[Scan]
initial_time=2015-12-22T16:55:49
final_time=2015-12-22T16:56:09
ip_count=19
run=1021
dataset=2
scan=62
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09518E0
qbias_imon=-1.08685E-4
ql1_vset=
ql1_vmon=-8.1749E-1
ql1_imon=1.36567E-8
ql2_vset=
ql2_vmon=-7.97939E-1
ql2_imon=2.00183E-9
ql3_vset=
ql3_vmon=-9.13117E0
ql3_imon=3.61013E-10
ql4_vset=
ql4_vmon=-9.14207E0
ql4_imon=5.22614E-11
mult1=-9.18652E-9
mult2=-2.51501E-9
rf_tmon=-5.85827E-3
rf_agc=3.14109E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.62668E-3
ql5_imon=1.73304E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63318E0
bslens_imon=2.69191E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19901E1
lens5a_imon=1.97094E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12505E2
lens4a_imon=2.04987E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53418E1
cs_ef1b_imon=2.84935E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04586E2
lens23_imon=1.02022E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05124E1
cs_ea1_imon=2.56379E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37374E0
lens1_imon=2.42292E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64662E1
os_ef1alow_imon=2.96648E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04015E1
cs_ea2_imon=1.53418E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84352E1
cs_ef1a_imon=2.93801E-5
olens2_vset=9.7E-1
olens2_vmon=9.70554E-1
olens2_imon=1.31152E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11135E1
os_restr1_imon=4.29887E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1514E1
os_ea1_imon=2.36488E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63677E1
os_ef1bup_imon=3.07965E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22673E0
cs_ionrep_imon=1.18307E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91871E2
cs_nozzle_imon=1.93179E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01947E1
cs_anode1_imon=2.94198E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20542E0
olens4_imon=3.29789E-8
tplens_vset=1.4E-1
tplens_vmon=1.6143E0
tplens_imon=-3.13045E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26248E1
iondef3_imon=1.47896E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26597E1
iondef2_imon=1.57488E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02981E2
lens6_imon=2.97953E-4
ql6_vset=1.0E-1
ql6_vmon=9.28879E-2
ql6_imon=4.10954E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.32348E0
ionrepsh_imon=1.77946E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33675E1
lens5b_imon=2.17304E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74561E1
cs_ef2b_imon=3.12001E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.36359E0
os_ea2_imon=-6.56367E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06116E2
lens4b_imon=2.00729E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71029E1
cs_ef2a_imon=3.17263E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07678E0
os_ef2alow_imon=-2.68437E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.77602E-1
os_ef2bup_imon=-5.47745E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10697E1
os_restr2_imon=3.39067E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.28725E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02019E1
cs_anode2_imon=2.24569E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72955E1
iondef1_imon=1.07158E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68484E1
iondef4_imon=1.0744E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.51586E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82475E-1
olens1_imon=7.81486E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12353E0
cs_ionaccel_imon=-1.98881E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02048E2
cs_ionfocb_imon=1.47143E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56183E1
einzel_imon=7.57251E-6
window_vset=0.0E0
window_vmon=1.81303E-1
window_imon=-1.06259E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82623E2
mask1_imon=2.39207E-4
mask2_vset=0.0E0
mask2_vmon=-1.86356E1
mask2_imon=-7.02193E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92667E3
multa_neg_imon=7.38871E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93702E3
defgrida_imon=6.06497E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=6.93566E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.1959E0
defgridb_imon=6.07559E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33375E1
os_fil1_imon=9.42624E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.05689E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63296E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30914E1
cs_fil1_imon=9.96798E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62816E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63459E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.66075E-2
