[Scan]
initial_time=2015-12-22T17:00:42
final_time=2015-12-22T17:01:02
ip_count=19
run=1021
dataset=2
scan=73
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09642E0
qbias_imon=-1.08838E-4
ql1_vset=
ql1_vmon=-8.16894E-1
ql1_imon=1.36731E-8
ql2_vset=
ql2_vmon=-7.98464E-1
ql2_imon=1.98803E-9
ql3_vset=
ql3_vmon=-9.131E0
ql3_imon=2.69651E-10
ql4_vset=
ql4_vmon=-9.14176E0
ql4_imon=4.32014E-11
mult1=-1.09806E-8
mult2=-2.80444E-9
rf_tmon=-4.6386E-3
rf_agc=3.31233E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.43594E-3
ql5_imon=1.73312E-9
bslens_vset=-6.2E0
bslens_vmon=-6.76591E0
bslens_imon=1.96987E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.18143E1
lens5a_imon=1.89378E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12529E2
lens4a_imon=2.05776E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53718E1
cs_ef1b_imon=2.81728E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04763E2
lens23_imon=1.02273E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04003E1
cs_ea1_imon=2.43425E-5
lens1_vset=-5.0E0
lens1_vmon=-5.20857E0
lens1_imon=3.32193E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64626E1
os_ef1alow_imon=2.97045E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.05867E1
cs_ea2_imon=1.6039E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84292E1
cs_ef1a_imon=2.95387E-5
olens2_vset=9.7E-1
olens2_vmon=9.70411E-1
olens2_imon=1.29874E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11292E1
os_restr1_imon=4.29274E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14869E1
os_ea1_imon=2.27851E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63737E1
os_ef1bup_imon=3.0955E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.10934E0
cs_ionrep_imon=1.12219E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91956E2
cs_nozzle_imon=1.94351E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01977E1
cs_anode1_imon=2.93693E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20558E0
olens4_imon=3.27279E-8
tplens_vset=1.4E-1
tplens_vmon=1.73051E0
tplens_imon=-4.65239E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26368E1
iondef3_imon=1.38375E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26681E1
iondef2_imon=1.65239E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0309E2
lens6_imon=2.98735E-4
ql6_vset=1.0E-1
ql6_vmon=9.2864E-2
ql6_imon=4.12854E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.21257E0
ionrepsh_imon=1.69487E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.32248E1
lens5b_imon=2.1695E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74615E1
cs_ef2b_imon=3.11857E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.61548E0
os_ea2_imon=3.62982E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06126E2
lens4b_imon=1.99639E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70495E1
cs_ef2a_imon=3.17515E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0936E0
os_ef2alow_imon=-2.75285E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.77602E-1
os_ef2bup_imon=-5.42339E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10931E1
os_restr2_imon=3.41842E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.22914E2
cs_ionfoca_imon=6.22885E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01947E1
cs_anode2_imon=2.24389E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73027E1
iondef1_imon=1.14413E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67914E1
iondef4_imon=1.08017E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=5.50202E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8269E-1
olens1_imon=7.79273E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12233E0
cs_ionaccel_imon=-2.03206E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02074E2
cs_ionfocb_imon=1.47291E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56207E1
einzel_imon=7.61936E-6
window_vset=0.0E0
window_vmon=1.56075E-1
window_imon=-8.89599E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.38918E-4
mask2_vset=0.0E0
mask2_vmon=-1.8605E1
mask2_imon=-7.34629E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92847E3
multa_neg_imon=7.5586E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93638E3
defgrida_imon=5.74288E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50155E3
multb_neg_imon=6.38706E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.76876E0
defgridb_imon=7.1905E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33394E1
os_fil1_imon=9.39693E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07317E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62918E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3097E1
cs_fil1_imon=9.95807E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62774E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6404E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.68608E-2
os_fil2_imon=-2.53983E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88704E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.01513E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38197E-1
