[Scan]
initial_time=2015-12-22T16:56:16
final_time=2015-12-22T16:56:35
ip_count=19
run=1021
dataset=2
scan=63
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0948E0
qbias_imon=-1.08723E-4
ql1_vset=
ql1_vmon=-8.16751E-1
ql1_imon=1.36683E-8
ql2_vset=
ql2_vmon=-7.9844E-1
ql2_imon=2.02087E-9
ql3_vset=
ql3_vmon=-9.1311E0
ql3_imon=3.67689E-10
ql4_vset=
ql4_vmon=-9.14192E0
ql4_imon=5.42998E-11
mult1=-9.51162E-9
mult2=-2.64476E-9
rf_tmon=-4.62057E-3
rf_agc=3.34958E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.22137E-3
ql5_imon=1.74545E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64949E0
bslens_imon=2.56942E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20077E1
lens5a_imon=1.96515E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12478E2
lens4a_imon=2.04871E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5391E1
cs_ef1b_imon=2.85324E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04644E2
lens23_imon=1.01899E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04414E1
cs_ea1_imon=2.5495E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39689E0
lens1_imon=2.41647E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64614E1
os_ef1alow_imon=2.9648E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03175E1
cs_ea2_imon=1.5421E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84423E1
cs_ef1a_imon=2.9429E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.29761E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11419E1
os_restr1_imon=4.30103E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15734E1
os_ea1_imon=2.36457E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63965E1
os_ef1bup_imon=3.08156E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20633E0
cs_ionrep_imon=1.17014E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91939E2
cs_nozzle_imon=1.92899E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01937E1
cs_anode1_imon=2.9436E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20544E0
olens4_imon=3.31222E-8
tplens_vset=1.4E-1
tplens_vmon=1.54178E0
tplens_imon=-3.36683E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26182E1
iondef3_imon=1.48856E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26849E1
iondef2_imon=1.56643E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02955E2
lens6_imon=2.98231E-4
ql6_vset=1.0E-1
ql6_vmon=9.30548E-2
ql6_imon=4.15024E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27469E0
ionrepsh_imon=1.77292E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33698E1
lens5b_imon=2.1699E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74768E1
cs_ef2b_imon=3.13057E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42707E0
os_ea2_imon=-6.46065E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06096E2
lens4b_imon=2.00664E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71599E1
cs_ef2a_imon=3.1813E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06846E0
os_ef2alow_imon=-2.66146E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.89122E-1
os_ef2bup_imon=-5.49032E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10816E1
os_restr2_imon=3.41797E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23069E2
cs_ionfoca_imon=6.28294E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02041E1
cs_anode2_imon=2.24299E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73141E1
iondef1_imon=1.10166E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6816E1
iondef4_imon=1.07808E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=5.54651E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=7.83415E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12782E0
cs_ionaccel_imon=-1.98379E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02069E2
cs_ionfocb_imon=1.47282E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5633E1
einzel_imon=7.47237E-6
window_vset=0.0E0
window_vmon=1.65557E-1
window_imon=-1.05937E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82641E2
mask1_imon=2.39067E-4
mask2_vset=0.0E0
mask2_vmon=-1.86367E1
mask2_imon=-6.24965E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92654E3
multa_neg_imon=7.10935E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93692E3
defgrida_imon=6.34111E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50145E3
multb_neg_imon=7.01549E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4036E0
defgridb_imon=6.1082E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33395E1
os_fil1_imon=9.44326E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06263E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63719E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30959E1
cs_fil1_imon=9.99119E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6247E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63807E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.79733E-2
