[Scan]
initial_time=2015-12-22T16:55:23
final_time=2015-12-22T16:55:42
ip_count=19
run=1021
dataset=2
scan=61
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0948E0
qbias_imon=-1.08799E-4
ql1_vset=
ql1_vmon=-8.17084E-1
ql1_imon=1.36782E-8
ql2_vset=
ql2_vmon=-7.98535E-1
ql2_imon=2.07502E-9
ql3_vset=
ql3_vmon=-9.13119E0
ql3_imon=3.08812E-10
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=3.88622E-11
mult1=-1.20401E-8
mult2=-3.34539E-9
rf_tmon=-4.20803E-4
rf_agc=3.92157E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.55515E-3
ql5_imon=1.72929E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65592E0
bslens_imon=2.5738E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19713E1
lens5a_imon=1.96829E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12552E2
lens4a_imon=2.0483E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53634E1
cs_ef1b_imon=2.83494E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04601E2
lens23_imon=1.02117E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05204E1
cs_ea1_imon=2.55698E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36655E0
lens1_imon=2.41158E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64843E1
os_ef1alow_imon=2.97549E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03846E1
cs_ea2_imon=1.53894E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84358E1
cs_ef1a_imon=2.94162E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.29688E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.114E1
os_restr1_imon=4.29887E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15173E1
os_ea1_imon=2.36628E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63755E1
os_ef1bup_imon=3.0883E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2515E0
cs_ionrep_imon=1.17196E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91862E2
cs_nozzle_imon=1.93157E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02037E1
cs_anode1_imon=2.93693E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20539E0
olens4_imon=3.29774E-8
tplens_vset=1.4E-1
tplens_vmon=1.57895E0
tplens_imon=-3.5342E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26206E1
iondef3_imon=1.48451E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.28778E1
iondef2_imon=1.5786E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02931E2
lens6_imon=2.98252E-4
ql6_vset=1.0E-1
ql6_vmon=9.31025E-2
ql6_imon=4.11648E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28214E0
ionrepsh_imon=1.77002E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33616E1
lens5b_imon=2.16801E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74681E1
cs_ef2b_imon=3.12614E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41252E0
os_ea2_imon=-8.50904E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06114E2
lens4b_imon=2.00464E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71264E1
cs_ef2a_imon=3.17443E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07438E0
os_ef2alow_imon=-2.62671E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.86612E-1
os_ef2bup_imon=-5.28644E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10829E1
os_restr2_imon=3.404E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23058E2
cs_ionfoca_imon=6.3101E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.24713E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73772E1
iondef1_imon=1.07102E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68022E1
iondef4_imon=1.08269E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=5.5424E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=7.78675E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14155E0
cs_ionaccel_imon=-1.81582E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02084E2
cs_ionfocb_imon=1.47096E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56309E1
einzel_imon=7.51485E-6
window_vset=0.0E0
window_vmon=1.38055E-1
window_imon=-1.13827E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82635E2
mask1_imon=2.39073E-4
mask2_vset=0.0E0
mask2_vmon=-1.86374E1
mask2_imon=-7.41837E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92668E3
multa_neg_imon=7.20977E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93734E3
defgrida_imon=6.2833E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=6.98987E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39555E0
defgridb_imon=5.91199E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33402E1
os_fil1_imon=9.40912E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06729E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63182E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30961E1
cs_fil1_imon=9.95128E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63135E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63222E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.93184E-2
os_fil2_imon=-2.7861E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.76691E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.98042E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37161E-1