cs_fil2_imon=-2.61191E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.62024E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22468E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.47494E-2
chamber_ion_pmon=2.42437E-9
chamber_cvt_pmon=2.52318E-3
foreline_cvt_pmon=2.52318E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.42473E-1
res40_imon=-2.41408E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=205
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09634E0	-8.1706E-1	-7.98225E-1	-9.13138E0	-9.14195E0	5.03063E-3	9.30786E-2	2.7449E1	-3.27511E1	-3.24915E1	2.68076E1	2.42657E-9	2.51632E-3	2.51632E-3	6.31278E-3	2.46188E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09603E0	-8.17013E-1	-7.98035E-1	-9.13095E0	-9.14204E0	5.22137E-3	9.30786E-2	2.7335E1	-3.26503E1	-3.26778E1	2.68126E1	2.42553E-9	2.5131E-3	2.5131E-3	6.32896E-3	2.47029E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09657E0	-8.17156E-1	-7.98345E-1	-9.13098E0	-9.14199E0	5.45979E-3	9.29832E-2	2.73198E1	-3.26679E1	-3.2629E1	2.6792E1	2.42315E-9	2.51359E-3	2.51359E-3	6.30182E-3	2.46882E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-8.17037E-1	-7.9844E-1	-9.13098E0	-9.14171E0	5.36442E-3	9.29832E-2	2.72685E1	-3.26738E1	-3.26573E1	2.68065E1	2.42437E-9	2.52538E-3	2.52538E-3	6.30192E-3	2.47065E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09526E0	-8.16917E-1	-7.98082E-1	-9.13131E0	-9.14178E0	5.45979E-3	9.27925E-2	2.72998E1	-3.2629E1	-3.26219E1	2.67992E1	2.42361E-9	2.51603E-3	2.51603E-3	6.29157E-3	2.47617E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09565E0	-8.17013E-1	-7.98512E-1	-9.13112E0	-9.14159E0	5.17368E-3	9.3317E-2	2.72937E1	-3.26615E1	-3.26416E1	2.68052E1	2.42331E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.47065E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-8.16965E-1	-7.98249E-1	-9.13124E0	-9.14147E0	5.38826E-3	9.3174E-2	2.72997E1	-3.26579E1	-3.2623E1	2.68304E1	2.42016E-9	2.51552E-3	2.51552E-3	6.32936E-3	2.46636E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-8.16917E-1	-7.98225E-1	-9.13126E0	-9.14185E0	5.14984E-3	9.30786E-2	2.73015E1	-3.26494E1	-3.26308E1	2.68046E1	2.41911E-9	2.51552E-3	2.51552E-3	6.31837E-3	2.47709E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.16751E-1	-7.98178E-1	-9.131E0	-9.14176E0	5.34058E-3	9.31025E-2	2.73117E1	-3.26675E1	-3.26428E1	2.67866E1	2.42226E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.47494E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09449E0	-8.16941E-1	-7.98082E-1	-9.13095E0	-9.14147E0	5.65052E-3	9.32455E-2	2.73201E1	-3.26741E1	-3.25773E1	2.67968E1	2.42542E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.47279E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09456E0	-8.16917E-1	-7.98225E-1	-9.13062E0	-9.1418E0	5.26905E-3	9.30309E-2	2.72961E1	-3.26999E1	-3.26272E1	2.6813E1	2.42864E-9	2.51954E-3	2.51954E-3	6.32356E-3	2.46398E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.16798E-1	-7.98249E-1	-9.13088E0	-9.14192E0	5.00679E-3	9.30071E-2	2.73129E1	-3.26627E1	-3.26212E1	2.67932E1	2.42437E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.47065E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09557E0	-8.16655E-1	-7.98154E-1	-9.13122E0	-9.1419E0	5.29289E-3	9.30309E-2	2.73051E1	-3.26536E1	-3.2638E1	2.67836E1	2.42208E-9	2.52362E-3	2.52362E-3	6.30182E-3	2.4732E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0958E0	-8.16917E-1	-7.98273E-1	-9.13112E0	-9.14211E0	5.38826E-3	9.29356E-2	2.7275E1	-3.26354E1	-3.26537E1	2.6831E1	2.4245E-9	2.52492E-3	2.52492E-3	6.30202E-3	2.46819E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.16679E-1	-7.98082E-1	-9.13107E0	-9.1418E0	5.38826E-3	9.2864E-2	2.73105E1	-3.26536E1	-3.26218E1	2.6849E1	2.42016E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.46421E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.16417E-1	-7.98225E-1	-9.13124E0	-9.14159E0	5.4121E-3	9.30309E-2	2.73399E1	-3.26813E1	-3.26362E1	2.67866E1	2.42331E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.47279E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.16679E-1	-7.98106E-1	-9.13098E0	-9.14159E0	5.24521E-3	9.29117E-2	2.72901E1	-3.26573E1	-3.262E1	2.68458E1	2.42121E-9	2.5199E-3	2.5199E-3	6.29645E-3	2.47709E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09611E0	-8.16774E-1	-7.98249E-1	-9.13095E0	-9.14154E0	5.24521E-3	9.2864E-2	2.72833E1	-3.26608E1	-3.26307E1	2.6792E1	2.42753E-9	2.51443E-3	2.51443E-3	6.31288E-3	2.47065E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09673E0	-8.16774E-1	-7.98392E-1	-9.131E0	-9.14137E0	5.24521E-3	9.26733E-2	2.73135E1	-3.26579E1	-3.26188E1	2.67649E1	2.41934E-9	2.51632E-3	2.51632E-3	6.31278E-3	2.47029E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09642E0	-8.16894E-1	-7.98464E-1	-9.131E0	-9.14176E0	5.43594E-3	9.2864E-2	2.73027E1	-3.26681E1	-3.26368E1	2.67914E1	2.42437E-9	2.52318E-3	2.52318E-3	6.30192E-3	2.47494E-2