os_fil2_imon=-2.75607E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.76755E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.6695E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36768E-1
cs_fil2_imon=-2.46646E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.45077E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22348E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.47494E-2
chamber_ion_pmon=2.42226E-9
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.18285E-1
res40_imon=-2.56416E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=204
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09394E0	-8.17108E-1	-7.98535E-1	-9.1311E0	-9.14185E0	5.10216E-3	9.29356E-2	2.73243E1	-3.26711E1	-3.26512E1	2.68106E1	2.42057E-9	2.52131E-3	2.52131E-3	6.3074E-3	2.46789E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09394E0	-8.17227E-1	-7.98297E-1	-9.1311E0	-9.14168E0	5.4121E-3	9.31978E-2	2.73143E1	-3.2634E1	-3.26168E1	2.6825E1	2.42347E-9	2.52061E-3	2.52061E-3	6.31278E-3	2.48085E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09441E0	-8.17108E-1	-7.98535E-1	-9.13091E0	-9.14166E0	5.29289E-3	9.29356E-2	2.73057E1	-3.26996E1	-3.26503E1	2.67962E1	2.4253E-9	2.51693E-3	2.51693E-3	6.30182E-3	2.47101E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09387E0	-8.17251E-1	-7.98464E-1	-9.13091E0	-9.14187E0	5.31673E-3	9.27925E-2	2.73416E1	-3.26782E1	-3.25976E1	2.68155E1	2.4276E-9	2.52276E-3	2.52276E-3	6.3074E-3	2.47029E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09433E0	-8.16917E-1	-7.98559E-1	-9.13079E0	-9.14173E0	5.53131E-3	9.28879E-2	2.73153E1	-3.2623E1	-3.26428E1	2.67986E1	2.42675E-9	2.5199E-3	2.5199E-3	6.3282E-3	2.47573E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09426E0	-8.17156E-1	-7.98488E-1	-9.1311E0	-9.1418E0	5.65052E-3	9.27448E-2	2.72835E1	-3.26398E1	-3.26356E1	2.6807E1	2.41994E-9	2.51804E-3	2.51804E-3	6.3074E-3	2.47539E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09387E0	-8.1687E-1	-7.9844E-1	-9.13081E0	-9.14187E0	5.26905E-3	9.28402E-2	2.72998E1	-3.26655E1	-3.26077E1	2.6816E1	2.41911E-9	2.51552E-3	2.51552E-3	6.31288E-3	2.47494E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09449E0	-8.16727E-1	-7.98488E-1	-9.13086E0	-9.14159E0	5.22137E-3	9.29356E-2	2.72757E1	-3.26444E1	-3.26015E1	2.68144E1	2.41727E-9	2.51417E-3	2.51417E-3	6.3074E-3	2.46819E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09449E0	-8.16917E-1	-7.9844E-1	-9.13136E0	-9.14202E0	5.48363E-3	9.28402E-2	2.73099E1	-3.26657E1	-3.26176E1	2.6817E1	2.42315E-9	2.51693E-3	2.51693E-3	6.32978E-3	2.46446E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0941E0	-8.17108E-1	-7.98249E-1	-9.13105E0	-9.14199E0	5.4121E-3	9.3174E-2	2.72668E1	-3.26113E1	-3.2688E1	2.67964E1	2.43646E-9	2.5208E-3	2.5208E-3	6.31283E-3	2.45774E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.16989E-1	-7.98082E-1	-9.13095E0	-9.14211E0	5.93662E-3	9.30309E-2	2.72582E1	-3.26759E1	-3.26122E1	2.67914E1					
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09379E0	-8.16989E-1	-7.98273E-1	-9.13074E0	-9.1418E0	5.6982E-3	9.31263E-2	2.73279E1	-3.26687E1	-3.2641E1	2.68286E1	2.4359E-9	2.51954E-3	2.51954E-3	6.31278E-3	2.46819E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09402E0	-8.1687E-1	-7.98488E-1	-9.13093E0	-9.14197E0	5.36442E-3	9.28402E-2	2.7324E1	-3.26561E1	-3.26236E1	2.68024E1	2.44233E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.47709E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.16989E-1	-7.98416E-1	-9.13107E0	-9.14207E0	5.45979E-3	9.28879E-2	2.7302E1	-3.26487E1	-3.26168E1	2.67945E1	2.42964E-9	2.51443E-3	2.51443E-3	6.30192E-3	2.47279E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.16965E-1	-7.98392E-1	-9.13086E0	-9.14168E0	5.17368E-3	9.34124E-2	2.73252E1	-3.26667E1	-3.25871E1	2.68198E1	2.43492E-9	2.5188E-3	2.5188E-3	6.33486E-3	2.46207E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09348E0	-8.16941E-1	-7.98321E-1	-9.1311E0	-9.14178E0	5.34058E-3	9.30786E-2	2.73249E1	-3.26927E1	-3.26212E1	2.6804E1	2.43278E-9	2.51417E-3	2.51417E-3	6.33436E-3	2.47029E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09348E0	-8.16965E-1	-7.98416E-1	-9.1311E0	-9.14156E0	5.19753E-3	9.30309E-2	2.73033E1	-3.26254E1	-3.26392E1	2.68076E1	2.4328E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.45353E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09387E0	-8.16965E-1	-7.98273E-1	-9.13088E0	-9.14185E0	5.29289E-3	9.31025E-2	2.72819E1	-3.26729E1	-3.2637E1	2.68018E1	2.42858E-9	2.51007E-3	2.51007E-3	6.31837E-3	2.47279E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0941E0	-8.16751E-1	-7.9813E-1	-9.13115E0	-9.14187E0	5.07832E-3	9.30786E-2	2.73153E1	-3.26476E1	-3.26374E1	2.68088E1	2.42057E-9	2.51498E-3	2.51498E-3	6.30212E-3	2.46789E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0948E0	-8.16751E-1	-7.9844E-1	-9.1311E0	-9.14192E0	5.22137E-3	9.30548E-2	2.73141E1	-3.26849E1	-3.26182E1	2.6816E1	2.42226E-9	2.52209E-3	2.52209E-3	6.30192E-3	2.47494E-2