[Scan]
initial_time=2015-12-22T16:58:03
final_time=2015-12-22T16:58:22
ip_count=19
run=1021
dataset=2
scan=67
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.08812E-4
ql1_vset=
ql1_vmon=-8.16846E-1
ql1_imon=1.36643E-8
ql2_vset=
ql2_vmon=-7.98678E-1
ql2_imon=2.0141E-9
ql3_vset=
ql3_vmon=-9.1311E0
ql3_imon=2.95699E-10
ql4_vset=
ql4_vmon=-9.1419E0
ql4_imon=4.66466E-11
mult1=-1.01023E-8
mult2=-3.23085E-9
rf_tmon=-4.60976E-3
rf_agc=3.24125E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=1.73235E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63129E0
bslens_imon=2.48007E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20025E1
lens5a_imon=1.96793E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12479E2
lens4a_imon=2.04949E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53869E1
cs_ef1b_imon=2.83962E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04636E2
lens23_imon=1.02164E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04814E1
cs_ea1_imon=2.55734E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38638E0
lens1_imon=2.44042E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64915E1
os_ef1alow_imon=2.95675E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03696E1
cs_ea2_imon=1.52236E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84178E1
cs_ef1a_imon=2.92215E-5
olens2_vset=9.7E-1
olens2_vmon=9.70459E-1
olens2_imon=1.29994E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11562E1
os_restr1_imon=4.29526E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15222E1
os_ea1_imon=2.37673E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63323E1
os_ef1bup_imon=3.07929E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24369E0
cs_ionrep_imon=1.18674E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91876E2
cs_nozzle_imon=1.93233E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01911E1
cs_anode1_imon=2.95567E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20542E0
olens4_imon=3.30297E-8
tplens_vset=1.4E-1
tplens_vmon=1.59757E0
tplens_imon=-3.31791E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26815E1
iondef3_imon=1.48487E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26585E1
iondef2_imon=1.56093E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02982E2
lens6_imon=2.98371E-4
ql6_vset=1.0E-1
ql6_vmon=9.29832E-2
ql6_imon=4.0979E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26832E0
ionrepsh_imon=1.75199E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33904E1
lens5b_imon=2.18891E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74669E1
cs_ef2b_imon=3.1247E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44376E0
os_ea2_imon=-8.14854E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.061E2
lens4b_imon=2.00659E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70555E1
cs_ef2a_imon=3.16794E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04014E0
os_ef2alow_imon=-2.60148E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.67991E-1
os_ef2bup_imon=-5.30806E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10739E1
os_restr2_imon=3.41554E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23038E2
cs_ionfoca_imon=6.27369E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01947E1
cs_anode2_imon=2.25001E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73027E1
iondef1_imon=1.07787E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68004E1
iondef4_imon=1.0708E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=5.51794E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82928E-1
olens1_imon=7.79752E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14456E0
cs_ionaccel_imon=-1.85546E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02109E2
cs_ionfocb_imon=1.47057E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56021E1
einzel_imon=7.6518E-6
window_vset=0.0E0
window_vmon=1.53673E-1
window_imon=-1.09142E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.39113E-4
mask2_vset=0.0E0
mask2_vmon=-1.8629E1
mask2_imon=-7.95896E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92664E3
multa_neg_imon=7.43328E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93701E3
defgrida_imon=6.8637E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.11244E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.19103E0
defgridb_imon=5.96246E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33424E1
os_fil1_imon=9.43315E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06638E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63257E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30915E1
cs_fil1_imon=9.95873E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61783E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63693E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.75127E-2
