[Scan]
initial_time=2015-12-22T16:54:03
final_time=2015-12-22T16:54:22
ip_count=19
run=1021
dataset=2
scan=58
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09642E0
qbias_imon=-1.08687E-4
ql1_vset=
ql1_vmon=-8.1718E-1
ql1_imon=1.37938E-8
ql2_vset=
ql2_vmon=-7.98583E-1
ql2_imon=2.04775E-9
ql3_vset=
ql3_vmon=-9.13076E0
ql3_imon=4.28188E-10
ql4_vset=
ql4_vmon=-9.14192E0
ql4_imon=3.61681E-11
mult1=-9.83671E-9
mult2=-2.48307E-9
rf_tmon=-5.0772E-3
rf_agc=3.35318E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.19753E-3
ql5_imon=1.74145E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6421E0
bslens_imon=2.41518E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20199E1
lens5a_imon=1.97262E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12475E2
lens4a_imon=2.04891E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53661E1
cs_ef1b_imon=2.83586E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.0211E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05E1
cs_ea1_imon=2.56203E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36715E0
lens1_imon=2.49449E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6455E1
os_ef1alow_imon=2.99364E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04003E1
cs_ea2_imon=1.52704E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84406E1
cs_ef1a_imon=2.93943E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.29718E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10903E1
os_restr1_imon=4.31111E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1521E1
os_ea1_imon=2.3706E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63716E1
os_ef1bup_imon=3.07288E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23828E0
cs_ionrep_imon=1.19142E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91881E2
cs_nozzle_imon=1.93229E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02024E1
cs_anode1_imon=2.93248E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20544E0
olens4_imon=3.29131E-8
tplens_vset=1.4E-1
tplens_vmon=1.59337E0
tplens_imon=-3.13766E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26482E1
iondef3_imon=1.47513E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2638E1
iondef2_imon=1.5703E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03E2
lens6_imon=2.98382E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=4.15457E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27132E0
ionrepsh_imon=1.74478E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33754E1
lens5b_imon=2.19216E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74681E1
cs_ef2b_imon=3.10728E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44016E0
os_ea2_imon=-6.09372E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06108E2
lens4b_imon=2.00453E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71327E1
cs_ef2a_imon=3.17401E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09394E0
os_ef2alow_imon=-2.92558E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.72904E-1
os_ef2bup_imon=-5.35826E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10735E1
os_restr2_imon=3.42979E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23062E2
cs_ionfoca_imon=6.29784E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01931E1
cs_anode2_imon=2.23673E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72618E1
iondef1_imon=1.07823E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68166E1
iondef4_imon=1.08364E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=5.49802E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82666E-1
olens1_imon=7.81789E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14404E0
cs_ionaccel_imon=-1.76485E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02048E2
cs_ionfocb_imon=1.47167E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56394E1
einzel_imon=7.72954E-6
window_vset=0.0E0
window_vmon=1.89884E-1
window_imon=-1.03852E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82603E2
mask1_imon=2.39074E-4
mask2_vset=0.0E0
mask2_vmon=-1.85996E1
mask2_imon=-7.18797E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92612E3
multa_neg_imon=7.35757E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93693E3
defgrida_imon=6.75555E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=6.83486E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.29329E0
defgridb_imon=5.82907E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33394E1
os_fil1_imon=9.42843E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0646E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63164E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31051E1
cs_fil1_imon=1.00254E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63953E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63538E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.67389E-2
os_fil2_imon=-2.86032E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.72701E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.93273E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35769E-1
