[Scan]
initial_time=2015-12-22T16:57:36
final_time=2015-12-22T16:57:55
ip_count=19
run=1021
dataset=2
scan=66
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08757E-4
ql1_vset=
ql1_vmon=-8.16822E-1
ql1_imon=1.36799E-8
ql2_vset=
ql2_vmon=-7.98225E-1
ql2_imon=2.01378E-9
ql3_vset=
ql3_vmon=-9.13098E0
ql3_imon=3.12579E-10
ql4_vset=
ql4_vmon=-9.14178E0
ql4_imon=4.22955E-11
mult1=-1.04026E-8
mult2=-2.40522E-9
rf_tmon=-5.21539E-3
rf_agc=3.28649E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.17368E-3
ql5_imon=1.73167E-9
bslens_vset=-6.2E0
bslens_vmon=-6.61807E0
bslens_imon=2.51973E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19941E1
lens5a_imon=1.96252E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12478E2
lens4a_imon=2.05226E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53814E1
cs_ef1b_imon=2.84142E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.01944E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04832E1
cs_ea1_imon=2.58474E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35033E0
lens1_imon=2.3539E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6465E1
os_ef1alow_imon=2.96288E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03883E1
cs_ea2_imon=1.56562E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84502E1
cs_ef1a_imon=2.93441E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.30571E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11274E1
os_restr1_imon=4.29707E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15029E1
os_ea1_imon=2.34933E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63593E1
os_ef1bup_imon=3.08577E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24909E0
cs_ionrep_imon=1.18638E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91869E2
cs_nozzle_imon=1.93175E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01863E1
cs_anode1_imon=2.93765E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20577E0
olens4_imon=3.28596E-8
tplens_vset=1.4E-1
tplens_vmon=1.66487E0
tplens_imon=-4.32729E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2632E1
iondef3_imon=1.4827E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26627E1
iondef2_imon=1.56526E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02955E2
lens6_imon=2.98324E-4
ql6_vset=1.0E-1
ql6_vmon=9.29117E-2
ql6_imon=4.12621E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29055E0
ionrepsh_imon=1.75091E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33682E1
lens5b_imon=2.18927E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74681E1
cs_ef2b_imon=3.11929E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43415E0
os_ea2_imon=-8.58114E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06112E2
lens4b_imon=2.00767E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71804E1
cs_ef2a_imon=3.18813E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05336E0
os_ef2alow_imon=-2.706E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.80005E-1
os_ef2bup_imon=-5.49907E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10937E1
os_restr2_imon=3.40941E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23055E2
cs_ionfoca_imon=6.27657E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01719E1
cs_anode2_imon=2.24569E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72823E1
iondef1_imon=1.1049E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68448E1
iondef4_imon=1.0726E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=5.57572E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82714E-1
olens1_imon=7.76836E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12954E0
cs_ionaccel_imon=-1.79059E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02051E2
cs_ionfocb_imon=1.4714E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56477E1
einzel_imon=7.59414E-6
window_vset=0.0E0
window_vmon=1.67488E-1
window_imon=-1.08782E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82624E2
mask1_imon=2.39109E-4
mask2_vset=0.0E0
mask2_vmon=-1.86134E1
mask2_imon=-7.74273E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92662E3
multa_neg_imon=6.84928E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93692E3
defgrida_imon=6.13189E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50161E3
multb_neg_imon=6.90696E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.55194E0
defgridb_imon=5.89757E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33432E1
os_fil1_imon=9.41687E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06104E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63227E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30945E1
cs_fil1_imon=9.96191E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62924E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63858E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.78996E-2
