[Scan]
initial_time=2015-12-22T16:54:56
final_time=2015-12-22T16:55:15
ip_count=19
run=1021
dataset=2
scan=60
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08707E-4
ql1_vset=
ql1_vmon=-8.17037E-1
ql1_imon=1.36806E-8
ql2_vset=
ql2_vmon=-7.9844E-1
ql2_imon=2.04128E-9
ql3_vset=
ql3_vmon=-9.13143E0
ql3_imon=3.76809E-10
ql4_vset=
ql4_vmon=-9.1418E0
ql4_imon=5.60522E-11
mult1=-1.25295E-8
mult2=-2.37935E-9
rf_tmon=2.3357E-3
rf_agc=4.00178E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.67436E-3
ql5_imon=1.73903E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63041E0
bslens_imon=2.48867E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20025E1
lens5a_imon=1.98066E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12487E2
lens4a_imon=2.0498E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53892E1
cs_ef1b_imon=2.83394E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04635E2
lens23_imon=1.0196E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04982E1
cs_ea1_imon=2.54332E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38566E0
lens1_imon=2.586E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64721E1
os_ef1alow_imon=2.96643E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03809E1
cs_ea2_imon=1.54565E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84394E1
cs_ef1a_imon=2.92376E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.29808E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11498E1
os_restr1_imon=4.29392E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15137E1
os_ea1_imon=2.36513E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63604E1
os_ef1bup_imon=3.0686E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25459E0
cs_ionrep_imon=1.18627E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91886E2
cs_nozzle_imon=1.93072E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01877E1
cs_anode1_imon=2.94247E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20515E0
olens4_imon=3.28238E-8
tplens_vset=1.4E-1
tplens_vmon=1.5859E0
tplens_imon=-3.00317E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.27512E1
iondef3_imon=1.48201E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26614E1
iondef2_imon=1.58908E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0298E2
lens6_imon=2.98436E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=4.14069E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28891E0
ionrepsh_imon=1.79123E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33858E1
lens5b_imon=2.18094E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74832E1
cs_ef2b_imon=3.11388E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44677E0
os_ea2_imon=-8.61857E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06122E2
lens4b_imon=2.00514E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71164E1
cs_ef2a_imon=3.18237E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06204E0
os_ef2alow_imon=-2.80636E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.84533E-1
os_ef2bup_imon=-5.50476E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10961E1
os_restr2_imon=3.41741E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23092E2
cs_ionfoca_imon=6.30602E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01934E1
cs_anode2_imon=2.24336E-5
iondef1_vset=2.763E1
iondef1_vmon=2.71892E1
iondef1_imon=1.09567E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67995E1
iondef4_imon=1.08017E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=5.4683E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82714E-1
olens1_imon=7.73312E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12078E0
cs_ionaccel_imon=-1.90065E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47114E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56436E1
einzel_imon=7.74772E-6
window_vset=0.0E0
window_vmon=1.60211E-1
window_imon=-1.17085E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82628E2
mask1_imon=2.39095E-4
mask2_vset=0.0E0
mask2_vmon=-1.86363E1
mask2_imon=-7.03025E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92613E3
multa_neg_imon=7.52756E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=6.58792E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.29172E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.28693E0
defgridb_imon=5.95525E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33368E1
os_fil1_imon=9.42576E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06674E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63526E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30941E1
cs_fil1_imon=9.96638E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6337E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62983E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.98293E-2
os_fil2_imon=-2.88706E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.94711E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.68881E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36375E-1
