[Scan]
initial_time=2015-12-22T17:00:16
final_time=2015-12-22T17:00:35
ip_count=19
run=1021
dataset=2
scan=72
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.0877E-4
ql1_vset=
ql1_vmon=-8.16679E-1
ql1_imon=1.3668E-8
ql2_vset=
ql2_vmon=-7.98273E-1
ql2_imon=1.97482E-9
ql3_vset=
ql3_vmon=-9.13088E0
ql3_imon=2.2639E-10
ql4_vset=
ql4_vmon=-9.14178E0
ql4_imon=5.00917E-11
mult1=-1.09685E-8
mult2=-2.63278E-9
rf_tmon=-3.68329E-3
rf_agc=3.38683E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.36442E-3
ql5_imon=1.75084E-9
bslens_vset=-6.2E0
bslens_vmon=-6.75435E0
bslens_imon=1.8568E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.18611E1
lens5a_imon=1.86191E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12466E2
lens4a_imon=2.05966E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53499E1
cs_ef1b_imon=2.84351E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04839E2
lens23_imon=1.0243E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.03615E1
cs_ea1_imon=2.46468E-5
lens1_vset=-5.0E0
lens1_vmon=-5.2254E0
lens1_imon=2.67023E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64788E1
os_ef1alow_imon=2.97348E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.05168E1
cs_ea2_imon=1.6582E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84348E1
cs_ef1a_imon=2.93526E-5
olens2_vset=9.7E-1
olens2_vmon=9.70507E-1
olens2_imon=1.29609E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11257E1
os_restr1_imon=4.29929E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15149E1
os_ea1_imon=2.26549E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63751E1
os_ef1bup_imon=3.07739E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.09683E0
cs_ionrep_imon=1.14755E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91926E2
cs_nozzle_imon=1.94105E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01919E1
cs_anode1_imon=2.94533E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20563E0
olens4_imon=3.29487E-8
tplens_vset=1.4E-1
tplens_vmon=1.74108E0
tplens_imon=-2.77588E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.259E1
iondef3_imon=1.37559E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26627E1
iondef2_imon=1.61544E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03099E2
lens6_imon=2.98812E-4
ql6_vset=1.0E-1
ql6_vmon=9.2864E-2
ql6_imon=4.12365E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28512E0
ionrepsh_imon=1.67454E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.31954E1
lens5b_imon=2.17059E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74472E1
cs_ef2b_imon=3.11249E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.54815E0
os_ea2_imon=1.4651E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06129E2
lens4b_imon=2.00237E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71605E1
cs_ef2a_imon=3.18443E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03313E0
os_ef2alow_imon=-2.55721E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.96652E-1
os_ef2bup_imon=-5.43124E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11037E1
os_restr2_imon=3.41067E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.22916E2
cs_ionfoca_imon=6.23358E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01943E1
cs_anode2_imon=2.2482E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72516E1
iondef1_imon=1.18474E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6789E1
iondef4_imon=1.07183E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.55823E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=7.78927E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1284E0
cs_ionaccel_imon=-1.83435E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47181E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5633E1
einzel_imon=7.61833E-6
window_vset=0.0E0
window_vmon=1.67295E-1
window_imon=-1.05937E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82626E2
mask1_imon=2.39101E-4
mask2_vset=0.0E0
mask2_vmon=-1.86315E1
mask2_imon=-6.84045E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92723E3
multa_neg_imon=8.13135E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93605E3
defgrida_imon=6.14296E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50212E3
multb_neg_imon=6.00044E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.85313E0
defgridb_imon=6.94597E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33373E1
os_fil1_imon=9.4231E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06565E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63085E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30922E1
cs_fil1_imon=9.98858E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62517E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63848E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.83464E-2
os_fil2_imon=-2.71552E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.76755E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.91436E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34896E-1