os_fil2_imon=-2.80412E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.65879E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.90824E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35996E-1
cs_fil2_imon=-2.50379E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.71925E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22255E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28552E-3
inlet_lpb_pmon=2.47065E-2
chamber_ion_pmon=2.42121E-9
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.90526E-1
res40_imon=-2.56544E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=202
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.0941E0	-8.17132E-1	-7.98297E-1	-9.13093E0	-9.14197E0	5.65052E-3	9.30309E-2	2.72553E1	-3.26359E1	-3.26191E1	2.68334E1	2.42331E-9	2.51116E-3	2.51116E-3	6.33486E-3	2.47494E-2
2.0E0	4.0E0	0.0E0	3.16E2	1.6E2	-2.0941E0	-8.17323E-1	-7.98583E-1	-9.13115E0	-9.14207E0	5.60284E-3	9.30071E-2	2.73288E1	-3.26366E1	-3.26597E1	2.68052E1	2.4245E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.46608E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-8.17394E-1	-7.98225E-1	-9.13134E0	-9.14192E0	5.48363E-3	9.30786E-2	2.72514E1	-3.26726E1	-3.26561E1	2.67956E1	2.42745E-9	2.51359E-3	2.51359E-3	6.31299E-3	2.4732E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0934E0	-8.17084E-1	-7.98297E-1	-9.131E0	-9.14166E0	5.45979E-3	9.29594E-2	2.72842E1	-3.27089E1	-3.25808E1	2.68053E1	2.4245E-9	2.51203E-3	2.51203E-3	6.32356E-3	2.45978E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09371E0	-8.16917E-1	-7.98178E-1	-9.13119E0	-9.14178E0	5.26905E-3	9.31501E-2	2.73153E1	-3.2629E1	-3.2647E1	2.68118E1	2.42243E-9	2.51847E-3	2.51847E-3	6.32356E-3	2.47451E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09371E0	-8.1706E-1	-7.98321E-1	-9.1311E0	-9.14168E0	5.57899E-3	9.30786E-2	2.72841E1	-3.26633E1	-3.2617E1	2.68058E1	2.42331E-9	2.51771E-3	2.51771E-3	6.34037E-3	2.47065E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09441E0	-8.16894E-1	-7.98202E-1	-9.13115E0	-9.14159E0	5.65052E-3	9.31501E-2	2.72774E1	-3.2675E1	-3.26113E1	2.68099E1	2.42088E-9	2.52546E-3	2.52546E-3	6.31548E-3	2.46398E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.16822E-1	-7.98273E-1	-9.13107E0	-9.14164E0	5.24521E-3	9.31978E-2	2.72775E1	-3.26609E1	-3.26729E1	2.68022E1					
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.1687E-1	-7.98154E-1	-9.13093E0	-9.1418E0	5.43594E-3	9.32217E-2	2.73151E1	-3.26608E1	-3.25918E1	2.68292E1	2.42753E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.47925E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-8.16846E-1	-7.98273E-1	-9.13081E0	-9.14195E0	5.34058E-3	9.31978E-2	2.73429E1	-3.26711E1	-3.25821E1	2.67872E1	2.42542E-9	2.51662E-3	2.51662E-3	6.34037E-3	2.46636E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09433E0	-8.16512E-1	-7.98059E-1	-9.1311E0	-9.14173E0	5.10216E-3	9.30786E-2	2.73522E1	-3.26621E1	-3.26138E1	2.68004E1	2.43175E-9	2.51632E-3	2.51632E-3	6.31278E-3	2.46819E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09379E0	-8.16727E-1	-7.98321E-1	-9.13093E0	-9.14156E0	5.31673E-3	9.30786E-2	2.73375E1	-3.26368E1	-3.26188E1	2.68202E1	2.43067E-9	2.51804E-3	2.51804E-3	6.31299E-3	2.46664E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-8.17275E-1	-7.98488E-1	-9.13105E0	-9.14178E0	5.10216E-3	9.30071E-2	2.73236E1	-3.26851E1	-3.26364E1	2.67995E1	2.42226E-9	2.52318E-3	2.52318E-3	6.31288E-3	2.46421E-2
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.16917E-1	-7.98106E-1	-9.13098E0	-9.14173E0	5.45979E-3	9.31263E-2	2.73267E1	-3.26579E1	-3.26422E1	2.68262E1	2.42564E-9	2.51919E-3	2.51919E-3	6.35514E-3	2.4741E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09441E0	-8.16965E-1	-7.98559E-1	-9.131E0	-9.14176E0	5.26905E-3	9.29594E-2	2.72614E1	-3.27157E1	-3.2629E1	2.68058E1	2.42121E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.47279E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09371E0	-8.16751E-1	-7.98416E-1	-9.13115E0	-9.14199E0	5.29289E-3	9.31025E-2	2.73886E1	-3.27654E1	-3.25311E1	2.67806E1	2.42331E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.45994E-2
2.0E1	0.0E0	1.0E0	8.08E2	5.58E2	-2.09402E0	-8.1687E-1	-7.98416E-1	-9.13088E0	-9.14168E0	5.29289E-3	9.29117E-2	2.73128E1	-3.26809E1	-3.25877E1	2.6828E1	2.42037E-9	2.52061E-3	2.52061E-3	6.3074E-3	2.47451E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09387E0	-8.16703E-1	-7.98082E-1	-9.13086E0	-9.14168E0	5.26905E-3	9.28164E-2	2.73246E1	-3.27115E1	-3.25782E1	2.67995E1	2.42437E-9	2.5199E-3	2.5199E-3	6.34588E-3	2.46636E-2
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-8.16989E-1	-7.98321E-1	-9.13088E0	-9.14171E0	5.17368E-3	9.29356E-2	2.73159E1	-3.26434E1	-3.26206E1	2.68028E1	2.42768E-9	2.51814E-3	2.51814E-3	6.32858E-3	2.46169E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.16822E-1	-7.98225E-1	-9.13098E0	-9.14178E0	5.17368E-3	9.29117E-2	2.72823E1	-3.26627E1	-3.2632E1	2.68448E1	2.42121E-9	2.51662E-3	2.51662E-3	6.28552E-3	2.47065E-2