cs_fil2_imon=-2.37958E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=-1.38043E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22222E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28552E-3
inlet_lpb_pmon=2.47494E-2
chamber_ion_pmon=2.41806E-9
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.81419E-1
res40_imon=-2.49118E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09371E0	-8.16989E-1	-7.98726E-1	-9.13053E0	-9.14202E0	5.31673E-3	9.31263E-2	2.7301E1	-3.26779E1	-3.26537E1	2.68142E1	2.42226E-9	2.52428E-3	2.52428E-3	6.34037E-3	2.47709E-2
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.09317E0	-8.17037E-1	-7.98726E-1	-9.13069E0	-9.14183E0	5.34058E-3	9.32455E-2	2.72835E1	-3.26645E1	-3.26206E1	2.67746E1	2.4226E-9	2.51498E-3	2.51498E-3	6.31798E-3	2.46789E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0934E0	-8.17156E-1	-7.98368E-1	-9.13081E0	-9.14154E0	5.19753E-3	9.31978E-2	2.73063E1	-3.26554E1	-3.26092E1	2.68352E1	2.4253E-9	2.5147E-3	2.5147E-3	6.32418E-3	2.47101E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0941E0	-8.1737E-1	-7.98631E-1	-9.13045E0	-9.1418E0	5.19753E-3	9.3317E-2	2.72952E1	-3.26399E1	-3.26121E1	2.68151E1	2.42437E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.47925E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09549E0	-8.1737E-1	-7.98368E-1	-9.1306E0	-9.14164E0	5.31673E-3	9.28879E-2	2.73082E1	-3.26542E1	-3.26187E1	2.67842E1	2.42159E-9	2.51814E-3	2.51814E-3	6.33388E-3	2.4741E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09464E0	-8.17347E-1	-7.98464E-1	-9.13074E0	-9.14199E0	5.00679E-3	9.32217E-2	2.72987E1	-3.26648E1	-3.26283E1	2.6819E1	2.42016E-9	2.51552E-3	2.51552E-3	6.31288E-3	2.47065E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0941E0	-8.17323E-1	-7.98345E-1	-9.13107E0	-9.14168E0	5.05447E-3	9.27687E-2	2.72935E1	-3.26334E1	-3.26174E1	2.68292E1	2.42347E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.47874E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.17323E-1	-7.98202E-1	-9.13095E0	-9.1414E0	4.86374E-3	9.2721E-2	2.72786E1	-3.26349E1	-3.26201E1	2.68136E1	2.42647E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.47279E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09441E0	-8.1718E-1	-7.98321E-1	-9.13086E0	-9.14187E0	5.19753E-3	9.3174E-2	2.72905E1	-3.26568E1	-3.25979E1	2.68208E1	2.42542E-9	2.51443E-3	2.51443E-3	6.28552E-3	2.47279E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09433E0	-8.17418E-1	-7.98559E-1	-9.13105E0	-9.14195E0	5.17368E-3	9.32932E-2	2.73044E1	-3.26682E1	-3.26357E1	2.67991E1	2.42226E-9	2.51498E-3	2.51498E-3	6.33211E-3	2.47645E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09387E0	-8.1737E-1	-7.98321E-1	-9.131E0	-9.14145E0	5.00679E-3	9.30548E-2	2.72732E1	-3.26543E1	-3.26425E1	2.68172E1	2.42264E-9	2.52029E-3	2.52029E-3	6.34897E-3	2.47219E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.17299E-1	-7.98416E-1	-9.131E0	-9.14154E0	5.29289E-3	9.30071E-2	2.73003E1	-3.26777E1	-3.265E1	2.67974E1	2.42657E-9	2.52276E-3	2.52276E-3	6.33977E-3	2.46608E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-8.17275E-1	-7.98583E-1	-9.13079E0	-9.1414E0	5.48363E-3	9.30309E-2	2.7248E1	-3.26579E1	-3.26843E1	2.67896E1	2.42647E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.47065E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.17394E-1	-7.98416E-1	-9.13062E0	-9.14154E0	5.55515E-3	9.26495E-2	2.73183E1	-3.26458E1	-3.2641E1	2.68262E1	2.42016E-9	2.5199E-3	2.5199E-3	6.34588E-3	2.47065E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09557E0	-8.17347E-1	-7.9844E-1	-9.1305E0	-9.14168E0	5.29289E-3	9.28879E-2	2.7324E1	-3.26862E1	-3.26254E1	2.68273E1	2.41934E-9	2.52169E-3	2.52169E-3	6.32896E-3	2.4724E-2
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09619E0	-8.17204E-1	-7.98512E-1	-9.13057E0	-9.14164E0	4.74453E-3	9.30071E-2	2.73118E1	-3.26462E1	-3.26327E1	2.68094E1	2.42437E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.47279E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09696E0	-8.1749E-1	-7.98559E-1	-9.13045E0	-9.14173E0	5.10216E-3	9.30309E-2	2.73129E1	-3.26963E1	-3.26639E1	2.68202E1	2.4253E-9	2.52027E-3	2.52027E-3	6.31858E-3	2.46882E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09642E0	-8.17299E-1	-7.9844E-1	-9.13072E0	-9.14159E0	5.19753E-3	9.33647E-2	2.73097E1	-3.267E1	-3.26411E1	2.6781E1	2.4214E-9	2.52276E-3	2.52276E-3	6.32356E-3	2.46188E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09611E0	-8.17227E-1	-7.98655E-1	-9.13093E0	-9.14161E0	4.86374E-3	9.29117E-2	2.73231E1	-3.26843E1	-3.26218E1	2.68238E1	2.42037E-9	2.52276E-3	2.52276E-3	6.33977E-3	2.47451E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09642E0	-8.1718E-1	-7.98583E-1	-9.13076E0	-9.14192E0	5.19753E-3	9.3317E-2	2.72618E1	-3.2638E1	-3.26482E1	2.68166E1	2.41806E-9	2.5199E-3	2.5199E-3	6.28552E-3	2.47494E-2