[Scan]
initial_time=2015-12-22T16:59:23
final_time=2015-12-22T16:59:42
ip_count=19
run=1021
dataset=2
scan=70
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09603E0
qbias_imon=-1.08794E-4
ql1_vset=
ql1_vmon=-8.16989E-1
ql1_imon=1.36691E-8
ql2_vset=
ql2_vmon=-7.98035E-1
ql2_imon=2.06814E-9
ql3_vset=
ql3_vmon=-9.13157E0
ql3_imon=2.50936E-10
ql4_vset=
ql4_vmon=-9.14176E0
ql4_imon=5.55634E-11
mult1=-8.87098E-9
mult2=-2.82172E-9
rf_tmon=-3.67893E-3
rf_agc=3.45889E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.24521E-3
ql5_imon=1.7545E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65232E0
bslens_imon=2.51612E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19568E1
lens5a_imon=1.96108E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12537E2
lens4a_imon=2.04794E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53953E1
cs_ef1b_imon=2.83746E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04607E2
lens23_imon=1.0193E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05355E1
cs_ea1_imon=2.57825E-5
lens1_vset=-5.0E0
lens1_vmon=-5.28784E0
lens1_imon=2.41158E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64434E1
os_ef1alow_imon=2.96828E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0318E1
cs_ea2_imon=1.54579E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84676E1
cs_ef1a_imon=2.93297E-5
olens2_vset=9.7E-1
olens2_vmon=9.70531E-1
olens2_imon=1.30417E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11153E1
os_restr1_imon=4.27652E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14795E1
os_ea1_imon=2.38034E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63695E1
os_ef1bup_imon=3.07604E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23768E0
cs_ionrep_imon=1.19972E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91878E2
cs_nozzle_imon=1.93215E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01857E1
cs_anode1_imon=2.95026E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20558E0
olens4_imon=3.28387E-8
tplens_vset=1.4E-1
tplens_vmon=1.52307E0
tplens_imon=-1.69568E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26227E1
iondef3_imon=1.4928E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26814E1
iondef2_imon=1.5703E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02939E2
lens6_imon=2.98267E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=4.16983E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23527E0
ionrepsh_imon=1.79165E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34186E1
lens5b_imon=2.15575E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74802E1
cs_ef2b_imon=3.11172E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.35784E0
os_ea2_imon=-6.09372E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06097E2
lens4b_imon=2.00626E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70537E1
cs_ef2a_imon=3.17984E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05936E0
os_ef2alow_imon=-2.65915E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.02229E-1
os_ef2bup_imon=-5.67927E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10889E1
os_restr2_imon=3.40436E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23079E2
cs_ionfoca_imon=6.30181E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01731E1
cs_anode2_imon=2.24389E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72984E1
iondef1_imon=1.10274E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6802E1
iondef4_imon=1.08233E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=5.52434E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82928E-1
olens1_imon=7.7465E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14756E0
cs_ionaccel_imon=-1.95277E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.47158E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56273E1
einzel_imon=7.61576E-6
window_vset=0.0E0
window_vmon=1.6929E-1
window_imon=-1.30045E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82638E2
mask1_imon=2.3907E-4
mask2_vset=0.0E0
mask2_vmon=-1.86176E1
mask2_imon=-7.05797E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92422E3
multa_neg_imon=8.9041E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93739E3
defgrida_imon=6.62577E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.49978E3
multb_neg_imon=8.1038E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.62412E0
defgridb_imon=5.60196E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33394E1
os_fil1_imon=9.41495E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06218E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63081E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30954E1
cs_fil1_imon=9.9648E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63099E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62998E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.75127E-2
