[Scan]
initial_time=2015-12-22T16:57:09
final_time=2015-12-22T16:57:29
ip_count=19
run=1021
dataset=2
scan=65
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09433E0
qbias_imon=-1.08734E-4
ql1_vset=
ql1_vmon=-8.1706E-1
ql1_imon=1.36933E-8
ql2_vset=
ql2_vmon=-7.98249E-1
ql2_imon=2.03178E-9
ql3_vset=
ql3_vmon=-9.13107E0
ql3_imon=3.04961E-10
ql4_vset=
ql4_vmon=-9.14161E0
ql4_imon=5.00798E-11
mult1=-8.94571E-9
mult2=-2.4671E-9
rf_tmon=-6.44708E-3
rf_agc=3.22281E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.34058E-3
ql5_imon=1.74693E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65324E0
bslens_imon=2.38752E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19683E1
lens5a_imon=1.95891E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12478E2
lens4a_imon=2.0499E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53748E1
cs_ef1b_imon=2.83962E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04619E2
lens23_imon=1.02064E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04929E1
cs_ea1_imon=2.55813E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36961E0
lens1_imon=2.38045E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64759E1
os_ef1alow_imon=2.96864E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03832E1
cs_ea2_imon=1.54444E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84214E1
cs_ef1a_imon=2.93297E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=1.29875E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11376E1
os_restr1_imon=4.30031E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14969E1
os_ea1_imon=2.36346E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63749E1
os_ef1bup_imon=3.07785E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24443E0
cs_ionrep_imon=1.17422E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91887E2
cs_nozzle_imon=1.93208E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01941E1
cs_anode1_imon=2.94594E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20551E0
olens4_imon=3.28073E-8
tplens_vset=1.4E-1
tplens_vmon=1.60722E0
tplens_imon=-2.31638E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25978E1
iondef3_imon=1.49206E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26747E1
iondef2_imon=1.58479E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0296E2
lens6_imon=2.98374E-4
ql6_vset=1.0E-1
ql6_vmon=9.29832E-2
ql6_imon=4.14344E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28867E0
ionrepsh_imon=1.77344E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33634E1
lens5b_imon=2.17056E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74573E1
cs_ef2b_imon=3.11352E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47272E0
os_ea2_imon=-5.99737E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06099E2
lens4b_imon=2.00379E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70969E1
cs_ef2a_imon=3.18524E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07979E0
os_ef2alow_imon=-2.66635E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.91417E-1
os_ef2bup_imon=-5.45943E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10871E1
os_restr2_imon=3.41157E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23076E2
cs_ionfoca_imon=6.30105E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.25037E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73424E1
iondef1_imon=1.08326E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68136E1
iondef4_imon=1.078E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7179E1
olens3_imon=5.49728E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82761E-1
olens1_imon=7.80016E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12894E0
cs_ionaccel_imon=-1.85546E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02064E2
cs_ionfocb_imon=1.47104E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56243E1
einzel_imon=7.60855E-6
window_vset=0.0E0
window_vmon=1.38656E-1
window_imon=-1.0734E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82622E2
mask1_imon=2.39127E-4
mask2_vset=0.0E0
mask2_vmon=-1.86374E1
mask2_imon=-7.27421E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9265E3
multa_neg_imon=7.66124E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.37998E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50105E3
multb_neg_imon=7.30022E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2963E0
defgridb_imon=5.92693E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33372E1
os_fil1_imon=9.39207E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0623E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63157E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30959E1
cs_fil1_imon=9.94978E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62282E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64678E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.62277E-2
