[Scan]
initial_time=2015-12-22T16:58:56
final_time=2015-12-22T16:59:15
ip_count=19
run=1021
dataset=2
scan=69
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09464E0
qbias_imon=-1.08789E-4
ql1_vset=
ql1_vmon=-8.17037E-1
ql1_imon=1.36641E-8
ql2_vset=
ql2_vmon=-7.98082E-1
ql2_imon=1.99621E-9
ql3_vset=
ql3_vmon=-9.13122E0
ql3_imon=2.35927E-10
ql4_vset=
ql4_vmon=-9.14221E0
ql4_imon=5.6982E-11
mult1=-1.01141E-8
mult2=-2.68602E-9
rf_tmon=-6.1435E-3
rf_agc=3.15394E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.50747E-3
ql5_imon=1.70707E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64992E0
bslens_imon=2.26017E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20085E1
lens5a_imon=1.97766E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12508E2
lens4a_imon=2.04974E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53493E1
cs_ef1b_imon=2.83806E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04616E2
lens23_imon=1.02074E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0482E1
cs_ea1_imon=2.56563E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36535E0
lens1_imon=2.42239E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64677E1
os_ef1alow_imon=2.97242E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03973E1
cs_ea2_imon=1.54219E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84307E1
cs_ef1a_imon=2.9436E-5
olens2_vset=9.7E-1
olens2_vmon=9.70531E-1
olens2_imon=1.30046E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11466E1
os_restr1_imon=4.30103E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15504E1
os_ea1_imon=2.33852E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63841E1
os_ef1bup_imon=3.06261E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27673E0
cs_ionrep_imon=1.18602E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91872E2
cs_nozzle_imon=1.9311E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01946E1
cs_anode1_imon=2.929E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20535E0
olens4_imon=3.27933E-8
tplens_vset=1.4E-1
tplens_vmon=1.61079E0
tplens_imon=-4.18309E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26319E1
iondef3_imon=1.45747E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26242E1
iondef2_imon=1.57824E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02984E2
lens6_imon=2.98083E-4
ql6_vset=1.0E-1
ql6_vmon=9.26018E-2
ql6_imon=4.11974E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29776E0
ionrepsh_imon=1.76497E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33652E1
lens5b_imon=2.17918E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74744E1
cs_ef2b_imon=3.12212E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45097E0
os_ea2_imon=-6.85076E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06075E2
lens4b_imon=2.00551E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7175E1
cs_ef2a_imon=3.18425E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.02649E0
os_ef2alow_imon=-2.56683E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.86404E-1
os_ef2bup_imon=-5.47856E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10755E1
os_restr2_imon=3.40244E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23074E2
cs_ionfoca_imon=6.29315E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.24336E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72833E1
iondef1_imon=1.09193E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67848E1
iondef4_imon=1.08166E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=5.48472E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8269E-1
olens1_imon=7.72937E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13201E0
cs_ionaccel_imon=-1.91562E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47009E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56399E1
einzel_imon=7.52317E-6
window_vset=0.0E0
window_vmon=1.55844E-1
window_imon=-1.03611E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82627E2
mask1_imon=2.38927E-4
mask2_vset=0.0E0
mask2_vmon=-1.8607E1
mask2_imon=-7.47936E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92584E3
multa_neg_imon=7.16651E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.33016E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50114E3
multb_neg_imon=7.19535E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32337E0
defgridb_imon=6.09945E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33371E1
os_fil1_imon=9.43094E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06824E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63171E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30935E1
cs_fil1_imon=9.98266E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62777E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63485E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.75127E-2