cs_fil2_imon=-2.79349E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.93542E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22251E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31798E-3
inlet_lpb_pmon=2.4741E-2
chamber_ion_pmon=2.42463E-9
chamber_cvt_pmon=2.51077E-3
foreline_cvt_pmon=2.51077E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.64998E-1
res40_imon=-2.58554E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09402E0	-8.1706E-1	-7.98416E-1	-9.13095E0	-9.1418E0	5.38826E-3	9.29117E-2	2.7344E1	-3.26756E1	-3.26354E1	2.68118E1	2.42518E-9	2.51725E-3	2.51725E-3	6.3131E-3	2.46693E-2
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.09464E0	-8.17037E-1	-7.98011E-1	-9.13124E0	-9.1419E0	5.38826E-3	9.28164E-2	2.72843E1	-3.27025E1	-3.26174E1	2.68136E1	2.41727E-9	2.51632E-3	2.51632E-3	6.32896E-3	2.45978E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-8.17204E-1	-7.98488E-1	-9.13062E0	-9.14204E0	5.45979E-3	9.29832E-2	2.73086E1	-3.26685E1	-3.26248E1	2.68059E1	2.42315E-9	2.52139E-3	2.52139E-3	6.30182E-3	2.48417E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0948E0	-8.1718E-1	-7.98607E-1	-9.13079E0	-9.14178E0	5.45979E-3	9.28879E-2	2.72971E1	-3.2667E1	-3.26567E1	2.68059E1	2.42553E-9	2.51417E-3	2.51417E-3	6.31817E-3	2.47662E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.17132E-1	-7.98535E-1	-9.13091E0	-9.14176E0	5.36442E-3	9.33647E-2	2.73195E1	-3.26536E1	-3.26188E1	2.68094E1	2.41579E-9	2.51575E-3	2.51575E-3	6.3282E-3	2.46963E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-8.1749E-1	-7.98678E-1	-9.13098E0	-9.14168E0	5.62668E-3	9.3174E-2	2.73063E1	-3.26856E1	-3.26242E1	2.68196E1	2.42858E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.47494E-2
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-8.1718E-1	-7.98678E-1	-9.1311E0	-9.1418E0	5.26905E-3	9.31501E-2	2.72985E1	-3.26705E1	-3.26296E1	2.68128E1	2.42657E-9	2.52276E-3	2.52276E-3	6.31278E-3	2.47029E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09426E0	-8.17275E-1	-7.98321E-1	-9.13112E0	-9.14204E0	5.65052E-3	9.28879E-2	2.72909E1	-3.26596E1	-3.26054E1	2.6819E1	2.4245E-9	2.52061E-3	2.52061E-3	6.32356E-3	2.46819E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09387E0	-8.17227E-1	-7.98583E-1	-9.131E0	-9.14168E0	5.67436E-3	9.29594E-2	2.72877E1	-3.26717E1	-3.2596E1	2.67944E1	2.41934E-9	2.51632E-3	2.51632E-3	6.3074E-3	2.47029E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0941E0	-8.17227E-1	-7.98368E-1	-9.13084E0	-9.1419E0	5.67436E-3	9.30071E-2	2.72811E1	-3.26549E1	-3.26206E1	2.6828E1	2.42331E-9	2.51771E-3	2.51771E-3	6.3074E-3	2.47709E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09402E0	-8.17204E-1	-7.98202E-1	-9.13103E0	-9.14183E0	5.38826E-3	9.31025E-2	2.73033E1	-3.26579E1	-3.26086E1	2.68064E1	2.41459E-9	2.5147E-3	2.5147E-3	6.31299E-3	2.47539E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09371E0	-8.16989E-1	-7.98225E-1	-9.13119E0	-9.14178E0	5.74589E-3	9.33647E-2	2.73163E1	-3.26691E1	-3.26413E1	2.68041E1	2.4245E-9	2.51847E-3	2.51847E-3	6.33977E-3	2.48509E-2
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.0948E0	-8.16727E-1	-7.98225E-1	-9.13105E0	-9.14168E0	5.48363E-3	9.29832E-2	2.73502E1	-3.26867E1	-3.2623E1	2.68046E1	2.42121E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.47065E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09387E0	-8.16631E-1	-7.98535E-1	-9.13084E0	-9.14183E0	5.4121E-3	9.32455E-2	2.72961E1	-3.26771E1	-3.26302E1	2.68226E1	2.42037E-9	2.51954E-3	2.51954E-3	6.31278E-3	2.47662E-2
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09402E0	-8.16655E-1	-7.98392E-1	-9.13115E0	-9.14187E0	5.98431E-3	9.34124E-2	2.73033E1	-3.26496E1	-3.2629E1	2.6813E1	2.42016E-9	2.51225E-3	2.51225E-3	6.31288E-3	2.47279E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09426E0	-8.16631E-1	-7.98345E-1	-9.13115E0	-9.14168E0	5.36442E-3	9.3317E-2	2.73247E1	-3.26585E1	-3.26058E1	2.67794E1	2.42647E-9	2.52757E-3	2.52757E-3	6.31288E-3	2.46207E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09449E0	-8.16917E-1	-7.98345E-1	-9.13122E0	-9.14171E0	5.19753E-3	9.31025E-2	2.73175E1	-3.26567E1	-3.26408E1	2.67842E1	2.42647E-9	2.51334E-3	2.51334E-3	6.30192E-3	2.46421E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.16846E-1	-7.98297E-1	-9.13129E0	-9.14195E0	5.24521E-3	9.34362E-2	2.7301E1	-3.26638E1	-3.26077E1	2.68016E1	2.42016E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.47709E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-8.16917E-1	-7.98464E-1	-9.13157E0	-9.14166E0	5.26905E-3	9.35793E-2	2.72762E1	-3.26402E1	-3.2639E1	2.68065E1	2.42243E-9	2.51632E-3	2.51632E-3	6.30202E-3	2.47029E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-8.17037E-1	-7.9844E-1	-9.13143E0	-9.1418E0	5.67436E-3	9.32932E-2	2.71892E1	-3.26614E1	-3.27512E1	2.67995E1	2.42463E-9	2.51077E-3	2.51077E-3	6.31798E-3	2.4741E-2