cs_fil2_imon=-2.45488E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.5973E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22414E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=2.4724E-2
chamber_ion_pmon=2.4214E-9
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40034E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-2.79275E-1
res40_imon=-2.5155E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=149
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09588E0	-8.16822E-1	-7.97892E-1	-9.13115E0	-9.14192E0	5.31673E-3	9.31501E-2	2.74349E1	-3.27699E1	-3.25063E1	2.68192E1	2.4226E-9	2.50972E-3	2.50972E-3	6.31269E-3	2.46376E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09518E0	-8.16965E-1	-7.98011E-1	-9.13117E0	-9.1418E0	5.57899E-3	9.32455E-2	2.73417E1	-3.2647E1	-3.26368E1	2.68148E1	2.4214E-9	2.52276E-3	2.52276E-3	6.33436E-3	2.46819E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09595E0	-8.1687E-1	-7.98249E-1	-9.13112E0	-9.14183E0	5.14984E-3	9.30786E-2	2.72815E1	-3.2682E1	-3.26708E1	2.68028E1	2.42226E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.47279E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09611E0	-8.16917E-1	-7.98464E-1	-9.13143E0	-9.14166E0	5.19753E-3	9.31978E-2	2.73265E1	-3.26842E1	-3.25905E1	2.68052E1	2.42347E-9	2.51632E-3	2.51632E-3	6.3074E-3	2.46819E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-8.16679E-1	-7.98297E-1	-9.13141E0	-9.14178E0	5.43594E-3	9.29594E-2	2.73322E1	-3.26691E1	-3.26148E1	2.67962E1	2.42647E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.4814E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-8.16989E-1	-7.98702E-1	-9.13141E0	-9.14187E0	5.53131E-3	9.33409E-2	2.72561E1	-3.27001E1	-3.26499E1	2.68064E1	2.41911E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.45567E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09441E0	-8.16631E-1	-7.98464E-1	-9.1311E0	-9.14173E0	5.34058E-3	9.31025E-2	2.72856E1	-3.26555E1	-3.25912E1	2.6807E1	2.42121E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.46636E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09426E0	-8.16774E-1	-7.9844E-1	-9.13088E0	-9.14178E0	5.31673E-3	9.34601E-2	2.72968E1	-3.26596E1	-3.2603E1	2.6818E1	2.42016E-9	2.52538E-3	2.52538E-3	6.32386E-3	2.47709E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.1687E-1	-7.9844E-1	-9.131E0	-9.14161E0	5.14984E-3	9.3317E-2	2.731E1	-3.26793E1	-3.25874E1	2.68082E1	2.41727E-9	2.51954E-3	2.51954E-3	6.33436E-3	2.46608E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-8.16607E-1	-7.98154E-1	-9.13103E0	-9.14209E0	5.126E-3	9.31025E-2	2.73198E1	-3.26597E1	-3.25789E1	2.68322E1	2.42423E-9	2.51804E-3	2.51804E-3	6.32418E-3	2.47539E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-8.16607E-1	-7.98392E-1	-9.13093E0	-9.14147E0	5.29289E-3	9.33886E-2	2.73081E1	-3.26945E1	-3.26543E1	2.68292E1	2.42331E-9	2.51662E-3	2.51662E-3	6.30192E-3	2.4578E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09634E0	-8.16751E-1	-7.98488E-1	-9.13105E0	-9.14199E0	5.31673E-3	9.30309E-2	2.72853E1	-3.26494E1	-3.26026E1	2.67956E1	2.42852E-9	2.52697E-3	2.52697E-3	6.29067E-3	2.4732E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-8.16822E-1	-7.98321E-1	-9.13122E0	-9.14199E0	5.17368E-3	9.31978E-2	2.73399E1	-3.26567E1	-3.26386E1	2.68016E1	2.42037E-9	2.51954E-3	2.51954E-3	6.28592E-3	2.46398E-2
1.7E1	2.0E0	0.0E0	6.87E2	4.7E2	-2.0965E0	-8.16703E-1	-7.98368E-1	-9.13098E0	-9.14149E0	5.00679E-3	9.31263E-2	2.73305E1	-3.26278E1	-3.26703E1	2.68016E1	2.42753E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.47065E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09627E0	-8.1706E-1	-7.98202E-1	-9.13093E0	-9.1418E0	5.24521E-3	9.32932E-2	2.73249E1	-3.26518E1	-3.26681E1	2.681E1	2.42243E-9	2.52384E-3	2.52384E-3	6.32356E-3	2.47662E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.16512E-1	-7.98225E-1	-9.13105E0	-9.14173E0	4.86374E-3	9.31978E-2	2.72596E1	-3.26698E1	-3.26032E1	2.68134E1	2.42391E-9	2.52189E-3	2.52189E-3	6.32644E-3	2.4641E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09572E0	-8.16417E-1	-7.98249E-1	-9.13119E0	-9.14195E0	4.8399E-3	9.31263E-2	2.73369E1	-3.26566E1	-3.25992E1	2.68232E1					
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09572E0	-8.16703E-1	-7.98249E-1	-9.13105E0	-9.14173E0	4.98295E-3	9.30548E-2	2.73105E1	-3.26302E1	-3.26176E1	2.68046E1	2.42208E-9	2.51804E-3	2.51804E-3	6.32418E-3	2.47977E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09588E0	-8.16393E-1	-7.98321E-1	-9.13103E0	-9.14142E0	5.24521E-3	9.26733E-2	2.72892E1	-3.26461E1	-3.26402E1	2.68064E1	2.41806E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.46421E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.16679E-1	-7.98273E-1	-9.13088E0	-9.14178E0	5.36442E-3	9.2864E-2	2.72516E1	-3.26627E1	-3.259E1	2.6789E1	2.4214E-9	2.52169E-3	2.52169E-3	6.29665E-3	2.4724E-2