os_fil2_imon=-2.72488E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83483E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.71231E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34358E-1
cs_fil2_imon=-2.50656E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=4.68789E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22283E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=2.46636E-2
chamber_ion_pmon=2.42226E-9
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.4878E-1
res40_imon=-2.60051E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=148
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-8.16393E-1	-7.98321E-1	-9.13064E0	-9.1418E0	5.60284E-3	9.2864E-2	2.73611E1	-3.26478E1	-3.26313E1	2.68192E1	2.42647E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.4685E-2
2.0E0	3.0E0	0.0E0	3.16E2	1.6E2	-2.09627E0	-8.16607E-1	-7.98297E-1	-9.13062E0	-9.14156E0	5.48363E-3	9.2864E-2	2.73467E1	-3.26823E1	-3.26162E1	2.68076E1	2.42243E-9	2.52169E-3	2.52169E-3	6.32896E-3	2.4724E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09371E0	-8.16584E-1	-7.98345E-1	-9.131E0	-9.1414E0	5.26905E-3	9.30071E-2	2.73051E1	-3.26712E1	-3.26086E1	2.68034E1	2.42637E-9	2.51804E-3	2.51804E-3	6.31858E-3	2.4732E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09387E0	-8.16774E-1	-7.98059E-1	-9.13069E0	-9.14159E0	5.24521E-3	9.27687E-2	2.72961E1	-3.26446E1	-3.25816E1	2.68001E1	2.42463E-9	2.52236E-3	2.52236E-3	6.3074E-3	2.46169E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09364E0	-8.16464E-1	-7.98178E-1	-9.13067E0	-9.14166E0	5.81741E-3	9.29594E-2	2.73257E1	-3.26885E1	-3.2613E1	2.68178E1	2.42331E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.47279E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09426E0	-8.16798E-1	-7.97939E-1	-9.13088E0	-9.14171E0	5.17368E-3	9.31025E-2	2.73291E1	-3.26008E1	-3.26597E1	2.68112E1	2.42657E-9	2.50882E-3	2.50882E-3	6.32896E-3	2.46819E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09402E0	-8.16751E-1	-7.98392E-1	-9.13103E0	-9.1418E0	4.98295E-3	9.33886E-2	2.73033E1	-3.26536E1	-3.26146E1	2.6822E1	2.42437E-9	2.51443E-3	2.51443E-3	6.31837E-3	2.47494E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0941E0	-8.16703E-1	-7.98321E-1	-9.13091E0	-9.14176E0	4.98295E-3	9.34362E-2	2.726E1	-3.26879E1	-3.25677E1	2.67932E1					
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09402E0	-8.16917E-1	-7.98488E-1	-9.13093E0	-9.14204E0	4.72069E-3	9.30548E-2	2.73339E1	-3.26398E1	-3.26338E1	2.68448E1	2.42226E-9	2.51334E-3	2.51334E-3	6.29645E-3	2.46421E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09379E0	-8.16965E-1	-7.98273E-1	-9.13134E0	-9.1419E0	4.98295E-3	9.27448E-2	2.72973E1	-3.26573E1	-3.265E1	2.6786E1	2.42331E-9	2.51443E-3	2.51443E-3	6.30192E-3	2.47494E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09379E0	-8.16774E-1	-7.98225E-1	-9.13112E0	-9.14178E0	5.00679E-3	9.27925E-2	2.73682E1	-3.2638E1	-3.26543E1	2.68202E1	2.42437E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.47925E-2
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.16965E-1	-7.98607E-1	-9.13134E0	-9.14197E0	5.22137E-3	9.31978E-2	2.72799E1	-3.26579E1	-3.26747E1	2.67794E1	2.42753E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.47279E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09418E0	-8.17156E-1	-7.98488E-1	-9.13126E0	-9.14173E0	5.4121E-3	9.30071E-2	2.73225E1	-3.26915E1	-3.26308E1	2.68022E1	2.41911E-9	2.51552E-3	2.51552E-3	6.31837E-3	2.47709E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09456E0	-8.16941E-1	-7.98154E-1	-9.13119E0	-9.14195E0	5.57899E-3	9.31263E-2	2.73321E1	-3.26813E1	-3.2602E1	2.68088E1	2.41911E-9	2.5199E-3	2.5199E-3	6.29645E-3	2.47709E-2
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-8.1706E-1	-7.98154E-1	-9.13119E0	-9.14187E0	5.10216E-3	9.30309E-2	2.73198E1	-3.26517E1	-3.26034E1	2.67968E1	2.42377E-9	2.52119E-3	2.52119E-3	6.3157E-3	2.47408E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09495E0	-8.16774E-1	-7.9813E-1	-9.13148E0	-9.14209E0	5.29289E-3	9.31978E-2	2.72395E1	-3.26426E1	-3.26354E1	2.67843E1					
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.17037E-1	-7.98082E-1	-9.13148E0	-9.14164E0	5.34058E-3	9.31501E-2	2.73271E1	-3.26487E1	-3.26811E1	2.68136E1	2.42513E-9	2.52081E-3	2.52081E-3	6.31773E-3	2.47424E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.1706E-1	-7.98082E-1	-9.13124E0	-9.14187E0	5.05447E-3	9.31263E-2	2.74058E1	-3.27021E1	-3.26249E1	2.68417E1	2.42423E-9	2.5225E-3	2.5225E-3	6.32418E-3	2.47977E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0941E0	-8.17204E-1	-7.98059E-1	-9.13126E0	-9.14204E0	5.03063E-3	9.29832E-2	2.73712E1	-3.26615E1	-3.262E1	2.6801E1	2.42586E-9	2.52262E-3	2.52262E-3	6.31761E-3	2.46732E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09464E0	-8.17037E-1	-7.98082E-1	-9.13122E0	-9.14221E0	5.50747E-3	9.26018E-2	2.72833E1	-3.26242E1	-3.26319E1	2.67848E1	2.42226E-9	2.51771E-3	2.51771E-3	6.33486E-3	2.46636E-2