os_fil2_imon=-2.74405E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86302E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.9005E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33666E-1
cs_fil2_imon=-3.14049E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.31641E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22177E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.47709E-2
chamber_ion_pmon=2.42437E-9
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.52394E-1
res40_imon=-2.40687E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09627E0	-8.17084E-1	-7.98345E-1	-9.13091E0	-9.14185E0	5.67436E-3	9.30071E-2	2.72809E1	-3.26632E1	-3.26018E1	2.67962E1	2.43598E-9	2.52209E-3	2.52209E-3	6.3074E-3	2.46636E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09572E0	-8.16798E-1	-7.98225E-1	-9.13095E0	-9.14197E0	5.53131E-3	9.29594E-2	2.72953E1	-3.26903E1	-3.26346E1	2.68316E1	2.42553E-9	2.52599E-3	2.52599E-3	6.3074E-3	2.46819E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09565E0	-8.1687E-1	-7.98464E-1	-9.13103E0	-9.14202E0	5.57899E-3	9.28164E-2	2.7319E1	-3.26666E1	-3.26364E1	2.67878E1	2.42423E-9	2.51804E-3	2.51804E-3	6.33538E-3	2.46882E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09595E0	-8.16917E-1	-7.97963E-1	-9.13122E0	-9.14168E0	5.60284E-3	9.2864E-2	2.7304E1	-3.2681E1	-3.2593E1	2.68131E1	2.42564E-9	2.52236E-3	2.52236E-3	6.32858E-3	2.4741E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09456E0	-8.16798E-1	-7.98321E-1	-9.131E0	-9.14185E0	5.57899E-3	9.29117E-2	2.73388E1	-3.26864E1	-3.26357E1	2.68063E1	2.42692E-9	2.51223E-3	2.51223E-3	6.31744E-3	2.47097E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-8.16607E-1	-7.98106E-1	-9.13093E0	-9.14187E0	5.38826E-3	9.29356E-2	2.73188E1	-3.2622E1	-3.26431E1	2.68001E1	2.42719E-9	2.51793E-3	2.51793E-3	6.32518E-3	2.46756E-2
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.09433E0	-8.16965E-1	-7.9844E-1	-9.13076E0	-9.14168E0	5.36442E-3	9.29594E-2	2.72745E1	-3.26933E1	-3.25695E1	2.68111E1	2.41956E-9	2.51919E-3	2.51919E-3	6.31269E-3	2.46789E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.16822E-1	-7.98631E-1	-9.1311E0	-9.1418E0	5.29289E-3	9.29832E-2	2.73014E1	-3.26762E1	-3.25899E1	2.68038E1	2.4245E-9	2.51954E-3	2.51954E-3	6.34518E-3	2.4724E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-8.1687E-1	-7.98559E-1	-9.13107E0	-9.14171E0	5.62668E-3	9.27925E-2	2.72715E1	-3.26843E1	-3.25948E1	2.68328E1	2.42408E-9	2.52066E-3	2.52066E-3	6.3131E-3	2.47585E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-8.17347E-1	-7.98464E-1	-9.13107E0	-9.14178E0	5.60284E-3	9.29117E-2	2.73183E1	-3.26146E1	-3.26362E1	2.67968E1	2.43278E-9	2.51632E-3	2.51632E-3	6.31817E-3	2.46608E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-8.16751E-1	-7.98512E-1	-9.1311E0	-9.14185E0	5.55515E-3	9.27687E-2	2.72973E1	-3.26687E1	-3.26398E1	2.68208E1	2.42542E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.46636E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.1706E-1	-7.98464E-1	-9.13093E0	-9.14166E0	5.62668E-3	9.2864E-2	2.73472E1	-3.26747E1	-3.26254E1	2.68424E1	2.43386E-9	2.5199E-3	2.5199E-3	6.30192E-3	2.47494E-2
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.17013E-1	-7.98416E-1	-9.13117E0	-9.14168E0	5.55515E-3	9.30786E-2	2.7324E1	-3.26195E1	-3.26573E1	2.67949E1	2.43069E-9	2.51443E-3	2.51443E-3	6.32936E-3	2.46207E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.16941E-1	-7.98392E-1	-9.13129E0	-9.14187E0	5.26905E-3	9.3174E-2	2.7257E1	-3.26591E1	-3.26344E1	2.68136E1	2.43071E-9	2.52061E-3	2.52061E-3	6.32896E-3	2.46398E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0958E0	-8.16798E-1	-7.98202E-1	-9.13103E0	-9.14152E0	5.50747E-3	9.30071E-2	2.72943E1	-3.26795E1	-3.25785E1	2.67902E1	2.42753E-9	2.51443E-3	2.51443E-3	6.32936E-3	2.4685E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-8.17132E-1	-7.98368E-1	-9.13091E0	-9.14199E0	5.48363E-3	9.30786E-2	2.72727E1	-3.26585E1	-3.26419E1	2.67956E1	2.43175E-9	2.51771E-3	2.51771E-3	6.3074E-3	2.46636E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09627E0	-8.16894E-1	-7.98512E-1	-9.13076E0	-9.14192E0	5.4121E-3	9.31025E-2	2.72555E1	-3.26542E1	-3.26217E1	2.6837E1	2.4245E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.46819E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.16894E-1	-7.98321E-1	-9.13098E0	-9.14164E0	5.19753E-3	9.28879E-2	2.73323E1	-3.27048E1	-3.26017E1	2.67897E1	2.42101E-9	2.51693E-3	2.51693E-3	6.29624E-3	2.46664E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-8.16894E-1	-7.9844E-1	-9.13131E0	-9.1418E0	5.126E-3	9.32693E-2	2.73291E1	-3.2626E1	-3.26212E1	2.68016E1	2.42361E-9	2.52025E-3	2.52025E-3	6.31798E-3	2.47617E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-8.16846E-1	-7.98678E-1	-9.1311E0	-9.1419E0	4.86374E-3	9.29832E-2	2.73027E1	-3.26585E1	-3.26815E1	2.68004E1	2.42437E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.47709E-2