os_fil2_imon=-3.05039E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.851E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.65192E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34831E-1
cs_fil2_imon=-2.56986E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.17866E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22278E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.47494E-2
chamber_ion_pmon=2.42437E-9
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.23563E-1
res40_imon=-2.45732E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-8.17227E-1	-7.98464E-1	-9.13131E0	-9.14176E0	5.55515E-3	9.31025E-2	2.72929E1	-3.26724E1	-3.26133E1	2.68169E1	2.42243E-9	2.51632E-3	2.51632E-3	6.29665E-3	2.46398E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09464E0	-8.17394E-1	-7.98416E-1	-9.13129E0	-9.14176E0	5.43594E-3	9.3174E-2	2.72444E1	-3.26591E1	-3.26452E1	2.6804E1	2.42077E-9	2.51369E-3	2.51369E-3	6.30221E-3	2.47166E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09565E0	-8.17108E-1	-7.98368E-1	-9.13107E0	-9.14154E0	5.126E-3	9.31025E-2	2.7321E1	-3.2685E1	-3.26319E1	2.68124E1	2.42101E-9	2.51693E-3	2.51693E-3	6.31299E-3	2.47539E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09495E0	-8.17275E-1	-7.9813E-1	-9.13126E0	-9.14183E0	5.31673E-3	9.31978E-2	2.73092E1	-3.2633E1	-3.26092E1	2.68001E1	2.42657E-9	2.51525E-3	2.51525E-3	6.32356E-3	2.46398E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09565E0	-8.17227E-1	-7.98464E-1	-9.13157E0	-9.14223E0	5.4121E-3	9.34362E-2	2.72847E1	-3.26506E1	-3.2653E1	2.68296E1	2.42564E-9	2.51919E-3	2.51919E-3	6.32328E-3	2.46582E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.17156E-1	-7.98297E-1	-9.1315E0	-9.14168E0	5.79357E-3	9.34124E-2	2.73153E1	-3.26633E1	-3.26308E1	2.68268E1	2.41911E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.46636E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09441E0	-8.17013E-1	-7.98225E-1	-9.13095E0	-9.14207E0	5.45979E-3	9.36508E-2	2.7224E1	-3.26681E1	-3.2599E1	2.67896E1	2.42347E-9	2.52384E-3	2.52384E-3	6.31278E-3	2.47451E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09549E0	-8.1718E-1	-7.98154E-1	-9.13098E0	-9.14185E0	5.91278E-3	9.34601E-2	2.73411E1	-3.2641E1	-3.2641E1	2.68194E1	2.42753E-9	2.51552E-3	2.51552E-3	6.31837E-3	2.47494E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-8.1737E-1	-7.98249E-1	-9.13095E0	-9.14183E0	5.65052E-3	9.33409E-2	2.7357E1	-3.26502E1	-3.26478E1	2.68117E1	2.42852E-9	2.51804E-3	2.51804E-3	6.30182E-3	2.45792E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09549E0	-8.17227E-1	-7.98273E-1	-9.13086E0	-9.14202E0	5.65052E-3	9.32455E-2	2.7298E1	-3.26838E1	-3.25883E1	2.68142E1	2.4226E-9	2.51393E-3	2.51393E-3	6.31798E-3	2.46376E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.17156E-1	-7.98607E-1	-9.13093E0	-9.14173E0	5.38826E-3	9.3174E-2	2.73249E1	-3.26597E1	-3.26458E1	2.681E1	2.42858E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.47925E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-8.1718E-1	-7.98631E-1	-9.13095E0	-9.14178E0	5.36442E-3	9.30309E-2	2.72666E1	-3.27113E1	-3.2614E1	2.68007E1	2.42437E-9	2.52318E-3	2.52318E-3	6.29645E-3	2.47279E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-8.17204E-1	-7.98464E-1	-9.13095E0	-9.14187E0	5.17368E-3	9.34124E-2	2.73181E1	-3.26714E1	-3.26986E1	2.67896E1	2.42347E-9	2.51525E-3	2.51525E-3	6.3074E-3	2.4724E-2
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.17275E-1	-7.98202E-1	-9.13136E0	-9.14183E0	5.45979E-3	9.31025E-2	2.73027E1	-3.26807E1	-3.27167E1	2.67974E1	2.42542E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.47279E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09449E0	-8.17108E-1	-7.98535E-1	-9.13093E0	-9.14142E0	5.17368E-3	9.33886E-2	2.73538E1	-3.25749E1	-3.28399E1	2.67788E1	2.42657E-9	2.51417E-3	2.51417E-3	6.32356E-3	2.47451E-2
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.0948E0	-8.17204E-1	-7.98345E-1	-9.13095E0	-9.14159E0	5.14984E-3	9.31263E-2	2.73424E1	-3.26573E1	-3.26777E1	2.68196E1	2.42315E-9	2.51804E-3	2.51804E-3	6.29624E-3	2.47101E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.1737E-1	-7.9782E-1	-9.13103E0	-9.14185E0	5.29289E-3	9.33886E-2	2.73016E1	-3.26791E1	-3.2629E1	2.67974E1	2.42347E-9	2.51632E-3	2.51632E-3	6.30202E-3	2.46819E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09449E0	-8.1706E-1	-7.98249E-1	-9.13103E0	-9.14166E0	5.14984E-3	9.30309E-2	2.72949E1	-3.27011E1	-3.259E1	2.68036E1	2.42331E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.47494E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09433E0	-8.1737E-1	-7.97892E-1	-9.13107E0	-9.1418E0	5.07832E-3	9.34124E-2	2.73063E1	-3.26416E1	-3.262E1	2.67866E1	2.4214E-9	2.52276E-3	2.52276E-3	6.32896E-3	2.46188E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09518E0	-8.1749E-1	-7.97939E-1	-9.13117E0	-9.14207E0	5.62668E-3	9.28879E-2	2.72955E1	-3.26597E1	-3.26248E1	2.68484E1	2.42437E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.47494E-2