117E0	-9.14171E0	5.34058E-3	9.29117E-2	2.73411E1	-3.26224E1	-3.26404E1	2.67974E1	2.42864E-9	2.51954E-3	2.51954E-3	6.31817E-3	2.46819E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.1768E-1	-7.98488E-1	-9.13119E0	-9.14149E0	5.19753E-3	9.3174E-2	2.73069E1	-3.26609E1	-3.26224E1	2.6804E1	2.42016E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.47279E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-8.17418E-1	-7.98488E-1	-9.13091E0	-9.14161E0	5.53131E-3	9.3174E-2	2.73358E1	-3.26312E1	-3.26277E1	2.68007E1	2.42753E-9	2.51662E-3	2.51662E-3	6.28006E-3	2.47065E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.17418E-1	-7.98535E-1	-9.13107E0	-9.1419E0	5.26905E-3	9.32455E-2	2.72763E1	-3.26909E1	-3.26242E1	2.68208E1	2.42057E-9	2.52025E-3	2.52025E-3	6.29684E-3	2.48032E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.17442E-1	-7.98297E-1	-9.13079E0	-9.1419E0	5.34058E-3	9.29832E-2	2.72868E1	-3.26301E1	-3.26231E1	2.67878E1	2.42208E-9	2.51915E-3	2.51915E-3	6.3074E-3	2.47539E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-8.17561E-1	-7.98464E-1	-9.13107E0	-9.14211E0	5.22137E-3	9.30548E-2	2.72924E1	-3.26453E1	-3.26296E1	2.68214E1	2.42553E-9	2.51739E-3	2.51739E-3	6.3074E-3	2.46608E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09348E0	-8.17633E-1	-7.98512E-1	-9.13086E0	-9.14183E0	5.34058E-3	9.32455E-2	2.7321E1	-3.26459E1	-3.26112E1	2.67892E1	2.43316E-9	2.52316E-3	2.52316E-3	6.3074E-3	2.46666E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09348E0	-8.17275E-1	-7.98631E-1	-9.13086E0	-9.14166E0	5.62668E-3	9.29117E-2	2.72472E1	-3.26553E1	-3.26044E1	2.68024E1					
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09402E0	-8.17585E-1	-7.98798E-1	-9.13076E0	-9.14192E0	5.67436E-3	9.31501E-2	2.73287E1	-3.26874E1	-3.26266E1	2.67974E1	2.43622E-9	2.5199E-3	2.5199E-3	6.33065E-3	2.4627E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09464E0	-8.1768E-1	-7.98512E-1	-9.13081E0	-9.14159E0	5.53131E-3	9.31978E-2	2.73112E1	-3.2675E1	-3.26493E1	2.67878E1	2.43798E-9	2.5131E-3	2.5131E-3	6.32356E-3	2.44722E-2
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.17561E-1	-7.98631E-1	-9.13112E0	-9.14176E0	5.29289E-3	9.29832E-2	2.73016E1	-3.26726E1	-3.26083E1	2.68227E1	2.43606E-9	2.52027E-3	2.52027E-3	6.31299E-3	2.46664E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0948E0	-8.17251E-1	-7.98345E-1	-9.13098E0	-9.14197E0	5.50747E-3	9.31501E-2	2.72892E1	-3.26343E1	-3.26178E1	2.68202E1	2.43694E-9	2.51632E-3	2.51632E-3	6.31278E-3	2.47874E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09449E0	-8.17084E-1	-7.98512E-1	-9.13117E0	-9.14185E0	5.55515E-3	9.31978E-2	2.73003E1	-3.26873E1	-3.26446E1	2.681E1	2.44006E-9	2.52492E-3	2.52492E-3	6.31278E-3	2.46188E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09472E0	-8.17323E-1	-7.98845E-1	-9.13086E0	-9.14178E0	5.24521E-3	9.32217E-2	2.73279E1	-3.26837E1	-3.2632E1	2.68334E1	2.43703E-9	2.51334E-3	2.51334E-3	6.30192E-3	2.4685E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-8.1718E-1	-7.98368E-1	-9.13095E0	-9.14197E0	5.48363E-3	9.29832E-2	2.72821E1	-3.26608E1	-3.26443E1	2.67891E1	2.43382E-9	2.52061E-3	2.52061E-3	6.29665E-3	2.46819E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.17227E-1	-7.9844E-1	-9.1311E0	-9.14187E0	5.55515E-3	9.30309E-2	2.73213E1	-3.26711E1	-3.26062E1	2.68208E1	2.43703E-9	2.51443E-3	2.51443E-3	6.32386E-3	2.47279E-2