cs_fil2_imon=-2.5158E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.11219E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22301E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.47494E-2
chamber_ion_pmon=2.42226E-9
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.4E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.27767E-1
res40_imon=-2.56905E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=200
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09549E0	-8.16894E-1	-7.98559E-1	-9.131E0	-9.14156E0	5.43594E-3	9.30786E-2	2.72906E1	-3.26758E1	-3.26069E1	2.67968E1	2.42016E-9	2.52538E-3	2.52538E-3	6.3074E-3	2.47494E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09549E0	-8.1706E-1	-7.98631E-1	-9.13098E0	-9.14137E0	5.26905E-3	9.33409E-2	2.7332E1	-3.26334E1	-3.26444E1	2.6807E1	2.42347E-9	2.51954E-3	2.51954E-3	6.31817E-3	2.47029E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0958E0	-8.17084E-1	-7.98702E-1	-9.13081E0	-9.14149E0	5.38826E-3	9.31263E-2	2.73092E1	-3.26708E1	-3.26219E1	2.6803E1	2.42315E-9	2.51693E-3	2.51693E-3	6.32978E-3	2.46228E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.16965E-1	-7.98559E-1	-9.13124E0	-9.14145E0	5.19753E-3	9.28879E-2	2.72927E1	-3.26455E1	-3.2629E1	2.68118E1	2.42159E-9	2.52025E-3	2.52025E-3	6.32858E-3	2.45963E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-8.16822E-1	-7.98488E-1	-9.1311E0	-9.14207E0	5.76973E-3	9.30309E-2	2.73213E1	-3.26512E1	-3.2638E1	2.68124E1	2.42864E-9	2.51417E-3	2.51417E-3	6.32356E-3	2.4514E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09441E0	-8.16917E-1	-7.98607E-1	-9.13091E0	-9.14183E0	5.53131E-3	9.31025E-2	2.72862E1	-3.2672E1	-3.25959E1	2.68154E1	2.42423E-9	2.52585E-3	2.52585E-3	6.32978E-3	2.46228E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09402E0	-8.17037E-1	-7.98392E-1	-9.13105E0	-9.14183E0	5.29289E-3	9.30071E-2	2.73015E1	-3.26591E1	-3.26068E1	2.6807E1	2.4245E-9	2.51632E-3	2.51632E-3	6.31278E-3	2.46398E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09348E0	-8.16798E-1	-7.98368E-1	-9.13112E0	-9.14192E0	5.31673E-3	9.28164E-2	2.73151E1	-3.26874E1	-3.26614E1	2.68178E1	2.43486E-9	2.52061E-3	2.52061E-3	6.3074E-3	2.47662E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09402E0	-8.16894E-1	-7.98702E-1	-9.13153E0	-9.14195E0	5.45979E-3	9.30786E-2	2.72702E1	-3.26795E1	-3.262E1	2.67992E1	2.4328E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.46421E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09379E0	-8.17037E-1	-7.98392E-1	-9.1316E0	-9.14204E0	5.65052E-3	9.27687E-2	2.73289E1	-3.26011E1	-3.26515E1	2.68146E1	2.42347E-9	2.51739E-3	2.51739E-3	6.34518E-3	2.46819E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09418E0	-8.17037E-1	-7.98512E-1	-9.13129E0	-9.14173E0	5.67436E-3	9.27448E-2	2.7318E1	-3.26321E1	-3.26707E1	2.6816E1	2.42243E-9	2.51417E-3	2.51417E-3	6.29128E-3	2.46398E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09348E0	-8.17108E-1	-7.98607E-1	-9.13117E0	-9.14159E0	5.60284E-3	9.30548E-2	2.73321E1	-3.26633E1	-3.25479E1	2.68219E1	2.41806E-9	2.52647E-3	2.52647E-3	6.3514E-3	2.4685E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09333E0	-8.17227E-1	-7.98488E-1	-9.13124E0	-9.14176E0	5.22137E-3	9.27925E-2	2.73003E1	-3.2629E1	-3.26753E1	2.67966E1	2.4253E-9	2.51693E-3	2.51693E-3	6.3074E-3	2.44923E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09302E0	-8.17251E-1	-7.98392E-1	-9.13129E0	-9.14164E0	5.36442E-3	9.26971E-2	2.73122E1	-3.26767E1	-3.26012E1	2.68358E1	2.42753E-9	2.51116E-3	2.51116E-3	6.29098E-3	2.45567E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0941E0	-8.17728E-1	-7.98416E-1	-9.13103E0	-9.14147E0	5.45979E-3	9.30071E-2	2.73326E1	-3.26995E1	-3.26897E1	2.6807E1	2.41831E-9	2.51525E-3	2.51525E-3	6.31817E-3	2.45559E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-8.16965E-1	-7.98297E-1	-9.13117E0	-9.14173E0	5.57899E-3	9.29356E-2	2.72961E1	-3.26903E1	-3.26392E1	2.68064E1	2.42437E-9	2.51771E-3	2.51771E-3	6.32936E-3	2.47279E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.17013E-1	-7.98488E-1	-9.13107E0	-9.14156E0	5.67436E-3	9.31978E-2	2.73033E1	-3.26561E1	-3.25924E1	2.67902E1	2.42226E-9	2.52099E-3	2.52099E-3	6.34037E-3	2.47494E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09426E0	-8.1706E-1	-7.98512E-1	-9.1311E0	-9.14178E0	5.6982E-3	9.36031E-2	2.72886E1	-3.26726E1	-3.25989E1	2.67854E1	2.42331E-9	2.52318E-3	2.52318E-3	6.30192E-3	2.47065E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09464E0	-8.17299E-1	-7.98607E-1	-9.13129E0	-9.14183E0	5.84126E-3	9.31263E-2	2.73195E1	-3.26218E1	-3.27263E1	2.68148E1	2.42437E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.4685E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0948E0	-8.17084E-1	-7.98535E-1	-9.13119E0	-9.14202E0	5.55515E-3	9.31025E-2	2.73772E1	-3.28778E1	-3.26206E1	2.68022E1	2.42226E-9	2.51552E-3	2.51552E-3	6.3074E-3	2.47494E-2