os_fil2_imon=-2.64795E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95312E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.85314E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36773E-1
cs_fil2_imon=-2.53382E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.18427E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22595E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.46207E-2
chamber_ion_pmon=2.41806E-9
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.92929E-1
res40_imon=-2.53301E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.17275E-1	-7.98154E-1	-9.13134E0	-9.14183E0	5.60284E-3	9.30071E-2	2.73181E1	-3.26697E1	-3.26195E1	2.68007E1	2.42864E-9	2.51632E-3	2.51632E-3	6.3074E-3	2.46188E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.17227E-1	-7.98154E-1	-9.13107E0	-9.14204E0	5.57899E-3	9.3174E-2	2.72985E1	-3.26543E1	-3.26488E1	2.6825E1	2.42864E-9	2.51847E-3	2.51847E-3	6.30202E-3	2.47029E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09426E0	-8.17227E-1	-7.98464E-1	-9.13117E0	-9.14185E0	5.91278E-3	9.30786E-2	2.73204E1	-3.26408E1	-3.26166E1	2.68001E1	2.43606E-9	2.51581E-3	2.51581E-3	6.32978E-3	2.46446E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09433E0	-8.17204E-1	-7.9844E-1	-9.13103E0	-9.14204E0	5.31673E-3	9.29594E-2	2.7298E1	-3.2672E1	-3.26213E1	2.68041E1	2.43486E-9	2.51739E-3	2.51739E-3	6.3074E-3	2.4535E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-8.16822E-1	-7.98249E-1	-9.13088E0	-9.14183E0	5.50747E-3	9.29356E-2	2.73167E1	-3.26321E1	-3.26334E1	2.68069E1	2.4348E-9	2.52131E-3	2.52131E-3	6.32858E-3	2.45757E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09426E0	-8.16774E-1	-7.98011E-1	-9.13103E0	-9.14173E0	5.8651E-3	9.31978E-2	2.72848E1	-3.2644E1	-3.26295E1	2.6803E1	2.43498E-9	2.5147E-3	2.5147E-3	6.31858E-3	2.47539E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09433E0	-8.16917E-1	-7.98225E-1	-9.13067E0	-9.14161E0	5.62668E-3	9.33409E-2	2.72929E1	-3.26499E1	-3.26119E1	2.68136E1	2.4359E-9	2.51739E-3	2.51739E-3	6.3074E-3	2.47451E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09565E0	-8.16751E-1	-7.98059E-1	-9.13115E0	-9.14183E0	5.53131E-3	9.3317E-2	2.73039E1	-3.26543E1	-3.25953E1	2.68304E1	2.43492E-9	2.5188E-3	2.5188E-3	6.29098E-3	2.46421E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0958E0	-8.16655E-1	-7.97987E-1	-9.13146E0	-9.14178E0	5.48363E-3	9.35316E-2	2.73069E1	-3.26579E1	-3.26506E1	2.68154E1	2.43486E-9	2.51954E-3	2.51954E-3	6.33436E-3	2.45978E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-8.16584E-1	-7.98297E-1	-9.13119E0	-9.14183E0	5.22137E-3	9.30548E-2	2.73369E1	-3.26921E1	-3.25948E1	2.6825E1	2.42101E-9	2.51915E-3	2.51915E-3	6.35786E-3	2.45792E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0958E0	-8.16894E-1	-7.98202E-1	-9.13107E0	-9.14159E0	5.34058E-3	9.377E-2	2.73027E1	-3.26815E1	-3.26124E1	2.68178E1	2.42437E-9	2.52647E-3	2.52647E-3	6.32936E-3	2.4578E-2
1.5E1	2.0E0	0.0E0	6.06E2	4.11E2	-2.09572E0	-8.16846E-1	-7.9782E-1	-9.13105E0	-9.14156E0	5.34058E-3	9.3174E-2	2.72745E1	-3.26561E1	-3.26134E1	2.68545E1	2.42437E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.4514E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0958E0	-8.16774E-1	-7.9813E-1	-9.13072E0	-9.14149E0	5.36442E-3	9.30548E-2	2.73231E1	-3.26657E1	-3.26284E1	2.68016E1	2.42243E-9	2.51525E-3	2.51525E-3	6.32356E-3	2.45978E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.17084E-1	-7.98059E-1	-9.13093E0	-9.14142E0	5.36442E-3	9.28879E-2	2.73237E1	-3.265E1	-3.26308E1	2.68322E1	2.42489E-9	2.51935E-3	2.51935E-3	6.31288E-3	2.4685E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09433E0	-8.16965E-1	-7.97796E-1	-9.13067E0	-9.14156E0	5.53131E-3	9.29117E-2	2.73305E1	-3.26502E1	-3.259E1	2.68343E1					
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-8.16894E-1	-7.97915E-1	-9.13079E0	-9.14159E0	5.57899E-3	9.29594E-2	2.73075E1	-3.25473E1	-3.26086E1	2.68356E1	2.42657E-9	2.51525E-3	2.51525E-3	6.32896E-3	2.45559E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.16798E-1	-7.97772E-1	-9.13072E0	-9.14202E0	5.07832E-3	9.29117E-2	2.72648E1	-3.2635E1	-3.26326E1	2.68128E1	2.42423E-9	2.51581E-3	2.51581E-3	6.31299E-3	2.45575E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09472E0	-8.17132E-1	-7.98368E-1	-9.13088E0	-9.14156E0	5.34058E-3	9.3174E-2	2.73183E1	-3.26416E1	-3.26314E1	2.67998E1	2.41934E-9	2.51847E-3	2.51847E-3	6.33436E-3	2.47874E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09426E0	-8.16917E-1	-7.98178E-1	-9.13088E0	-9.14168E0	5.34058E-3	9.3174E-2	2.72915E1	-3.26773E1	-3.26048E1	2.67914E1	2.42016E-9	2.52209E-3	2.52209E-3	6.3074E-3	2.46421E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09433E0	-8.1706E-1	-7.98249E-1	-9.13107E0	-9.14161E0	5.34058E-3	9.29832E-2	2.73424E1	-3.26747E1	-3.25978E1	2.68136E1	2.41806E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.46207E-2