os_fil2_imon=-2.90623E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83899E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.98944E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36643E-1
cs_fil2_imon=-2.49778E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.19978E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22378E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32978E-3
inlet_lpb_pmon=2.4732E-2
chamber_ion_pmon=2.42101E-9
chamber_cvt_pmon=2.5147E-3
foreline_cvt_pmon=2.5147E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.67101E-1
res40_imon=-2.64833E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=200
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.16965E-1	-7.98631E-1	-9.13107E0	-9.14209E0	4.95911E-3	9.29117E-2	2.72501E1	-3.26614E1	-3.25918E1	2.68196E1	2.42437E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.46636E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09503E0	-8.1687E-1	-7.98726E-1	-9.1311E0	-9.1419E0	5.126E-3	9.29594E-2	2.72654E1	-3.26512E1	-3.26032E1	2.67956E1	2.42159E-9	2.51919E-3	2.51919E-3	6.3445E-3	2.46789E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.17013E-1	-7.98678E-1	-9.13086E0	-9.14178E0	5.65052E-3	9.32217E-2	2.72673E1	-3.26366E1	-3.2616E1	2.68018E1	2.42331E-9	2.5199E-3	2.5199E-3	6.34037E-3	2.47925E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0948E0	-8.16703E-1	-7.98821E-1	-9.13107E0	-9.14183E0	5.26905E-3	9.32217E-2	2.7265E1	-3.26691E1	-3.26042E1	2.68233E1	2.42502E-9	2.51847E-3	2.51847E-3	6.32356E-3	2.47346E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-8.16751E-1	-7.98869E-1	-9.13095E0	-9.14199E0	5.29289E-3	9.32455E-2	2.723E1	-3.26518E1	-3.26026E1	2.68026E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.16965E-1	-7.98488E-1	-9.13088E0	-9.14211E0	4.88758E-3	9.32932E-2	2.72504E1	-3.26717E1	-3.26092E1	2.6813E1	2.42121E-9	2.52209E-3	2.52209E-3	6.29645E-3	2.47065E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-8.1718E-1	-7.98249E-1	-9.13081E0	-9.14207E0	5.19753E-3	9.31025E-2	2.72829E1	-3.26729E1	-3.26398E1	2.68094E1	2.42226E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.46207E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.1687E-1	-7.98202E-1	-9.13112E0	-9.14207E0	5.34058E-3	9.34601E-2	2.73399E1	-3.26464E1	-3.25647E1	2.68016E1	2.42542E-9	2.51334E-3	2.51334E-3	6.30192E-3	2.47065E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-8.17084E-1	-7.98845E-1	-9.13124E0	-9.14211E0	5.03063E-3	9.33409E-2	2.73634E1	-3.26663E1	-3.26134E1	2.68094E1	2.42437E-9	2.51443E-3	2.51443E-3	6.32936E-3	2.46636E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09464E0	-8.1687E-1	-7.98607E-1	-9.131E0	-9.14218E0	5.6982E-3	9.30071E-2	2.73662E1	-3.2679E1	-3.25561E1	2.68194E1	2.42858E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.47279E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-8.17037E-1	-7.98726E-1	-9.13124E0	-9.1419E0	5.45979E-3	9.3174E-2	2.73294E1	-3.26805E1	-3.26196E1	2.68227E1	2.43175E-9	2.51611E-3	2.51611E-3	6.29603E-3	2.46916E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-8.1706E-1	-7.98583E-1	-9.13122E0	-9.1418E0	5.34058E-3	9.31263E-2	2.73802E1	-3.26771E1	-3.26561E1	2.67866E1	2.42463E-9	2.52659E-3	2.52659E-3	6.28103E-3	2.46789E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.17037E-1	-7.98488E-1	-9.13095E0	-9.14207E0	5.60284E-3	9.35316E-2	2.73171E1	-3.2635E1	-3.26801E1	2.68052E1	2.42858E-9	2.52318E-3	2.52318E-3	6.31288E-3	2.4685E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.16917E-1	-7.98178E-1	-9.13126E0	-9.14171E0	5.4121E-3	9.30309E-2	2.72666E1	-3.26518E1	-3.26284E1	2.68016E1	2.42864E-9	2.51739E-3	2.51739E-3	6.32896E-3	2.47029E-2
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09456E0	-8.17013E-1	-7.98392E-1	-9.13112E0	-9.14166E0	5.36442E-3	9.30786E-2	2.7349E1	-3.26981E1	-3.26116E1	2.67962E1	2.42226E-9	2.5199E-3	2.5199E-3	6.34037E-3	2.4685E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09449E0	-8.17013E-1	-7.98249E-1	-9.13115E0	-9.14187E0	5.19753E-3	9.31025E-2	2.73315E1	-3.26368E1	-3.26705E1	2.68064E1	2.42637E-9	2.51915E-3	2.51915E-3	6.29624E-3	2.4732E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.17132E-1	-7.98154E-1	-9.13146E0	-9.14187E0	5.50747E-3	9.2864E-2	2.72455E1	-3.26614E1	-3.26514E1	2.6825E1	2.42647E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.46207E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-8.1706E-1	-7.98392E-1	-9.1311E0	-9.1419E0	5.07832E-3	9.3174E-2	2.73141E1	-3.26741E1	-3.25954E1	2.68052E1	2.42553E-9	2.52492E-3	2.52492E-3	6.31817E-3	2.47029E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09565E0	-8.16894E-1	-7.98225E-1	-9.13119E0	-9.14168E0	5.05447E-3	9.31501E-2	2.73253E1	-3.2697E1	-3.26474E1	2.67962E1	2.42858E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.46421E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09603E0	-8.16989E-1	-7.98035E-1	-9.13157E0	-9.14176E0	5.24521E-3	9.3317E-2	2.72984E1	-3.26814E1	-3.26227E1	2.6802E1	2.42101E-9	2.5147E-3	2.5147E-3	6.32978E-3	2.4732E-2